散斑干涉计量关键问题研究及其应用
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摘要
电子散斑干涉技术(Electronic Speckle Pattern Interferometry,简称ESPI)是一种对光学粗糙表面进行非接触全场测量的技术由于具有进行全场非接触高精度和高灵敏度等特点，被广泛应用于粗糙表面的位移和变形测量，以及无损检测和振动测量方面该方法是以散斑干涉条纹图为主要研究对象，并通过对干涉条纹图的处理获取相位图并测量所需要的物理量；快速准确地提取相位，对物体的位移应变振动等测量具有重要意义主要工作如下：
1.本文首先对基于时间相移的散斑干涉技术进行了详细和深入的讨论为了在动态和振动状态下提高相位图的质量，提出了将直接相关法和加窗傅立叶变换滤波法分别与五图四步相移法结合，产生了两种新的相位提取算法
2.由于加窗傅立叶变换滤波的阈值处理采用固定阈值，这就会使滤波后的图像产生振铃，即伪Gibbs现象本文提出了自适应阈值法，使阈值能根据图像本身信息进行调整，克服了固定阈值的缺点，提高了相位图滤波的效果
3.鉴于基于时间相移的相位提取算法要在不同时刻采集多幅散斑图，容易受到环境的影响，而且在测量效率方面也存在不足；而基于空间相移方法的光路虽然能在同一时刻采集多幅散斑图，可以提高测量效率，但是其光路过于复杂，实际应用难度很大为此本文提出了基于空间载波相移的散斑干涉技术——马赫-曾德尔型电子剪切散斑干涉系统基于马赫-曾德尔干涉系统的剪切散斑干涉由于其几何结构的原因其视场角很小，为了扩大其视场角，提出了一个包含4f系统的大视场角的干涉系统，并用来进行缺陷的无损检测该系统包含：CCD相机半导体激光器马赫-曾德尔干涉系统和4f系统等四部分该系统中相位图分别由改进的sinusoidal-fitting方法和傅立叶变换方法得到，并用于含有空间载波条纹的干涉中该干涉系统可以分别控制剪切量和空间载波频率在该光学系统中，成像透镜放在马赫-曾德尔干涉系统的前面，所以视场角不再受马赫-曾德尔干涉系统的限制，而只取决于成像镜头的焦距和数字相机中传感器的尺寸，突破了传统马赫-曾德尔型电子剪切散斑干涉系统视场角最大为19°的限制，实现了大视场角测量
4.由于马赫-曾德尔干涉光路仅能有效利用一半光能，对光能利用率低，在应用于光不敏感材料时，对光能要求较高，该方法有一定局限性为了提高光能利用率，本文提出了一种新的电子剪切散斑干涉系统该光路能对全部光能进行利用，从理论上解决了利用率问题，对光能利用率的提高有很大改进
5.随着轮胎和复合材料的快速发展，对无损检测技术提出了新的要求由于电子散斑干涉测量技术具有实时显示灵敏度高全场测量等优点，该技术在无损检测中得到了广泛应用本文根据基于空间载波相移的电子剪切散斑干涉系统，搭建了电子剪切散斑干涉无损检测装置并用VC++6.0可视化编程开发软件编制集图像采集与图像处理相位图实时显示于一体的电子散斑无损检测应用软件并采用真空加载和热加载，利用本文研究的电子剪切散斑无损检测技术，对轮胎和复合材料进行了无损检测的验证性实验研究，获取了轮胎和复合材料的缺陷图片结果显示，该方法能够快速准确的评估材料内部孔隙脱层等结构质量该系统可脱离防震台检测，切实可行
Electronic Speckle Pattern Interferometry is an optical, non-contact and full-fieldmeasurement technology for.rough surface. Because of the full-field, non-contact, highaccuracy and high sensitivity measurement characteristics, it is widely used in rough surfacedisplacement and deformation measurement, non-destructive testing and vibrationmeasurement. The method is based on speckle interference fringe pattern shows the mainobject of study to obtain the phase map, and by processing the interference fringe pattern andmeasure the physical quantity. It is significant to extract the phase of the displacement of theobject, strain, vibration and other measurements quickly and accurately. The main works areas follows:
1. There is a detailed and in-depth discussion for the time phase shift speckleinterferometry technology firstly in this article. In order to improve the quality of the phasemap in the dynamic and vibration state, produced two new phase extraction algorithms basedon integrating direct-correlation algorithm and the Windowed Fourier transform filtering methodwith5interferogram four steps phase shifting method, respectively.
2. Since the Windowed Fourier transform filtering threshold value process uses a fixedthreshold value, which causes the filtered image to generate a ringing, pseudo Gibbsphenomenon. In the proposed adaptive threshold method, the threshold value can be adjustedaccording to the image itself, overcomes the disadvantages of a fixed threshold value, andimproves the filtering effect of the phase diagram.
3. With multiple speckle patterns to be collected at different times based on the phase ofthe time phase shift extraction algorithm, it is easily affected by the environment, and thereare also disadvantages in measurement efficiency; Although the phase shift method based onspatial light path can be collected at the same time multiple speckle patterns can improvemeasurement efficiency, but its light path is too complex, the actual application is verydifficult. In this paper, electronic shearing speckle interferometer system.based on spatialcarrier phase shift speckle interferometry and Mach–Zehnder is proposed. Shearographyinterferometer based on Mach-Zehnder interferometer system has a very small angle of view because the field geometry. In order to expand the angle of view, interference system with alarge angle of view based on4f system is proposed and used for non-destructive detection ofdefects. The system comprises a CCD camera, a semiconductor laser, Mach-Zehnderinterferometer and4f system. Phase maps are obtained by the improved sinusoidal-fittingmethod and Fourier transform method, respectively, and is used to contain the spatial carrierfringe interference. The interferometer system can control the amount of shear and the spatialcarrier frequency. In this optical system, the imaging lens is placed in front of the Mach-Zehnder interferometer system. the angle of view may no longer be restricted by the Mach-Zehnder interferometer system, only depends on the size of the sensor and the focal length ofthe imaging lens of digital camera, breaking the traditional Mach-Zehnder electronicshearing speckle interferometry system the angle of view the maximum limit of19°, toachieve a large field angle measurement.
4. Mach-Zehnder interferometer optical path only use half of the light energy, lightenergy utilization rate is low, when applied to the light-sensitive material, high lightrequirements, the method has some limitations. In order to improve energy efficiency, thispaper proposes a new electronic shearing speckle pattern interferometry system. The opticalpath can take advantage of all the light energy, utilization problem is solved theoreticallyimproving light energy utilization efficiency has improved significantly.
5. With the rapid development of the tire and composite materials, non-destructivetesting techniques proposed new requirements. Electronic speckle pattern interferometry has areal-time, high sensitivity, audience measurement and other advantage, the technology hasbeen widely used in non-destructive testing. Based on electronic shearing speckle patterninterferometry system, based on spatial carrier phase shift, electronic shearing speckle patterninterferometry is builded for Nondestructive Testing. With VC++6.0visual programmingdevelopment software to prepare a set of image acquisition and image processing, phase mapis displayed in real time in one electronic speckle non-destructive testing applications. Andthe use of vacuum load and thermal load, this article study of electronic Shearography ofnon-destructive detection technology, tire and composites NDT validation experiments,acquired defect pictures of tires and composites. The results show that this method can fastand accurate assess the material within the pores, delamination and structural quality. The system can be out of the shock station detects and practical.
1.本文首先对基于时间相移的散斑干涉技术进行了详细和深入的讨论为了在动态和振动状态下提高相位图的质量，提出了将直接相关法和加窗傅立叶变换滤波法分别与五图四步相移法结合，产生了两种新的相位提取算法
2.由于加窗傅立叶变换滤波的阈值处理采用固定阈值，这就会使滤波后的图像产生振铃，即伪Gibbs现象本文提出了自适应阈值法，使阈值能根据图像本身信息进行调整，克服了固定阈值的缺点，提高了相位图滤波的效果
3.鉴于基于时间相移的相位提取算法要在不同时刻采集多幅散斑图，容易受到环境的影响，而且在测量效率方面也存在不足；而基于空间相移方法的光路虽然能在同一时刻采集多幅散斑图，可以提高测量效率，但是其光路过于复杂，实际应用难度很大为此本文提出了基于空间载波相移的散斑干涉技术——马赫-曾德尔型电子剪切散斑干涉系统基于马赫-曾德尔干涉系统的剪切散斑干涉由于其几何结构的原因其视场角很小，为了扩大其视场角，提出了一个包含4f系统的大视场角的干涉系统，并用来进行缺陷的无损检测该系统包含：CCD相机半导体激光器马赫-曾德尔干涉系统和4f系统等四部分该系统中相位图分别由改进的sinusoidal-fitting方法和傅立叶变换方法得到，并用于含有空间载波条纹的干涉中该干涉系统可以分别控制剪切量和空间载波频率在该光学系统中，成像透镜放在马赫-曾德尔干涉系统的前面，所以视场角不再受马赫-曾德尔干涉系统的限制，而只取决于成像镜头的焦距和数字相机中传感器的尺寸，突破了传统马赫-曾德尔型电子剪切散斑干涉系统视场角最大为19°的限制，实现了大视场角测量
4.由于马赫-曾德尔干涉光路仅能有效利用一半光能，对光能利用率低，在应用于光不敏感材料时，对光能要求较高，该方法有一定局限性为了提高光能利用率，本文提出了一种新的电子剪切散斑干涉系统该光路能对全部光能进行利用，从理论上解决了利用率问题，对光能利用率的提高有很大改进
5.随着轮胎和复合材料的快速发展，对无损检测技术提出了新的要求由于电子散斑干涉测量技术具有实时显示灵敏度高全场测量等优点，该技术在无损检测中得到了广泛应用本文根据基于空间载波相移的电子剪切散斑干涉系统，搭建了电子剪切散斑干涉无损检测装置并用VC++6.0可视化编程开发软件编制集图像采集与图像处理相位图实时显示于一体的电子散斑无损检测应用软件并采用真空加载和热加载，利用本文研究的电子剪切散斑无损检测技术，对轮胎和复合材料进行了无损检测的验证性实验研究，获取了轮胎和复合材料的缺陷图片结果显示，该方法能够快速准确的评估材料内部孔隙脱层等结构质量该系统可脱离防震台检测，切实可行
Electronic Speckle Pattern Interferometry is an optical, non-contact and full-fieldmeasurement technology for.rough surface. Because of the full-field, non-contact, highaccuracy and high sensitivity measurement characteristics, it is widely used in rough surfacedisplacement and deformation measurement, non-destructive testing and vibrationmeasurement. The method is based on speckle interference fringe pattern shows the mainobject of study to obtain the phase map, and by processing the interference fringe pattern andmeasure the physical quantity. It is significant to extract the phase of the displacement of theobject, strain, vibration and other measurements quickly and accurately. The main works areas follows:
1. There is a detailed and in-depth discussion for the time phase shift speckleinterferometry technology firstly in this article. In order to improve the quality of the phasemap in the dynamic and vibration state, produced two new phase extraction algorithms basedon integrating direct-correlation algorithm and the Windowed Fourier transform filtering methodwith5interferogram four steps phase shifting method, respectively.
2. Since the Windowed Fourier transform filtering threshold value process uses a fixedthreshold value, which causes the filtered image to generate a ringing, pseudo Gibbsphenomenon. In the proposed adaptive threshold method, the threshold value can be adjustedaccording to the image itself, overcomes the disadvantages of a fixed threshold value, andimproves the filtering effect of the phase diagram.
3. With multiple speckle patterns to be collected at different times based on the phase ofthe time phase shift extraction algorithm, it is easily affected by the environment, and thereare also disadvantages in measurement efficiency; Although the phase shift method based onspatial light path can be collected at the same time multiple speckle patterns can improvemeasurement efficiency, but its light path is too complex, the actual application is verydifficult. In this paper, electronic shearing speckle interferometer system.based on spatialcarrier phase shift speckle interferometry and Mach–Zehnder is proposed. Shearographyinterferometer based on Mach-Zehnder interferometer system has a very small angle of view because the field geometry. In order to expand the angle of view, interference system with alarge angle of view based on4f system is proposed and used for non-destructive detection ofdefects. The system comprises a CCD camera, a semiconductor laser, Mach-Zehnderinterferometer and4f system. Phase maps are obtained by the improved sinusoidal-fittingmethod and Fourier transform method, respectively, and is used to contain the spatial carrierfringe interference. The interferometer system can control the amount of shear and the spatialcarrier frequency. In this optical system, the imaging lens is placed in front of the Mach-Zehnder interferometer system. the angle of view may no longer be restricted by the Mach-Zehnder interferometer system, only depends on the size of the sensor and the focal length ofthe imaging lens of digital camera, breaking the traditional Mach-Zehnder electronicshearing speckle interferometry system the angle of view the maximum limit of19°, toachieve a large field angle measurement.
4. Mach-Zehnder interferometer optical path only use half of the light energy, lightenergy utilization rate is low, when applied to the light-sensitive material, high lightrequirements, the method has some limitations. In order to improve energy efficiency, thispaper proposes a new electronic shearing speckle pattern interferometry system. The opticalpath can take advantage of all the light energy, utilization problem is solved theoreticallyimproving light energy utilization efficiency has improved significantly.
5. With the rapid development of the tire and composite materials, non-destructivetesting techniques proposed new requirements. Electronic speckle pattern interferometry has areal-time, high sensitivity, audience measurement and other advantage, the technology hasbeen widely used in non-destructive testing. Based on electronic shearing speckle patterninterferometry system, based on spatial carrier phase shift, electronic shearing speckle patterninterferometry is builded for Nondestructive Testing. With VC++6.0visual programmingdevelopment software to prepare a set of image acquisition and image processing, phase mapis displayed in real time in one electronic speckle non-destructive testing applications. Andthe use of vacuum load and thermal load, this article study of electronic Shearography ofnon-destructive detection technology, tire and composites NDT validation experiments,acquired defect pictures of tires and composites. The results show that this method can fastand accurate assess the material within the pores, delamination and structural quality. The system can be out of the shock station detects and practical.
引文
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