一种环型直线超声波马达的研究
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摘要
超声波马达是一种利用压电陶瓷的逆压电效应,通过各种伸缩振动模式的转换与耦合,将材料的微观变形通过共振放大和摩擦耦合转换成转子或者滑块宏观运动的直接驱动器。它具有功率密度大、无电磁干扰、低速大转矩、动作相应快、运行无噪声、无输入自锁等卓越特性。本文研究利用行波原理的优点,在具有两个直线段的长环形结构中激励出行波,使马达产生直线运动的超声波直线马达。
通过分析行波产生的原理,指出旋转型马达的行波是由两个同型同频的驻波叠加而成,而长环型直线马达的行波是由两个模态频率十分接近的驻波叠加而成。
采用有限元方法对带有两个直线段的超声波直线马达进行了分析,分析结果表明长环型结构上存在着产生行波所需的两个弯曲驻波。同时,本文又通过谐响应分析得到了长环型直线马达的仿真运动结果,进一步从理论上证实了行波的存在性。
推导了弹性体上质点的椭圆运动方程,而后通过瞬态分析得到了长环型直线马达上齿的端部上质点的椭圆运动轨迹。对马达起动的初始阶段的振动情况也进行了仿真分析,分析结果表明马达的起动时间为0.5ms。
研制了长环型直线马达的样机,并进行了实验研究。当驱动电压为300V,配重块为0.24Kg时,长环型直线马达的速度达到最大值15mm/s。
The ultrasonic motor is a kind of direct driver which is uses the converse piezoelectric effect of the piezoelectricity ceramics, by using transformation and the coupling of each kind of expansion and contraction vibration pattern enlarging the material microscopic distortion by resonate effect and transforming it to macroscopic movement of the rotor or the slide by the friction coupling. The ultrasonic motor displays particular properties like the higher power density, the non-electronmagetic interference, the low speed with big torque, the small start-stop time-constants, the movement without the noise, high holding torque with no current applied and so on. This dissertation is about taking use of the merit of the traveling wave principle, exciting a traveling wave in a ring type stator with two tangential paths, generating the linear movement of the ultrasonic motor.
By analyzing the principle of traveling wave, this paper point out that the traveling wave of the rotational motor generates by two same types and frequencies standing wave superimposition, while the traveling wave of the ring-type motor degenerates by two standing wave of extremely approaches in frequencies.
Analytical results proves the existence of the two needed bend standing wave which generate traveling wave in the ring-type structure with two linear portions, and also confirms the existence of traveling wave through the harmony response analysis.
This paper derives the equation of the particle of the elastomer, obtains the elliptical trace of the notch of the ring-type linear motor, simulates the start term of the motor and educes the theoretical start-time 0.5ms.
A prototype motor of the ring-type structure has been manufactured and taken experimental research according to the theoretical analysis results. The ring-type linear ultrasonic motor obtains its maximal velocity 15mm/s with the power of 300V and load of 0.24Kg.
通过分析行波产生的原理,指出旋转型马达的行波是由两个同型同频的驻波叠加而成,而长环型直线马达的行波是由两个模态频率十分接近的驻波叠加而成。
采用有限元方法对带有两个直线段的超声波直线马达进行了分析,分析结果表明长环型结构上存在着产生行波所需的两个弯曲驻波。同时,本文又通过谐响应分析得到了长环型直线马达的仿真运动结果,进一步从理论上证实了行波的存在性。
推导了弹性体上质点的椭圆运动方程,而后通过瞬态分析得到了长环型直线马达上齿的端部上质点的椭圆运动轨迹。对马达起动的初始阶段的振动情况也进行了仿真分析,分析结果表明马达的起动时间为0.5ms。
研制了长环型直线马达的样机,并进行了实验研究。当驱动电压为300V,配重块为0.24Kg时,长环型直线马达的速度达到最大值15mm/s。
The ultrasonic motor is a kind of direct driver which is uses the converse piezoelectric effect of the piezoelectricity ceramics, by using transformation and the coupling of each kind of expansion and contraction vibration pattern enlarging the material microscopic distortion by resonate effect and transforming it to macroscopic movement of the rotor or the slide by the friction coupling. The ultrasonic motor displays particular properties like the higher power density, the non-electronmagetic interference, the low speed with big torque, the small start-stop time-constants, the movement without the noise, high holding torque with no current applied and so on. This dissertation is about taking use of the merit of the traveling wave principle, exciting a traveling wave in a ring type stator with two tangential paths, generating the linear movement of the ultrasonic motor.
By analyzing the principle of traveling wave, this paper point out that the traveling wave of the rotational motor generates by two same types and frequencies standing wave superimposition, while the traveling wave of the ring-type motor degenerates by two standing wave of extremely approaches in frequencies.
Analytical results proves the existence of the two needed bend standing wave which generate traveling wave in the ring-type structure with two linear portions, and also confirms the existence of traveling wave through the harmony response analysis.
This paper derives the equation of the particle of the elastomer, obtains the elliptical trace of the notch of the ring-type linear motor, simulates the start term of the motor and educes the theoretical start-time 0.5ms.
A prototype motor of the ring-type structure has been manufactured and taken experimental research according to the theoretical analysis results. The ring-type linear ultrasonic motor obtains its maximal velocity 15mm/s with the power of 300V and load of 0.24Kg.
引文
1 贺思源. 超声波马达理论模型与新型超声驱动器的研究. 哈尔滨工业大学博士论文. 1998:7~10
2 Kenji Uchino. Piezoelectric Ultrasonic Motors: Overview. Smart Mater Structure. 1998,(7):173~285
3 褚祥诚. 行波超声马达理论建模及其振动行为实验研究. 哈尔滨工业大学博士论文. 1999:1~19
4 H. Hose. Ultrasonic Motor for Auto Focus Lenses. Ultrasonic Technology. 1989,1(2): 36~41
5 杨永生, 吴昌林. 超声波电动机的原理与发展动态. 微电机. 2003, (6):35~38
6 陈维山, 张帆, 刘军考. 新型超声换能器式直线驻波马达的研究. 压电与声光. 2004,26(1):24~26
7 李晓萍. 压电陶瓷马达及其应用. 煤矿机械 .2003,(9):89~90
8 褚祥诚, 李龙土. 压电陶瓷超声马达. 物理学和高新技术. 2002, (4):229~234
9 刘景全, 杨志刚, 吴博达. 圆筒型行波非接触超声马达的激励原理研究. 声学学报. 2003,28(1):91~95
10 内野研二. 壓電セラミクスを用した超音波モ―タ. 固體物理. 1988, 23(8):124~132
11 龙柏林. 基于有限元方法的超声波马达建模与优化. 哈尔滨工业大学硕士论文. 1998:1~2
12 郭海训. 大力矩高精度超声波电机的基础研究. 浙江大学博士学位论文. 2002:2~4.
13 指田年生. 超声波モ―タ開発. M&E. 1984,(2):74~79
14 J. Tsujino. Ultrasonic Rotary Motor Using Longitudinal-Torsional Vibration Converter. Japan Journal of Applied Physics. 1992,(31):245~247
15 Anita M. Flynn. Piezoelectric Micromotors for Microrobots.IEEE Ultrasonics Symposium. 1990:1163~1172
16 黒泽実, 上羽贞行. 进行波型超声波モ―タの效率. 日本音响学会誌. 1988,44(1):40~46
17 大山繁樹. 超声波モ―タ.低·高トルタを武器に実用化へ. Nikkei Electronics. 1987,(423):111~117
18 T. Yamazaki. Trial Construction of a Non-contact Ultrasonic Motor with an Ultrasonic Levitated Rotor.Jpn.J.Appl. Phys. 1996,35(5):3286~3288
19 Sadayuki Ueha. Present State of the Art of Ultrasonic Motors. Japanese Journal of Applied Physics. 1989,(28):3~6
20 张文超. 超声马达歩进特性和定位控制技术研究与应用. 生命科学仪器. 2005,(3):38~43
21 李华峰, 辜承林. 使用PI控制的超声波电机精密位置控制. 微特电机. 2002,35(2):23~26.
22 胡黄卿. 固体润滑剂的应用展望. 机械研究与应用. 2004,17(5):5~7
23 T. Takano. Same Phase Drive-Type Ultrasonic Motors Using Two Degenerate Bending Vibration Modes of a Disk. IEEE Trans. UFFC. 1992,39(2):180~186
24 M.Umeda. Doubbell-Sahped Small Sized Hybrid Ultrasonic Motor. Jpn.J.Appl.Phys. 1989,(29):191~193
25 S.Y.HE, X.C.CHU. Double-Stator No-Bearing Ultrasonic Motor Using Three-Dimensional Motion of Projections. World Congress on Ultrasonics, Yokohama, Japan. 1997:124~127
26 赵淳生. 世界超声电机技术的新进展. 振动、测试与诊断. 2004,24(1):1~5
27 齐震, 朱邦太. 超声波马达的原理及发展状况. 矿山机械. 2003,(3):41~43
28 刘世清. 超声波马达原理及其应用. 渭南师范学院学报. 2004,(9):13~16
29 郑伟智. 压电马达的发展及其技术特点. 北京工商大学学报. 2003,(3):45~48
30 张铁民, 刘仁鑫. 直线超声波电动机在信息产业中的应用. 微特电机. 2005,(3):33~36
31 王宏祥, 王红静. 直线超声电机的研究进展. 机械工程师. 2004,(3):3~6
32 Seemann, Wolfgang. Ultrasonic Traveling Wave Linear Motor with Improved Efficiency. SPIE Proceeding, 1992,(2716):554~564.
33 M.Hermann, W.Schinkothe, J.Haug. Properties of a Piezoelectric Travelling Wave Motor Generating Direct Linear Motion. ACTUATOR 98. 6th International Conference on New Actuators with Accompanying Exhibition. Conference Proceedings. 1998:17~19
34 Hermann, M.Schinkothe. Piezoelectric Travelling Wave Motors GeneratingDirect Linear Motion Actuator 96. 5th International Conference on New Actuators. Conference Proceedings. 1996:200~203
35 胡伟, 赵淳生. 直线型行波超声马达的研究. 振动、测试与诊断. 1996,(3): 8~14
36 Ken Higuchi. A Piezoelectric Linear Motor Driven By Superposing Standing Waves With Phase Difference..Institute Of Space And Astronautical Science. 1995:3296 ~ 3303.
37 Chee Kian Lim, Siyuan He, I-Ming Chen, Song Huat Yeo. A Piezo-on-slider Type Linear Ultrasonic Motor for the Application of Position Stages. 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. 1999:103~108
38 陈维山, 张日安, 褚祥诚, 贺思源. 双向驻波直线电动机. 微特电机. 2000,(4):31~35
39 辜 承 林 , 董 干 . 双 π 型 压 电 超 声 波 直 线 电 机 . 中 国 电 机 工 程 学 报 . 1998,(3):48~52
40 Junhui Hu. A Standing Wave - type Noncontact Linear Ultrasonic Motor. IEEE Transtactions On Ultrasonics Ferroelectrics And FrequencyControl. 2001,48(3):1224~1228
41 Minoru Kuribayashi. Transducer For High Speed And Large Thrust Ultrasonic Linear Motor Using Two Sandwich - Type Vibrators. IEEE Transactions On Ultrasonic Ferroelectrics And Frequency Control. 1998,45(5):1186 ~ 1195.
42 Hemsel, Tobias. Untersuchung und Weiterentwicklung Linearer Piezoelektriser Schwingungsantriebe. German: Heinz -Nixdorf –Institut, Universitaet Paderborn, 2001.
43 李朝东, 姚华, 裴仁清, 龚振邦. 仿生步行小型直线超声电机. 微特电机. 2001,(6):10~11
44 刘俊标, 黄卫清, 赵淳生. 一种新型的二自由度直线型超声电机. 压电与声光. 2001,(10):346~348
45 Cheol-Ho YUN. A High Power Ultrasonic Linear Motor Using A Longitudinal And Bending Hybrid Bolt - Clamped Langevin Type Transducer. Jpn. J . Appl . Phys.2001,(40):3773 ~ 3776.
46 赵万生, 袁松海. 一种小型微位移超稳定直线压电驱动器. 压电与声光. 1999,(12):439~441
47 张志彬. 复合材料超声直线电机的研究. 光学精密工程. l998,6(4):65~69
48 黄国庆, 刘群亭, 黄卫清, 赵淳生. 直线型超声电机研究的现状. 微特电机. 2003,(2):24~30
49 胡敏强, 金龙, 顾菊平. 超声波电机原理与设计. 科学出版社, 2005:25~44
50 上羽贞行, 富川义郎著, 杨志刚译. 超声波马达的原理与应用. 上海科技出版社, 1998:13~17
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2 Kenji Uchino. Piezoelectric Ultrasonic Motors: Overview. Smart Mater Structure. 1998,(7):173~285
3 褚祥诚. 行波超声马达理论建模及其振动行为实验研究. 哈尔滨工业大学博士论文. 1999:1~19
4 H. Hose. Ultrasonic Motor for Auto Focus Lenses. Ultrasonic Technology. 1989,1(2): 36~41
5 杨永生, 吴昌林. 超声波电动机的原理与发展动态. 微电机. 2003, (6):35~38
6 陈维山, 张帆, 刘军考. 新型超声换能器式直线驻波马达的研究. 压电与声光. 2004,26(1):24~26
7 李晓萍. 压电陶瓷马达及其应用. 煤矿机械 .2003,(9):89~90
8 褚祥诚, 李龙土. 压电陶瓷超声马达. 物理学和高新技术. 2002, (4):229~234
9 刘景全, 杨志刚, 吴博达. 圆筒型行波非接触超声马达的激励原理研究. 声学学报. 2003,28(1):91~95
10 内野研二. 壓電セラミクスを用した超音波モ―タ. 固體物理. 1988, 23(8):124~132
11 龙柏林. 基于有限元方法的超声波马达建模与优化. 哈尔滨工业大学硕士论文. 1998:1~2
12 郭海训. 大力矩高精度超声波电机的基础研究. 浙江大学博士学位论文. 2002:2~4.
13 指田年生. 超声波モ―タ開発. M&E. 1984,(2):74~79
14 J. Tsujino. Ultrasonic Rotary Motor Using Longitudinal-Torsional Vibration Converter. Japan Journal of Applied Physics. 1992,(31):245~247
15 Anita M. Flynn. Piezoelectric Micromotors for Microrobots.IEEE Ultrasonics Symposium. 1990:1163~1172
16 黒泽実, 上羽贞行. 进行波型超声波モ―タの效率. 日本音响学会誌. 1988,44(1):40~46
17 大山繁樹. 超声波モ―タ.低·高トルタを武器に実用化へ. Nikkei Electronics. 1987,(423):111~117
18 T. Yamazaki. Trial Construction of a Non-contact Ultrasonic Motor with an Ultrasonic Levitated Rotor.Jpn.J.Appl. Phys. 1996,35(5):3286~3288
19 Sadayuki Ueha. Present State of the Art of Ultrasonic Motors. Japanese Journal of Applied Physics. 1989,(28):3~6
20 张文超. 超声马达歩进特性和定位控制技术研究与应用. 生命科学仪器. 2005,(3):38~43
21 李华峰, 辜承林. 使用PI控制的超声波电机精密位置控制. 微特电机. 2002,35(2):23~26.
22 胡黄卿. 固体润滑剂的应用展望. 机械研究与应用. 2004,17(5):5~7
23 T. Takano. Same Phase Drive-Type Ultrasonic Motors Using Two Degenerate Bending Vibration Modes of a Disk. IEEE Trans. UFFC. 1992,39(2):180~186
24 M.Umeda. Doubbell-Sahped Small Sized Hybrid Ultrasonic Motor. Jpn.J.Appl.Phys. 1989,(29):191~193
25 S.Y.HE, X.C.CHU. Double-Stator No-Bearing Ultrasonic Motor Using Three-Dimensional Motion of Projections. World Congress on Ultrasonics, Yokohama, Japan. 1997:124~127
26 赵淳生. 世界超声电机技术的新进展. 振动、测试与诊断. 2004,24(1):1~5
27 齐震, 朱邦太. 超声波马达的原理及发展状况. 矿山机械. 2003,(3):41~43
28 刘世清. 超声波马达原理及其应用. 渭南师范学院学报. 2004,(9):13~16
29 郑伟智. 压电马达的发展及其技术特点. 北京工商大学学报. 2003,(3):45~48
30 张铁民, 刘仁鑫. 直线超声波电动机在信息产业中的应用. 微特电机. 2005,(3):33~36
31 王宏祥, 王红静. 直线超声电机的研究进展. 机械工程师. 2004,(3):3~6
32 Seemann, Wolfgang. Ultrasonic Traveling Wave Linear Motor with Improved Efficiency. SPIE Proceeding, 1992,(2716):554~564.
33 M.Hermann, W.Schinkothe, J.Haug. Properties of a Piezoelectric Travelling Wave Motor Generating Direct Linear Motion. ACTUATOR 98. 6th International Conference on New Actuators with Accompanying Exhibition. Conference Proceedings. 1998:17~19
34 Hermann, M.Schinkothe. Piezoelectric Travelling Wave Motors GeneratingDirect Linear Motion Actuator 96. 5th International Conference on New Actuators. Conference Proceedings. 1996:200~203
35 胡伟, 赵淳生. 直线型行波超声马达的研究. 振动、测试与诊断. 1996,(3): 8~14
36 Ken Higuchi. A Piezoelectric Linear Motor Driven By Superposing Standing Waves With Phase Difference..Institute Of Space And Astronautical Science. 1995:3296 ~ 3303.
37 Chee Kian Lim, Siyuan He, I-Ming Chen, Song Huat Yeo. A Piezo-on-slider Type Linear Ultrasonic Motor for the Application of Position Stages. 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. 1999:103~108
38 陈维山, 张日安, 褚祥诚, 贺思源. 双向驻波直线电动机. 微特电机. 2000,(4):31~35
39 辜 承 林 , 董 干 . 双 π 型 压 电 超 声 波 直 线 电 机 . 中 国 电 机 工 程 学 报 . 1998,(3):48~52
40 Junhui Hu. A Standing Wave - type Noncontact Linear Ultrasonic Motor. IEEE Transtactions On Ultrasonics Ferroelectrics And FrequencyControl. 2001,48(3):1224~1228
41 Minoru Kuribayashi. Transducer For High Speed And Large Thrust Ultrasonic Linear Motor Using Two Sandwich - Type Vibrators. IEEE Transactions On Ultrasonic Ferroelectrics And Frequency Control. 1998,45(5):1186 ~ 1195.
42 Hemsel, Tobias. Untersuchung und Weiterentwicklung Linearer Piezoelektriser Schwingungsantriebe. German: Heinz -Nixdorf –Institut, Universitaet Paderborn, 2001.
43 李朝东, 姚华, 裴仁清, 龚振邦. 仿生步行小型直线超声电机. 微特电机. 2001,(6):10~11
44 刘俊标, 黄卫清, 赵淳生. 一种新型的二自由度直线型超声电机. 压电与声光. 2001,(10):346~348
45 Cheol-Ho YUN. A High Power Ultrasonic Linear Motor Using A Longitudinal And Bending Hybrid Bolt - Clamped Langevin Type Transducer. Jpn. J . Appl . Phys.2001,(40):3773 ~ 3776.
46 赵万生, 袁松海. 一种小型微位移超稳定直线压电驱动器. 压电与声光. 1999,(12):439~441
47 张志彬. 复合材料超声直线电机的研究. 光学精密工程. l998,6(4):65~69
48 黄国庆, 刘群亭, 黄卫清, 赵淳生. 直线型超声电机研究的现状. 微特电机. 2003,(2):24~30
49 胡敏强, 金龙, 顾菊平. 超声波电机原理与设计. 科学出版社, 2005:25~44
50 上羽贞行, 富川义郎著, 杨志刚译. 超声波马达的原理与应用. 上海科技出版社, 1998:13~17
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