双振子压电泵设计理论与结构优化技术研究
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摘要
在多振子压电泵中,双振子压电泵是结构最简单的形式。分析双振子驱动形式对泵性能的影响,优化结构尺寸,设计输出性能良好的双振子压电泵,并为压电泵在多振子驱动过程中,解决工作流体流动时存在的相互扰动问题提供可借鉴的方法,有着十分重要的意义。
本文采用理论分析与试验研究相结合的方法,运用压电陶瓷学、机械振动学、流体动力学与运动学等相关理论知识,对双振子压电泵设计理论和结构优化技术进行研究。
为预测双振子压电泵的输出能力,推导了压电单晶片和压电双晶片振动时的弯曲变形方程和容积变化量方程,并通过试验验证理论推导的正确性。
针对双振子压电泵最佳工作点比较高的特点,分别设计了悬臂梁阀、轮式平板和伞形橡胶阀等三种被动截止阀,应用三种被动截止阀设计了双振子单腔泵、双振子双腔串联泵和双振子双腔并联泵三种结构双振子压电泵,并对三种结构双振子压电泵的阀通流孔大小和泵腔体的初始容积进行了确定,给出了各自的理论输出流量公式,对振子驱动方式对其输出性能的不同影响进行了分析与阐述,在此基础上加工了试验样机,进行了试验测试。
对双振子压电泵的试验测试结果表明,在满足双振子压电泵最佳结构尺寸的条件下,在110V正弦交流电驱动下,以水为介质,双振子单腔泵最大输出流量和输出压力为500ml/min和100kPa;双振子双腔串联泵最大输出流量和输出压力为1100ml/min和100kPa;双振子双腔并联泵最大输出流量和输出压力为1350ml/min和40 kPa。
对双振子压电泵驱动气体和粘度比水大的液体进行了试验,试验结果表明,双振子串联泵和并联泵可驱动最大粘度为234.6mPa.s的甘油水溶液,此时泵的输出最大流量为30ml/min。和驱动液体比较,当驱动气体时,泵的工作方式发生了变化,在电信号为“同步驱动”的情况下,三种结构形式的双振子压电泵都能获得比“异步驱动”还要好的流量输出,输出气体的最大流量和压力可达1100ml/min和7.8kPa;腔体的初始容积对泵送气体的性能仍然有影响,在满足压电振子和阀自由振动的情况下,腔体的初始容积越小,泵输出气体的性能越好。
The structure of Double-actuator Piezo-pump is the simplest among the multi-actuator Piezo-pumps.It is very important to analyze the performance influence of the Double-actuator Piezo-pump, optimize the structure size,design a Double-actuator Piezo-pump with good output performance,offer a effective method for the turbulence of the liquid in the multi-actuator Piezo-pumps.
The piezo-pump research has more than twenty years history,so it has a tremendous progress,such as the Co. thinXXSGmbH in Germany and Co.SIMI in Japan already have had products in market. As for the domestic research condition, related research of piezo -pump started lately, there is no products. By reading large numbers of papers and author’s experience on the research, the research of the Piezo-pump overseas focus in the single-actuator single cavity pump, especially focus in the minisize Piezo-pump. In China,the research of the multi- actuator Piezo-pumps is developing based on the research of the single actuator Piezo-pumps.
The two main development directions are below:one is the exact Piezo–pump,which is productd by the Micro-Processing technology,with the flux 10μl/min～10ml/min,mainly used in the chip laboratory, micro-analysis system, biomedical engineering(such as microinjected, disease examination analysis),even at unicellular monitor which need the flux at pl(1 pl=1/1,000,000,000,000L);the other is the big flux pump with the flux more than 1000 ml/min, the out press at 10～100kPa,and it can replace the traditional pump or used in situsituation that the traditional pump can’t work, such as fuel battery supply, motor fuel supply, cooling of the chip. Moreover, for the Piezo-pump, beside pumping the low viscosity liquid such as water, the pumping high viscosity liquid or gas was no reported, this is very important in the future research.
Based on the research of the design theory and structure optimization of the Double-actuator Piezo-pump , the author engaged some work below:
1.Research of vibration characteristic of Piezoelectric actuator
In order to predict the output performance of the Double-actuator Piezo-pump,in the situations of ignoring the influence of the glue line to the piezo-pump, establishing libration equation of circular piezoelectric actuator and cubage variety equation of cavity. The theory result indicate that establishing libration equation of circular piezoelectric actuator and cubage variety equation of cavity relate to the size of the actuator, performance parameter d 31of the ceramic wafer, driving voltage U. The result indicate that Drived by effective voltage 110V, the amplitude of center of ? 35mm single-actuator is 20.2 ?m ,the cubage variety of cavity is ?V =1.43x10-8m3;the amplitude of center of ? 35mm double-actuator is 50.49 ?m ,the cubage variety of cavity is ?V '=3.6x10-8m3 . Then, this thesis prove the theory derivation by static and dynamic test on the the amplitude of center.
2.Research of design and work characteristic of check valve
Check valve is the key component which confirm the output performance of the piezo-pump ,the development of the check valve promotes the development of piezo-pump. Membrane valve is very popular for its simple structure, easy to open, high response frequency. According to the characteristic of the piezo-pump , the author designs and products three kinds of cut-off valves, cantilever valve, spiral plate valve, umbrella-shape rubber valve, analysised overflowing property and critical working conditions of the check valve.The experimentation show that the three kinds of valve start to work when the press reach 0.2kPa. The flow capacity of the umbrella-shape rubber valve is the best, those of cantilever valve is the worst.when set the three kinds of valves into the same structure of piezo-pump, self-absorbing capacity of the umbrella-shape rubber valve piezo-pump.is the best,those of cantilever valve piezo-pump is the worst.Then,did the simulation analysis of umbrella-shape rubber valve by the software ANASYS.
3. Structure design and performance analysis of Double-actuator Piezo-pump with membrane valve
According to the design theory of the Double-actuator Piezo-pump, the author develop the structure optimization design of Double-actuator Piezo-pump. The research of the Double-actuator Piezo-pump show that the more cavity initialization capacity,the worse self-absorbing capacity of pump. But a proper cavity initialization capacity could made the pump get the best output flow. The author also obtain the number of the suction holes and radius of the umbrella-shape rubber valve and spiral plate valve by experiment.When the valve hole radius of umbrella-shape rubber valve is r ? 3.2mm,suction holes=n=8,the suction performance is the best, the valve hole radius of spiral plate valve is r=2.75mm, the suction performance is the best. The experiment also show that tandem pump three valves structure is better than those of two valves.The author expatiated the reason of cavitation give birth to in the pump,we must make sure that the pressure ratio on the two sides of the vlalve p1/p2<3.5 for avoid producing cavitation in the pump. Cavitation may lead to abscission and cauterization of actuator metal plate .
Aiming at the factors that affect the performance of double-actuator piezo-pump, such as drive method of actuator electrical signal,high of cavity, author product many kinds of Piezo-pump ,choose water as transmission medium,use bimorph actuator, experimentalize with sine alternating current 110V.
With regard to double-actuator single cavity pump, with the synchronous drive on actuator, working frequency band of pump less than 250Hz,the optimal frequency is around 60Hz,at that time the flux is more than 500ml/min. With the synchronous drive on actuator, working frequency band of pump is more wide, which can reach to 400Hz,when the pressure output is more than 100kPa. The cavity initialization capacity may affect the output of the pump, which reach to 2501.2 mm3,the output is pretty good.The length of the outlet pipe may affect optimal working frequency of the pump. Prolong the length of the loulet pipe, the optimal working frequency of the pump will diminish, the output flux will diminish.The using of flexible support on actuator will diminish optimal working frequency of the pump, without influence of the flux output.
In the face of double-actuator pump in series, the output performance of pump is affected by chamber initialization capacity and valve number,which is best when the chamber initialization capacity is 1900 mm3 and with three valves,the max output flux can reach to 1100ml/min.When the working frequency of the pump is less than 400Hz,the max output pressure is 100kPa.
In the face of double-actuator pump in parallel, analysis the influence which cavity initialization capacity,drive method of actuator,the different kinds of valve onto it.When cavity initialization capacity is 1135 mm3, paralleled pumps get the best output performance,the max output flux is 1350ml/min, when the working frequency of the pump is less than 400Hz, the max output. Pressure is 40kPa.Compare with the cantilever valve paralleled pumps, spiral plate valve paralleled pumps,the umbrella-shape rubber valve paralleled pump’s performance is best in the experiment.
4. Experimental Study of Double-actuator Piezo-pump with membrane valve driving gas and liquid with different viscosity.
The author did the experimental study of Double-actuator Piezo-pump with membrane valve driving gas and liquid with viscosity higher than water, the result of the experiment indicate that driven by the effective working voltage 110v sinusoidal current, double-actuator tandem pump and paralleled pump can drive max viscosity 234.6 mPa.s glycerine solution,when the the max output flux is 30ml/min. comparing with the driven by liquid, Piezo-pump driven by synchronous electric signal is much than those driven by induction electric signal;the max gas output pressure of Piezo-pump is 7.8kPa; The output gas performance is affected by the cavity initialization capacity,the litter the cavity initialization capacity,the better the output gas performance.If we take the three kinds structure double-actuator Piezo-pump with the same cavity initialization capacity in a experiment, in aspect of output flux , synchronous parallel pump is the best, induction tandem pump is the worst;in the aspect of output pressure, induction tandem pump is the best, synchronous parallel pump is the worst.
Based on the research of Double-actuator Piezo-pump , author offered a effective method for the turbulence of the liquid in the double-actuator Piezo-pumps, showed clearly direction of the research on the multi-actuator Piezo-pumps, such as Three- actuator Piezo-pump ,four-actuator Piezo-pump.
This paper funded by―863 programe‖Investigation on Multi-chamber Mini-Piezo-Pump‖(number 2002AA404250)and innovation fund for technology based firms program― computer chip water cooling system with piezo-pump‖(number04C26222210064), investigated a kind of piezo-pump with valve which has the characteristics of working stabilized, low noise ,great flow(1000ml/min), high and accurate out pressure(100kPa).Base on the research above, the theory of Piezoelectric drive and the structure design of the Double-actuator Piezo-pump , experimental study were developed.
本文采用理论分析与试验研究相结合的方法,运用压电陶瓷学、机械振动学、流体动力学与运动学等相关理论知识,对双振子压电泵设计理论和结构优化技术进行研究。
为预测双振子压电泵的输出能力,推导了压电单晶片和压电双晶片振动时的弯曲变形方程和容积变化量方程,并通过试验验证理论推导的正确性。
针对双振子压电泵最佳工作点比较高的特点,分别设计了悬臂梁阀、轮式平板和伞形橡胶阀等三种被动截止阀,应用三种被动截止阀设计了双振子单腔泵、双振子双腔串联泵和双振子双腔并联泵三种结构双振子压电泵,并对三种结构双振子压电泵的阀通流孔大小和泵腔体的初始容积进行了确定,给出了各自的理论输出流量公式,对振子驱动方式对其输出性能的不同影响进行了分析与阐述,在此基础上加工了试验样机,进行了试验测试。
对双振子压电泵的试验测试结果表明,在满足双振子压电泵最佳结构尺寸的条件下,在110V正弦交流电驱动下,以水为介质,双振子单腔泵最大输出流量和输出压力为500ml/min和100kPa;双振子双腔串联泵最大输出流量和输出压力为1100ml/min和100kPa;双振子双腔并联泵最大输出流量和输出压力为1350ml/min和40 kPa。
对双振子压电泵驱动气体和粘度比水大的液体进行了试验,试验结果表明,双振子串联泵和并联泵可驱动最大粘度为234.6mPa.s的甘油水溶液,此时泵的输出最大流量为30ml/min。和驱动液体比较,当驱动气体时,泵的工作方式发生了变化,在电信号为“同步驱动”的情况下,三种结构形式的双振子压电泵都能获得比“异步驱动”还要好的流量输出,输出气体的最大流量和压力可达1100ml/min和7.8kPa;腔体的初始容积对泵送气体的性能仍然有影响,在满足压电振子和阀自由振动的情况下,腔体的初始容积越小,泵输出气体的性能越好。
The structure of Double-actuator Piezo-pump is the simplest among the multi-actuator Piezo-pumps.It is very important to analyze the performance influence of the Double-actuator Piezo-pump, optimize the structure size,design a Double-actuator Piezo-pump with good output performance,offer a effective method for the turbulence of the liquid in the multi-actuator Piezo-pumps.
The piezo-pump research has more than twenty years history,so it has a tremendous progress,such as the Co. thinXXSGmbH in Germany and Co.SIMI in Japan already have had products in market. As for the domestic research condition, related research of piezo -pump started lately, there is no products. By reading large numbers of papers and author’s experience on the research, the research of the Piezo-pump overseas focus in the single-actuator single cavity pump, especially focus in the minisize Piezo-pump. In China,the research of the multi- actuator Piezo-pumps is developing based on the research of the single actuator Piezo-pumps.
The two main development directions are below:one is the exact Piezo–pump,which is productd by the Micro-Processing technology,with the flux 10μl/min～10ml/min,mainly used in the chip laboratory, micro-analysis system, biomedical engineering(such as microinjected, disease examination analysis),even at unicellular monitor which need the flux at pl(1 pl=1/1,000,000,000,000L);the other is the big flux pump with the flux more than 1000 ml/min, the out press at 10～100kPa,and it can replace the traditional pump or used in situsituation that the traditional pump can’t work, such as fuel battery supply, motor fuel supply, cooling of the chip. Moreover, for the Piezo-pump, beside pumping the low viscosity liquid such as water, the pumping high viscosity liquid or gas was no reported, this is very important in the future research.
Based on the research of the design theory and structure optimization of the Double-actuator Piezo-pump , the author engaged some work below:
1.Research of vibration characteristic of Piezoelectric actuator
In order to predict the output performance of the Double-actuator Piezo-pump,in the situations of ignoring the influence of the glue line to the piezo-pump, establishing libration equation of circular piezoelectric actuator and cubage variety equation of cavity. The theory result indicate that establishing libration equation of circular piezoelectric actuator and cubage variety equation of cavity relate to the size of the actuator, performance parameter d 31of the ceramic wafer, driving voltage U. The result indicate that Drived by effective voltage 110V, the amplitude of center of ? 35mm single-actuator is 20.2 ?m ,the cubage variety of cavity is ?V =1.43x10-8m3;the amplitude of center of ? 35mm double-actuator is 50.49 ?m ,the cubage variety of cavity is ?V '=3.6x10-8m3 . Then, this thesis prove the theory derivation by static and dynamic test on the the amplitude of center.
2.Research of design and work characteristic of check valve
Check valve is the key component which confirm the output performance of the piezo-pump ,the development of the check valve promotes the development of piezo-pump. Membrane valve is very popular for its simple structure, easy to open, high response frequency. According to the characteristic of the piezo-pump , the author designs and products three kinds of cut-off valves, cantilever valve, spiral plate valve, umbrella-shape rubber valve, analysised overflowing property and critical working conditions of the check valve.The experimentation show that the three kinds of valve start to work when the press reach 0.2kPa. The flow capacity of the umbrella-shape rubber valve is the best, those of cantilever valve is the worst.when set the three kinds of valves into the same structure of piezo-pump, self-absorbing capacity of the umbrella-shape rubber valve piezo-pump.is the best,those of cantilever valve piezo-pump is the worst.Then,did the simulation analysis of umbrella-shape rubber valve by the software ANASYS.
3. Structure design and performance analysis of Double-actuator Piezo-pump with membrane valve
According to the design theory of the Double-actuator Piezo-pump, the author develop the structure optimization design of Double-actuator Piezo-pump. The research of the Double-actuator Piezo-pump show that the more cavity initialization capacity,the worse self-absorbing capacity of pump. But a proper cavity initialization capacity could made the pump get the best output flow. The author also obtain the number of the suction holes and radius of the umbrella-shape rubber valve and spiral plate valve by experiment.When the valve hole radius of umbrella-shape rubber valve is r ? 3.2mm,suction holes=n=8,the suction performance is the best, the valve hole radius of spiral plate valve is r=2.75mm, the suction performance is the best. The experiment also show that tandem pump three valves structure is better than those of two valves.The author expatiated the reason of cavitation give birth to in the pump,we must make sure that the pressure ratio on the two sides of the vlalve p1/p2<3.5 for avoid producing cavitation in the pump. Cavitation may lead to abscission and cauterization of actuator metal plate .
Aiming at the factors that affect the performance of double-actuator piezo-pump, such as drive method of actuator electrical signal,high of cavity, author product many kinds of Piezo-pump ,choose water as transmission medium,use bimorph actuator, experimentalize with sine alternating current 110V.
With regard to double-actuator single cavity pump, with the synchronous drive on actuator, working frequency band of pump less than 250Hz,the optimal frequency is around 60Hz,at that time the flux is more than 500ml/min. With the synchronous drive on actuator, working frequency band of pump is more wide, which can reach to 400Hz,when the pressure output is more than 100kPa. The cavity initialization capacity may affect the output of the pump, which reach to 2501.2 mm3,the output is pretty good.The length of the outlet pipe may affect optimal working frequency of the pump. Prolong the length of the loulet pipe, the optimal working frequency of the pump will diminish, the output flux will diminish.The using of flexible support on actuator will diminish optimal working frequency of the pump, without influence of the flux output.
In the face of double-actuator pump in series, the output performance of pump is affected by chamber initialization capacity and valve number,which is best when the chamber initialization capacity is 1900 mm3 and with three valves,the max output flux can reach to 1100ml/min.When the working frequency of the pump is less than 400Hz,the max output pressure is 100kPa.
In the face of double-actuator pump in parallel, analysis the influence which cavity initialization capacity,drive method of actuator,the different kinds of valve onto it.When cavity initialization capacity is 1135 mm3, paralleled pumps get the best output performance,the max output flux is 1350ml/min, when the working frequency of the pump is less than 400Hz, the max output. Pressure is 40kPa.Compare with the cantilever valve paralleled pumps, spiral plate valve paralleled pumps,the umbrella-shape rubber valve paralleled pump’s performance is best in the experiment.
4. Experimental Study of Double-actuator Piezo-pump with membrane valve driving gas and liquid with different viscosity.
The author did the experimental study of Double-actuator Piezo-pump with membrane valve driving gas and liquid with viscosity higher than water, the result of the experiment indicate that driven by the effective working voltage 110v sinusoidal current, double-actuator tandem pump and paralleled pump can drive max viscosity 234.6 mPa.s glycerine solution,when the the max output flux is 30ml/min. comparing with the driven by liquid, Piezo-pump driven by synchronous electric signal is much than those driven by induction electric signal;the max gas output pressure of Piezo-pump is 7.8kPa; The output gas performance is affected by the cavity initialization capacity,the litter the cavity initialization capacity,the better the output gas performance.If we take the three kinds structure double-actuator Piezo-pump with the same cavity initialization capacity in a experiment, in aspect of output flux , synchronous parallel pump is the best, induction tandem pump is the worst;in the aspect of output pressure, induction tandem pump is the best, synchronous parallel pump is the worst.
Based on the research of Double-actuator Piezo-pump , author offered a effective method for the turbulence of the liquid in the double-actuator Piezo-pumps, showed clearly direction of the research on the multi-actuator Piezo-pumps, such as Three- actuator Piezo-pump ,four-actuator Piezo-pump.
This paper funded by―863 programe‖Investigation on Multi-chamber Mini-Piezo-Pump‖(number 2002AA404250)and innovation fund for technology based firms program― computer chip water cooling system with piezo-pump‖(number04C26222210064), investigated a kind of piezo-pump with valve which has the characteristics of working stabilized, low noise ,great flow(1000ml/min), high and accurate out pressure(100kPa).Base on the research above, the theory of Piezoelectric drive and the structure design of the Double-actuator Piezo-pump , experimental study were developed.
引文
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