压电共振型隔膜泵的设计理论与试验研究
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摘要
隔膜泵是流体泵的一个重要种类，主要满足小型化、低输出性能方面的需求，近年在医药生物、精细化工、航空航天、微机电系统等领域的应用越来越广泛，显示着良好的发展前景。目前隔膜泵主要有利用电机凸轮机构驱动的隔膜泵(简称“电磁隔膜泵”)与压电振子驱动的薄膜泵(简称“压电泵”)两大类，其中压电泵对液体类介质的输出效果好，对气体的输出效果很差，同时存在输出压力低、压电晶片易发热、碎裂等问题，还没有广泛的市场应用；电磁隔膜泵则存在结构复杂、成本高、噪音大等问题，应用受到一定限制。本文将压电泵的结构简单的特点与系统谐振技术相结合，提出一种利用压电振动激励隔膜共振而形成驱动能力的新型压电共振型隔膜泵(简称“压电共振泵”)，研究这种压电共振泵的基本原理与构成方法，进行相关的样机设计与试验，是国家自然科学基金项目《压电型气体隔膜泵设计理论与关键技术研究》（项目编号：51175213）研究工作的一部分。总体内容如下：
1.对压电共振泵中所用圆形压电振子平衡条件与弯曲变形挠度进行了分析计算。通过压电振子有限元模型的建立，获取了其多阶模态的振型；使用解析的方法求解了周边固定支撑条件下压电振子中心点的挠度公式，通过实验测试的方法，得到了驱动电压对圆形压电振子中心点的挠度的影响示意图。最后对压电振子进行阻抗分析，测得了压电振子的阻抗特性及其固有频率。
2.将压电共振泵的主要结构划分为激振单元和泵送单元两部分，分别描述了两个单元的作用与工作原理；对激振单元，建立了动力学模型并解析了各构成部件的刚度，获得了共振系统的放大倍数；对泵送单元，推导了隔膜膜片的挠度和及其对流体的近似输出流量计算公式；最后对激振单元的共振频率和振动位移进行了试验测量。
3.针对压电共振泵中圆形共振板弹簧不易换取的缺点，利用磁力弹簧刚度可变的特性，设计了磁力弹簧式压电共振型隔膜泵(简称“磁力式压电共振泵”)。首先对磁力弹簧的特性进行了研究，建立了磁力弹簧的数学模型，通过计算得到了磁力弹簧轴向刚度与轴向间距的关系式，并使用电子称与精雕机台面搭成的试验台，对磁力弹簧轴向力进行了测量；其次，描述了磁力式压电共振泵的工作原理，并建立了其动力学模型，从计算可知，调整磁力弹簧的轴向间距即可改变共振泵的共振频率；通过对磁力式压电共振泵有限元建模分析，得知当激振单元处于一阶模态工作时，质量块的中心振幅最大；最后，对磁力式压电共振泵进行结构设计并制作了样机，对其激振单元进行了共振频率和振动位移的测量，最后对振动幅值比进行了测量。
4.针对压电共振泵和磁力式压电共振泵进行了两部分工作，第一部分，试验、测试对不同粘度液体的输出性能；首先搭建了针对液体流量测试的试验台，其次选取性质稳定、几乎不挥发、不会对试验环境产生污染的甘油作为配比溶液；通过实验的方法对两种共振泵激振单元和泵送单元的各结构参数进行了最优选择，得到了其最大输出流量和输出压力；第二部分，试验、测试了对气体的输出性能；通过构建的气体输送试验平台进行了气体的输送实验，得到了对气体的输送流量；最后对同等工作条件下共振泵输送液体和气体出现的流量差异进行了分析说明。
5.根据压电共振泵的工作特性，设计了专用驱动电源，主要包括其整体结构设计、核心处理器的选用、逆变式驱动电路的选择等。
In recent years,as an important species of fluid pump, diaphragm pump has widelyapplication in pharmaceutical and biotech, fine chemical, aerospace,micro-electromechanical systems and show good prospects for development,which are metin the miniaturization、low output performance requirements.At present,there are two maintype of diaphragm pump, piezoelectric diaphragm pump driven by piezoelectric vibratorand electromagnetic diaphragm pump driven by motor cam mechanism.The drive capacityof traditional piezoelectric air pump is much lower than the liquid piezoelectric pump ofthe same volume, but also problems of piezoelectric wafer heating, easily broken, and noisewhich seriously affect the life and reliability work. Electromagnetic diaphragm pump hasproblems of complex structure, high cost, noise and other issues.Combing with thecharacteristics of existing piezoelectric pump and the system resonance technology, thispaper puts forward a new kind of piezoelectric resonant diaphragm pump driven by thediaphragm resonance with piezoelectric vibration excitation, researchs the basic principleand composition method and designs prototype for testing.The work is a part of StateNatural Sciences Foundation Monumental Projects (Project No.511175213).Specificcontent as follows:
1. Analyzed the equilibrium conditions of the circular piezoelectric vibrator whichpiezoelectric resonant pump used and the bending deformation deflection. This paperobtained the vibration mode of multistage modal piezoelectric vibrator through establishingthe FEM model and solved the deflection formula of the piezoelectric vibrator centerthrough the analytical method.Through the experiment test, relationship of the drivingvoltage and the annular piezoelectric vibrator center deflection was obtained. Finally, impedance characteristics and natural frequency of the piezoelectric vibrator weremeasured by impedance analysis.
2. It described respectively the principle of operation for the two parts of piezoelectricresonance pump: the vibration unit and pumping unit. It also established the dynamicsmodel, calculated the stiffness for the structure of the vibration unit, and calculated themagnification of resonance system. In the analysis of the pumping unit, the diaphragmdeflection of diaphragm and the pump output flow calculation formula for pumping fluidwere deduced. Finally the resonance frequency of piezoelectric resonance vibration andvibration displacement were took experimental measurements.
3. According to the circular rensonance plate spring in piezoelectric resonance pumpnot easy to change, piezoelectric resonance pump of magnetic spring is designed using thecharacteristics of the variable stiffness of magnetic spring. And through the establishmentof mathematical model of magnetic spring, it achieved the relation between the axialmagnetic spring stiffness and the axial spacing. Furthermore, the magnetic spring axialforce was measured by using the electronic scale and carved the machine surface of test rig.Second, it described the principle of operation for magnetic spring type piezoelectricresonance pump, and its dynamics model was established. From the calculation results, itcan be obtained that adjusting the magnetic spring axial spacing can change the resonancefrequency of resonance pump. Through taking FEM model of the magnetic springresonance pump, we can know that, when vibration unit in first-order modal, the center ofmass position amplitude is the largest. Finally, it took the structure design for the magneticspring piezoelectric resonance pump and made a prototype, and carried on the resonancefrequency and the vibration displacement measurement for vibration unit on the designprototype, then its vibration amplitude ratio were measured at the end.
4. Taking the piezoelectric resonance pump and magnetic spring type piezoelectricresonance pump as the research objects, this paper carried two works. In the first part,experiment test for driving different viscosity of the liquid. First of all, a test bench forliquid flow measurement was built, then selected properties of stability which almost novolatilization, and also make no pollution to the environment as a proportion for solution ofglycerol test. Through the experimental method, it made the optimal selection of the structure parameters of resonance pump vibration unit and pumping unit. And two kinds ofresonance to the maximum pump output flow rate the pressure were obtained. The secondpart is aimed at conveying experiment for gas. Construct the experimental platform fordelivering gas, then took the conveying experiment respectively for the piezoelectricresonance pump and the magnetic spring type piezoelectric resonance pump.In addition,the flow difference between pumping liquid and gas under the same working conditions ofthe resonance pump were analyzed and explained.
5. According to the characteristics of operation for piezoelectric resonance pump, itdesigned the drive controller of the resonance pump which mainly includes the overallstructure of the controller design, the selection of core processors and inverter type drivecircuit.
1.对压电共振泵中所用圆形压电振子平衡条件与弯曲变形挠度进行了分析计算。通过压电振子有限元模型的建立，获取了其多阶模态的振型；使用解析的方法求解了周边固定支撑条件下压电振子中心点的挠度公式，通过实验测试的方法，得到了驱动电压对圆形压电振子中心点的挠度的影响示意图。最后对压电振子进行阻抗分析，测得了压电振子的阻抗特性及其固有频率。
2.将压电共振泵的主要结构划分为激振单元和泵送单元两部分，分别描述了两个单元的作用与工作原理；对激振单元，建立了动力学模型并解析了各构成部件的刚度，获得了共振系统的放大倍数；对泵送单元，推导了隔膜膜片的挠度和及其对流体的近似输出流量计算公式；最后对激振单元的共振频率和振动位移进行了试验测量。
3.针对压电共振泵中圆形共振板弹簧不易换取的缺点，利用磁力弹簧刚度可变的特性，设计了磁力弹簧式压电共振型隔膜泵(简称“磁力式压电共振泵”)。首先对磁力弹簧的特性进行了研究，建立了磁力弹簧的数学模型，通过计算得到了磁力弹簧轴向刚度与轴向间距的关系式，并使用电子称与精雕机台面搭成的试验台，对磁力弹簧轴向力进行了测量；其次，描述了磁力式压电共振泵的工作原理，并建立了其动力学模型，从计算可知，调整磁力弹簧的轴向间距即可改变共振泵的共振频率；通过对磁力式压电共振泵有限元建模分析，得知当激振单元处于一阶模态工作时，质量块的中心振幅最大；最后，对磁力式压电共振泵进行结构设计并制作了样机，对其激振单元进行了共振频率和振动位移的测量，最后对振动幅值比进行了测量。
4.针对压电共振泵和磁力式压电共振泵进行了两部分工作，第一部分，试验、测试对不同粘度液体的输出性能；首先搭建了针对液体流量测试的试验台，其次选取性质稳定、几乎不挥发、不会对试验环境产生污染的甘油作为配比溶液；通过实验的方法对两种共振泵激振单元和泵送单元的各结构参数进行了最优选择，得到了其最大输出流量和输出压力；第二部分，试验、测试了对气体的输出性能；通过构建的气体输送试验平台进行了气体的输送实验，得到了对气体的输送流量；最后对同等工作条件下共振泵输送液体和气体出现的流量差异进行了分析说明。
5.根据压电共振泵的工作特性，设计了专用驱动电源，主要包括其整体结构设计、核心处理器的选用、逆变式驱动电路的选择等。
In recent years,as an important species of fluid pump, diaphragm pump has widelyapplication in pharmaceutical and biotech, fine chemical, aerospace,micro-electromechanical systems and show good prospects for development,which are metin the miniaturization、low output performance requirements.At present,there are two maintype of diaphragm pump, piezoelectric diaphragm pump driven by piezoelectric vibratorand electromagnetic diaphragm pump driven by motor cam mechanism.The drive capacityof traditional piezoelectric air pump is much lower than the liquid piezoelectric pump ofthe same volume, but also problems of piezoelectric wafer heating, easily broken, and noisewhich seriously affect the life and reliability work. Electromagnetic diaphragm pump hasproblems of complex structure, high cost, noise and other issues.Combing with thecharacteristics of existing piezoelectric pump and the system resonance technology, thispaper puts forward a new kind of piezoelectric resonant diaphragm pump driven by thediaphragm resonance with piezoelectric vibration excitation, researchs the basic principleand composition method and designs prototype for testing.The work is a part of StateNatural Sciences Foundation Monumental Projects (Project No.511175213).Specificcontent as follows:
1. Analyzed the equilibrium conditions of the circular piezoelectric vibrator whichpiezoelectric resonant pump used and the bending deformation deflection. This paperobtained the vibration mode of multistage modal piezoelectric vibrator through establishingthe FEM model and solved the deflection formula of the piezoelectric vibrator centerthrough the analytical method.Through the experiment test, relationship of the drivingvoltage and the annular piezoelectric vibrator center deflection was obtained. Finally, impedance characteristics and natural frequency of the piezoelectric vibrator weremeasured by impedance analysis.
2. It described respectively the principle of operation for the two parts of piezoelectricresonance pump: the vibration unit and pumping unit. It also established the dynamicsmodel, calculated the stiffness for the structure of the vibration unit, and calculated themagnification of resonance system. In the analysis of the pumping unit, the diaphragmdeflection of diaphragm and the pump output flow calculation formula for pumping fluidwere deduced. Finally the resonance frequency of piezoelectric resonance vibration andvibration displacement were took experimental measurements.
3. According to the circular rensonance plate spring in piezoelectric resonance pumpnot easy to change, piezoelectric resonance pump of magnetic spring is designed using thecharacteristics of the variable stiffness of magnetic spring. And through the establishmentof mathematical model of magnetic spring, it achieved the relation between the axialmagnetic spring stiffness and the axial spacing. Furthermore, the magnetic spring axialforce was measured by using the electronic scale and carved the machine surface of test rig.Second, it described the principle of operation for magnetic spring type piezoelectricresonance pump, and its dynamics model was established. From the calculation results, itcan be obtained that adjusting the magnetic spring axial spacing can change the resonancefrequency of resonance pump. Through taking FEM model of the magnetic springresonance pump, we can know that, when vibration unit in first-order modal, the center ofmass position amplitude is the largest. Finally, it took the structure design for the magneticspring piezoelectric resonance pump and made a prototype, and carried on the resonancefrequency and the vibration displacement measurement for vibration unit on the designprototype, then its vibration amplitude ratio were measured at the end.
4. Taking the piezoelectric resonance pump and magnetic spring type piezoelectricresonance pump as the research objects, this paper carried two works. In the first part,experiment test for driving different viscosity of the liquid. First of all, a test bench forliquid flow measurement was built, then selected properties of stability which almost novolatilization, and also make no pollution to the environment as a proportion for solution ofglycerol test. Through the experimental method, it made the optimal selection of the structure parameters of resonance pump vibration unit and pumping unit. And two kinds ofresonance to the maximum pump output flow rate the pressure were obtained. The secondpart is aimed at conveying experiment for gas. Construct the experimental platform fordelivering gas, then took the conveying experiment respectively for the piezoelectricresonance pump and the magnetic spring type piezoelectric resonance pump.In addition,the flow difference between pumping liquid and gas under the same working conditions ofthe resonance pump were analyzed and explained.
5. According to the characteristics of operation for piezoelectric resonance pump, itdesigned the drive controller of the resonance pump which mainly includes the overallstructure of the controller design, the selection of core processors and inverter type drivecircuit.
引文
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