LED基片专用摇摆式数控多线切割机系统控制研究及应用
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摘要
LED基片专用摇摆式多线切割机是半导体照明产业中衬底切片的专用装备。衬底材料的切片质量好坏直接影响LED后续加工步骤。传统多线切割机的切割对象为莫氏硬度5左右(金刚石的莫氏硬度为10)的水晶和硅片,LED衬底材料主要采用蓝宝石和碳化硅,这两种材料的莫氏硬度都在9以上,传统多线切割机切割效率低,甚至切不动,必须使用LED专用多线切割机。而LED多线切割机被日本和瑞士企业垄断,成为制约我国LED产业发展的瓶颈。LED多线切割机在系统功能结构、控制策略、自动化程度等几个方面与传统多线切割机有较大区别和提升。本文以传统多线切割机为参照对比,以LED多线切割机项目研发过程中的关键技术难点为主线,对LED多线切割机数控系统关键技术进行深入研究。
(1)阐述课题研究的背景和意义；依据项目开发要求,研究LED衬底基片多线切割机和与之相关的几项关键控制技术的国内外研究状况,论述数控多线切割技术的发展趋势；介绍LED衬底基片多线切割机控制技术基础；概括作者承担的科研任务以及本文主要研究内容。
(2)分析传统多线切割机的机械结构和原理,得出传统多线切割机高速切割LED材料时切割效率低和切割质量不稳定的原因。针对传统多线切割机的缺点,提出用金刚石线+冷却液切割模式替代钢丝线+砂浆模式,解决磨料游离的问题；设计一种摆动装置的机械结构,克服传统多线切割机p值不恒定的缺点。同时增加自动绕线机构和放线侧排线器,得到LED多线切割机机械机构。根据LED切片的要求和特点,设定LED多线切割机总体性能指标,设计系统整体与各个模块的电气和控制系统。分析了LED多线切割机控制的重点和难点
(3)针对常规张力控制在LED多线切割机系统中精度不高,非线性干扰系统不稳定的问题,提出干扰观测的线性H∞张力控制算法。该算法充分考虑系统中具有子系统模型的动态干扰和未建模动态干扰以及参数和结构的不确定性引起的误差,并给出解决方案。研究线性H∞控制系统的稳定性,并在系统稳定的条件下,利用Chelosky分解方法,得到动态方程的解,大幅提高系统响应速度。样机的实验结果表明该系统具有系统张力波动小,稳定性能好,断线率低的特点。
(4)分析机械结构改进后出现的多轴同步控制难点,根据其固有的特点,充分利用模糊控制鲁棒性强和迭代学习控制精度高的优点,同时避免模糊控制稳态精度不高,迭代学习控制对参数变化敏感的缺陷,提出模糊迭代学习控制方法。通过实验对比了模糊控制和模糊迭代学习控制算法的运行结果,证明模糊迭代学习控制算法的有效性。
(5)详尽分析机器结构和功能发生变化之后的自动绕线控制要求。根据系统控制要求,对主流的主从同步控制算法进行改进,得到主从-位置控制算法。相对单一的主从控制算法,主从-位置控制算法减少了控制层次,缩小延时,有一定的进步意义。针对主从-位置算法的局限性,建立LED多线切割机自动绕线的数学模型,提出一种并联差分耦合控制算法,并对其有效性进行证明。并联差分耦合控制算法建立系统线速度同步和角速度同步的统一模型,综合相邻交叉耦合控制和偏交叉耦合控制的优点；在与主从-位置控制算法的对比试验中,控制精度高,响应速度快,效果良好。
(6)传统多线切割机往往凭借经验设定多线切割机的系统线速度、张力以及工件台速度等参数,且参数一旦设定,整个切割过程中保持不变。依赖经验的操作自动化程度低,且不一定是最佳选择,切割参数固定不变未必效率最高。通过试验找出上述三项参数对于切割效率的定量关系,并根据其关系建立数学模型,提出切割时间最优控制。试验对比证明该控制算法能够提高生产效率,且本文的试验结果和控制方法对传统多线切割机同样有效。通过切片试验结果和数据对比分析,表明整机具有切片精度高,稳定性好的特点。
本课题成功开发一款LED多线切割机产品,整机性能指标达到预期目标,该新产品已于2011年投入市场应用。本文研究的LED多线切割机的几项核心控制技术,对数控多线切割机系列化装备的研制具有重要意义,同时对工业领域相关控制课题的研究具有重要的借鉴作用和参考价值。
Swing type multi-wire saw (MWS) for LED substrate is the special equipment in the LED wafer manufacturing process in semiconductor lighting industry. The quality of the substrate sliced sheet direct impact on LED subsequent processing step. The cutting object of traditional MWS is silicon wafer and crystal with Moh's hardness about5(Moh's hardness of diamond is10). LED substrate mainly uses the sapphire and silicon carbide. The two kinds of material in more than nine's hardness, but due to its high hardness and heavy brittle, there are some problems in the precision machining course. Traditional MWS cutting efficiency is low, even cut motionless and it must use special LED MWS. LED MWS is monopolized by Japanese and Swiss enterprises, and becomes a development bottleneck that constrains our country LED industry. LED MWS have great differences and ascend than traditional MWS in the system function structure, control strategy, automation degree and so on several aspects. Traditional MWS as reference to more contrast, LED MWS key technical difficulties in the process of project research as the main line, LED MWS NC system is further research.
(1) The background and meaning of subject research are expounded. The domestic and foreign present study situation of MWS for LED wafers and for several key control technology have been studied. The development trend of numerical control multi wire slice technology is described. According to the project request, the theory foundation has been deeply researched on control system of MWS for LED wafer. The project tasks undertaken by author are introduced. And the main contents of this dissertation are given.
(2) Through the analysis of the traditional MWS mechanical structure and principle,the reasons that cutting efficiency of traditional MWS cutting LED material with high speed is low and cutting quality is not stable is got. According to the disadvantages of traditional MWS, the diamond wire+cooling fluid cutting model alternative steel wire+mortar model; the problem of free abrasive is solved.A swinging mechanical structure is designed; the fault that traditional MWS p value is not constant is solved. At the same time, automatic winding institutions and row wire institutions of the pay-off side are increased, and LED MWS mechanical institutions is got. The key and difficult problem of LED MWS is analyzed.
(3) To deal with the low precision and instability of nonlinear interference with normal control in the LED MWS, a disturbance observer linear H-infinity control algorithm is proposed.This algorithm take full account of error that caused by dynamics disturbances of subsystem model and unmodeled dynamics disturbances as well as the uncertainty of the parameters and structure of the LED MWS, and the solution is given. The stability of linear H-infinity control systems is studied, and under the conditions of the system stability, the analytical solution of dynamic equation is obtained by using the method of Chelosky decomposition. The system response speed is improved significantly. The experiment result of model machine illustrates that the system is undulating of tension small, stabilizes performance well and the break line ratio low.
(4) A detailed analysis of the control difficulty comes after mechanical structure improvement. According to its inherent characteristics, making full use of the advantages of fuzzy control strong robustness and iterative learning control high precision, a fuzzy iterative learning control method is proposed. The control method avoids defects of fuzzy control that steady precision is not high and the iterative learning control that is sensitive to the parameters changes. Through the contrast of fuzzy control and fuzzy iterative learning control the operation of the algorithm, the experiment results show that the fuzzy iterative learning control algorithm is effective.
(5) The automatic winding control requirements are analyzed after the change of machine structure and function. According to the system control requirements, the mainstream master-slave synchronous control algorithm was improved, a master-slave-position control algorithm is proposed. Compare with single master-slave control algorithm, master-slave-position control algorithm reduce the control grade and delay.It has the certain progressive significance. The limitations of master-slave-position control algorithm are analyzed, and through establishing a LED MWS mathematics model of the automatic winding, a kind of parallel differential coupled control algorithm is put forward. Its effectiveness is prooved. Parallel differential coupled control algorithm establish unified synchronous model of angular velocity and linear velocity for the system, absorbs the advantages of the adjacent cross coupling control and partial cross coupling control.In the contrast test with master-slave-position control algorithm, it prove that high control accuracy, fast response and the effect is good.
(6) People often set machine parameters like the linear speed, tension and speed of the work piece platform with experience. And once the parameters set, the cutting process remains unchanged. Relying on operation experience is the low automatic degree, and is not necessarily the best choice. Fixed cutting parameters may not have the highest efficiency.These parameters is very important to cutting efficiency. This article find out the quantitative relationship between cutting efficiency and above three parameters, and according to the relationship established the mathematical model. A time optimal control is put forward. The experiment results and data analysis show that the machine has high sliced precision and good stability.
This scientific project has developed a LED MWS product successfully. The complete machine performance has achieved the expected goal, this new product already put into market application in2011. In this paper, a few core control technology reserched in LED MWS has an important meaning for the NC MWS series equipment development. At the same time, it has important reference function and value for the industry related control topic research.
(1)阐述课题研究的背景和意义；依据项目开发要求,研究LED衬底基片多线切割机和与之相关的几项关键控制技术的国内外研究状况,论述数控多线切割技术的发展趋势；介绍LED衬底基片多线切割机控制技术基础；概括作者承担的科研任务以及本文主要研究内容。
(2)分析传统多线切割机的机械结构和原理,得出传统多线切割机高速切割LED材料时切割效率低和切割质量不稳定的原因。针对传统多线切割机的缺点,提出用金刚石线+冷却液切割模式替代钢丝线+砂浆模式,解决磨料游离的问题；设计一种摆动装置的机械结构,克服传统多线切割机p值不恒定的缺点。同时增加自动绕线机构和放线侧排线器,得到LED多线切割机机械机构。根据LED切片的要求和特点,设定LED多线切割机总体性能指标,设计系统整体与各个模块的电气和控制系统。分析了LED多线切割机控制的重点和难点
(3)针对常规张力控制在LED多线切割机系统中精度不高,非线性干扰系统不稳定的问题,提出干扰观测的线性H∞张力控制算法。该算法充分考虑系统中具有子系统模型的动态干扰和未建模动态干扰以及参数和结构的不确定性引起的误差,并给出解决方案。研究线性H∞控制系统的稳定性,并在系统稳定的条件下,利用Chelosky分解方法,得到动态方程的解,大幅提高系统响应速度。样机的实验结果表明该系统具有系统张力波动小,稳定性能好,断线率低的特点。
(4)分析机械结构改进后出现的多轴同步控制难点,根据其固有的特点,充分利用模糊控制鲁棒性强和迭代学习控制精度高的优点,同时避免模糊控制稳态精度不高,迭代学习控制对参数变化敏感的缺陷,提出模糊迭代学习控制方法。通过实验对比了模糊控制和模糊迭代学习控制算法的运行结果,证明模糊迭代学习控制算法的有效性。
(5)详尽分析机器结构和功能发生变化之后的自动绕线控制要求。根据系统控制要求,对主流的主从同步控制算法进行改进,得到主从-位置控制算法。相对单一的主从控制算法,主从-位置控制算法减少了控制层次,缩小延时,有一定的进步意义。针对主从-位置算法的局限性,建立LED多线切割机自动绕线的数学模型,提出一种并联差分耦合控制算法,并对其有效性进行证明。并联差分耦合控制算法建立系统线速度同步和角速度同步的统一模型,综合相邻交叉耦合控制和偏交叉耦合控制的优点；在与主从-位置控制算法的对比试验中,控制精度高,响应速度快,效果良好。
(6)传统多线切割机往往凭借经验设定多线切割机的系统线速度、张力以及工件台速度等参数,且参数一旦设定,整个切割过程中保持不变。依赖经验的操作自动化程度低,且不一定是最佳选择,切割参数固定不变未必效率最高。通过试验找出上述三项参数对于切割效率的定量关系,并根据其关系建立数学模型,提出切割时间最优控制。试验对比证明该控制算法能够提高生产效率,且本文的试验结果和控制方法对传统多线切割机同样有效。通过切片试验结果和数据对比分析,表明整机具有切片精度高,稳定性好的特点。
本课题成功开发一款LED多线切割机产品,整机性能指标达到预期目标,该新产品已于2011年投入市场应用。本文研究的LED多线切割机的几项核心控制技术,对数控多线切割机系列化装备的研制具有重要意义,同时对工业领域相关控制课题的研究具有重要的借鉴作用和参考价值。
Swing type multi-wire saw (MWS) for LED substrate is the special equipment in the LED wafer manufacturing process in semiconductor lighting industry. The quality of the substrate sliced sheet direct impact on LED subsequent processing step. The cutting object of traditional MWS is silicon wafer and crystal with Moh's hardness about5(Moh's hardness of diamond is10). LED substrate mainly uses the sapphire and silicon carbide. The two kinds of material in more than nine's hardness, but due to its high hardness and heavy brittle, there are some problems in the precision machining course. Traditional MWS cutting efficiency is low, even cut motionless and it must use special LED MWS. LED MWS is monopolized by Japanese and Swiss enterprises, and becomes a development bottleneck that constrains our country LED industry. LED MWS have great differences and ascend than traditional MWS in the system function structure, control strategy, automation degree and so on several aspects. Traditional MWS as reference to more contrast, LED MWS key technical difficulties in the process of project research as the main line, LED MWS NC system is further research.
(1) The background and meaning of subject research are expounded. The domestic and foreign present study situation of MWS for LED wafers and for several key control technology have been studied. The development trend of numerical control multi wire slice technology is described. According to the project request, the theory foundation has been deeply researched on control system of MWS for LED wafer. The project tasks undertaken by author are introduced. And the main contents of this dissertation are given.
(2) Through the analysis of the traditional MWS mechanical structure and principle,the reasons that cutting efficiency of traditional MWS cutting LED material with high speed is low and cutting quality is not stable is got. According to the disadvantages of traditional MWS, the diamond wire+cooling fluid cutting model alternative steel wire+mortar model; the problem of free abrasive is solved.A swinging mechanical structure is designed; the fault that traditional MWS p value is not constant is solved. At the same time, automatic winding institutions and row wire institutions of the pay-off side are increased, and LED MWS mechanical institutions is got. The key and difficult problem of LED MWS is analyzed.
(3) To deal with the low precision and instability of nonlinear interference with normal control in the LED MWS, a disturbance observer linear H-infinity control algorithm is proposed.This algorithm take full account of error that caused by dynamics disturbances of subsystem model and unmodeled dynamics disturbances as well as the uncertainty of the parameters and structure of the LED MWS, and the solution is given. The stability of linear H-infinity control systems is studied, and under the conditions of the system stability, the analytical solution of dynamic equation is obtained by using the method of Chelosky decomposition. The system response speed is improved significantly. The experiment result of model machine illustrates that the system is undulating of tension small, stabilizes performance well and the break line ratio low.
(4) A detailed analysis of the control difficulty comes after mechanical structure improvement. According to its inherent characteristics, making full use of the advantages of fuzzy control strong robustness and iterative learning control high precision, a fuzzy iterative learning control method is proposed. The control method avoids defects of fuzzy control that steady precision is not high and the iterative learning control that is sensitive to the parameters changes. Through the contrast of fuzzy control and fuzzy iterative learning control the operation of the algorithm, the experiment results show that the fuzzy iterative learning control algorithm is effective.
(5) The automatic winding control requirements are analyzed after the change of machine structure and function. According to the system control requirements, the mainstream master-slave synchronous control algorithm was improved, a master-slave-position control algorithm is proposed. Compare with single master-slave control algorithm, master-slave-position control algorithm reduce the control grade and delay.It has the certain progressive significance. The limitations of master-slave-position control algorithm are analyzed, and through establishing a LED MWS mathematics model of the automatic winding, a kind of parallel differential coupled control algorithm is put forward. Its effectiveness is prooved. Parallel differential coupled control algorithm establish unified synchronous model of angular velocity and linear velocity for the system, absorbs the advantages of the adjacent cross coupling control and partial cross coupling control.In the contrast test with master-slave-position control algorithm, it prove that high control accuracy, fast response and the effect is good.
(6) People often set machine parameters like the linear speed, tension and speed of the work piece platform with experience. And once the parameters set, the cutting process remains unchanged. Relying on operation experience is the low automatic degree, and is not necessarily the best choice. Fixed cutting parameters may not have the highest efficiency.These parameters is very important to cutting efficiency. This article find out the quantitative relationship between cutting efficiency and above three parameters, and according to the relationship established the mathematical model. A time optimal control is put forward. The experiment results and data analysis show that the machine has high sliced precision and good stability.
This scientific project has developed a LED MWS product successfully. The complete machine performance has achieved the expected goal, this new product already put into market application in2011. In this paper, a few core control technology reserched in LED MWS has an important meaning for the NC MWS series equipment development. At the same time, it has important reference function and value for the industry related control topic research.
引文
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