Nd:YAG晶体及其加工技术的研究
摘要
激光晶体材料Nd:YAG在民用、军事、激光技术等诸多领域有着极其广泛而特殊的用途,科学技术的飞速发展对硬脆光学晶体材料的生长制备、加工技术等都提出了越来越高的要求。
本文在介绍激光晶体材料的应用与发展的同时,重点分析了Nd:YAG光学晶体材料的结构与性能、原料制备(原料烧结、称量配料、混料和压块成型等)及提拉法生长晶体的工艺过程。另外,在分析国内外脆性材料超精密加工技术及其应用领域的基础上,较为深入地研究了激光晶体Nd:YAG加工的全过程,优化了加工中各项工艺参数,改善了超精密加工表面质量。
本文研究内容也将对激光晶体材料的生长制备、超精密加工及其应用技术具有重要的指导意义。
Lasers crystal materials Nd: YAG have very extensive and special use in many field, such as civil,military,laser technology. Fast development of science and technology puts forward stricter request to craft of processing and growth preparation of rigid-handing crystal materials.
When the paper introduced the application and development of rigid-handing crystal materials, the crystals structure and function, raw material preparation and Czochralski grow method were analysised. In addition,the paper, based on analyzing and studying domestic and international rigid-harding crystal materials cutting techniques and the crystal materials' application areas, studied thoroughly the craft of whole process about Nd: YAG crystal materials. Various craft parameters were optimized in the process,and the super precise process surface quality is improved.
The research content of this paper will also have important instruction meaning for the lasers crystal materials' growth preparation, ultra-precision processing and application.
本文在介绍激光晶体材料的应用与发展的同时,重点分析了Nd:YAG光学晶体材料的结构与性能、原料制备(原料烧结、称量配料、混料和压块成型等)及提拉法生长晶体的工艺过程。另外,在分析国内外脆性材料超精密加工技术及其应用领域的基础上,较为深入地研究了激光晶体Nd:YAG加工的全过程,优化了加工中各项工艺参数,改善了超精密加工表面质量。
本文研究内容也将对激光晶体材料的生长制备、超精密加工及其应用技术具有重要的指导意义。
Lasers crystal materials Nd: YAG have very extensive and special use in many field, such as civil,military,laser technology. Fast development of science and technology puts forward stricter request to craft of processing and growth preparation of rigid-handing crystal materials.
When the paper introduced the application and development of rigid-handing crystal materials, the crystals structure and function, raw material preparation and Czochralski grow method were analysised. In addition,the paper, based on analyzing and studying domestic and international rigid-harding crystal materials cutting techniques and the crystal materials' application areas, studied thoroughly the craft of whole process about Nd: YAG crystal materials. Various craft parameters were optimized in the process,and the super precise process surface quality is improved.
The research content of this paper will also have important instruction meaning for the lasers crystal materials' growth preparation, ultra-precision processing and application.
引文
[1]W.克希耐尔著,孙文等译,《固体激光工程》,科学出版社.2003,40-43
[2]王立鼎,崔天宏,吕琼莹,微型机械研究的现状及展望.科技导报.1993,(12):42-43
[3]王德民译,发光硅元件研制成功,世界科技译报.1994,472-475
[4]袁哲俊,王先逵,袁巨龙等.精密和超精密加工技术.北京:机械工业出版社,1999,66-68
[5]Ball M J,et al.Electrolytically assisted" ductile" mode diamond grinding of BK7 and SF10 optical glasses.Proc.SPIE,1991,1573:30-38
[6]Ohmon H,et al.Analysis of mirror surface generation of hard and brillle materials by ELID grinding with superfine grain metallic bond wheels.Annals of the CIRP,1995,44(1):45-49
[7]刘中杰.ELID磨削技术及其在光学加工中的应用.应用光学.1997,18(1):30-33
[8]Kordonski Wm I Adaptive Structures Based on Magnetorheological Fluids.Proc 3rd Int Conf,Adaptive Structed Wada Natori and Breitbach,San Diego,CA,1992,13-17
[9]Prokhorov I V,Kordonsky W I,Gleb L K,Gorodkin G R,Levin M L.New High-precision Magnetorheological Instrument-Based Method of polishing Optics.OSA OF & T Workshop Digest,1992,24:134-138
[10]Golini D,Pollicove H,Platt G,Jacobs S,Kordonski W.Computer control makes asphere production run of the mill.Laser Focus World,1995,83-86
[11]Jacobs S D,Golini D,Hsu Y,Puchebner B E,Strafford D,Kordonski Wm I,ProKhovrov I V,Fess E,Pietrowski D,Kordonski V M.Magnetorheological finishing:a deterministic process for optics manufacturing.Proc SPIE,1995,2576:372-376
[12]S.D.Jacobs,FuqianYang,E.M.Fess,J.B.Feingold,B.E Gillman,W.I.KordonSki,H.Edwards,and D.Golini.Magnet-torheological Finishing of IR Materials.Proc SPIE,1997,3134:258-269
[13]Steigermald J.M.,Murarka S.P.,Cutmann R.J Chemical mechanical planarization of microelectronic materials,A Wiley-Interscience Publication,John Wiley & sons,Inc.,New York,USA,1996:324-326
[14]Kaufman F.B.,Thompson D.B.,Broabie R.E.et al.Chemical-mechanical polishing for fabricating patterned W metal features as chip interconnects.1.Electrochem.Soc.,1991,138(11):3460-3464
[15]Sivaram S.,Bath H.,Leggett R.et al,Planarizing interlevel dielectrics by chemical-mechanical polishing,Solid State Technology,1992,5:87-91
[16]Huo Yu-jing,et al.Review on Development of Laser Sources in Pulsed Rangefinder.Laser and Infrared,Vol.32,No.3
[17]张承栓,国外军用激光仪器手册,兵器工业出版社.1989,50-51
[18]刘伟仁,钱龙生,余锦,LD泉浦的紧贴式产业化固体绿激光器的研究,光学精密工程.1999,36-38
[19]杜惠茹,Q开关Nd:YAG激光治疗额部褐青色痣疗效分析,中国美容医学.2003,12,(6):581-583
[20]王永贤,Q开关Nd:YAG激光不同波长治疗面部毛细血管扩张疗效比较,中国美容医学.2003,12,(3).253-255
[21]陈熙,调Q开关Nd:YAG染料700nm激光治疗雀斑的临床效果观察[刊,中],福建医药杂志.2003,22-27
[22]杨育成,Q开关钕:钇-铝石榴石激光治疗扁平疣的研究[刊,中],中国美容医学.2003,12,(3).256-257
[23]吴全林,Nd:YAG激光在面部美容皮肤整容及性病治疗中的应用[会,中],唐山医药.1994,12(3/4).32-33
[24]Laser skin resurfacing using a frequency-doubled Nd:YAG laser after topical application of an exogenous chromophore[会,英]Chryslain Sumian...(France)//Medical Applications of lasers in Dermatology,Cardiology,Ophthalmology,and Dentistry Ⅱ Meeting Date:09/08-09/12/98,Stockholm,Sweden.1998,2-10
[25]胡雪金,MZ型脉冲YAG激光治疗仪:99016546[成,中]1999,5-6
[26]Study on double Wavelength laser Equipments for cosmetic[会,英]/Yulan Zhang...(Changchun University of Science and Technology)//Conference on Optics in Health Care and Biomedical Optics:Diagnostics and Treatment,Oct 15-18,2002,Shanghai,China,2002,352-354
[27]Danielmeyer H G,Blatte M.Fluorescence quenching in Nd:YAG.Appl.Phys.,1973,1(6):269-274
[28]毛艳丽等.高浓度掺钦忆铝石榴石晶体的光谱与激光特性光学学报,21(10):1264-1266
[29]徐晓东等,提拉法与温梯法Yb:YAG晶体性能比较,人工晶体学报,2003,32(4):306-309
[30]吕茂钰编著光学零件制造(冷加工部分)北京机械工业出版社,1977,166-168
[31]张心德.光学技术.中文核心期刊纵览CJFD收录刊.1980,06,36-38
[32]张心德.光学技术.中文核心期刊纵览CJFD收录刊.1981,02,58-60
[33]Yin Y,Liu Z G,Wang X S et al..The epitaxial growth of wurtzite ZnO films on LiNbO_3(0001)substrates.Crystal Growth,2000,220:281-285
[34]Kulinich S A,Yamaki T,Bysakh Set al..Epitaxial LiNb_(0.5)Ta_(0.5)O_3 films on LiTaO_3 and LiNbO_3 substrates grown by thermal plasma.Crystal Growth,2003,247:408-418
[35]程得刚,吕反修,孙庆标等.强激光窗口和透镜材料氯化钾晶体的双层增透膜.人工晶体学报.1994,23(2):156-159
[36]Qing Zhang,Yoon S F,Zhgoon S et al..Study of diamond-like carbon film on LiNb_3.Thin Solid Films,2000,360:274-277
[37]Nakagawara O,Saeki M,Watanabe Metal..Epitaxially grown aluminum films with titanium intermediate layer on θ rotated Y-X LiNbO3 piezoelectric single crystal substrates.Crystal Growth,2003,249:497-501
[2]王立鼎,崔天宏,吕琼莹,微型机械研究的现状及展望.科技导报.1993,(12):42-43
[3]王德民译,发光硅元件研制成功,世界科技译报.1994,472-475
[4]袁哲俊,王先逵,袁巨龙等.精密和超精密加工技术.北京:机械工业出版社,1999,66-68
[5]Ball M J,et al.Electrolytically assisted" ductile" mode diamond grinding of BK7 and SF10 optical glasses.Proc.SPIE,1991,1573:30-38
[6]Ohmon H,et al.Analysis of mirror surface generation of hard and brillle materials by ELID grinding with superfine grain metallic bond wheels.Annals of the CIRP,1995,44(1):45-49
[7]刘中杰.ELID磨削技术及其在光学加工中的应用.应用光学.1997,18(1):30-33
[8]Kordonski Wm I Adaptive Structures Based on Magnetorheological Fluids.Proc 3rd Int Conf,Adaptive Structed Wada Natori and Breitbach,San Diego,CA,1992,13-17
[9]Prokhorov I V,Kordonsky W I,Gleb L K,Gorodkin G R,Levin M L.New High-precision Magnetorheological Instrument-Based Method of polishing Optics.OSA OF & T Workshop Digest,1992,24:134-138
[10]Golini D,Pollicove H,Platt G,Jacobs S,Kordonski W.Computer control makes asphere production run of the mill.Laser Focus World,1995,83-86
[11]Jacobs S D,Golini D,Hsu Y,Puchebner B E,Strafford D,Kordonski Wm I,ProKhovrov I V,Fess E,Pietrowski D,Kordonski V M.Magnetorheological finishing:a deterministic process for optics manufacturing.Proc SPIE,1995,2576:372-376
[12]S.D.Jacobs,FuqianYang,E.M.Fess,J.B.Feingold,B.E Gillman,W.I.KordonSki,H.Edwards,and D.Golini.Magnet-torheological Finishing of IR Materials.Proc SPIE,1997,3134:258-269
[13]Steigermald J.M.,Murarka S.P.,Cutmann R.J Chemical mechanical planarization of microelectronic materials,A Wiley-Interscience Publication,John Wiley & sons,Inc.,New York,USA,1996:324-326
[14]Kaufman F.B.,Thompson D.B.,Broabie R.E.et al.Chemical-mechanical polishing for fabricating patterned W metal features as chip interconnects.1.Electrochem.Soc.,1991,138(11):3460-3464
[15]Sivaram S.,Bath H.,Leggett R.et al,Planarizing interlevel dielectrics by chemical-mechanical polishing,Solid State Technology,1992,5:87-91
[16]Huo Yu-jing,et al.Review on Development of Laser Sources in Pulsed Rangefinder.Laser and Infrared,Vol.32,No.3
[17]张承栓,国外军用激光仪器手册,兵器工业出版社.1989,50-51
[18]刘伟仁,钱龙生,余锦,LD泉浦的紧贴式产业化固体绿激光器的研究,光学精密工程.1999,36-38
[19]杜惠茹,Q开关Nd:YAG激光治疗额部褐青色痣疗效分析,中国美容医学.2003,12,(6):581-583
[20]王永贤,Q开关Nd:YAG激光不同波长治疗面部毛细血管扩张疗效比较,中国美容医学.2003,12,(3).253-255
[21]陈熙,调Q开关Nd:YAG染料700nm激光治疗雀斑的临床效果观察[刊,中],福建医药杂志.2003,22-27
[22]杨育成,Q开关钕:钇-铝石榴石激光治疗扁平疣的研究[刊,中],中国美容医学.2003,12,(3).256-257
[23]吴全林,Nd:YAG激光在面部美容皮肤整容及性病治疗中的应用[会,中],唐山医药.1994,12(3/4).32-33
[24]Laser skin resurfacing using a frequency-doubled Nd:YAG laser after topical application of an exogenous chromophore[会,英]Chryslain Sumian...(France)//Medical Applications of lasers in Dermatology,Cardiology,Ophthalmology,and Dentistry Ⅱ Meeting Date:09/08-09/12/98,Stockholm,Sweden.1998,2-10
[25]胡雪金,MZ型脉冲YAG激光治疗仪:99016546[成,中]1999,5-6
[26]Study on double Wavelength laser Equipments for cosmetic[会,英]/Yulan Zhang...(Changchun University of Science and Technology)//Conference on Optics in Health Care and Biomedical Optics:Diagnostics and Treatment,Oct 15-18,2002,Shanghai,China,2002,352-354
[27]Danielmeyer H G,Blatte M.Fluorescence quenching in Nd:YAG.Appl.Phys.,1973,1(6):269-274
[28]毛艳丽等.高浓度掺钦忆铝石榴石晶体的光谱与激光特性光学学报,21(10):1264-1266
[29]徐晓东等,提拉法与温梯法Yb:YAG晶体性能比较,人工晶体学报,2003,32(4):306-309
[30]吕茂钰编著光学零件制造(冷加工部分)北京机械工业出版社,1977,166-168
[31]张心德.光学技术.中文核心期刊纵览CJFD收录刊.1980,06,36-38
[32]张心德.光学技术.中文核心期刊纵览CJFD收录刊.1981,02,58-60
[33]Yin Y,Liu Z G,Wang X S et al..The epitaxial growth of wurtzite ZnO films on LiNbO_3(0001)substrates.Crystal Growth,2000,220:281-285
[34]Kulinich S A,Yamaki T,Bysakh Set al..Epitaxial LiNb_(0.5)Ta_(0.5)O_3 films on LiTaO_3 and LiNbO_3 substrates grown by thermal plasma.Crystal Growth,2003,247:408-418
[35]程得刚,吕反修,孙庆标等.强激光窗口和透镜材料氯化钾晶体的双层增透膜.人工晶体学报.1994,23(2):156-159
[36]Qing Zhang,Yoon S F,Zhgoon S et al..Study of diamond-like carbon film on LiNb_3.Thin Solid Films,2000,360:274-277
[37]Nakagawara O,Saeki M,Watanabe Metal..Epitaxially grown aluminum films with titanium intermediate layer on θ rotated Y-X LiNbO3 piezoelectric single crystal substrates.Crystal Growth,2003,249:497-501