用于长度测量的位移传感器及直线度补偿器
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摘要
进行长度测量时,因基准发生偏移或仪器摆放不良而造成的误差,是影响长度测量精度的重要因素之一,其中包括余弦误差和阿贝误差。采用位置敏感器件(PositionSensitive Detectors,PSD)设计了一种激光位移传感器和一种直线度补偿器分别用来消除余弦误差和阿贝误差。PSD是一种基于非均匀半导体横向光电效应的、对入射光或粒子位置敏感的连续型模拟器件,克服了阵列型器件分辨率受像元尺寸限制的缺陷,在现代工业生产和科学研究中得到广泛应用。
对激光位移传感器的激光三角法测量原理进行了研究,推导出物象位移关系并就主要结构参数对传感器的影响进行了分析,确定了结构尺寸。对PSD接收到的光能量进行了估算。通过对PSD杂散光电流和暗电流等附加电流的消除方法进行的研究,根据PSD输出电流信号的特性,分别设计了基于单片机的一维PSD和二维PSD信号检测电路,包括I/V转换与放大电路、A/D转换电路、激光器驱动电路以及串口通信电路等。编写了激光位移传感器与直线度补偿器的单片机控制软件,根据对信号的分析,采用软件方法消除暗电流与杂散光电流的影响。使用VC6.0平台,编写了传感器的PC机测试软件,实现了与单片机的通信、数据处理、实时在线测量。
分别对激光位移传感器与直线度补偿器进行了测试实验。对传感器进行标定,采用分段插值的方式来减小激光三角法的非线性的影响,得出测量范围内的误差与标准差的分布情况。实验表明激光位移传感器测量误差小于0.02mm,标准差小于0.01mm。对直线度补偿器进行测试,给出了测量结果并对其进行了误差修正,修正后相对误差基本在3%以内。最后对传感器误差来源的各种因素进行了分析讨论。
While measuring length, errors caused by migration of measuring datum or poor placement of devices, are one of the important factors of affecting the accuracy of distacne measurement, two of them are cosine error and Abbe error. A laser displacement sensor and a straightness compensator which are designed based on Position Sensitive Device (PSD) are used to eliminate cosine error and Abbe error respectively. PSD is a kind of device based on lateral photoelectric effect and sensitive to the position of the incident light or particles, and it is a continuous analog device. This kind of device can overcome the resolution limitation caused by array devices, and it is widely used in industries and science.
Based on the research of the laser triangulation method, relation equations between objects and images were derived; the structure parameters were analyzed and designed. Energy received by PSD was estimated and then physical map was presented. Methods with which to eliminate influence caused by stray light current and duck current were studied, according to the characteristics of PSD output current signals, one-dimensional PSD and two-dimensional PSD signal processing circuits were designed based on SCM respectively, including I/V conversion and amplification circuits, A/D circuit, laser driver circuit and serial communication circuit. MCU embedded software of laser displacement sensor and straightness compensator were compiled. A software approach was adopted to eliminate dark current and the current of stray light through analyzing the signals. PC test software was written by VC6.0, the communication between MCU and PC, data processing, and real times measuring were achieved.
Measuring experiments of laser displacement sensor and straightness compensator were implemented. While calibrating the sensor, subsection interpolation method was taken to eliminate the non-linear of laser triangulation. Distribution of errors and standard deviations was obtained. According to the experiments, errors of laser displacement sensor are less than 0.02mm, and standard deviations are less than 0.01mm. For the straightness compensator, the errors are less than 3%. Finally, influence factors were discussed and analyzed.
对激光位移传感器的激光三角法测量原理进行了研究,推导出物象位移关系并就主要结构参数对传感器的影响进行了分析,确定了结构尺寸。对PSD接收到的光能量进行了估算。通过对PSD杂散光电流和暗电流等附加电流的消除方法进行的研究,根据PSD输出电流信号的特性,分别设计了基于单片机的一维PSD和二维PSD信号检测电路,包括I/V转换与放大电路、A/D转换电路、激光器驱动电路以及串口通信电路等。编写了激光位移传感器与直线度补偿器的单片机控制软件,根据对信号的分析,采用软件方法消除暗电流与杂散光电流的影响。使用VC6.0平台,编写了传感器的PC机测试软件,实现了与单片机的通信、数据处理、实时在线测量。
分别对激光位移传感器与直线度补偿器进行了测试实验。对传感器进行标定,采用分段插值的方式来减小激光三角法的非线性的影响,得出测量范围内的误差与标准差的分布情况。实验表明激光位移传感器测量误差小于0.02mm,标准差小于0.01mm。对直线度补偿器进行测试,给出了测量结果并对其进行了误差修正,修正后相对误差基本在3%以内。最后对传感器误差来源的各种因素进行了分析讨论。
While measuring length, errors caused by migration of measuring datum or poor placement of devices, are one of the important factors of affecting the accuracy of distacne measurement, two of them are cosine error and Abbe error. A laser displacement sensor and a straightness compensator which are designed based on Position Sensitive Device (PSD) are used to eliminate cosine error and Abbe error respectively. PSD is a kind of device based on lateral photoelectric effect and sensitive to the position of the incident light or particles, and it is a continuous analog device. This kind of device can overcome the resolution limitation caused by array devices, and it is widely used in industries and science.
Based on the research of the laser triangulation method, relation equations between objects and images were derived; the structure parameters were analyzed and designed. Energy received by PSD was estimated and then physical map was presented. Methods with which to eliminate influence caused by stray light current and duck current were studied, according to the characteristics of PSD output current signals, one-dimensional PSD and two-dimensional PSD signal processing circuits were designed based on SCM respectively, including I/V conversion and amplification circuits, A/D circuit, laser driver circuit and serial communication circuit. MCU embedded software of laser displacement sensor and straightness compensator were compiled. A software approach was adopted to eliminate dark current and the current of stray light through analyzing the signals. PC test software was written by VC6.0, the communication between MCU and PC, data processing, and real times measuring were achieved.
Measuring experiments of laser displacement sensor and straightness compensator were implemented. While calibrating the sensor, subsection interpolation method was taken to eliminate the non-linear of laser triangulation. Distribution of errors and standard deviations was obtained. According to the experiments, errors of laser displacement sensor are less than 0.02mm, and standard deviations are less than 0.01mm. For the straightness compensator, the errors are less than 3%. Finally, influence factors were discussed and analyzed.
引文
[1]Paul A Slazas.Non-contact optical displacement sensing.Sensor Review,1996,Volume 16,Number 3:33-37.
[2]邹振书,李喜增,张景和等.非接触测量激光光学测头.光学精密工程,Vol.5,No.3,1997.6.
[3]万瑾,黄元庆.激光三角法测量的研究.三明学院学报.第23卷,第4期,2006.4.
[4]V.Lombardo,T.Marzulli,C.Pappalettere,et al.A time-of-scan laser triangulation technique for distance measurements.Optics and Lasers in Engineering 39(2003):247-254.
[5]Lijiang Zeng,Fan Yuan,Deqiang Song,et al.A two-beam laser triangulation for measuring the position of a moving object.Optics and Lasers in Engineering 31(1999)445-453.
[6]黎志坚.谈谈关于长度测量中的阿贝误差.标准计量与质量,1999.2.
[7]狄岚,狄锦如.阿贝原则误差和改善导轨直线度的方法.制造技术与机床,1999年第11期,1999.11.
[8]黄梅珍.位置敏感探测器的研究:(博士学位论文).杭州:浙江大学,2001.
[9]曾超,李锋,徐向东.光电位置传感器PSD特性及其应用.光学仪器,第24卷,第4-5期,2002.8.
[10]吴赛燕.PSD的性能分析及其应用.机械工程与自动化,2007年4月第2期(总第141期).
[11]Jiwhan Noh,Jongpil La,Woosub Youm,et al.A new optical laser extensometer using a position sensitive detector(PSD).International Conference on Advanced Intelligent Mechatronics(AIM 2003):1178-1181.
[12]王连平,王惠南.基于PSD的激光加速度测量技术研究.计算机测量与控制,2006.14(2).
[13]孙筱.基于PSD的激光在线厚度测量系统.兰州工业高等专科学校学报,第12卷第3期,2005.9.
[14]S.R.LEE,J.MIRECKI MILLUNCHICK,R.D.TWESTEN,et al.Reciprocal-space analysis of compositional modulation in short-period superlattices using position-sensitive x-ray detection.Materials in Electronics 10(1999):191-197.
[15]曹国华,苏成志,徐洪吉.基于位置敏感探测器和激光技术对大型轴系中心线检测方法的研究.兵工学报,第27卷,第4期,2006.7.
[16]朱小平,张永年,杨自本等.利用二维PSD器件测量小角度的研究一种新型的自准直仪.现代计量测试,2001年第2期.
[17]M.Abd El Rahim,R.Antoine,L.Arnaud,et al.Time-of-flight mass spectrometer coupled to a position sensitive detection.The European Physical Journal D 34,2005:15-18.
[18]Ch.Buehler,U.Greuter,G.Frey,et al.Sub-nanosecond multi-channel time-to-digital converter for the 2-D position-sensitive neutron detectors at TriCS and AMOR.Applied Physics A 74,S82-S85(2002).
[19]秦岚,彭慧,薛联.基于PSD的微小步行机器人位置检测实验系统.重庆大学学报,第27卷第1期,2004.1.
[20]Rodrigo Martins,Pedro Teodoro,Fernando Soares,et al.Application of Amorphous Silicon Thin-Film Position-Sensitive Detector to Optical Rules.Advanced Engineering Materials,2001,3,No.3.
[21]G.Lucovsky.Photoeffects in nonuniformly irradiated p-n junctions.Appl Phys,1960,31(6):1088-1095.
[22]J.Henry,J.Liveingstone.A comparion of layered metal-semiconductor optical position sensitive detectors.IEEE Sensors,2002,2(4):836-840.
[23]D.Brida,E.Fortunato,H.Aguas,et al.New insights on large area flexible position sensitive detectors.J N on CrystSolids,2002,299-302(1):1272-1276.
[24]Makynen A,Ruotsalainen T,Rahkonnen T.CMOS-compatible position-sensitive devices(PSD)based on photodetector array.Sensors and Actuators A,2003,105(3):261-270.
[25]陶忠祥,刘泽乾,宋建中.负载电阻及光敏层电阻率对一维PSD的影响.光电子 激光,第15卷第2期,2004.2.
[26]陶忠祥,林明秀,王英霞等.光敏层电阻率非均匀分布对PSD定位影响的研究.光学技术,第31卷第1期,2005.1.
[27]Fortunato E,Soares F,Teodoro P,et al.Characteristics of a linear array of a-Si:H thin film position sensitive detector.ThinSolid Films,1999,337(2):222-225.
[28]Hamamatsu technical data.Photonics K.K..Solid State Division,Position Sensitive Detectors,Product Catalogue,1991.
[29]UDT Sensors,Product Catalogue,1997.
[30]陈东严,林斌,陈钰清.位置敏感探测器(PSD)的研究进展.光学仪器,第26卷第4期,2004.8.
[30]吴剑波,骆清铭.激光三角法在生物医学领域中的若干应用.激光技术,第30卷第1期,2006.1.
[31]陈静,华眼球,窦传威.一种使用PSD的3D光学三角测量传感器.计算机测量与控制,2006.14(5).
[32]林小倩,林斌,潘泰才.基于CMOS单点激光三角法测距系统设计.光学仪器,第28卷第2期,2006.4.
[33]王晓东,赵杰,蔡鹤皋.使用PSD设计非接触测距传感器及其性能分析.哈尔滨工业大学学报,第28卷第4期,1996.8.
[34]吴奎先,杨仁平,张国雄等.三角法光学非接触测量头应用中的关键技术.天津大学学报,Vol.38,No.1,2005.1.
[35]http://www.micro-epsilon.com.cn/
[36]赵继广.利用PSD进行炮口角测量的方法研究.装备指挥技术学院学报,第14卷第3期,2003.6.
[37]郑二功.基于LD/PSD的激光同轴度校正技术研究:(硕士学位论文).武汉:武汉理工大学,2006.
[38]焦国华,李育林,胡宝文.基于PSD的高精度激光校准仪的设计.传感器与微系统,第25卷第6期,2006.
[39]侯金龙.PSD激光三角测量系统的研制:(硕士学位论文).武汉:华中科技大学,2005.
[40]林眉德.基于PSD的微距离测量系统研究:(硕士学位论文).杭州:浙江大学,2007.
[41]Fumio Murakami.Accuracy assessment of a laser triangulation sensor.IMTC '94 May 10-12,Hamamatsu,1994.
[42]赵斌,侯金龙.基于PSD激光三角测量的非线性校正电路.传感器技术,第24卷第6期,2005.
[43]莫长涛,陈长征,张黎丽等.基于神经网络算法的一维PSD非线性修正.哈尔滨工业大学学报,第36卷第8期,2004.8.
[44]袁红星,王志兴,贺安之.PSD非线性修正的算法研究.仪器仪表学报,第20卷第3期,1999.6.
[45]M.波恩,E.沃耳夫.光学原理(上册).北京:电子工业出版社,2005.8:164-166.
[46]安连生.应用光学(第三版).北京理工大学出版社,2002.149-154.
[47]马春光,袁红星,贺安之.PSD光斑定位中的抗干扰技术研究.测控技术与设备,第27卷第11期,2001.
[48]尚鸿雁,张广军.PSD位置响应特性与光源照射方式的关系研究.光学技术,第31卷第3期,2005.5.
[49]莫长涛.一维PSD背景光补偿的研究.哈尔滨商业大学学报(自然科学版),第20卷第1期,2004.2.
[50]李琳,穆向阳.一种消除PSD背景光干扰的新方法.传感器与微系统,第25卷第9期,2006.
[51]苏少华,石庚辰.PSD信号处理电路的研究.华北工学院测试技术学报,第15卷第2期,2001.
[52]林知木,潘宏侠.激光测试系统PSD信号处理电路的研究.科技情报开发与经济,第15卷第3期,2005.
[53]刘彬,张秋婵.光电检测前置放大电路的设计.燕山大学学报,第27卷第3期,2003.7.
[54]陈张玮,李玉和,李庆祥等.光电探测器前级放大电路设计与研究.电测与仪表,总第42卷第474期,2005.6.
[55]孟丽霞,于林丽,濮钰麒等.微小信号放大电路设计.仪器仪表学报,第27卷第6期增刊,2006.6.
[56]单片机通信技术与工程实践.求是科技编著.北京:人民邮电出版社,2005.1.
[57]张培仁,孙力.基于C语言C8051F系列微控制器原理及应用.北京:清华大学出版社,2007.
[58]胡广书.数字信号处理-理论算法与实现.北京:清华大学出版社,2003.8.
[59]施吉林,张宏伟,金光日.计算机科学计算.北京:高等教育出版社,2005.6.
[2]邹振书,李喜增,张景和等.非接触测量激光光学测头.光学精密工程,Vol.5,No.3,1997.6.
[3]万瑾,黄元庆.激光三角法测量的研究.三明学院学报.第23卷,第4期,2006.4.
[4]V.Lombardo,T.Marzulli,C.Pappalettere,et al.A time-of-scan laser triangulation technique for distance measurements.Optics and Lasers in Engineering 39(2003):247-254.
[5]Lijiang Zeng,Fan Yuan,Deqiang Song,et al.A two-beam laser triangulation for measuring the position of a moving object.Optics and Lasers in Engineering 31(1999)445-453.
[6]黎志坚.谈谈关于长度测量中的阿贝误差.标准计量与质量,1999.2.
[7]狄岚,狄锦如.阿贝原则误差和改善导轨直线度的方法.制造技术与机床,1999年第11期,1999.11.
[8]黄梅珍.位置敏感探测器的研究:(博士学位论文).杭州:浙江大学,2001.
[9]曾超,李锋,徐向东.光电位置传感器PSD特性及其应用.光学仪器,第24卷,第4-5期,2002.8.
[10]吴赛燕.PSD的性能分析及其应用.机械工程与自动化,2007年4月第2期(总第141期).
[11]Jiwhan Noh,Jongpil La,Woosub Youm,et al.A new optical laser extensometer using a position sensitive detector(PSD).International Conference on Advanced Intelligent Mechatronics(AIM 2003):1178-1181.
[12]王连平,王惠南.基于PSD的激光加速度测量技术研究.计算机测量与控制,2006.14(2).
[13]孙筱.基于PSD的激光在线厚度测量系统.兰州工业高等专科学校学报,第12卷第3期,2005.9.
[14]S.R.LEE,J.MIRECKI MILLUNCHICK,R.D.TWESTEN,et al.Reciprocal-space analysis of compositional modulation in short-period superlattices using position-sensitive x-ray detection.Materials in Electronics 10(1999):191-197.
[15]曹国华,苏成志,徐洪吉.基于位置敏感探测器和激光技术对大型轴系中心线检测方法的研究.兵工学报,第27卷,第4期,2006.7.
[16]朱小平,张永年,杨自本等.利用二维PSD器件测量小角度的研究一种新型的自准直仪.现代计量测试,2001年第2期.
[17]M.Abd El Rahim,R.Antoine,L.Arnaud,et al.Time-of-flight mass spectrometer coupled to a position sensitive detection.The European Physical Journal D 34,2005:15-18.
[18]Ch.Buehler,U.Greuter,G.Frey,et al.Sub-nanosecond multi-channel time-to-digital converter for the 2-D position-sensitive neutron detectors at TriCS and AMOR.Applied Physics A 74,S82-S85(2002).
[19]秦岚,彭慧,薛联.基于PSD的微小步行机器人位置检测实验系统.重庆大学学报,第27卷第1期,2004.1.
[20]Rodrigo Martins,Pedro Teodoro,Fernando Soares,et al.Application of Amorphous Silicon Thin-Film Position-Sensitive Detector to Optical Rules.Advanced Engineering Materials,2001,3,No.3.
[21]G.Lucovsky.Photoeffects in nonuniformly irradiated p-n junctions.Appl Phys,1960,31(6):1088-1095.
[22]J.Henry,J.Liveingstone.A comparion of layered metal-semiconductor optical position sensitive detectors.IEEE Sensors,2002,2(4):836-840.
[23]D.Brida,E.Fortunato,H.Aguas,et al.New insights on large area flexible position sensitive detectors.J N on CrystSolids,2002,299-302(1):1272-1276.
[24]Makynen A,Ruotsalainen T,Rahkonnen T.CMOS-compatible position-sensitive devices(PSD)based on photodetector array.Sensors and Actuators A,2003,105(3):261-270.
[25]陶忠祥,刘泽乾,宋建中.负载电阻及光敏层电阻率对一维PSD的影响.光电子 激光,第15卷第2期,2004.2.
[26]陶忠祥,林明秀,王英霞等.光敏层电阻率非均匀分布对PSD定位影响的研究.光学技术,第31卷第1期,2005.1.
[27]Fortunato E,Soares F,Teodoro P,et al.Characteristics of a linear array of a-Si:H thin film position sensitive detector.ThinSolid Films,1999,337(2):222-225.
[28]Hamamatsu technical data.Photonics K.K..Solid State Division,Position Sensitive Detectors,Product Catalogue,1991.
[29]UDT Sensors,Product Catalogue,1997.
[30]陈东严,林斌,陈钰清.位置敏感探测器(PSD)的研究进展.光学仪器,第26卷第4期,2004.8.
[30]吴剑波,骆清铭.激光三角法在生物医学领域中的若干应用.激光技术,第30卷第1期,2006.1.
[31]陈静,华眼球,窦传威.一种使用PSD的3D光学三角测量传感器.计算机测量与控制,2006.14(5).
[32]林小倩,林斌,潘泰才.基于CMOS单点激光三角法测距系统设计.光学仪器,第28卷第2期,2006.4.
[33]王晓东,赵杰,蔡鹤皋.使用PSD设计非接触测距传感器及其性能分析.哈尔滨工业大学学报,第28卷第4期,1996.8.
[34]吴奎先,杨仁平,张国雄等.三角法光学非接触测量头应用中的关键技术.天津大学学报,Vol.38,No.1,2005.1.
[35]http://www.micro-epsilon.com.cn/
[36]赵继广.利用PSD进行炮口角测量的方法研究.装备指挥技术学院学报,第14卷第3期,2003.6.
[37]郑二功.基于LD/PSD的激光同轴度校正技术研究:(硕士学位论文).武汉:武汉理工大学,2006.
[38]焦国华,李育林,胡宝文.基于PSD的高精度激光校准仪的设计.传感器与微系统,第25卷第6期,2006.
[39]侯金龙.PSD激光三角测量系统的研制:(硕士学位论文).武汉:华中科技大学,2005.
[40]林眉德.基于PSD的微距离测量系统研究:(硕士学位论文).杭州:浙江大学,2007.
[41]Fumio Murakami.Accuracy assessment of a laser triangulation sensor.IMTC '94 May 10-12,Hamamatsu,1994.
[42]赵斌,侯金龙.基于PSD激光三角测量的非线性校正电路.传感器技术,第24卷第6期,2005.
[43]莫长涛,陈长征,张黎丽等.基于神经网络算法的一维PSD非线性修正.哈尔滨工业大学学报,第36卷第8期,2004.8.
[44]袁红星,王志兴,贺安之.PSD非线性修正的算法研究.仪器仪表学报,第20卷第3期,1999.6.
[45]M.波恩,E.沃耳夫.光学原理(上册).北京:电子工业出版社,2005.8:164-166.
[46]安连生.应用光学(第三版).北京理工大学出版社,2002.149-154.
[47]马春光,袁红星,贺安之.PSD光斑定位中的抗干扰技术研究.测控技术与设备,第27卷第11期,2001.
[48]尚鸿雁,张广军.PSD位置响应特性与光源照射方式的关系研究.光学技术,第31卷第3期,2005.5.
[49]莫长涛.一维PSD背景光补偿的研究.哈尔滨商业大学学报(自然科学版),第20卷第1期,2004.2.
[50]李琳,穆向阳.一种消除PSD背景光干扰的新方法.传感器与微系统,第25卷第9期,2006.
[51]苏少华,石庚辰.PSD信号处理电路的研究.华北工学院测试技术学报,第15卷第2期,2001.
[52]林知木,潘宏侠.激光测试系统PSD信号处理电路的研究.科技情报开发与经济,第15卷第3期,2005.
[53]刘彬,张秋婵.光电检测前置放大电路的设计.燕山大学学报,第27卷第3期,2003.7.
[54]陈张玮,李玉和,李庆祥等.光电探测器前级放大电路设计与研究.电测与仪表,总第42卷第474期,2005.6.
[55]孟丽霞,于林丽,濮钰麒等.微小信号放大电路设计.仪器仪表学报,第27卷第6期增刊,2006.6.
[56]单片机通信技术与工程实践.求是科技编著.北京:人民邮电出版社,2005.1.
[57]张培仁,孙力.基于C语言C8051F系列微控制器原理及应用.北京:清华大学出版社,2007.
[58]胡广书.数字信号处理-理论算法与实现.北京:清华大学出版社,2003.8.
[59]施吉林,张宏伟,金光日.计算机科学计算.北京:高等教育出版社,2005.6.