基于超声辐射力及力矩的非接触型微装配关键技术研究
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摘要
微机电系统(MEMS)作为在国防建设和国民经济等相关领域具有广阔应用前景的一类光机电一体化高新技术产品,经过30多年的发展历程,已从原先注重徽构件或单一功能部件的生产向多部件、多结构和多功能的混合复杂系统集成化方向迈进,其进一步发展必须借助微装配技术的进步和应用。特别是面对微机电系统应用对象尺度的微型化、制造技术追求高深宽比的三维化以及制造工艺和材料的多样化等所带来的诸多挑战,微装配技术更加体现出其重要性和迫切性。因此,探索新理论、新机理并发展这种技术,是目前微机电系统这个新兴技术领域内一个最基础的、关键的热点研究课题。
根据微装配的技术特点,一种对微构件无损的非接触装配技术是当前研究和发展的主流方向,而超声波作为一种机械波,其力学效应特性在微颗粒的俘获、聚集及分拣等方面已证实了较好的应用潜力,显示出诸多的优点。因此,以超声辐射力及力矩作为驱动力源,发展一种非接触型微装配技术,必将有其自身的技术优势。但是,目前超声辐射力及辐射力矩的理论研究还局限于理想声场和规则散射体,针对微装配应用的相关理论研究还少有涉足,并且现有超声辐射力的各种应用都是在稳态和定性的基础上进行,而微装配过程中的微构件准备、定位、位姿调整及目标位置释放等都必须达到精确的定量控制效果,当前的相关技术和装置还远未能满足微装配技术的需求。为此,根据微机电系统的特点,本学位论文结合国家高技术研究发展计划项目“基于超声辐射力的微纳构件三维遥操纵关键技术研究(No.2006AA042329)”和浙江省自然科学基金重点项目“基于声操纵的三维自动微装配理论与实践研究(No.Z1110393)”,提出开展基于超声辐射力及力矩的非接触型徽装配关键技术的研究,通过对微装配各单元步骤的力学模型、装配环境下超声辐射力产生机理及影响因素的理论分析及实验研究,利用超声相控阵技术柔性和精确地合成满足各装配单元步骤所需的超声辐射力场,构建一种多模式非接触遥驱动力源,实现固壁面上微构件的拾取、空间大范围定量传输、位姿调整及目标位置释放等微装配单元技术,以应用于微机电系统的集成装配中,为微机电系统研究和制造提供一种的共性技术手段。具体的研究内容和创新点体现在：
第一章,通过分析微装配技术在微机电系统等领域的作用与地位,说明开展微装配技术研究的重要意义,并在阐述微装配技术国内外研究现状及其发展趋势的基础上,提出了基于超声辐射力和力矩的微装配技术。同时,综述了超声辐射力及力矩理论和应用的研究成果,评述了超声辐射力及力矩应用于微装配技术中的可行性和先进性以及有待解决的问题,明确了本文研究方向,并对各章节的研究内容进行了安排。
第二章,为有效实施微构件准备和释放于目标位置这两个微装配的单元步骤,本章开展基于超声辐射力的刚性壁面上微构件拾取和目标位置释放技术的研究。系统研究近壁面刚性球形Reyleigh散射体在多束平面入射波合成的声场中所受辐射力的理论模型,并使用两束交叉分布的超声波实现固壁面上微构件的拾取与目标位置的释放。同时,以不同尺寸和材料的微构件为对象进行实验研究,证实了上述拾取与释放技术的有效性。
第三章,提出了一种“逐级递推全程定位”的微构件大范围定量传输方法。在精确合成声场的基础上,通过控制超声信号的相位动态调整声势阱的空间分布,带动俘获于声势阱内的微构件以不同速度和轨迹的逐级递推式运动,实现微构件大范围定量传输。理论数值仿真分析、水听器实测合成声场以及对50μm直径硅球的传输实验都证实了该方法的可行性和有效性。同时,还对实验过程中硅球运动状态及其影响因素进行分析。
第四章,针对微构件大范围传输过程中出现位置波动及可能存在脱离声势阱束缚的现象,对微构件传输的稳定性进行了系统地研究。在分析声流现象对微构件传输性能影响的基础上,建立了声势阱特性与微构件俘获和传输稳定性的关系,提出了一种声势阱综合性能定量评价方法,给出了理想声势阱所需满足的基本条件。同时,还利用该方法对几种不同类型辐射力场中的声势阱特性进行了评价,并对第三章提出的微构件传输方法进行了优化。实验结果表明优化后声场内微构件大范围传输过程中的波动现象得到了明显地抑制。
第五章,提出了一种基于辐射力矩的微构件二维位姿调整方法。在建立长条形微构件在合成声场中所受辐射力及力矩理论模型的同时,将环形分布的超声换能器阵列分组构成子阵列,利用其中一个子阵列合成基础声场俘获微构件的基础上,通过不同子阵列间的顺序交替切换激励产生声场旋转,以驱动微构件的旋转运动,从而实现微构件二维位姿调整。开展了基于超声辐射力矩的微构件姿态调整实验研究,取得了预期的位姿调整效果,并明确了通过增加换能器阵列数可有效提高位姿调整的分辨率。
第六章,在确定系统功能目标及设计系统总体方案的基础上,重点开发了多通道程控超声信号发生器、线性功率放大器、数据采集处理卡和嵌入式CMOS相机等功能模块,并采用虚拟仪器体系结构和模块化的设计策略,集成开发了一套基于超声辐射力及力矩的微装配实验系统。同时,还利用该系统开展了相关实验研究,证实了本文方法的可行性和有效性。
第七章,总结论文取得的成果和创新之处,并对以后的工作进行展望。
The Micro Electro-Mechanical System (MEMS) as a kind of optical-electronic-machinery integrated high technology has broad application prospects in the related fields of national defense and economy. After30years of development, MEMS has forward to the integration of the multi-functional complex hybrid system with multi-component and multi-structure from focusing on the production of micro components or a single feature in the past. The further development of this technology should rely on the improvement and application of the micro-assembly technology. Especially, with many challenges due to the dimension miniaturization of the application objects, the three-dimensional manufacture with high depth-to-width ratio, the diversity of manufacture process and material in MEMS, the micro-assembly technology becomes even more important and urgent. Hence, exploring new theories and mechanisms to develop this technology is the most basic and key research subject in MEMS area at present.
According to the technical characteristics of the micro-assembly, a kind of non-destructive and noncontact micro-assembly technology should be the main trend in the current research and development. As a kind of mechanical wave, ultrasonic has shown good application potential and advantage in micro-particles trapping, agglomeration and separation by its characteristics of mechanical effects. Hence, using acoustic radiation force and torque as the driving force to develop a noncontact micro-assembly technology should has its own technical superiority. However, the theoretic research of this technology is still limited to ideal sound field and regular scatters, and there is little theoretical model for micro-assembly applications. Moreover, the existing application of acoustic radiation force and torque is based on the steady state and qualitative analysis. And because precise and quantitative control should be satisfied in preparing, locating, posture adjusting and releasing of the micro-component during micro-assembling process, the current related methodology and application failed to meet the needs of micro-assembly technology. Therefore, considering the characteristics of MEMS, the key technologies of non-contact micro-assembly based on acoustic radiation force and torque were studied in this dissertation, which is supported by National High Technology Research and Development Program " Research on Key technologies of3D tele-manipulation for micro and nano components based on ultrasonic radiation force (No.2006AA04Z329)" and Key Project of Natural Science Foundation of Zhejiang Province "Research on theory and application of automatic3D micro-assembly technology based on acoustic manipulation (No. Z1110393)". The mechanical model of the unit procedure in micro-assembly, the mechanism and influencing factors of the acoustic radiation force under assembling condition have been theoretically analyzed and experimentally studied. A multi-mode noncontact tele-driving source has been built by using ultrasonic phased array to flexibly and precisely synthesize the acoustic radiation force field which meets the needs of each unit procedure in micro-assembling process. The technology of detaching the micro-components on the rigid surface, quantitative transportation at a long range, adjusting the posture of the micro-components and releasing to the target position have been realized. This new technology can be applied in the micro-assembly of MEMS and provide a general solution for the research and manufacturing of MEMS. The detailed contents and innovative points of this dissertation are presented as below:
In chapter one, the significance to conduct the research on the micro-assembly technology was described by discussing its role and status in MEMS and other fields. And through elaborating the present research status and development trends of micro-assembly technology at home and abroad, the technology of micro-assembly based on acoustic radiation force and torque was proposed. Meanwhile, the achievements of the theory and the applications of acoustic radiation force and torque were summarized to illustrate the feasibility and advantage of applying them to micro-assembly. And its problems were observed and the research direction was pointed out.
In chapter two, the technologies of detaching the micro-components on a rigid surface and releasing it to the target position were studied in order to realize the unit procedures of preparing and releasing the micro-component. On the basis of the systemic study on the theoretical model of the acoustic radiation force acting on the rigid spherical Reyleigh scatter near a rigid surface in the sound field which was synthesized by several incident wave, detaching the particle from the surface and releasing it to the target position were realized by two ultrasonic wave with crossed wave vectors.
In chapter three, the methodology of controllable and quantitative transporting micro-component at a long range was proposed. On the basis of precisely synthesizing the sound field, the micro-component trapped at the acoustic potential well can be transported at different velocity and trajectories by changing the phase of the ultrasonic wave to shift the distribution of the sound field. The feasibility and applicability of this method has been verified by numerical simulation of the theory, measurements of the sound field with a hydrophone and the results of transporting silica bead with50μm radius. Meanwhile, the status of the bead in the transporting process and the influence on it was analyzed.
In chapter four, the stability of the micro-component in the long range transporting process was systematically studied aiming at the possible position fluctuation and the phenomenon of slipping off during the transporting course. On the basis of analyzing the influence of acoustic streaming on the performance of micro-component transporting, the relationship between the characteristics of the acoustic potential well and the stability of the transporting was developed. A method to quantitatively evaluate the performance of the acoustic potential well was proposed and the basis properties of an ideal acoustic potential well were also presented. Meanwhile, the characteristics of the acoustic potential well in several different sound field was analyzed using this method and the micro-component transporting method proposed in chapter three was optimized. The experimental results illustrate that the position fluctuation of the micro-component in the transporting process has been obviously suppressed after optimization.
In chapter five, a stepless method to adjust the two-dimensional posture of the micro-component was proposed. While the theory on the acoustic radiation force and torque of the long-stripe shape micro-component in the sound field was studied, two-dimensional posture adjusting was realized using circular transducer array which was grouped to several sub-arrays. On the basis of trapping the micro-component in the sound field synthesized by one group, the sound field was rotated by alternately using different sub-arrays, and the micro-component was rotated with the sound field. The experiment on posture adjusting was conducted and the anticipated effect was achieved. And the experiment results showed that the accuracy of the posture adjusting can be improved by adding more transducers in the circular array.
In chapter six, on the basis of confirming the function target and entire design of the system, the functional modules of the multi-channel ultrasonic signal generator, the linear power amplifier, the data acquisition card and the CMOS camera were developed, and an experiment setup is established using the architecture of the virtual instrument and the strategy of modular design. Meanwhile, the experiment was performed to verify the feasibility and applicability of the methodology proposed in this dissertation.
In chapter seven, the research results and the innovative points of this dissertation were summarized, and the future research works were also forecasted.
根据微装配的技术特点,一种对微构件无损的非接触装配技术是当前研究和发展的主流方向,而超声波作为一种机械波,其力学效应特性在微颗粒的俘获、聚集及分拣等方面已证实了较好的应用潜力,显示出诸多的优点。因此,以超声辐射力及力矩作为驱动力源,发展一种非接触型微装配技术,必将有其自身的技术优势。但是,目前超声辐射力及辐射力矩的理论研究还局限于理想声场和规则散射体,针对微装配应用的相关理论研究还少有涉足,并且现有超声辐射力的各种应用都是在稳态和定性的基础上进行,而微装配过程中的微构件准备、定位、位姿调整及目标位置释放等都必须达到精确的定量控制效果,当前的相关技术和装置还远未能满足微装配技术的需求。为此,根据微机电系统的特点,本学位论文结合国家高技术研究发展计划项目“基于超声辐射力的微纳构件三维遥操纵关键技术研究(No.2006AA042329)”和浙江省自然科学基金重点项目“基于声操纵的三维自动微装配理论与实践研究(No.Z1110393)”,提出开展基于超声辐射力及力矩的非接触型徽装配关键技术的研究,通过对微装配各单元步骤的力学模型、装配环境下超声辐射力产生机理及影响因素的理论分析及实验研究,利用超声相控阵技术柔性和精确地合成满足各装配单元步骤所需的超声辐射力场,构建一种多模式非接触遥驱动力源,实现固壁面上微构件的拾取、空间大范围定量传输、位姿调整及目标位置释放等微装配单元技术,以应用于微机电系统的集成装配中,为微机电系统研究和制造提供一种的共性技术手段。具体的研究内容和创新点体现在：
第一章,通过分析微装配技术在微机电系统等领域的作用与地位,说明开展微装配技术研究的重要意义,并在阐述微装配技术国内外研究现状及其发展趋势的基础上,提出了基于超声辐射力和力矩的微装配技术。同时,综述了超声辐射力及力矩理论和应用的研究成果,评述了超声辐射力及力矩应用于微装配技术中的可行性和先进性以及有待解决的问题,明确了本文研究方向,并对各章节的研究内容进行了安排。
第二章,为有效实施微构件准备和释放于目标位置这两个微装配的单元步骤,本章开展基于超声辐射力的刚性壁面上微构件拾取和目标位置释放技术的研究。系统研究近壁面刚性球形Reyleigh散射体在多束平面入射波合成的声场中所受辐射力的理论模型,并使用两束交叉分布的超声波实现固壁面上微构件的拾取与目标位置的释放。同时,以不同尺寸和材料的微构件为对象进行实验研究,证实了上述拾取与释放技术的有效性。
第三章,提出了一种“逐级递推全程定位”的微构件大范围定量传输方法。在精确合成声场的基础上,通过控制超声信号的相位动态调整声势阱的空间分布,带动俘获于声势阱内的微构件以不同速度和轨迹的逐级递推式运动,实现微构件大范围定量传输。理论数值仿真分析、水听器实测合成声场以及对50μm直径硅球的传输实验都证实了该方法的可行性和有效性。同时,还对实验过程中硅球运动状态及其影响因素进行分析。
第四章,针对微构件大范围传输过程中出现位置波动及可能存在脱离声势阱束缚的现象,对微构件传输的稳定性进行了系统地研究。在分析声流现象对微构件传输性能影响的基础上,建立了声势阱特性与微构件俘获和传输稳定性的关系,提出了一种声势阱综合性能定量评价方法,给出了理想声势阱所需满足的基本条件。同时,还利用该方法对几种不同类型辐射力场中的声势阱特性进行了评价,并对第三章提出的微构件传输方法进行了优化。实验结果表明优化后声场内微构件大范围传输过程中的波动现象得到了明显地抑制。
第五章,提出了一种基于辐射力矩的微构件二维位姿调整方法。在建立长条形微构件在合成声场中所受辐射力及力矩理论模型的同时,将环形分布的超声换能器阵列分组构成子阵列,利用其中一个子阵列合成基础声场俘获微构件的基础上,通过不同子阵列间的顺序交替切换激励产生声场旋转,以驱动微构件的旋转运动,从而实现微构件二维位姿调整。开展了基于超声辐射力矩的微构件姿态调整实验研究,取得了预期的位姿调整效果,并明确了通过增加换能器阵列数可有效提高位姿调整的分辨率。
第六章,在确定系统功能目标及设计系统总体方案的基础上,重点开发了多通道程控超声信号发生器、线性功率放大器、数据采集处理卡和嵌入式CMOS相机等功能模块,并采用虚拟仪器体系结构和模块化的设计策略,集成开发了一套基于超声辐射力及力矩的微装配实验系统。同时,还利用该系统开展了相关实验研究,证实了本文方法的可行性和有效性。
第七章,总结论文取得的成果和创新之处,并对以后的工作进行展望。
The Micro Electro-Mechanical System (MEMS) as a kind of optical-electronic-machinery integrated high technology has broad application prospects in the related fields of national defense and economy. After30years of development, MEMS has forward to the integration of the multi-functional complex hybrid system with multi-component and multi-structure from focusing on the production of micro components or a single feature in the past. The further development of this technology should rely on the improvement and application of the micro-assembly technology. Especially, with many challenges due to the dimension miniaturization of the application objects, the three-dimensional manufacture with high depth-to-width ratio, the diversity of manufacture process and material in MEMS, the micro-assembly technology becomes even more important and urgent. Hence, exploring new theories and mechanisms to develop this technology is the most basic and key research subject in MEMS area at present.
According to the technical characteristics of the micro-assembly, a kind of non-destructive and noncontact micro-assembly technology should be the main trend in the current research and development. As a kind of mechanical wave, ultrasonic has shown good application potential and advantage in micro-particles trapping, agglomeration and separation by its characteristics of mechanical effects. Hence, using acoustic radiation force and torque as the driving force to develop a noncontact micro-assembly technology should has its own technical superiority. However, the theoretic research of this technology is still limited to ideal sound field and regular scatters, and there is little theoretical model for micro-assembly applications. Moreover, the existing application of acoustic radiation force and torque is based on the steady state and qualitative analysis. And because precise and quantitative control should be satisfied in preparing, locating, posture adjusting and releasing of the micro-component during micro-assembling process, the current related methodology and application failed to meet the needs of micro-assembly technology. Therefore, considering the characteristics of MEMS, the key technologies of non-contact micro-assembly based on acoustic radiation force and torque were studied in this dissertation, which is supported by National High Technology Research and Development Program " Research on Key technologies of3D tele-manipulation for micro and nano components based on ultrasonic radiation force (No.2006AA04Z329)" and Key Project of Natural Science Foundation of Zhejiang Province "Research on theory and application of automatic3D micro-assembly technology based on acoustic manipulation (No. Z1110393)". The mechanical model of the unit procedure in micro-assembly, the mechanism and influencing factors of the acoustic radiation force under assembling condition have been theoretically analyzed and experimentally studied. A multi-mode noncontact tele-driving source has been built by using ultrasonic phased array to flexibly and precisely synthesize the acoustic radiation force field which meets the needs of each unit procedure in micro-assembling process. The technology of detaching the micro-components on the rigid surface, quantitative transportation at a long range, adjusting the posture of the micro-components and releasing to the target position have been realized. This new technology can be applied in the micro-assembly of MEMS and provide a general solution for the research and manufacturing of MEMS. The detailed contents and innovative points of this dissertation are presented as below:
In chapter one, the significance to conduct the research on the micro-assembly technology was described by discussing its role and status in MEMS and other fields. And through elaborating the present research status and development trends of micro-assembly technology at home and abroad, the technology of micro-assembly based on acoustic radiation force and torque was proposed. Meanwhile, the achievements of the theory and the applications of acoustic radiation force and torque were summarized to illustrate the feasibility and advantage of applying them to micro-assembly. And its problems were observed and the research direction was pointed out.
In chapter two, the technologies of detaching the micro-components on a rigid surface and releasing it to the target position were studied in order to realize the unit procedures of preparing and releasing the micro-component. On the basis of the systemic study on the theoretical model of the acoustic radiation force acting on the rigid spherical Reyleigh scatter near a rigid surface in the sound field which was synthesized by several incident wave, detaching the particle from the surface and releasing it to the target position were realized by two ultrasonic wave with crossed wave vectors.
In chapter three, the methodology of controllable and quantitative transporting micro-component at a long range was proposed. On the basis of precisely synthesizing the sound field, the micro-component trapped at the acoustic potential well can be transported at different velocity and trajectories by changing the phase of the ultrasonic wave to shift the distribution of the sound field. The feasibility and applicability of this method has been verified by numerical simulation of the theory, measurements of the sound field with a hydrophone and the results of transporting silica bead with50μm radius. Meanwhile, the status of the bead in the transporting process and the influence on it was analyzed.
In chapter four, the stability of the micro-component in the long range transporting process was systematically studied aiming at the possible position fluctuation and the phenomenon of slipping off during the transporting course. On the basis of analyzing the influence of acoustic streaming on the performance of micro-component transporting, the relationship between the characteristics of the acoustic potential well and the stability of the transporting was developed. A method to quantitatively evaluate the performance of the acoustic potential well was proposed and the basis properties of an ideal acoustic potential well were also presented. Meanwhile, the characteristics of the acoustic potential well in several different sound field was analyzed using this method and the micro-component transporting method proposed in chapter three was optimized. The experimental results illustrate that the position fluctuation of the micro-component in the transporting process has been obviously suppressed after optimization.
In chapter five, a stepless method to adjust the two-dimensional posture of the micro-component was proposed. While the theory on the acoustic radiation force and torque of the long-stripe shape micro-component in the sound field was studied, two-dimensional posture adjusting was realized using circular transducer array which was grouped to several sub-arrays. On the basis of trapping the micro-component in the sound field synthesized by one group, the sound field was rotated by alternately using different sub-arrays, and the micro-component was rotated with the sound field. The experiment on posture adjusting was conducted and the anticipated effect was achieved. And the experiment results showed that the accuracy of the posture adjusting can be improved by adding more transducers in the circular array.
In chapter six, on the basis of confirming the function target and entire design of the system, the functional modules of the multi-channel ultrasonic signal generator, the linear power amplifier, the data acquisition card and the CMOS camera were developed, and an experiment setup is established using the architecture of the virtual instrument and the strategy of modular design. Meanwhile, the experiment was performed to verify the feasibility and applicability of the methodology proposed in this dissertation.
In chapter seven, the research results and the innovative points of this dissertation were summarized, and the future research works were also forecasted.
引文
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