Wolter X射线成像系统设计及成像质量分析
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摘要
近年来，由于X射线光刻技术，空间技术，以及激光引爆的惯性约束聚变(ICF)的过程诊断等的需要，X射线成像技术迅速发展。X射线在介质中被强烈地吸收，再加上介质的折射率在X射线波段略小于1，这些因素给X射线成像增加了很多难度，常规的成像方法难以适应X射线波段。目前多采用掠入射反射成像和编码孔径成像方法。本文详细论述了WolterⅠ型X射线掠入射成像系统的发展及研究现状，主要介绍了WolterⅠ型望远镜的设计过程并对所设计的系统进行了像差分析和成像质量评价。鉴于掠入射系统结构的特殊性，一般的光学设计CAD软件很难适应，我们编写了适用于Wolter望远镜系统的光路计算程序，并利用这个程序进行了大量的光路计算。本文从光学设计的角度出发，在WolterⅠ型望远镜的结构设计、像差分析和成像质量评价等方面做了深入的研究和分析，并提供了大量的数据，这些数据是分析WolterⅠ型望远镜系统的合理性及系统加工和调装的可靠依据。从分析的结果来看，所设计的WolterⅠ型望远镜没有任何的轴上像差，但是有比较严重的慧差、像散和像面弯曲。
In the latest years, X-ray imaging technology has developed fast in order to meet the need of X-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. Since refractive index of materials in the X-ray region is lower than 1, and X-ray is strongly absorbed by the materials, it is very difficult to image objects in the X-ray region. Conventional imaging methods are hardly suitable to X-ray range. Generally, grazing reflective and coding aperture imaging methods have been adopted more and more. This paper describes the development of Wolter I X-ray grazing incidence imaging system, mainly discusses the process of the design of Wolter I telescope, analyses the aberrations and presents the evaluation of imaging quality. Because of the particular structure of grazing incidence imaging system, the general optical design CAD is hardly suitable to this system, a more suitable optical computing program is created ,with which optical computing is performed. From the point of view of optical design, we make analysis of the structure, aberrations and imaging quality of Wolter type I telescope. We provide a large of computation data of Wolter type I telescope, and these data are the base for machining and mounting Wolter type I telescope. Analysis shows that Wolter system has no on axis aberration but has large coma, astigmatism and field curvature.
In the latest years, X-ray imaging technology has developed fast in order to meet the need of X-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. Since refractive index of materials in the X-ray region is lower than 1, and X-ray is strongly absorbed by the materials, it is very difficult to image objects in the X-ray region. Conventional imaging methods are hardly suitable to X-ray range. Generally, grazing reflective and coding aperture imaging methods have been adopted more and more. This paper describes the development of Wolter I X-ray grazing incidence imaging system, mainly discusses the process of the design of Wolter I telescope, analyses the aberrations and presents the evaluation of imaging quality. Because of the particular structure of grazing incidence imaging system, the general optical design CAD is hardly suitable to this system, a more suitable optical computing program is created ,with which optical computing is performed. From the point of view of optical design, we make analysis of the structure, aberrations and imaging quality of Wolter type I telescope. We provide a large of computation data of Wolter type I telescope, and these data are the base for machining and mounting Wolter type I telescope. Analysis shows that Wolter system has no on axis aberration but has large coma, astigmatism and field curvature.
引文
[1]Fenimore E E, Cannon T M. Uniformly redundant arrays: digital reconstruction methods. Appl. Opt.,1981,20(lO):1858-1864.
[2]Marshall F J, Oerte] J A. Framed, 16-image, Kirkpatrick-Baez microscope for b laser-plasma x-ray emission. Rev. Sci. Ins.,2004,75(10):4045-4047.
[3]Kirkpatrick P, Baez A B. Formations of optical images by x-ray. Opt. Soc. Am.,1948, 38,766-774.
[4]赵玲玲．KBA x射线显微镜研究：(博士学位论文)．大连：大连理工大学，2007．
[5]Wolter H. Mirror systems with glancing incidence on imaging producing optics for X-ray. Ann. Phys.,1952,94(lO):866-875.
[6]Snigireva A, Kohn V.A compound refractive lens for focusing high-energy x-ray. Nature, 1996,384:49-51.
[7]Lindblom J K. Soft x-ray/extreme ultraviolet images of the solar atmosphere with normal incidence multilayer optics. SPIE. 1988,984:202-212.
[8]Thompson P L, Harvey J E.Systems engineering analysis of aplanatic Wolter type I x-ray telescopes. Opt. Eng.,2000,39(6):1677-1691.
[9]李保权，朱光武，林华安等．天基 X 射线掠入射式成像望远镜发展现状．空间科学学报，2004，24(4)：89-97．
[10]郭培基，高清峰，董玉芝．用于ICF实验的轴对称掠入射 x 射线显微镜中的光学系统．中国激光，2001，28(4)：135-142．
[11]姚志平，x射线宽带多层膜的设计方法及制备工艺研究：(硕士学位论文)．K春：中国科学院研究生院．2005．
[12]潘宁宁，王占山．x 射线用Kirkpatrick—Baez显微镜成像质量的研究．强激光与粒子束，2006，18(1)：251-259．
[13]Franks A, Gale B. Grazing incidence optical for X-ray microscope. Germany:Springer Verlag. 1983:130-138.
[14]胡家升，张景和，王保林．x光掠入射平面反射镜系统的制备．中国激光，1995，A22(4)：276-280．
[15]王之江，伍树东．成像光学．北京：科学出版社，1991．
[16]Cremer J T, Piestrup M A, Clarke R et al. Large aperture compound lenses made of lithium. Rev. Sci. Ins.,2003,74(7):2262-2266.
[17]Arms D A, Dufresne E M, Clarke Ret al. Refractive optics using lithium metal, 2002,73(3): 1492-1494.
[18]Seward F D, Palmieri T M.A simple X-ray microscope for photographing laser produced plasmas. Rev. Sci. Ins.,1975,46(2):204-206.
[19]Wolter H. Estimation of imaging aberrations for X-ray telescopes. Appl. Acta.,1971, 42(8): 2564-2569.
[20]孙可煦，易荣清，杨国洪等．软 X 射线平面镜在不同掠入射角卜的反射率标定．物理学报：2004，53(4)：1099-1103．
[21]胡家升，张景和，王宝林．X光掠入射平面反射镜系统的制备．中国激光，1995，22(4)：102-106．
[22]Hu Jiasheng, Zhao Lingling. Design and analysis of X-ray microscope of four mirrors working at grazing incidence. Journal of Optoelectronic Laser, 2005,16(5):203-210.
[23]Werner W. Imaging properties of Wolter type I X-ray telescope. Appl. Opt.,1977,16(5): 1036-1042.
[24]Chase R C. Aplanatic grazing incidence X-ray microscopes: design and performance. Applied Optics, 1976,15(12):3094-3098.
[25]Winkler C E, Korsch D. Primary aberrations for grazing incidence. Applied Optics, 1977, 16(9):2464-2469.
[26]袁旭沧．光学设计．北京：科学出版社，1983．
[27]胡家升．光学工程导论．大连：大连理工大学出版社，2002．
[28]Van Speybroeck L P, Chase R C. Design parameters of paraboloid-hyperboloid telescopes for X-ray astronomy. Appl. Opt.,1972,440(ll):2063-2067.
[29]Saha T T. General surface equations for glancing incidence telescopes. Appl. Opt.,1987, 658(16):1597-1605.
[30]Chase R C, Van Speybroeck L P. Wolter-Schwarzschild telescopes for X ray astronomy. Appl. Opt.,1973,12(6):764-773.
[31]Saha T T. Transverse ray aberrations for paraboloid-hyperboloid telescopes. Appl. Opt., 1985,24(10):1856-1862.
[32]Mangus J D, Underwood J H. Optical design of a glancing incidence X-ray telescope. Appl. Opt.,1996, 95(8):2201-2211.
[33]李林，安连生．计算机辅助光学设计的理论与应用．北京：国防工业出版社，2002．
[34]吴世法．近代成像技术与图像处理．北京：国防工业出版社，1997．
[2]Marshall F J, Oerte] J A. Framed, 16-image, Kirkpatrick-Baez microscope for b laser-plasma x-ray emission. Rev. Sci. Ins.,2004,75(10):4045-4047.
[3]Kirkpatrick P, Baez A B. Formations of optical images by x-ray. Opt. Soc. Am.,1948, 38,766-774.
[4]赵玲玲．KBA x射线显微镜研究：(博士学位论文)．大连：大连理工大学，2007．
[5]Wolter H. Mirror systems with glancing incidence on imaging producing optics for X-ray. Ann. Phys.,1952,94(lO):866-875.
[6]Snigireva A, Kohn V.A compound refractive lens for focusing high-energy x-ray. Nature, 1996,384:49-51.
[7]Lindblom J K. Soft x-ray/extreme ultraviolet images of the solar atmosphere with normal incidence multilayer optics. SPIE. 1988,984:202-212.
[8]Thompson P L, Harvey J E.Systems engineering analysis of aplanatic Wolter type I x-ray telescopes. Opt. Eng.,2000,39(6):1677-1691.
[9]李保权，朱光武，林华安等．天基 X 射线掠入射式成像望远镜发展现状．空间科学学报，2004，24(4)：89-97．
[10]郭培基，高清峰，董玉芝．用于ICF实验的轴对称掠入射 x 射线显微镜中的光学系统．中国激光，2001，28(4)：135-142．
[11]姚志平，x射线宽带多层膜的设计方法及制备工艺研究：(硕士学位论文)．K春：中国科学院研究生院．2005．
[12]潘宁宁，王占山．x 射线用Kirkpatrick—Baez显微镜成像质量的研究．强激光与粒子束，2006，18(1)：251-259．
[13]Franks A, Gale B. Grazing incidence optical for X-ray microscope. Germany:Springer Verlag. 1983:130-138.
[14]胡家升，张景和，王保林．x光掠入射平面反射镜系统的制备．中国激光，1995，A22(4)：276-280．
[15]王之江，伍树东．成像光学．北京：科学出版社，1991．
[16]Cremer J T, Piestrup M A, Clarke R et al. Large aperture compound lenses made of lithium. Rev. Sci. Ins.,2003,74(7):2262-2266.
[17]Arms D A, Dufresne E M, Clarke Ret al. Refractive optics using lithium metal, 2002,73(3): 1492-1494.
[18]Seward F D, Palmieri T M.A simple X-ray microscope for photographing laser produced plasmas. Rev. Sci. Ins.,1975,46(2):204-206.
[19]Wolter H. Estimation of imaging aberrations for X-ray telescopes. Appl. Acta.,1971, 42(8): 2564-2569.
[20]孙可煦，易荣清，杨国洪等．软 X 射线平面镜在不同掠入射角卜的反射率标定．物理学报：2004，53(4)：1099-1103．
[21]胡家升，张景和，王宝林．X光掠入射平面反射镜系统的制备．中国激光，1995，22(4)：102-106．
[22]Hu Jiasheng, Zhao Lingling. Design and analysis of X-ray microscope of four mirrors working at grazing incidence. Journal of Optoelectronic Laser, 2005,16(5):203-210.
[23]Werner W. Imaging properties of Wolter type I X-ray telescope. Appl. Opt.,1977,16(5): 1036-1042.
[24]Chase R C. Aplanatic grazing incidence X-ray microscopes: design and performance. Applied Optics, 1976,15(12):3094-3098.
[25]Winkler C E, Korsch D. Primary aberrations for grazing incidence. Applied Optics, 1977, 16(9):2464-2469.
[26]袁旭沧．光学设计．北京：科学出版社，1983．
[27]胡家升．光学工程导论．大连：大连理工大学出版社，2002．
[28]Van Speybroeck L P, Chase R C. Design parameters of paraboloid-hyperboloid telescopes for X-ray astronomy. Appl. Opt.,1972,440(ll):2063-2067.
[29]Saha T T. General surface equations for glancing incidence telescopes. Appl. Opt.,1987, 658(16):1597-1605.
[30]Chase R C, Van Speybroeck L P. Wolter-Schwarzschild telescopes for X ray astronomy. Appl. Opt.,1973,12(6):764-773.
[31]Saha T T. Transverse ray aberrations for paraboloid-hyperboloid telescopes. Appl. Opt., 1985,24(10):1856-1862.
[32]Mangus J D, Underwood J H. Optical design of a glancing incidence X-ray telescope. Appl. Opt.,1996, 95(8):2201-2211.
[33]李林，安连生．计算机辅助光学设计的理论与应用．北京：国防工业出版社，2002．
[34]吴世法．近代成像技术与图像处理．北京：国防工业出版社，1997．