MEMS开关关键技术研究
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摘要
MEMS开关中,受表面效应的影响,黏着力对开关触点的工作可靠性有极大的影响。本文以固体力学、弹塑性力学和黏着力学为基础,建立触点微／纳米量级的弹性和塑性接触模型;基于量子力学研究了触点的隧道电流机理,建立了在弹-塑性变形条件下粗糙表面触点间的隧道电流和接触电阻计算模型；基于机电动力学原理设计了一种永磁微加速度开关。研究内容如下：
(1)基于Lennard-Jones势能定律和Hamaker假设,通过积分方法得到球体与平面间的黏着力,结合经典弹性理论计算了纳米级刚性球体和弹性平面的黏着接触变形,对常见金属触点材料在弹性接触时接触力、接触变形、接触面积等参数的变化规律进行了仿真分析。
(2)对污染触点进行了接触研究,模拟分析了金表面沉积碳膜后,触点的弹性接触力、接触变形、接触面积等参数的变化规律。
(3)建立了表面黏着接触应力计算模型。采用von Mises强度理论研究弹性平面屈服问题,得到了塑性变形区域和塑性变形量。
(4)给出了弹性和塑性区域的变形准则,基于该准则模拟分析球体下压过程中球-面间隙和接触面积的变化规律。以Au材料为例,计算了球体下压过程中材料的应力-应变关系并得到Au材料的微观屈服极限。
(5)建立了触点塑性接触模型,基于该模型对清洁和污染触点接触过程中接触压力、接触应力、表面变形量及接触面积等参数的变化规律进行了仿真分析,得到了接触表面的引力区域、斥力区域；弹性变形区域和塑性变形区域。
(6)基于隧道电流密度计算公式,推导了刚性球形触点趋近刚性平面时隧道电流和接触电阻的计算公式,并进一步给出了刚性接触时触点的收缩面积和截面收缩率随触点间隙的变化规律。
(7)建立了刚性球形触点和弹-塑性平面电接触的计算模型,研究了弹性和塑性变形对触点的接触力、隧道电流、接触电阻的影响。
(8)将触点表面微丘的曲率半径和高度误差量按照正态分布选取,建立了粗糙表面电接触模型；研究了微丘半径,高度误差和微丘数量对接触电阻的影响。得到典型触点接触电阻随接触力及接触压强变化的规律。
(9)给出一种永磁微加速度开关的结构设计方案,提出了该开关的静态设计原则。建立了微型运动平板间空气阻尼的计算模型。推导了MEMS微平面机构所受的空气阻尼力和阻尼系数的解析公式。
(10)基于典型粗糙表面电接触计算模型,给出了触点稳定工作时接触压力-接触电阻和电流-电压关系曲线。
(11)建立了开关动力学分析模型,对开关在激励下的工作响应进行了仿真。
In a micro switch, the adhension force caused by the surface effect exerts great influences on the reliability of the contactors. Based on solid mechanics, elastic-plastic mechanics and adhension mechanics, a micro-nano scale elastic-plastic contact model was built in this paper. A tunnel current theory based on quantum mechanics was given to build the calculation model of tunnel current and contact resistance on a rough surface contactor. A micro permanent magnet switch was designed according to the electromechanical dynamic theory. In this paper, the research contents are as follows.
1. Based on Lennard-Jones potential energy theorem and Hamaker hypothesis, the adhension force between a stiff sphere and an elastic surface was obtained. The contact deformation of the surface was calculated through classical elastic theory and the change rules of the contact force, the contact deformation and the contact area were studied through the simulated analysis.
2. The contact mechanism between two contaminative contactors was studied in cases of the contamination carbon on the contact surface. The change rules of the contact force, the contact deformation and the contact area were studied.
3. The contact stress computing model was built in this paper. The yielding stress of elastic surface was researched to get the plastic area and the plastic deformation.
4. The deformation regulations of elastic and plastic area were given. The interval and the contact area between the sphere and the surface were analyzed. Taking gold for example, the stress-strain relationship was studied and the yield limit of gold was obtained.
5. The plastic contact model was built in the paper. The contact stress, the deformation and the contact area of the surface were researched on the basis of the plastic contact model to get the attractive and repulsive area, the elastic and plastic deformation area.
6. Using the tunnel current density formulas, the computational formulas of the tunnel current through a stiff sphere contactor and a stiff plane were given. The contact resistance was calculated and further the rules that the contraction area and the shrinkage of the contactor area changed with the interval between two contractors were presented.
7. The electric contact model was set up to calculate the contact force, tunnel current and contact resistance between a stiff sphere contactor and an elastic-plastic surface.
8. As the micro mounds on the contactors being described according to normal distribution, the electrical contact model of a rough surface was built. The effects of the mounds radius, the mounds height error and the mounds number on the contact resistance were studied. Change laws of contact resistance that transfer with contact force and pressure between the contactors were obtained.
9. A new type of micro permanent magnetic acceleration switch was designed. The static design laws were presented. The calculation model of the squeeze damping was built and the analytical formulae of the gas damp force and damp coefficient of the parallel flats in the MEMS devices were derived。
10. According to the contact resistance model of the classical rough surface, the contact pressure-resistance and current-voltage curve were given.
11. The dynamic model of the switch was built. The dynamic response under an acceleration excitation of the square wave signals was simulated.
(1)基于Lennard-Jones势能定律和Hamaker假设,通过积分方法得到球体与平面间的黏着力,结合经典弹性理论计算了纳米级刚性球体和弹性平面的黏着接触变形,对常见金属触点材料在弹性接触时接触力、接触变形、接触面积等参数的变化规律进行了仿真分析。
(2)对污染触点进行了接触研究,模拟分析了金表面沉积碳膜后,触点的弹性接触力、接触变形、接触面积等参数的变化规律。
(3)建立了表面黏着接触应力计算模型。采用von Mises强度理论研究弹性平面屈服问题,得到了塑性变形区域和塑性变形量。
(4)给出了弹性和塑性区域的变形准则,基于该准则模拟分析球体下压过程中球-面间隙和接触面积的变化规律。以Au材料为例,计算了球体下压过程中材料的应力-应变关系并得到Au材料的微观屈服极限。
(5)建立了触点塑性接触模型,基于该模型对清洁和污染触点接触过程中接触压力、接触应力、表面变形量及接触面积等参数的变化规律进行了仿真分析,得到了接触表面的引力区域、斥力区域；弹性变形区域和塑性变形区域。
(6)基于隧道电流密度计算公式,推导了刚性球形触点趋近刚性平面时隧道电流和接触电阻的计算公式,并进一步给出了刚性接触时触点的收缩面积和截面收缩率随触点间隙的变化规律。
(7)建立了刚性球形触点和弹-塑性平面电接触的计算模型,研究了弹性和塑性变形对触点的接触力、隧道电流、接触电阻的影响。
(8)将触点表面微丘的曲率半径和高度误差量按照正态分布选取,建立了粗糙表面电接触模型；研究了微丘半径,高度误差和微丘数量对接触电阻的影响。得到典型触点接触电阻随接触力及接触压强变化的规律。
(9)给出一种永磁微加速度开关的结构设计方案,提出了该开关的静态设计原则。建立了微型运动平板间空气阻尼的计算模型。推导了MEMS微平面机构所受的空气阻尼力和阻尼系数的解析公式。
(10)基于典型粗糙表面电接触计算模型,给出了触点稳定工作时接触压力-接触电阻和电流-电压关系曲线。
(11)建立了开关动力学分析模型,对开关在激励下的工作响应进行了仿真。
In a micro switch, the adhension force caused by the surface effect exerts great influences on the reliability of the contactors. Based on solid mechanics, elastic-plastic mechanics and adhension mechanics, a micro-nano scale elastic-plastic contact model was built in this paper. A tunnel current theory based on quantum mechanics was given to build the calculation model of tunnel current and contact resistance on a rough surface contactor. A micro permanent magnet switch was designed according to the electromechanical dynamic theory. In this paper, the research contents are as follows.
1. Based on Lennard-Jones potential energy theorem and Hamaker hypothesis, the adhension force between a stiff sphere and an elastic surface was obtained. The contact deformation of the surface was calculated through classical elastic theory and the change rules of the contact force, the contact deformation and the contact area were studied through the simulated analysis.
2. The contact mechanism between two contaminative contactors was studied in cases of the contamination carbon on the contact surface. The change rules of the contact force, the contact deformation and the contact area were studied.
3. The contact stress computing model was built in this paper. The yielding stress of elastic surface was researched to get the plastic area and the plastic deformation.
4. The deformation regulations of elastic and plastic area were given. The interval and the contact area between the sphere and the surface were analyzed. Taking gold for example, the stress-strain relationship was studied and the yield limit of gold was obtained.
5. The plastic contact model was built in the paper. The contact stress, the deformation and the contact area of the surface were researched on the basis of the plastic contact model to get the attractive and repulsive area, the elastic and plastic deformation area.
6. Using the tunnel current density formulas, the computational formulas of the tunnel current through a stiff sphere contactor and a stiff plane were given. The contact resistance was calculated and further the rules that the contraction area and the shrinkage of the contactor area changed with the interval between two contractors were presented.
7. The electric contact model was set up to calculate the contact force, tunnel current and contact resistance between a stiff sphere contactor and an elastic-plastic surface.
8. As the micro mounds on the contactors being described according to normal distribution, the electrical contact model of a rough surface was built. The effects of the mounds radius, the mounds height error and the mounds number on the contact resistance were studied. Change laws of contact resistance that transfer with contact force and pressure between the contactors were obtained.
9. A new type of micro permanent magnetic acceleration switch was designed. The static design laws were presented. The calculation model of the squeeze damping was built and the analytical formulae of the gas damp force and damp coefficient of the parallel flats in the MEMS devices were derived。
10. According to the contact resistance model of the classical rough surface, the contact pressure-resistance and current-voltage curve were given.
11. The dynamic model of the switch was built. The dynamic response under an acceleration excitation of the square wave signals was simulated.
引文
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