单站式激光跟踪坐标测量系统研究
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摘要
单站式激光跟踪系统是一种测量精度高、测量范围大的三坐标测量系统。本文对系统的建模、‘鸟巢’坐标标定、误差分析和补偿、伺服控制等关键技术进行了研究。建成了一套具有测量功能的单站式激光跟踪仪，为开发具有自主知识产权的大范围、高精度跟踪测量产品奠定了基础。所做工作总结为以下几个方面：
搭建了回转精度高、机械结构误差小的激光跟踪系统。提出了根据反射光轨迹调节跟踪转镜位置误差和光线对准误差的方法。以DSP芯片为控制核心，搭建了直流电机的数字化伺服控制平台，并编写了便于调试的上位机软件。为研究单站式激光跟踪系统的关键技术创造了条件。
建立了只包含两个未知参数的系统数学模型，仿真验证了模型的正确性。
创立了采用约束球面标定‘鸟巢’坐标的原理。克服了现有的直线约束标定法和平面约束标定法原始误差大、误差传递系数高、抗噪性能差、收敛域较窄的缺点。
设计了采用三坐标测量机和Renishaw QC20-W球杆仪对‘鸟巢’坐标进行球面约束标定的实验装置。实验结果表明球面约束标定法比直线约束标定法和平面约束标定法标定精度更高。
分析了单站式激光跟踪系统的各项误差源并提出了误差补偿方案。建立了包含回转轴线异面距离和镜面安装偏心的标定模型和误差补偿模型。对误差补偿方法进行了仿真和实验。实验结果表明，误差补偿后系统的测量精度提高了38%。
推导了激光跟踪系统的位置敏感元件对目标镜位移的运动感知数学模型，实现了跟踪系统两回转轴跟踪量的解耦。
在复合控制的基础上，为控制系统的位置环添加模糊调节器，建立了综合控制器。实验结果表明综合控制器使系统跟踪目标时的脱靶量相对于复合控制器减小了80%，跟踪速度提高了35%。
对本文所建立的跟踪控制系统进行了跟踪范围测试实验、重复性精度检测实验、单轴测量精度检测实验、综合测量实验以及不同目标镜的光程差检测实验。实验结果表明，跟踪系统能够在3.2m的范围内对以高达0.5m/s速度运行的目标实现跟踪测量。与双频激光干涉仪的对比测长实验表明，系统在3.2m内的测量误差为±8.5μm。
Standalone Laser Tracking System (LTS) is a kind of coordinate measuringmachine which possesses high precision and large measuring range up to more than100meters. This dissertation focuses on researching key technologies of standaloneLTS including system modeling, parameter calibration, error analysis andcompensation, high performance servo controller etc. Main findings of thedissertation can be summed as following:
A standalone LTS with precise rotation shafts and accurate mechanical structureis produced. A method for adjusting the laser path and tracking mirror’s positionaccording to the trace of reflected light is developed. A digital servo platform takingDSP as the core is set up and PC application software is programed for theconvenience of developing various control strategies. All of this lays a goodfoundation for subsequent researches.
A new mathematical model for standalone LTS which only contains twounknown parameters is proposed. Simulation studies prove that this new model iscorrect.
A new calibration method with spherical constrains is proposed to calibrateunknown system parameters. It overcomes the shortcomings of big original error,significant error transmission factor, low noise resistance and narrow convergencedomain that exist in calibration methods with planer or liner constrains.
Experiment installation is designed to calibrate LTS, which utilizes CMM andRenishaw QC20-W ball bar to build precision spherical constrains. LTS is calibratedby spherical constrains and planer constrains respectively. Contrast measurementexperiments show that the new calibration method can provide more accuratecalibration results.
System errors are analyzed and error compensation is carried out. An errorcompensation model containing the misalignment of two rotation axis and theeccentricity of the tracking mirror is presented. Simulation and experimental resultsshow that system measuring accuracy increases by38%after error compensation.
Transformation matrix between the coordinates on the PSD’s surface of the lightspot and the displacements of the target reflector is derived out, which realizes the decoupling of the tracking errors of the two shafts.
Combining the compound controller and fuzzy controller together, a compositivecontroller is proposed. Tracking experiments show that the compositive controllerdecreases the tracking error by80%and increases the tacking speed by35%.
In order to test the performance of the LTS, experiments for testing themeasuring range, repeatability, single shaft measuring accuracy and volume accuracyare carried out. The results show that the LTS which is built in our laboratory cantrack a target with a speed of no faster than0.5m/s in3.2m radius range. Contrastspatial length measuring tests show that the measuring error of the LTS is±8.5μm.
搭建了回转精度高、机械结构误差小的激光跟踪系统。提出了根据反射光轨迹调节跟踪转镜位置误差和光线对准误差的方法。以DSP芯片为控制核心，搭建了直流电机的数字化伺服控制平台，并编写了便于调试的上位机软件。为研究单站式激光跟踪系统的关键技术创造了条件。
建立了只包含两个未知参数的系统数学模型，仿真验证了模型的正确性。
创立了采用约束球面标定‘鸟巢’坐标的原理。克服了现有的直线约束标定法和平面约束标定法原始误差大、误差传递系数高、抗噪性能差、收敛域较窄的缺点。
设计了采用三坐标测量机和Renishaw QC20-W球杆仪对‘鸟巢’坐标进行球面约束标定的实验装置。实验结果表明球面约束标定法比直线约束标定法和平面约束标定法标定精度更高。
分析了单站式激光跟踪系统的各项误差源并提出了误差补偿方案。建立了包含回转轴线异面距离和镜面安装偏心的标定模型和误差补偿模型。对误差补偿方法进行了仿真和实验。实验结果表明，误差补偿后系统的测量精度提高了38%。
推导了激光跟踪系统的位置敏感元件对目标镜位移的运动感知数学模型，实现了跟踪系统两回转轴跟踪量的解耦。
在复合控制的基础上，为控制系统的位置环添加模糊调节器，建立了综合控制器。实验结果表明综合控制器使系统跟踪目标时的脱靶量相对于复合控制器减小了80%，跟踪速度提高了35%。
对本文所建立的跟踪控制系统进行了跟踪范围测试实验、重复性精度检测实验、单轴测量精度检测实验、综合测量实验以及不同目标镜的光程差检测实验。实验结果表明，跟踪系统能够在3.2m的范围内对以高达0.5m/s速度运行的目标实现跟踪测量。与双频激光干涉仪的对比测长实验表明，系统在3.2m内的测量误差为±8.5μm。
Standalone Laser Tracking System (LTS) is a kind of coordinate measuringmachine which possesses high precision and large measuring range up to more than100meters. This dissertation focuses on researching key technologies of standaloneLTS including system modeling, parameter calibration, error analysis andcompensation, high performance servo controller etc. Main findings of thedissertation can be summed as following:
A standalone LTS with precise rotation shafts and accurate mechanical structureis produced. A method for adjusting the laser path and tracking mirror’s positionaccording to the trace of reflected light is developed. A digital servo platform takingDSP as the core is set up and PC application software is programed for theconvenience of developing various control strategies. All of this lays a goodfoundation for subsequent researches.
A new mathematical model for standalone LTS which only contains twounknown parameters is proposed. Simulation studies prove that this new model iscorrect.
A new calibration method with spherical constrains is proposed to calibrateunknown system parameters. It overcomes the shortcomings of big original error,significant error transmission factor, low noise resistance and narrow convergencedomain that exist in calibration methods with planer or liner constrains.
Experiment installation is designed to calibrate LTS, which utilizes CMM andRenishaw QC20-W ball bar to build precision spherical constrains. LTS is calibratedby spherical constrains and planer constrains respectively. Contrast measurementexperiments show that the new calibration method can provide more accuratecalibration results.
System errors are analyzed and error compensation is carried out. An errorcompensation model containing the misalignment of two rotation axis and theeccentricity of the tracking mirror is presented. Simulation and experimental resultsshow that system measuring accuracy increases by38%after error compensation.
Transformation matrix between the coordinates on the PSD’s surface of the lightspot and the displacements of the target reflector is derived out, which realizes the decoupling of the tracking errors of the two shafts.
Combining the compound controller and fuzzy controller together, a compositivecontroller is proposed. Tracking experiments show that the compositive controllerdecreases the tracking error by80%and increases the tacking speed by35%.
In order to test the performance of the LTS, experiments for testing themeasuring range, repeatability, single shaft measuring accuracy and volume accuracyare carried out. The results show that the LTS which is built in our laboratory cantrack a target with a speed of no faster than0.5m/s in3.2m radius range. Contrastspatial length measuring tests show that the measuring error of the LTS is±8.5μm.
引文
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