机械刻划光栅刻线误差及其修正方法研究
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摘要
随着科技的迅速发展，大面积且高质量的平面衍射光栅在各国军事、天文、核能、航天航空以及民用领域的需求越发迫切。机械刻划法是光栅主要制作方法之一，是制作某些特殊用途光栅的最佳选择，如低刻线密度的红外激光光栅和所有中阶梯光栅等。对于机械刻划法而言，光栅刻线误差是影响大面积光栅性能指标（衍射波前、杂散光和分辨本领等）的关键因素。鉴于此，本论文受“十一五”国家科技支撑计划重大项目和国家重大科研装备研制项目资助，从机械刻划光栅的刻线误差入手，探索提高大面积机械刻划光栅质量的方法，主要对机械刻划光栅刻线误差与基底面型误差和光栅衍射波前及其它性能指标之间的关系、刻线误差对光栅性能影响及其机械修正方法和刻线摆角误差实时修正方法等做了较为深入的研究。第一，推导出了光栅锥面衍射下光栅刻线误差、基底面型误差与衍射波前之间的关系表达式，通过测量光栅对称级次衍射波前，实现了刻线误差与基底面型误差分离以及二者的数字化定量提取；通过二维快速傅里叶变换方法分析光栅衍射波前,考察了刻线误差与基底面型误差对光栅性能指标的影响。借助上述方法可以通过重构的光栅衍射波前，分析光栅性能指标，同时还可以反演光栅全表面刻线误差与面型误差的大小，为光栅制造和使用技术提供理论依据。第二，阐述了在单色平行光入射条件下含有等间距刻线弯曲和刻线位置误差的平面光栅在焦平面上成像的光线追迹模型，分析了上述两种刻线误差对光栅衍射谱成像性能的影响；理论分析结果表明，刻线弯曲和刻线位置误差分别主要影响光栅弧矢和子午方向光谱性能，刻线弯曲对光栅分辨本领和杂散光影响较小，该结果可为机械刻划光栅制作技术的研究重点提供指导。第三，采用有限元分析方法对长春光机所2号刻划机可机械修正的主要光栅刻线弯曲来源——刻划刀架系统结构不对称、石英导轨系统刚度不足和刻划刀架系统驱动方式不合理等问题进行了分析，并提出了相应的机械修正方法，最后对部分机械修正方法进行了实验验证，实验与仿真结果在趋势上具有较好的一致性。第四，针对2号刻划机中的主要刻线位置误差展开机械修正方法研究；通过对刻划刀架系统与微定位工作台平行性进行机械修正，解决了光栅刻线不完整问题；提出了鞍型滑块与刻划刀架连接方式的机械修正方案，设计了柔性铰链式连接方式来取代原有的固定连接方式，有效解决了刻划刀架系统运行不稳定问题，机械修正后结构与原结构相比，其光栅刻线位置误差有了明显下降，有效抑制了光栅杂散光，提高了2号光栅刻划机的光栅质量。第五，对2号光栅刻划机微定位工作台系统数学模型中的主要参数与工作台动态性能之间的关系进行了仿真分析，并对BP神经网络PID和传统PID算法的控制精度进行了实验分析；结果表明，增大宏微两级工作台之间的连接刚度或阻尼在总体趋势上均可改善微定位工作台性能，而且BP神经网络PID算法是更适合2号刻划机工作台的控制算法，上述分析结果对大光栅刻划机宏微两级工作台设计和改进及控制算法选择具有一定参考意义。第六，给出了一种单压电陶瓷式光栅刻划机工作台摆角误差实时修正方法，并针对工作台摆角测量中出现的问题，采用三路激光干涉仪和zygo衍射波前测量仪对摆角测量误差来源进行交互验证分析，最终通过光栅刻划实验验证了本文提出的摆角修正方法的可行性；实验结果表明，采用本文给出的单压电陶瓷式方法，有效抑制了光栅刻线摆角误差，该摆角修正方法可望应用于实时修正大面积机械刻划光栅的刻线摆角误差。
With the rapid development of science and technology, large-area andhigh-quality plane diffraction gratings are being demanded more and more urgentlyin the national military, astronomy, nuclear energy, aerospace and civilian areas.Machine-ruling method is one of the major methods for making grating and is thebest choice for making some special gratings, such as low line-density grating forinfrared laser and all echelle gratings etc… For Machine-ruling method, grating’sline error is one of the important factors that effect the performance of large areagrating (diffraction wavefront, stray light and resolving power etc.).In view of uponreasons, the paper, which is funded by the National Key Technologies R&D Programfor the11th Five-year Plan and National R&D Projects for Key ScientificInstruments, is mainly focused on line errors of machine-ruling grating and methodsfor improve the quality of machine-ruling gratings with large areas. The relationshipamong grating’s diffraction wavefront, grating performances, line error andsubstrate’s surface error is analyzed deeply; Influence and revising method ofmachine-ruling grating’s line error on grating performance is studied detailedly; thereal-time revising method of yaw angle error of grating line is also elaborated. Firstly,the relationship among line error, surface error and diffraction wavefront undercondition of cone diffraction is deduced. Grating’s diffraction wavefronts ofsymmetric orders were measured by interferometer, and the separation of grating lineerror and surface error of substrate is realized from measured digitized results.Grating’s diffraction wavefront is analyzed by Two-dimensional fast Fouriertransform method and the influence of grating line error and surface error on gratingperformance is discussed. With the aid of aforesaid method, grating performance can be analyzed by reconstructing grating’s diffraction wavefront, and grating line errorand surface error on the whole surface of grating can be deduced, both of which canprovide a theoretical basis for grating’s substrate processing, grating manufactureand application. Secondly, the paper provides an light-tracing mathematical model inwhich collimated monochromatic light incidents on a plane grating which containsline's curved error and line location error and corresponding diffraction light isimaged on the focal plane. The influence of above-mentioned grating line errors ongrating performance is studied. Results show that grating line's curve and locationerror predominately influence grating sagittal and meridional spectral performanceseparately, and line's curved error has little effect on grating resolving power andscattered light. Upon results may provide guidance for making of machine-rulinggrating. Thirdly, the problem of asymmetry of ruling tool system, stiffness of quartzguide system and rationality of driven approach for ruling tool system, which aresome main reasons for grating’s line curve of CIOMP-2ruling engine in China, areanalyzed by finite element method, and corresponding mechanical correction methodare provided. some correction methods are verified by experiments, and experimentand simulation results are consistent on the changing trend. Fourthly, the structureand mechanical amended the original structure compared to the position error of thegrating lines have decreased significantly, effectively inhibit the grating stray light,and improve the quality of the grating of the grating ruling machine. The mechanicalcorrection method for main grating-line position errors in CIOMP-2ruling engine isstudied. The problem of incomplete grating lines is solved by mechanicallycorrecting the parallelism of the ruling tool system and micro-positioning table. Inorder to solve the problem of instability of ruling tool system, a correction methodfor connection mode of saddle slider and ruling tool is provided by using flexiblehinge instead of the fixed connection, and this method is an effective solution to theproblem of instability of ruling tool system. Compared to the origin ruling toolsystem, the modified ruling tool system’s grating-line position errors is decreasedsignificantly, stray light is effectively suppressed, and grating quality of CIOMP-2ruling engine is improved. Fifthly, relationship among main parameters of themathematical model of micro-positioning table system and dynamic performance ofmicro-positioning table system is analyzed by simulation, and thepositioning-accuracy difference between BP-neural-network PID control andtraditional PID control is compared by experiment analysis. Results show that thedynamic performance of the micro-positioning table can be improved by increasingthe connection stiffness (or damping) between micro-positioning table and macro-positioning table on the general trend, and BP-neural-network PID control ismore suitable for CIOMP-2ruling engine than traditional PID control. Upon analysisresults has some reference significances for the design and improvement ofmacro-micro table of grating ruling engine. Sixthly, in order to solve the problem ofyaw angle of micro-positioning table of ruling engine,a single-PZT correctionmethod is provided. The sources of measurement error of yaw angle is analyzed bymeasurement results from three laser interferometer and one diffraction-wavefrontmeasuring machine of Zygo Company. In final, experimental verification of thesingle-PZT correction method is performed. The results show that the single-PZTcorrection method can effectively suppress yaw errors of grating line. Thesingle-PZT correction method may be applied to correct the yaw angle of gratinglines of large-area and high-quality gratings which are made by grating rulingengines in real time.
With the rapid development of science and technology, large-area andhigh-quality plane diffraction gratings are being demanded more and more urgentlyin the national military, astronomy, nuclear energy, aerospace and civilian areas.Machine-ruling method is one of the major methods for making grating and is thebest choice for making some special gratings, such as low line-density grating forinfrared laser and all echelle gratings etc… For Machine-ruling method, grating’sline error is one of the important factors that effect the performance of large areagrating (diffraction wavefront, stray light and resolving power etc.).In view of uponreasons, the paper, which is funded by the National Key Technologies R&D Programfor the11th Five-year Plan and National R&D Projects for Key ScientificInstruments, is mainly focused on line errors of machine-ruling grating and methodsfor improve the quality of machine-ruling gratings with large areas. The relationshipamong grating’s diffraction wavefront, grating performances, line error andsubstrate’s surface error is analyzed deeply; Influence and revising method ofmachine-ruling grating’s line error on grating performance is studied detailedly; thereal-time revising method of yaw angle error of grating line is also elaborated. Firstly,the relationship among line error, surface error and diffraction wavefront undercondition of cone diffraction is deduced. Grating’s diffraction wavefronts ofsymmetric orders were measured by interferometer, and the separation of grating lineerror and surface error of substrate is realized from measured digitized results.Grating’s diffraction wavefront is analyzed by Two-dimensional fast Fouriertransform method and the influence of grating line error and surface error on gratingperformance is discussed. With the aid of aforesaid method, grating performance can be analyzed by reconstructing grating’s diffraction wavefront, and grating line errorand surface error on the whole surface of grating can be deduced, both of which canprovide a theoretical basis for grating’s substrate processing, grating manufactureand application. Secondly, the paper provides an light-tracing mathematical model inwhich collimated monochromatic light incidents on a plane grating which containsline's curved error and line location error and corresponding diffraction light isimaged on the focal plane. The influence of above-mentioned grating line errors ongrating performance is studied. Results show that grating line's curve and locationerror predominately influence grating sagittal and meridional spectral performanceseparately, and line's curved error has little effect on grating resolving power andscattered light. Upon results may provide guidance for making of machine-rulinggrating. Thirdly, the problem of asymmetry of ruling tool system, stiffness of quartzguide system and rationality of driven approach for ruling tool system, which aresome main reasons for grating’s line curve of CIOMP-2ruling engine in China, areanalyzed by finite element method, and corresponding mechanical correction methodare provided. some correction methods are verified by experiments, and experimentand simulation results are consistent on the changing trend. Fourthly, the structureand mechanical amended the original structure compared to the position error of thegrating lines have decreased significantly, effectively inhibit the grating stray light,and improve the quality of the grating of the grating ruling machine. The mechanicalcorrection method for main grating-line position errors in CIOMP-2ruling engine isstudied. The problem of incomplete grating lines is solved by mechanicallycorrecting the parallelism of the ruling tool system and micro-positioning table. Inorder to solve the problem of instability of ruling tool system, a correction methodfor connection mode of saddle slider and ruling tool is provided by using flexiblehinge instead of the fixed connection, and this method is an effective solution to theproblem of instability of ruling tool system. Compared to the origin ruling toolsystem, the modified ruling tool system’s grating-line position errors is decreasedsignificantly, stray light is effectively suppressed, and grating quality of CIOMP-2ruling engine is improved. Fifthly, relationship among main parameters of themathematical model of micro-positioning table system and dynamic performance ofmicro-positioning table system is analyzed by simulation, and thepositioning-accuracy difference between BP-neural-network PID control andtraditional PID control is compared by experiment analysis. Results show that thedynamic performance of the micro-positioning table can be improved by increasingthe connection stiffness (or damping) between micro-positioning table and macro-positioning table on the general trend, and BP-neural-network PID control ismore suitable for CIOMP-2ruling engine than traditional PID control. Upon analysisresults has some reference significances for the design and improvement ofmacro-micro table of grating ruling engine. Sixthly, in order to solve the problem ofyaw angle of micro-positioning table of ruling engine,a single-PZT correctionmethod is provided. The sources of measurement error of yaw angle is analyzed bymeasurement results from three laser interferometer and one diffraction-wavefrontmeasuring machine of Zygo Company. In final, experimental verification of thesingle-PZT correction method is performed. The results show that the single-PZTcorrection method can effectively suppress yaw errors of grating line. Thesingle-PZT correction method may be applied to correct the yaw angle of gratinglines of large-area and high-quality gratings which are made by grating rulingengines in real time.
引文
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