非互易光波导的若干基础问题研究
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摘要
现代集成光学的快速发展,需要光学器件向着片上系统(SOC)的方向发展,对器件的小型化(Small),集成化(System-integrated),智能化(Smart)和功能化(Specialized)有了更高的要求。其中作为集成光学不可或缺的非互易光波导器件,也朝着集成光学器件的4S要求方向发展。非互易光学器件主要包括光隔离器和环路器,隔离器可以阻隔反射光进入激光光源,对光源起到保护作用,而环路器可以使得信号在多个端口间流转,实现反射信号和透射信号的分流。传统的光隔离器和环路器体积仍然过大,是实现片上系统(SOC)最大的阻碍。近几年,基于各种原理的非互易光波导器件取得了长足的进步,逐渐朝着4S原则的方向发展。
本文从光学非互易现象的物理本质出发,在非互易光波导传输特性,数值模拟方法,器件设计和实验工艺等方面开展了研究,具体如下：
1.从麦克斯韦方程组导出的洛伦兹互易定理出发,在电磁理论的层面上解释了互易系统的原理以及打破互易性的三个基本方法。分析了利用磁光材料打破介电常数对称性而制作非互易光波导器件的方法,并简单介绍了当前主流的磁光材料。
2.针对目前主流的仿真软件大部分是非磁光的材料,类似于磁光材料在介电常数上有非对角分量和虚数分量的软件很少而且不成熟。因此,本文利用数值方法建立模型,对不同情况下的问题进行分析。从最基本的有效折射率等效方法开始,发展到磁光光束传播法(BPM),磁光有限时域差分法(FDTD),磁光传输矩阵法(TMM)等等,分析了包括马赫增德尔干涉仪(MZI),多模干涉器件(MMI),微环谐振器,周期性结构等一系列磁光器件和结构,为器件的设计研制提供了帮助。
3.对磁光材料作为芯层和包层两种实现非互易波导的方案进行了评估,进一步讨论了非互易相移公式的本质,并探究了增强非互易相移的方法。设计了若干器件包括基于磁光波导的隔离器,基于硅基波导的隔离器,环路器,同时提出了基于反射型隔离器和环路器的无泄漏光合束器构想。在硅基器件角度上,将磁光材料和微环谐振器,马赫增德尔干涉仪以及光子晶体缺陷波导等器件进行有机结合,设计出了多种非互易光波导器件。同时,进行了磁光波导器件工艺试验的初步探索。设计了硅基的弱耦合光栅器件的版图,在欧洲IMEC进行了流片并对返回来的器件进行了测试;进行了磁光材料溅射实验,磁光光纤拉制实验以及硅基器件和磁光材料键合实验的尝试。
本工作涵盖了非互易光学的基本工作原理,材料特性,数值模拟方法,器件设计方法和实验,对若干基础问题做了研究,希望能对今后非互易光学器件的研究有指导价值。
In this dissertation, several fundamental problems of concern in nonreciprocal optic waveguides have been studied. The rapid development of integrated Optics is proceeding towards the goal of realizing system on chip (SOC), raising a higher standard of small, system-integrated, smart and specialized (4S standards) to all integrated devices. As a crucial role in integrated photonic circuit, nonreciprocal devices also need to develop towards the4S standard. The most common nonreciprocal devices include optic isolator and circulator. The isolator can protect the laser source from reflecting light while the circulator can circulate the optic signals among its ports, enabling the separation of transmission and reflection signals. Traditional isolators and circulators are still too large to be integrated, becoming big obstacles for realizaing SOC. Recently, novel nonreciprocal devices based on different principles have been greatly developed during these years, moving towards the4S standards.
Starting from the principle of reciprocity of magnetic-electrics, this dissertation extensively studies the material properties of nonreciprocal device, the light propagation properties, numerical simulation approaches, device design methods and fabrication techniques. The details are presented as follows:
1. Starting from the Lorentz reciprocal law (LRL) deducted from Maxwell's equations, three basic approaches to break LRL and realize nonreciprocity are concluded. Then the analysis of magneto-optic (MO) material is presented, with properties of the major MO material clarified.
2. After understanding the physical principles, we need to build mathematic models in order to better solve the design problems. Since the major optic simulation tools are for reciprocal materials, we need to develop specific simulators for nonreicprocal materials. First the effective index method is presented, then beam propagation (BPM), finite-difference-time-difference (FDTD) and transfer matrix method (TMM) combined with MO properties are developed. Several devices including Mach-zehnder interfereror (MZI), Multimode interfereror (MMI) and periodic devices are simulated. Simulation provides good prediction for the device design.
3. The two profiles for MO devices design are analyzed, with the principle of nonreciprocal phase shift (NPS) clarified and general solution for NPS enhancement proposed. On this basis, a series of devices were designed including MMI isolator, ring isolator and circulator, photonic crystal waveguide MZI isolator as well as a proposal for zero-leakage optic combiner. Several experiments were carried out to realize the nonreciprocal devices including MO material sputtering, MO fiber and silicon waveguide and MO material bonding.
This research work covers the basic physical principles, material properties, numerical simulation approaches, device design and fabrication techniques of nonreciprocal devices, providing the analysis to several fundamental problems. This dissertation is intended to provide a guidance and reference to the following research of nonreciprocal guided-wave optics.
本文从光学非互易现象的物理本质出发,在非互易光波导传输特性,数值模拟方法,器件设计和实验工艺等方面开展了研究,具体如下：
1.从麦克斯韦方程组导出的洛伦兹互易定理出发,在电磁理论的层面上解释了互易系统的原理以及打破互易性的三个基本方法。分析了利用磁光材料打破介电常数对称性而制作非互易光波导器件的方法,并简单介绍了当前主流的磁光材料。
2.针对目前主流的仿真软件大部分是非磁光的材料,类似于磁光材料在介电常数上有非对角分量和虚数分量的软件很少而且不成熟。因此,本文利用数值方法建立模型,对不同情况下的问题进行分析。从最基本的有效折射率等效方法开始,发展到磁光光束传播法(BPM),磁光有限时域差分法(FDTD),磁光传输矩阵法(TMM)等等,分析了包括马赫增德尔干涉仪(MZI),多模干涉器件(MMI),微环谐振器,周期性结构等一系列磁光器件和结构,为器件的设计研制提供了帮助。
3.对磁光材料作为芯层和包层两种实现非互易波导的方案进行了评估,进一步讨论了非互易相移公式的本质,并探究了增强非互易相移的方法。设计了若干器件包括基于磁光波导的隔离器,基于硅基波导的隔离器,环路器,同时提出了基于反射型隔离器和环路器的无泄漏光合束器构想。在硅基器件角度上,将磁光材料和微环谐振器,马赫增德尔干涉仪以及光子晶体缺陷波导等器件进行有机结合,设计出了多种非互易光波导器件。同时,进行了磁光波导器件工艺试验的初步探索。设计了硅基的弱耦合光栅器件的版图,在欧洲IMEC进行了流片并对返回来的器件进行了测试;进行了磁光材料溅射实验,磁光光纤拉制实验以及硅基器件和磁光材料键合实验的尝试。
本工作涵盖了非互易光学的基本工作原理,材料特性,数值模拟方法,器件设计方法和实验,对若干基础问题做了研究,希望能对今后非互易光学器件的研究有指导价值。
In this dissertation, several fundamental problems of concern in nonreciprocal optic waveguides have been studied. The rapid development of integrated Optics is proceeding towards the goal of realizing system on chip (SOC), raising a higher standard of small, system-integrated, smart and specialized (4S standards) to all integrated devices. As a crucial role in integrated photonic circuit, nonreciprocal devices also need to develop towards the4S standard. The most common nonreciprocal devices include optic isolator and circulator. The isolator can protect the laser source from reflecting light while the circulator can circulate the optic signals among its ports, enabling the separation of transmission and reflection signals. Traditional isolators and circulators are still too large to be integrated, becoming big obstacles for realizaing SOC. Recently, novel nonreciprocal devices based on different principles have been greatly developed during these years, moving towards the4S standards.
Starting from the principle of reciprocity of magnetic-electrics, this dissertation extensively studies the material properties of nonreciprocal device, the light propagation properties, numerical simulation approaches, device design methods and fabrication techniques. The details are presented as follows:
1. Starting from the Lorentz reciprocal law (LRL) deducted from Maxwell's equations, three basic approaches to break LRL and realize nonreciprocity are concluded. Then the analysis of magneto-optic (MO) material is presented, with properties of the major MO material clarified.
2. After understanding the physical principles, we need to build mathematic models in order to better solve the design problems. Since the major optic simulation tools are for reciprocal materials, we need to develop specific simulators for nonreicprocal materials. First the effective index method is presented, then beam propagation (BPM), finite-difference-time-difference (FDTD) and transfer matrix method (TMM) combined with MO properties are developed. Several devices including Mach-zehnder interfereror (MZI), Multimode interfereror (MMI) and periodic devices are simulated. Simulation provides good prediction for the device design.
3. The two profiles for MO devices design are analyzed, with the principle of nonreciprocal phase shift (NPS) clarified and general solution for NPS enhancement proposed. On this basis, a series of devices were designed including MMI isolator, ring isolator and circulator, photonic crystal waveguide MZI isolator as well as a proposal for zero-leakage optic combiner. Several experiments were carried out to realize the nonreciprocal devices including MO material sputtering, MO fiber and silicon waveguide and MO material bonding.
This research work covers the basic physical principles, material properties, numerical simulation approaches, device design and fabrication techniques of nonreciprocal devices, providing the analysis to several fundamental problems. This dissertation is intended to provide a guidance and reference to the following research of nonreciprocal guided-wave optics.
引文
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