高精度曲面光刻实时调焦技术的研究
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摘要
激光刻划技术是一项在民用和军事等方面都有很大应用价值的综合性前沿技术,其优势在于刻划的超高精度。但是,由于基面上涂胶的不均匀以及安装误差和机械相对运动等等影响因素的存在,往往使得激光的有效焦深不能集中在被刻划位置上,造成刻划误差。对于基面为曲面的曲面刻划系统来说,由于倾斜角度的存在,同样的安装偏差和相对运动量等会造成更大的离焦,因此它对实时调焦系统的性能提出了更高的要求。
论文给出了曲面光刻系统的整体方案,简单分析了各种常用检焦方法的原理以及优缺点等;着重分析了差动临界角法的原理;给出了所设计的基于差动临界角法的实时调焦系统的设计方案。系统中采用灵敏度高、暗电流小的二象限光敏二极管S5870作为探测器,高分辨率的压电陶瓷及其驱动器作为微驱动器件,以确保系统的性能。
本文设计了以高速DSP芯片TMS320VC5416为核心的曲面光刻实时调焦控制器。根据曲面刻划系统的要求,设计了硬件电路和与之配套的软件系统。硬件电路以DSP为核心,包括信号预处理电路、数据采集电路、DSP硬件最小系统电路、串口通信电路以及自启动电路等,系统的信号处理以及各部分的控制均由DSP完成。DSP系统软件设计是在TI公司提供的CCS2.0的开发平台上来完成的,给出了控制算法及软件流程,实现信号采集控制、串口通信、自启动等等。利用VC制作了实时调焦监控界面。
分析了可能存在的对系统灵敏度的影响因素,给出了仿真曲线;对离焦量与输出信号曲线的非线性和拟采用的曲线拟合的校正方法也做了分析与仿真。
所做的验证性实验表明,系统精度和实时性基本满足要求。
Laser scribing is a kind of integrated front technology, because of its ultra-high-precision in lithography, it has a great value in either commercial or military field. But the effective focal depth of the laser beam can not always focus on the surface owing to the factors caused by nonuniformity of the photoresist spreaded on the surface, installation error and mechanical relative motion etc. these factors can cause scoring errors. More defocusing amount can be caused due to the existing dip, which is formed by the curved surface, when the laser beam is used to scribe on the cured surface and the influencing factors are the same as mentioned. So there is a higher demand for the performance of the real-time focusing system.
In this paper, the whole project of photolithography system on curved surface is given. It simply analysed the principle and advantages and disadvantages of the focus detecting methods which are often used. It emphatically analysed the principle of differential critical angle. The design scheme of the real-time focusing system which is based on differential critical angle is also given. The dual-quadrant photodiode (S5870) with high sensitivity and low dark current is used as photodetector, and the piezoelectric ceramics and the driver with high resolution are used as micro-driving device in order to guarantee the system performance.
The real-time focusing controller for laser scribing on curved surface with the core of high -speed DSP chip TMS320VC5416 is designed. According to the requirement of the surface scoring system, the hardware circuit and its necessary software system have been provided. The hardware circuit takes DSP as the core, including signal pretreatment electric circuit, the data acquisition circuit, the smallest DSP system circuit, the serial port communication circuit and the self-starting electric circuit etc. The signal processing and control of every part of the system are performed by DSP. The DSP system software is realized on the platform of CCS2.0 provided by TI. The controlling arithmetic and software flow are presented in the paper and, the signal gathering controls, serial port correspondence, self-starting etc. are completely realized. The real-time focusing control interface is designed on the platform of VC.
The factors which may influence the sensitivity are analysed in this paper. It also analysed the nonlinear exist in the curve, which is about defocusing amount and the output signal, and the curve fitting method to be used for the nonlinear correction.
The verification experiments indicate that the precision and real-time performance of the system can meet the primitive demands.
论文给出了曲面光刻系统的整体方案,简单分析了各种常用检焦方法的原理以及优缺点等;着重分析了差动临界角法的原理;给出了所设计的基于差动临界角法的实时调焦系统的设计方案。系统中采用灵敏度高、暗电流小的二象限光敏二极管S5870作为探测器,高分辨率的压电陶瓷及其驱动器作为微驱动器件,以确保系统的性能。
本文设计了以高速DSP芯片TMS320VC5416为核心的曲面光刻实时调焦控制器。根据曲面刻划系统的要求,设计了硬件电路和与之配套的软件系统。硬件电路以DSP为核心,包括信号预处理电路、数据采集电路、DSP硬件最小系统电路、串口通信电路以及自启动电路等,系统的信号处理以及各部分的控制均由DSP完成。DSP系统软件设计是在TI公司提供的CCS2.0的开发平台上来完成的,给出了控制算法及软件流程,实现信号采集控制、串口通信、自启动等等。利用VC制作了实时调焦监控界面。
分析了可能存在的对系统灵敏度的影响因素,给出了仿真曲线;对离焦量与输出信号曲线的非线性和拟采用的曲线拟合的校正方法也做了分析与仿真。
所做的验证性实验表明,系统精度和实时性基本满足要求。
Laser scribing is a kind of integrated front technology, because of its ultra-high-precision in lithography, it has a great value in either commercial or military field. But the effective focal depth of the laser beam can not always focus on the surface owing to the factors caused by nonuniformity of the photoresist spreaded on the surface, installation error and mechanical relative motion etc. these factors can cause scoring errors. More defocusing amount can be caused due to the existing dip, which is formed by the curved surface, when the laser beam is used to scribe on the cured surface and the influencing factors are the same as mentioned. So there is a higher demand for the performance of the real-time focusing system.
In this paper, the whole project of photolithography system on curved surface is given. It simply analysed the principle and advantages and disadvantages of the focus detecting methods which are often used. It emphatically analysed the principle of differential critical angle. The design scheme of the real-time focusing system which is based on differential critical angle is also given. The dual-quadrant photodiode (S5870) with high sensitivity and low dark current is used as photodetector, and the piezoelectric ceramics and the driver with high resolution are used as micro-driving device in order to guarantee the system performance.
The real-time focusing controller for laser scribing on curved surface with the core of high -speed DSP chip TMS320VC5416 is designed. According to the requirement of the surface scoring system, the hardware circuit and its necessary software system have been provided. The hardware circuit takes DSP as the core, including signal pretreatment electric circuit, the data acquisition circuit, the smallest DSP system circuit, the serial port communication circuit and the self-starting electric circuit etc. The signal processing and control of every part of the system are performed by DSP. The DSP system software is realized on the platform of CCS2.0 provided by TI. The controlling arithmetic and software flow are presented in the paper and, the signal gathering controls, serial port correspondence, self-starting etc. are completely realized. The real-time focusing control interface is designed on the platform of VC.
The factors which may influence the sensitivity are analysed in this paper. It also analysed the nonlinear exist in the curve, which is about defocusing amount and the output signal, and the curve fitting method to be used for the nonlinear correction.
The verification experiments indicate that the precision and real-time performance of the system can meet the primitive demands.
引文
[1]Haruna M,Takahashi M,Wakahayashi K,et al.Laser beam lithographed micro Fresnel lenses.Applied Optics,1990,29(34):5120-5126
[2]陈继民.激光制造技术的发展趋势.先进制造技术信息网.2004,(10)
[3]W.B.Veldkamp.Overview of Microoptics Past,Present,and Future Proc.SPIE.1991.287-299
[4]V.P.Koronkevich,V.P.Kiriyanov,F.I.Kokoulin etc.Fabrication of kinoform optical elements.Optick.1984,67(3):257-266
[5]卢振武,邢中宝,张景和等.二元光学元什激光直写设备研制技术报告.中国科学院长春光学精密机械物理研究所资料.2001.9
[6]徐兵,魏国军,陈林森.激光直写技术的研究现状及其进展.2004,17(6)
[7]徐瑞颐.光盘存储系统设计原理.国防工业出版社,2000.1:53-54
[8]沈颂,曹向群.光盘刀口法聚焦伺服分析.浙江大学学报,1984.28(2):224-228
[9]吴玉年.临界角法在聚焦伺服系统中的应用:(硕士学位论文).长春:长春理工大学,2002.
[10]Donald K.Cohen,Wing Ho.Gee.M.Ludeke and Julian Lewkowicz.Automatic focus control:the astigmatic lens approach.Applied Optics,1984.Vol.23(4):565-570
[11]David Y.Lon,A Martinez and D.Stanton.Surface profile measurement with a dual-beam optical system.Applied Optics,1984.Vol.23(5):746-751
[12]巩马理.离轴探测自动调焦系统.光电工程,1991.18(3):471-475
[13]陈海清,常洋燕.光盘伺服系统中临界角法研究.激光技术,1991.15(1):52-55
[14]Tsuguo,Kohno,Norimitsu Ozawa,Kozo Miyamoto etc.High precision optical surface sensor.Applied Optics,1988.Vol.27(1):103-108
[15]P.S.Huang and J.Ni.Angle measurement based on the internal-reflection effect using elongated critical angle prisms.Applied Optics,1996.Vol.35(13):2239-2241
[16]Song Shen,Dongsu Cui,Xiong Qian,Yongming Shu.Investigation of critical-angle focus error delection.SPIE,1992,Vol.2053:15-159
[17]赵远,张宁.光电子信号检测原理与技术.北京:机械工业出版社,2005
[18]郭培源,梁丽.光电子技术基础教程.北京:北京航空航天大学出版社,2005
[19]S5870 Datasheet,Japan,HAMMATSU PHOTONICS K.K.April.2001
[20]OPA111-Low noise precision difet~R operational amplifier.Burr-Brown Corporation.1984
[21]熊木地.大行程亚微米精度激光直写设备定位技术的研究:(博士学位论文).长春:中国科学院长春光学精密机械与物理研究所,2000.
[22]www.pi.ws.
[23]TMS320VC5416 Data Sheet.Texas Instruments.March 1999-Revised April 2003
[24]赵红怡 编著.DSP技术与应用实例.北京:电子工业出版社,2003
[25]Texas Instruments Incorporated著.梁晓雯,裴小平,李玉虎 编译.TMS320VC54x系列DSP的CPU与外设.北京:清华大学出版社,2006
[26]宋东清.基于DSP的导航计算机系统设计:(硕士学位论文).哈尔滨:哈尔滨工程大学.2007
[27]TPS73HD301 dual-output low-dropout voltage regulator data sheet.Texas Instruments.1999
[28]TPS3707-33 processor supervisory circuits with power-fail data sheet.Texas Instruments.1999
[29]TMS320C54x DSP Reference Set Vol.1:CPU and Peripherals.Texas Instruments.2001
[30]易思伟.基于DSP的贴片机运动控制系统的研究与设计:(硕士学位论文).成都:西南交通大学,2007
[31]TMS320C54x DSP Reference Set Vol 2:Mnemonic Instruction Set.Texas Instruments.2001
[32]Six-input channel analog front end AD73360.Analog devices,Inc.,2000
[33]潘焕成,赵卫东.新型A/D变换器AD73360及其应用:国外电子元器件,2002
[34]TMS320C54x DSP Reference Set Vol 5:Enhanced Peripherals.Texas Instruments.2001
[35]Low-cost,voltage-output,16-bit DACs with internal reference in μ MAX.Maxim Integrated Products,Inc.,2004
[36]李棡宇,杨家玮.用SPI总线实现DSP和MCU之间的高速通信:电子元器件应用,2006
[37]张经爱,许凯华,刘玉华.基于MSP430的模拟SPI串口通信的实现:计算机工程与设计,2008
[38]SPI/MICROWIRE-compatible UART and±15kv ESD-protected RS-232 transceivers with internal capacitors:MAX3110E.Maxim Integrated Products,Inc.,1999
[39]吴开杰,邵蔚,李刚.TMS320VC5410的McBSP串行接口技术与程序设计:新器件新技术,2001
[40]何学辉,苏涛.TMS320VC5402 DSP与串行AD73360 A/D转换器的接口设计:集成电路应用,2003
[41]吴建辉.印刷电路板的电磁兼容性设计.北京:国防工业出版社,2005
[42]尹勇,欧光军,关荣锋.DSP集成开发环境CCS使用指南.北京航空航天大学出版社,2003
[43]TMS320C54x Code Composer Studio Tutorial.Texas Instruments.2000
[44]唐冰,周勇,骆云志,王峰 等.全功能异步收发器与DSP的SPI接口技术:新器件新技术,2003
[45]TMS320VC5416 Bootloader.Texas Instruments.2002
[46]刘兵,徐家恺,刘阳.FLASH在系统编程和DSP并行引导的C语言实现.微处理机.2004
[47]王旭智,张怀柱,宋建中.TMS320VC5416在系统并行引导的研究与实现.电子器件.2007
[48]SST39VF200A Multi-Purpose FLASH data sheet.Silicon Storage Technology,Inc.,2002
[49]奉华成,白净.TMS320VC54x DSP在线烧写FLASH存储器并实现自举引导的方法.集成电路应用.2005
[50]刘君华.现代检测技术与测试系统设计.西安:西安交通大学出版社,1999
[2]陈继民.激光制造技术的发展趋势.先进制造技术信息网.2004,(10)
[3]W.B.Veldkamp.Overview of Microoptics Past,Present,and Future Proc.SPIE.1991.287-299
[4]V.P.Koronkevich,V.P.Kiriyanov,F.I.Kokoulin etc.Fabrication of kinoform optical elements.Optick.1984,67(3):257-266
[5]卢振武,邢中宝,张景和等.二元光学元什激光直写设备研制技术报告.中国科学院长春光学精密机械物理研究所资料.2001.9
[6]徐兵,魏国军,陈林森.激光直写技术的研究现状及其进展.2004,17(6)
[7]徐瑞颐.光盘存储系统设计原理.国防工业出版社,2000.1:53-54
[8]沈颂,曹向群.光盘刀口法聚焦伺服分析.浙江大学学报,1984.28(2):224-228
[9]吴玉年.临界角法在聚焦伺服系统中的应用:(硕士学位论文).长春:长春理工大学,2002.
[10]Donald K.Cohen,Wing Ho.Gee.M.Ludeke and Julian Lewkowicz.Automatic focus control:the astigmatic lens approach.Applied Optics,1984.Vol.23(4):565-570
[11]David Y.Lon,A Martinez and D.Stanton.Surface profile measurement with a dual-beam optical system.Applied Optics,1984.Vol.23(5):746-751
[12]巩马理.离轴探测自动调焦系统.光电工程,1991.18(3):471-475
[13]陈海清,常洋燕.光盘伺服系统中临界角法研究.激光技术,1991.15(1):52-55
[14]Tsuguo,Kohno,Norimitsu Ozawa,Kozo Miyamoto etc.High precision optical surface sensor.Applied Optics,1988.Vol.27(1):103-108
[15]P.S.Huang and J.Ni.Angle measurement based on the internal-reflection effect using elongated critical angle prisms.Applied Optics,1996.Vol.35(13):2239-2241
[16]Song Shen,Dongsu Cui,Xiong Qian,Yongming Shu.Investigation of critical-angle focus error delection.SPIE,1992,Vol.2053:15-159
[17]赵远,张宁.光电子信号检测原理与技术.北京:机械工业出版社,2005
[18]郭培源,梁丽.光电子技术基础教程.北京:北京航空航天大学出版社,2005
[19]S5870 Datasheet,Japan,HAMMATSU PHOTONICS K.K.April.2001
[20]OPA111-Low noise precision difet~R operational amplifier.Burr-Brown Corporation.1984
[21]熊木地.大行程亚微米精度激光直写设备定位技术的研究:(博士学位论文).长春:中国科学院长春光学精密机械与物理研究所,2000.
[22]www.pi.ws.
[23]TMS320VC5416 Data Sheet.Texas Instruments.March 1999-Revised April 2003
[24]赵红怡 编著.DSP技术与应用实例.北京:电子工业出版社,2003
[25]Texas Instruments Incorporated著.梁晓雯,裴小平,李玉虎 编译.TMS320VC54x系列DSP的CPU与外设.北京:清华大学出版社,2006
[26]宋东清.基于DSP的导航计算机系统设计:(硕士学位论文).哈尔滨:哈尔滨工程大学.2007
[27]TPS73HD301 dual-output low-dropout voltage regulator data sheet.Texas Instruments.1999
[28]TPS3707-33 processor supervisory circuits with power-fail data sheet.Texas Instruments.1999
[29]TMS320C54x DSP Reference Set Vol.1:CPU and Peripherals.Texas Instruments.2001
[30]易思伟.基于DSP的贴片机运动控制系统的研究与设计:(硕士学位论文).成都:西南交通大学,2007
[31]TMS320C54x DSP Reference Set Vol 2:Mnemonic Instruction Set.Texas Instruments.2001
[32]Six-input channel analog front end AD73360.Analog devices,Inc.,2000
[33]潘焕成,赵卫东.新型A/D变换器AD73360及其应用:国外电子元器件,2002
[34]TMS320C54x DSP Reference Set Vol 5:Enhanced Peripherals.Texas Instruments.2001
[35]Low-cost,voltage-output,16-bit DACs with internal reference in μ MAX.Maxim Integrated Products,Inc.,2004
[36]李棡宇,杨家玮.用SPI总线实现DSP和MCU之间的高速通信:电子元器件应用,2006
[37]张经爱,许凯华,刘玉华.基于MSP430的模拟SPI串口通信的实现:计算机工程与设计,2008
[38]SPI/MICROWIRE-compatible UART and±15kv ESD-protected RS-232 transceivers with internal capacitors:MAX3110E.Maxim Integrated Products,Inc.,1999
[39]吴开杰,邵蔚,李刚.TMS320VC5410的McBSP串行接口技术与程序设计:新器件新技术,2001
[40]何学辉,苏涛.TMS320VC5402 DSP与串行AD73360 A/D转换器的接口设计:集成电路应用,2003
[41]吴建辉.印刷电路板的电磁兼容性设计.北京:国防工业出版社,2005
[42]尹勇,欧光军,关荣锋.DSP集成开发环境CCS使用指南.北京航空航天大学出版社,2003
[43]TMS320C54x Code Composer Studio Tutorial.Texas Instruments.2000
[44]唐冰,周勇,骆云志,王峰 等.全功能异步收发器与DSP的SPI接口技术:新器件新技术,2003
[45]TMS320VC5416 Bootloader.Texas Instruments.2002
[46]刘兵,徐家恺,刘阳.FLASH在系统编程和DSP并行引导的C语言实现.微处理机.2004
[47]王旭智,张怀柱,宋建中.TMS320VC5416在系统并行引导的研究与实现.电子器件.2007
[48]SST39VF200A Multi-Purpose FLASH data sheet.Silicon Storage Technology,Inc.,2002
[49]奉华成,白净.TMS320VC54x DSP在线烧写FLASH存储器并实现自举引导的方法.集成电路应用.2005
[50]刘君华.现代检测技术与测试系统设计.西安:西安交通大学出版社,1999