微弧氧化电流脉冲电源及其负载电气特性的研究
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摘要
微弧氧化技术是近年来材料表面处理的一个重要研究内容,属于材料工程、电化学和电能变换技术研究的交叉领域,其氧化机理的不确定性和相关基础理论研究的薄弱导致了微弧氧化脉冲电源输出特性与其负载之间的不匹配,降低了电能转换效率和加工效率,从而所引起的高电能损耗限制了该技术的工业化推广应用。明确微弧氧化脉冲电源的负载电气特性、在此基础上设计与负载特性匹配的脉冲电源是降低微弧氧化电能损耗所亟待解决的工艺基础问题。本论文主要针对微弧氧化电流脉冲电源的设计及其负载的电气特性分析以及脉冲电源与其负载间的匹配技术进行了系统的研究。
运用理论分析、实验研究和数值模拟相结合的方法,对微弧氧化脉冲电源的负载等效电路模型的建立和定量分析进行了深入研究。按照微弧氧化过程中放电原理和特性将完整的工艺过程划分为不同氧化阶段,通过电化学领域使用的电化学阻抗谱(EIS)研究方法,建立了微弧氧化脉冲电源负载在不同氧化阶段的电路模型,得出在脉冲电流作用下,微弧氧化电源负载本质上是容性负载,它在电路中可等效为阻容网络。
根据微弧氧化工艺要求和脉冲电源的负载特性,提出了并联组合结构的方波电流脉冲电源方案,可实现脉冲宽度、幅值和频率的独立调节。设计了恒流特性BUCK型电路并联单元,通过各恒流单元间的均流并联,解决了输出电流幅值调节、功率控制和冗余的问题,有利于实现电源的模块化和大功率输出调节;采用电感短接作为能量存储和转换形式,使脉冲电源输出电流具有陡直前沿;针对开关损耗问题,运用缓冲型软开关技术,设计了无源缓冲型软开关电路,实现了零电流开通和零电压关断,降低了开关损耗,并改善了功率开关管的运行条件;针对脉冲电源各单元的功能和特点,在最大250kW等级,以PLC为核心设计了具有软启动、过压、过流和负载开路等保护功能的综合控制系统,为电源负载特性的深入研究以及国家重点工业性试验项目(PECC)的进行提供了必要条件。
根据实验测量结果,分析了微弧氧化等效负载电路对电源输出脉冲幅值、频率、占空比等变化的响应规律;通过参数拟合的方法,结合氧化机理分析,建立了微弧氧化方波电流脉冲电源的负载电路模型,并进行了电路参数的定量表征;根据等效电路中的参数变化规律,对应得到了各个参数的具体物理意义;进行电路仿真分析,其结果与源于实际工况测量的响应特性和参数变化规律相吻合,为适于负载特性变化的微弧氧化脉冲电源及系统效率优化提供了设计依据和仿真研究条件。
根据负载模型结构和定量参数,结合微弧氧化工艺实现条件,进行了电源脉冲作用效能分析,归纳了电源输出形式和波形参数对电能转化过程的影响规律。得出脉冲电流的前沿陡度对起弧速度具有决定性的影响;膜层击穿后仍然保持的电流既增加了系统的电能损耗,又是导致放电通道内的物质发生溅射的主要原因。在此基础上,对电源电流脉冲波形结构进行了优化,设计了具有电流尖峰形式输出的反激式电源实现方案,并进行了电源样机研制。通过仿真和实验,分别对方波脉冲电源和反激式脉冲电源进行功耗分析和对比,同时对本论文所建立的脉冲电源负载等效电路的合理性及其参数和反激式脉冲电源的优化效果进行了验证。为微弧氧化脉冲电源系统的优化设计提供了依据,进而为提高微弧氧化生产效率和电能转换效率提供了一种有效的方法。
Microarc oxidation (MAO) technology is an important research content of material surface modification that belongs to the crossing field of material engineering, electrochemical and power conversion technology. The uncertainty of oxidation mechanism and weakness of related basic theory research result in the mismatch between the output characteristics of MAO pulse power supply and its load which decrease the power conversion efficiency and machining efficiency. Induced high power consumption restricted the further research and industrial popularization and application of MAO technology. To definite the load characteristic of MAO pulse power supply and design the power supply matching to its load is the basic process problem to decrease the power consumption of MAO process. This paper carried on systematic researchs of the design and load electrical characteristic of MAO pulse power supply and the matching technology between power supply and its load.
Firstly, this paper researched the modeling and quantitative analysis of the load equivalent circuit of MAO pulse power supply combining of theory analysis, experimental study and numerical simulation. According to the discharge principle and characteristic in MAO process, the whole oxidation process was divided into various stages. Load circuit models of MAO pulse power supply by stages were built using electrochemical impedance spectroscopy (EIS) research method. It was concluded that the load of MAO pulse power supply is essentially the capacitive load of oxidation film that can equivalent to a network of resistance-capacity structure under current pulse.
Secondly, this paper designed the MAO square-wave constant current pulse power supply and researched its output forms and parameters design. A square-wave pulse power supply whose pulse width, amplitude and frequency can be regulated independently was put forward according to the requirements of MAO pulse power supply load characteristic and process. Paralleled unit structure BUCK-type circuit with constant current characteristic was designed. By parallel current sharing technology among constant current units, problems about amplitude regulation, capacity and redundancy were solved and modularization and high power output regulation of power supply were reached. Using inductance as the component of energy storage and conversion, pulse forming circuit was structured that can regulate the output frequency and pulse width and imply power supply to output pulse current with steep-wave rising edge. According to switching losses, a passive lossy buffer soft-switching circuit was designed to achieve ZCS and ZVS and decrease the switching loss and improve the operation condition of power switch tube. At maximum 250KV level, the parameters of main circuit and comprehensive control system with soft start and protection function to over voltage, over current and load open based on PLC were designed to prove the condition for the deep research of load characteristic and the implementation of natural important industry experiment project (PECC).
Thirdly, voltage characteristics of equivalent load circuit to current pulse step were analyzed and the response of pulse power supply load to its output was researched. By parameter fitting, combined with oxidation mechanism analysis, the load model of MAO square-wave pulse power supply was built and circuit parameters were quantitative characterized. Specific physical significances of various parameters were gained corresponding according variation law of equivalent circuit parameters. Simulation analysis were carried out and its result same as the response characteristic and parameter variation law under practical condition. Above research prove supports to the design of MAO pulse power supply and system efficiency optimization technically and in theory.
Finally, according to load model structure and quantitative parameters based on MAO process conditions, analysis about stress efficacy of power supply pulse and the effect of power supply output form and parameters to energy conversion law was inducted. Some conclusions were gained: the rising edge steepness of pulse current has decisive influence to arcing speed, keeping current after film breakdown increase the power loss of process system and result in the material sputtering from discharge channel. Current output form with steep-wave rising edge was put forward and flyback circuit with peak current form output was regulated. By simulation and experiment, power analysis and comparison between square-wave and flyback pulse power supply were carried out, the rationality of built pulse power supply load equivalent circuit and its parameters design were checked, and the matching relationship between the load model and the output form of pulse power supply were verified also. The research in this paper provided the foundation for the optimization of MAO pulse power supply, and it provided the method for the improvement of production efficiency and energy conversion efficiency in MAO process also.
运用理论分析、实验研究和数值模拟相结合的方法,对微弧氧化脉冲电源的负载等效电路模型的建立和定量分析进行了深入研究。按照微弧氧化过程中放电原理和特性将完整的工艺过程划分为不同氧化阶段,通过电化学领域使用的电化学阻抗谱(EIS)研究方法,建立了微弧氧化脉冲电源负载在不同氧化阶段的电路模型,得出在脉冲电流作用下,微弧氧化电源负载本质上是容性负载,它在电路中可等效为阻容网络。
根据微弧氧化工艺要求和脉冲电源的负载特性,提出了并联组合结构的方波电流脉冲电源方案,可实现脉冲宽度、幅值和频率的独立调节。设计了恒流特性BUCK型电路并联单元,通过各恒流单元间的均流并联,解决了输出电流幅值调节、功率控制和冗余的问题,有利于实现电源的模块化和大功率输出调节;采用电感短接作为能量存储和转换形式,使脉冲电源输出电流具有陡直前沿;针对开关损耗问题,运用缓冲型软开关技术,设计了无源缓冲型软开关电路,实现了零电流开通和零电压关断,降低了开关损耗,并改善了功率开关管的运行条件;针对脉冲电源各单元的功能和特点,在最大250kW等级,以PLC为核心设计了具有软启动、过压、过流和负载开路等保护功能的综合控制系统,为电源负载特性的深入研究以及国家重点工业性试验项目(PECC)的进行提供了必要条件。
根据实验测量结果,分析了微弧氧化等效负载电路对电源输出脉冲幅值、频率、占空比等变化的响应规律;通过参数拟合的方法,结合氧化机理分析,建立了微弧氧化方波电流脉冲电源的负载电路模型,并进行了电路参数的定量表征;根据等效电路中的参数变化规律,对应得到了各个参数的具体物理意义;进行电路仿真分析,其结果与源于实际工况测量的响应特性和参数变化规律相吻合,为适于负载特性变化的微弧氧化脉冲电源及系统效率优化提供了设计依据和仿真研究条件。
根据负载模型结构和定量参数,结合微弧氧化工艺实现条件,进行了电源脉冲作用效能分析,归纳了电源输出形式和波形参数对电能转化过程的影响规律。得出脉冲电流的前沿陡度对起弧速度具有决定性的影响;膜层击穿后仍然保持的电流既增加了系统的电能损耗,又是导致放电通道内的物质发生溅射的主要原因。在此基础上,对电源电流脉冲波形结构进行了优化,设计了具有电流尖峰形式输出的反激式电源实现方案,并进行了电源样机研制。通过仿真和实验,分别对方波脉冲电源和反激式脉冲电源进行功耗分析和对比,同时对本论文所建立的脉冲电源负载等效电路的合理性及其参数和反激式脉冲电源的优化效果进行了验证。为微弧氧化脉冲电源系统的优化设计提供了依据,进而为提高微弧氧化生产效率和电能转换效率提供了一种有效的方法。
Microarc oxidation (MAO) technology is an important research content of material surface modification that belongs to the crossing field of material engineering, electrochemical and power conversion technology. The uncertainty of oxidation mechanism and weakness of related basic theory research result in the mismatch between the output characteristics of MAO pulse power supply and its load which decrease the power conversion efficiency and machining efficiency. Induced high power consumption restricted the further research and industrial popularization and application of MAO technology. To definite the load characteristic of MAO pulse power supply and design the power supply matching to its load is the basic process problem to decrease the power consumption of MAO process. This paper carried on systematic researchs of the design and load electrical characteristic of MAO pulse power supply and the matching technology between power supply and its load.
Firstly, this paper researched the modeling and quantitative analysis of the load equivalent circuit of MAO pulse power supply combining of theory analysis, experimental study and numerical simulation. According to the discharge principle and characteristic in MAO process, the whole oxidation process was divided into various stages. Load circuit models of MAO pulse power supply by stages were built using electrochemical impedance spectroscopy (EIS) research method. It was concluded that the load of MAO pulse power supply is essentially the capacitive load of oxidation film that can equivalent to a network of resistance-capacity structure under current pulse.
Secondly, this paper designed the MAO square-wave constant current pulse power supply and researched its output forms and parameters design. A square-wave pulse power supply whose pulse width, amplitude and frequency can be regulated independently was put forward according to the requirements of MAO pulse power supply load characteristic and process. Paralleled unit structure BUCK-type circuit with constant current characteristic was designed. By parallel current sharing technology among constant current units, problems about amplitude regulation, capacity and redundancy were solved and modularization and high power output regulation of power supply were reached. Using inductance as the component of energy storage and conversion, pulse forming circuit was structured that can regulate the output frequency and pulse width and imply power supply to output pulse current with steep-wave rising edge. According to switching losses, a passive lossy buffer soft-switching circuit was designed to achieve ZCS and ZVS and decrease the switching loss and improve the operation condition of power switch tube. At maximum 250KV level, the parameters of main circuit and comprehensive control system with soft start and protection function to over voltage, over current and load open based on PLC were designed to prove the condition for the deep research of load characteristic and the implementation of natural important industry experiment project (PECC).
Thirdly, voltage characteristics of equivalent load circuit to current pulse step were analyzed and the response of pulse power supply load to its output was researched. By parameter fitting, combined with oxidation mechanism analysis, the load model of MAO square-wave pulse power supply was built and circuit parameters were quantitative characterized. Specific physical significances of various parameters were gained corresponding according variation law of equivalent circuit parameters. Simulation analysis were carried out and its result same as the response characteristic and parameter variation law under practical condition. Above research prove supports to the design of MAO pulse power supply and system efficiency optimization technically and in theory.
Finally, according to load model structure and quantitative parameters based on MAO process conditions, analysis about stress efficacy of power supply pulse and the effect of power supply output form and parameters to energy conversion law was inducted. Some conclusions were gained: the rising edge steepness of pulse current has decisive influence to arcing speed, keeping current after film breakdown increase the power loss of process system and result in the material sputtering from discharge channel. Current output form with steep-wave rising edge was put forward and flyback circuit with peak current form output was regulated. By simulation and experiment, power analysis and comparison between square-wave and flyback pulse power supply were carried out, the rationality of built pulse power supply load equivalent circuit and its parameters design were checked, and the matching relationship between the load model and the output form of pulse power supply were verified also. The research in this paper provided the foundation for the optimization of MAO pulse power supply, and it provided the method for the improvement of production efficiency and energy conversion efficiency in MAO process also.
引文
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