仿生蜘蛛振动感知的硅微加速度传感器研究
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摘要
本论文结合国家自然科学基金项目“基于蜘蛛振动感知机理的仿生多维微拾振构件及应用基础研究”(项目编号：50675193),首先通过生物学解剖、理论建模、数值仿真,深入研究了蜘蛛的两种机械感知器官及其感知机理,分别提出其在仿生微纳传感技术中的应用；进而结合微机电系统技术,提出新型的孔缝-微悬臂梁结构,研制出基于孔缝-微悬臂梁结构的仿生硅微加速度传感器,并对相关的设计开发问题进行了深入系统研究。
第1章,阐述了本学位论文的研究背景与意义,详细介绍了国内外在基于动植物体表感觉器官的仿生微纳传感技术、基于MEMS的微悬臂梁传感技术及硅微加速度传感器研制技术方面的研究现状,提出了本学位论文的主要研究内容。
第2章,首先选取狼蛛科的拟环纹豹蛛,进行生物学解剖实验,对蜘蛛的两种机械感知器官,即蜘蛛的毛形感受器及缝感受器,分别进行了SEM的电镜扫描观察；其次,针对蜘蛛的刚毛结构,研究其流量触觉感知机理,探讨其在仿生传感技术中的应用；然后,针对蜘蛛缝感受器和琴形器,研究其机械振动感知机理,结合孔缝的应力集中效应,提出基于孔缝的新型微传感器件的设计新思路。
第3章,研究仿生蜘蛛琴形器结构,结合微机电系统中的微悬臂梁传感技术,提出了新型的孔缝-微悬臂梁结构；其次,通过理论建模,深入研究孔缝的结构与位置参数等对微悬臂梁力学特性与检测性能的影响。结果表明：孔缝的引入可以有效的提高微悬臂梁的检测性能,而且可根据不同的设计要求,通过优化孔缝与微悬臂梁的结构参数以及孔缝的位置,获得所需的微悬臂梁力学特性,进而提高微悬臂梁的检测性能。
第4章,在孔缝-微悬臂梁理论分析的基础上,研究仿生蜘蛛琴形器的振动感知机理,提出了一种基于孔缝-微悬臂梁结构的压阻式仿生硅微加速度传感器。通过力学建模,系统分析了硅微加速度传感器的检测性能,如传感器的输出电压、线性度、灵敏度、谐振频率、噪声特性、分辨率、频响特性等。结果表明：相较于无孔缝结构,矩形孔缝的引入可以有效的提高硅微加速度传感器的检测性能,特别是在满足测量带宽的条件下,极大的提高传感器的灵敏度。
第5章,针对设计的仿生硅微加速度传感器,首先系统分析了结构参数、工艺参数和工作参数等对传感器性能的影响;其次,针对硅微加速度传感器优化设计这一问题,分别以灵敏度、噪声、分辨率作为设计目标,进行了单目标的优化设计分析；然后,针对三类参数之间的耦合关系及不同优化目标之间的矛盾,提出将非支配排序遗传算法(NSGA-Ⅱ)应用于仿生硅微加速度传感器的多目标优化设计。比较单目标优化结果,表明经多目标优化设计的硅微加速度传感器,各性能指标都有了较大的提升,验证了多目标优化设计数学模型的正确性和方法的有效性。
第6章,在仿生硅微加速度传感器理论分析和优化设计的基础上,结合外协作单位中国电子科技集团第13研究所的工艺条件,对本文仿生硅微加速度传感器的微机械加工工艺流程进行了研究,并完成了相应的制版与传感器制作。其次,针对传感器的结构特点,结合圆片级封装技术,完成了仿生硅微加速度传感器的封装制作；并为使封装后的硅微加速度传感器具有较高的动态特性,通过理论建模,分析了封装结构对传感器性能的影响,提出可以通过优化硅上盖板与玻璃衬底到中间结构层的距离来提高传感器的动态特性。
第7章,为了验证前面提出的理论和方法的正确性,在实验室自行研制的标准振动台上构建了仿生硅微加速度传感器的动态特性测试实验系统,并进行了相关的实验研究。首先对研制的仿生硅微加速度传感器的线性度、灵敏度、频响特性、噪声特性等进行了测试标定实验,结果表明,研制的仿生硅微加速度传感器具有较高的检测性能；其次,对传感器的非线性度及横向干扰进行了测试,分析其产生的原因及改善方案；此外,分析了仿生硅微加速度传感器的PCB安装方式对传感器性能的影响,提出实际使用中的改进方案。
第8章,总结了论文的主要研究工作和创新点,并展望了未来的研究工作。
Supported by "Research on Biomimetic Multidimensional Microvibrometer and Its Application Inspired from the Vibration Sensilla of Spiders", an National Natural Science Foundation of China (Grant No.50675193), spider's vibration mechanism and their application in biosensors development, such as slot-cantilever sensors and an novel piezoresistive accelerometers, were studied in this dissertation. The rearsearch work was carried out by combining theoretical analysis, numerical simulation with experimental verification.
In Chapter 1, the background and significance of the research were introduced, the development trend and current research situations of the biomimetic microsystems based on animals and plants'sensilla, micro-cantilever type sensors and accelerometers'development were explatiated, then the research contents of this dissertation were proposed.
In Chapter 2, firstly, spider's vibration sensing organs were studied by anotomy and SEM experiment. For spider's hair, the flow sensing mechanism was studied, and their potential applications in bio-sensing technologies were proposed. As for slit sensilla, the vibration sensing mechanism and slits'stress concentration effects were studied. Then, a novel design method of bio-sensors was presented.
In Chapter 3, based on spider's lyriform slits sensilla and combing MEMS technologies, piezoresistive slot-cantilever were presented. Analytical modeling was established to analyze the slits location and geometries effect on the sensing performance of cantilever sensors. The results show that the sensing performance and mechanical properties of cantilever can be greatly improved and adjusted by optimizing the slits and cantilever's structural and location parameters.
In Chapter 4, based on the above chapters analysis, a novel slot-cantilever type piezoresistive accelerometer was proposed. Then, an analytical models was established to study the sensing performance, such as output voltage, sensitivity, resonant frequency, noise floor, resolution, dynamic frequency responses, and etc. The results show that the sensing performance of the proposed bio-accelerometer can be effectively improved, especially for improving sensitivities and without decreasing the resonant frequency.
In Chapter 5, for piezoresistive accelerometer's optimization design, sensitivity, noise floor, resolution were selected as optimization objectives, the effects of structural dimensions, process parameters and working conditions were systematically analyzed. Then, sensitivity, noise floor or resolution was studied for single objective optimization design, respectively. As for the confliction of design parameters and objectives, a multi-objective optimization design method by using nondominated sorting genetic algorithm (NSGA-Ⅱ) is proposed to achieve the design optimization. The results demenstrated that the sensing performance of piezoresistive accelerometer can be greatly enhanced by using multi-objective optimization.
In Chapter 6, in order to fabricate the designed accelerometer, a set of process flows are brought forward and a series of important process steps are carried out to optimize the process parameters and flows. Then, the proposed accelerometer was eventually fabricated. For the packaging process, wafer-level packaging was designed to improve the sensing performance. An analytical models was presented to study the dynamic performance of the packaged accelerometer. The results show that the sensing performance can be enhanced by optimizing the air gaps of top silicon cap and bottom glass substrate to the middle sensing structure.
In Chapter 7, to verify the theory mentioned above and study the sensing performance for the developed accelerometer, the experimental setup was built on the standard vibration testing table. A series of experiments were carried out to study the sensing performance, such as sensitivity, linearity, bandwidth, noise level and etc. The results shown that the proposed accelerometer features high performance, such as higher sensitivity and relative large bandwidth. For the nonlinearity and cross sensitivity, the induced mechanism and improvements were studied. At last, as for the method of installation, analytical modeling was presented to study the effects of installation, then the improvements were proposed to eliminate these effects.
In Chapter 8, the chief work and innovations of this dissertation were summarized, and the further research subjects were proposed.
第1章,阐述了本学位论文的研究背景与意义,详细介绍了国内外在基于动植物体表感觉器官的仿生微纳传感技术、基于MEMS的微悬臂梁传感技术及硅微加速度传感器研制技术方面的研究现状,提出了本学位论文的主要研究内容。
第2章,首先选取狼蛛科的拟环纹豹蛛,进行生物学解剖实验,对蜘蛛的两种机械感知器官,即蜘蛛的毛形感受器及缝感受器,分别进行了SEM的电镜扫描观察；其次,针对蜘蛛的刚毛结构,研究其流量触觉感知机理,探讨其在仿生传感技术中的应用；然后,针对蜘蛛缝感受器和琴形器,研究其机械振动感知机理,结合孔缝的应力集中效应,提出基于孔缝的新型微传感器件的设计新思路。
第3章,研究仿生蜘蛛琴形器结构,结合微机电系统中的微悬臂梁传感技术,提出了新型的孔缝-微悬臂梁结构；其次,通过理论建模,深入研究孔缝的结构与位置参数等对微悬臂梁力学特性与检测性能的影响。结果表明：孔缝的引入可以有效的提高微悬臂梁的检测性能,而且可根据不同的设计要求,通过优化孔缝与微悬臂梁的结构参数以及孔缝的位置,获得所需的微悬臂梁力学特性,进而提高微悬臂梁的检测性能。
第4章,在孔缝-微悬臂梁理论分析的基础上,研究仿生蜘蛛琴形器的振动感知机理,提出了一种基于孔缝-微悬臂梁结构的压阻式仿生硅微加速度传感器。通过力学建模,系统分析了硅微加速度传感器的检测性能,如传感器的输出电压、线性度、灵敏度、谐振频率、噪声特性、分辨率、频响特性等。结果表明：相较于无孔缝结构,矩形孔缝的引入可以有效的提高硅微加速度传感器的检测性能,特别是在满足测量带宽的条件下,极大的提高传感器的灵敏度。
第5章,针对设计的仿生硅微加速度传感器,首先系统分析了结构参数、工艺参数和工作参数等对传感器性能的影响;其次,针对硅微加速度传感器优化设计这一问题,分别以灵敏度、噪声、分辨率作为设计目标,进行了单目标的优化设计分析；然后,针对三类参数之间的耦合关系及不同优化目标之间的矛盾,提出将非支配排序遗传算法(NSGA-Ⅱ)应用于仿生硅微加速度传感器的多目标优化设计。比较单目标优化结果,表明经多目标优化设计的硅微加速度传感器,各性能指标都有了较大的提升,验证了多目标优化设计数学模型的正确性和方法的有效性。
第6章,在仿生硅微加速度传感器理论分析和优化设计的基础上,结合外协作单位中国电子科技集团第13研究所的工艺条件,对本文仿生硅微加速度传感器的微机械加工工艺流程进行了研究,并完成了相应的制版与传感器制作。其次,针对传感器的结构特点,结合圆片级封装技术,完成了仿生硅微加速度传感器的封装制作；并为使封装后的硅微加速度传感器具有较高的动态特性,通过理论建模,分析了封装结构对传感器性能的影响,提出可以通过优化硅上盖板与玻璃衬底到中间结构层的距离来提高传感器的动态特性。
第7章,为了验证前面提出的理论和方法的正确性,在实验室自行研制的标准振动台上构建了仿生硅微加速度传感器的动态特性测试实验系统,并进行了相关的实验研究。首先对研制的仿生硅微加速度传感器的线性度、灵敏度、频响特性、噪声特性等进行了测试标定实验,结果表明,研制的仿生硅微加速度传感器具有较高的检测性能；其次,对传感器的非线性度及横向干扰进行了测试,分析其产生的原因及改善方案；此外,分析了仿生硅微加速度传感器的PCB安装方式对传感器性能的影响,提出实际使用中的改进方案。
第8章,总结了论文的主要研究工作和创新点,并展望了未来的研究工作。
Supported by "Research on Biomimetic Multidimensional Microvibrometer and Its Application Inspired from the Vibration Sensilla of Spiders", an National Natural Science Foundation of China (Grant No.50675193), spider's vibration mechanism and their application in biosensors development, such as slot-cantilever sensors and an novel piezoresistive accelerometers, were studied in this dissertation. The rearsearch work was carried out by combining theoretical analysis, numerical simulation with experimental verification.
In Chapter 1, the background and significance of the research were introduced, the development trend and current research situations of the biomimetic microsystems based on animals and plants'sensilla, micro-cantilever type sensors and accelerometers'development were explatiated, then the research contents of this dissertation were proposed.
In Chapter 2, firstly, spider's vibration sensing organs were studied by anotomy and SEM experiment. For spider's hair, the flow sensing mechanism was studied, and their potential applications in bio-sensing technologies were proposed. As for slit sensilla, the vibration sensing mechanism and slits'stress concentration effects were studied. Then, a novel design method of bio-sensors was presented.
In Chapter 3, based on spider's lyriform slits sensilla and combing MEMS technologies, piezoresistive slot-cantilever were presented. Analytical modeling was established to analyze the slits location and geometries effect on the sensing performance of cantilever sensors. The results show that the sensing performance and mechanical properties of cantilever can be greatly improved and adjusted by optimizing the slits and cantilever's structural and location parameters.
In Chapter 4, based on the above chapters analysis, a novel slot-cantilever type piezoresistive accelerometer was proposed. Then, an analytical models was established to study the sensing performance, such as output voltage, sensitivity, resonant frequency, noise floor, resolution, dynamic frequency responses, and etc. The results show that the sensing performance of the proposed bio-accelerometer can be effectively improved, especially for improving sensitivities and without decreasing the resonant frequency.
In Chapter 5, for piezoresistive accelerometer's optimization design, sensitivity, noise floor, resolution were selected as optimization objectives, the effects of structural dimensions, process parameters and working conditions were systematically analyzed. Then, sensitivity, noise floor or resolution was studied for single objective optimization design, respectively. As for the confliction of design parameters and objectives, a multi-objective optimization design method by using nondominated sorting genetic algorithm (NSGA-Ⅱ) is proposed to achieve the design optimization. The results demenstrated that the sensing performance of piezoresistive accelerometer can be greatly enhanced by using multi-objective optimization.
In Chapter 6, in order to fabricate the designed accelerometer, a set of process flows are brought forward and a series of important process steps are carried out to optimize the process parameters and flows. Then, the proposed accelerometer was eventually fabricated. For the packaging process, wafer-level packaging was designed to improve the sensing performance. An analytical models was presented to study the dynamic performance of the packaged accelerometer. The results show that the sensing performance can be enhanced by optimizing the air gaps of top silicon cap and bottom glass substrate to the middle sensing structure.
In Chapter 7, to verify the theory mentioned above and study the sensing performance for the developed accelerometer, the experimental setup was built on the standard vibration testing table. A series of experiments were carried out to study the sensing performance, such as sensitivity, linearity, bandwidth, noise level and etc. The results shown that the proposed accelerometer features high performance, such as higher sensitivity and relative large bandwidth. For the nonlinearity and cross sensitivity, the induced mechanism and improvements were studied. At last, as for the method of installation, analytical modeling was presented to study the effects of installation, then the improvements were proposed to eliminate these effects.
In Chapter 8, the chief work and innovations of this dissertation were summarized, and the further research subjects were proposed.
引文
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