基于B轴控制的微小非球面超精密固定点车削与磨削研究
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摘要
近年来，随着高性能的非球面光学仪器在航空航天、光学、电子及军用武器装备等领域的广泛应用，对于微小口径非球面光学零件的需求越来越大，客户对其制造精度的要求越来越高，如何获得高性能的小型光学透镜成为光学系统设计和制造的重点和难点。而随着非球面注塑与玻璃模压技术的日益成熟，微小口径非球面光学零件的大批量生产也成为现实，对应模具的制造则主要依靠超精密车削和磨削技术。因此，对于微小口径非球面光学零件的超精密车削与磨削技术研究就具有更为重要的理论意义和现实指导意义。
首先对国内外非球面超精密加工技术及设备现状进行了综述性介绍，探讨了目前的微小口径超精密车削与磨削技术存在的问题，进而提出了相应的解决方法。接着在传统的两轴联动非球面超精密车削与磨削技术的基础上，研究了基于B轴控制的固定点金刚石车削技术和固定点磨削技术，建立了形状误差预测的数学模型，分析了对工件形状精度、表面粗糙度以及刀具磨损的影响规律。介绍了几种常见的非球面超精密加工的检测技术，探讨了接触式测头结合激光干涉测量原理进行在位测量的方法，针对接触式气浮在位测量原理，提出了一种消除接触式测量过程中测头曲率半径误差对形状精度测量影响的方法。然后分析了非球面车削与磨削加工中的误差来源，研究了X、Y轴方向偏心误差的影响。并探讨了各种误差补偿原理，包括X、Y轴方向的偏心误差补偿、刀具误差补偿，以及通过最小二乘算法的多项式拟合对形状误差的补偿。
针对红铜、铝、单晶硅和红外卤硫玻璃材料，进行平面、凹球面、凹小非球面和凸非球面的X、Z两轴联动车削与X、Z、B三轴联动车削工艺对比试验，着重研究和分析了两种车削加工方式对工件形状误差、表面加工质量、补偿工艺等方面的影响。研究了适用于固定点磨削的砂轮修整技术，介绍了砂轮与B轴的对心原理。针对碳化钨和单晶硅材料，进行凹球面、凹小非球面和凸非球面的X、Z两轴联动磨削与X、Z、B三轴联动磨削工艺对比试验，着重研究和分析了两种磨削加工方式对工件形状误差、表面加工质量、补偿工艺等方面的影响。通过上述实验研究，验证了基于B轴控制的三轴联动加工方式可以提高非球面工件的加工精度。
In recent years, with the applications of high-performance aspheric optical parts in theaerospace, optics, electronics, military weapons and more fields widely, the demanding ofmachining accuracy and ultra-precision machining technologies on micro aspherical opticalparts have increased acutely, and how to obtain high performance micro optical lens hasbecome the key and difficult point for optical system design and manufacturing.With themature of aspheric plastic and glass molding technology, the mass production of asphericaloptical components has been achieved, and the main manufacturing technologyies foraspherical mold are turning and grinding technology. Therefore, the studies on turning andgrinding technologyies for ultra-precision micro aspheric parts have more importanttheoretical and practical significance.
Firstly, the present aspherical ultra-precision machining technologies in domestic andinternational are introduced as well as the mainstream ultra-precision machines. The currentproblems on ultra-precision turning and grinding technology for micro aspherical optical partsare investigated in details, and corresponding solutions are put forward. Then, base on thetraditional two-axis aspheric ultra-precision turning and grinding technology, the three-axisfixed-point ultra-precision turning and grinding technologies based on controlling B axis areinvestigated, and the corresponding prediction mathmatical models of profile error wereestablished, as the influence laws of them on the form accuracy, surface quality, tool wearwere analyzed. Some common aspherical measuring technologies in ultra-precision machiningprocess are introduced, and the on machine measuring technology combining with a contactprobe and the laser interferometer measurement and the principle of probe calibration areinvestigated. The error sources in machining process and systematic errors in installation ofaspherical turning and grinding are analyzed deeply, including the tool centering error in X,Y-axis direction. The error compensation methods using in this paper are introduced, and theprinciple for machining position error and form error compensation and of compensation areemphasized to analyze, including X, Y axis centering error compensation, tool radiuscompensation, and form error compensation using polynomial fitting by leastsquare method.
Focusing on different materials such as copper, aluminum, silicon and sulfur halogeninfrared glass, some comparative turning experiments using X, Z axis and X, Z, B axis for flat,concave spherical, small concave and convex aspherical surface are carried on in the samemachining conditions, and the influences of the two machining modes on the workpiece form error, surface quality, compensation technique are investigaged and anaylzed deeply in theturning process. The corresponding grinding wheel dressing technology is researched, andsetting principle and method between B-axis and wheel is introduced. Focusing on tungstencarbide and silicon materials, some comparative grinding experiments using X, Z axis and X,Z, B axis for small concave spherical, small concave and convex aspherical surface are carriedon in the same machining conditions. And influences of the two machining modes on theworkpiece form error, surface quality, compensation technique are investigaged and analyzeddeeply in the grinding process. Finally, the three axes machining mode based on B axiscontrolling may improve machining accuracy of aspherical workpiece.
首先对国内外非球面超精密加工技术及设备现状进行了综述性介绍，探讨了目前的微小口径超精密车削与磨削技术存在的问题，进而提出了相应的解决方法。接着在传统的两轴联动非球面超精密车削与磨削技术的基础上，研究了基于B轴控制的固定点金刚石车削技术和固定点磨削技术，建立了形状误差预测的数学模型，分析了对工件形状精度、表面粗糙度以及刀具磨损的影响规律。介绍了几种常见的非球面超精密加工的检测技术，探讨了接触式测头结合激光干涉测量原理进行在位测量的方法，针对接触式气浮在位测量原理，提出了一种消除接触式测量过程中测头曲率半径误差对形状精度测量影响的方法。然后分析了非球面车削与磨削加工中的误差来源，研究了X、Y轴方向偏心误差的影响。并探讨了各种误差补偿原理，包括X、Y轴方向的偏心误差补偿、刀具误差补偿，以及通过最小二乘算法的多项式拟合对形状误差的补偿。
针对红铜、铝、单晶硅和红外卤硫玻璃材料，进行平面、凹球面、凹小非球面和凸非球面的X、Z两轴联动车削与X、Z、B三轴联动车削工艺对比试验，着重研究和分析了两种车削加工方式对工件形状误差、表面加工质量、补偿工艺等方面的影响。研究了适用于固定点磨削的砂轮修整技术，介绍了砂轮与B轴的对心原理。针对碳化钨和单晶硅材料，进行凹球面、凹小非球面和凸非球面的X、Z两轴联动磨削与X、Z、B三轴联动磨削工艺对比试验，着重研究和分析了两种磨削加工方式对工件形状误差、表面加工质量、补偿工艺等方面的影响。通过上述实验研究，验证了基于B轴控制的三轴联动加工方式可以提高非球面工件的加工精度。
In recent years, with the applications of high-performance aspheric optical parts in theaerospace, optics, electronics, military weapons and more fields widely, the demanding ofmachining accuracy and ultra-precision machining technologies on micro aspherical opticalparts have increased acutely, and how to obtain high performance micro optical lens hasbecome the key and difficult point for optical system design and manufacturing.With themature of aspheric plastic and glass molding technology, the mass production of asphericaloptical components has been achieved, and the main manufacturing technologyies foraspherical mold are turning and grinding technology. Therefore, the studies on turning andgrinding technologyies for ultra-precision micro aspheric parts have more importanttheoretical and practical significance.
Firstly, the present aspherical ultra-precision machining technologies in domestic andinternational are introduced as well as the mainstream ultra-precision machines. The currentproblems on ultra-precision turning and grinding technology for micro aspherical optical partsare investigated in details, and corresponding solutions are put forward. Then, base on thetraditional two-axis aspheric ultra-precision turning and grinding technology, the three-axisfixed-point ultra-precision turning and grinding technologies based on controlling B axis areinvestigated, and the corresponding prediction mathmatical models of profile error wereestablished, as the influence laws of them on the form accuracy, surface quality, tool wearwere analyzed. Some common aspherical measuring technologies in ultra-precision machiningprocess are introduced, and the on machine measuring technology combining with a contactprobe and the laser interferometer measurement and the principle of probe calibration areinvestigated. The error sources in machining process and systematic errors in installation ofaspherical turning and grinding are analyzed deeply, including the tool centering error in X,Y-axis direction. The error compensation methods using in this paper are introduced, and theprinciple for machining position error and form error compensation and of compensation areemphasized to analyze, including X, Y axis centering error compensation, tool radiuscompensation, and form error compensation using polynomial fitting by leastsquare method.
Focusing on different materials such as copper, aluminum, silicon and sulfur halogeninfrared glass, some comparative turning experiments using X, Z axis and X, Z, B axis for flat,concave spherical, small concave and convex aspherical surface are carried on in the samemachining conditions, and the influences of the two machining modes on the workpiece form error, surface quality, compensation technique are investigaged and anaylzed deeply in theturning process. The corresponding grinding wheel dressing technology is researched, andsetting principle and method between B-axis and wheel is introduced. Focusing on tungstencarbide and silicon materials, some comparative grinding experiments using X, Z axis and X,Z, B axis for small concave spherical, small concave and convex aspherical surface are carriedon in the same machining conditions. And influences of the two machining modes on theworkpiece form error, surface quality, compensation technique are investigaged and analyzeddeeply in the grinding process. Finally, the three axes machining mode based on B axiscontrolling may improve machining accuracy of aspherical workpiece.
引文
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