LD泵浦的全固态457nm蓝光激光器
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摘要
LD泵浦的全固态激光器(Laser diode pumped solid-state laser或DPSSL)是激光技术领域的一个重要分支，与传统激光器相比在重量、体积、电—光转换效率、使用寿命和稳定性方面更具优越性。目前，LD泵浦全固态激光器已实现了连续、调Q脉冲和锁模脉冲等激光运转模式，广泛应用于材料加工、医疗、光学仪器和基础研究等领域。
目前，LD泵浦的473nm全固态蓝光激光器已经基本成熟，但是在457nm的全固态蓝光激光器方面发展还不成熟，尚需在理论和实验上进行更进一步的研究，为此，本文对457nm蓝光进行了深入研究，取得了一些有价值的结果。
1．从整体结构出发，分析了LD端面泵浦激光器模式匹配问题。
2．采用标准ABCD传输矩阵理论，对激光器腔模式进行了详细的分析。
3．从激光晶体的准三能级特性出发，充分考虑增益与损耗之间的矛盾，选择出最佳晶体长度；对三种倍频晶体进行了比较，选择出LBO作为主要倍频晶体；对膜系进行了必要的分析。
4．LD泵浦Nd：YVO_4，Ⅰ类相位匹配LBO作为倍频晶体，在2W泵浦功率条件下，获得了65mW的连续457nm蓝光输出；采用腔内插入光阑的方法，有效克服了功率抖动，同时改善了光斑模式；实验中发现准三能级激光器存在两个空间模式匹配比例关系，并对这一现象给出了合理的解释。
Laser Diode pumped solid-state laser (DPSSL) is an important branchin laser technological field which is more advantageous on the weight, volume, efficiency of the electric-optic switch than traditional laser.Continuous wave, pulse operation, Q-switching and mode-locking operationhave been achieved for DPSSL which have a lot of uses in the field ofmaterial manufacture, medicine, optical instruments, basic study and so on.
Presently, the development of LD pumped 473nm, solid-state blue laseris almost mature but not 457nm, the theoretical and experimental research isvery necessary. Based on the present researches, some valuable results havebeen obtained:
1. Based on monolithic consideration, the problem of mode-matchingwas analyzed.
2. Introducing ABCD theory, the laser mode was analyzed. With thethermal effect consideration.
3. The optical length of crystal was achieved for the characteristics ofquasi-three-level. After comparing the three types of crystal, we select LBOas the main frequency doubler. Meanwhile, some necessary analysis aboutfilm were made, the other strong spectrum were restrained by suitablecoating.
4. LD-pumped Nd: YVO_4, LBO (type-Ⅰcritical phase matching)intra-cavity frequency doubled, blue laser at 457nm was obtained finally.Under the condition of 2W pump power, high power TEM_(00) mode blue laserat 457nm of 65m W was obtained. By means of inserting diaphragm intocavity, the power fluctuation and beam mode were improved; in theexperiments, the proportion of special mode matching in quasi-three-levellaser was discovered, and the phenomenon were explained reasonably.
目前，LD泵浦的473nm全固态蓝光激光器已经基本成熟，但是在457nm的全固态蓝光激光器方面发展还不成熟，尚需在理论和实验上进行更进一步的研究，为此，本文对457nm蓝光进行了深入研究，取得了一些有价值的结果。
1．从整体结构出发，分析了LD端面泵浦激光器模式匹配问题。
2．采用标准ABCD传输矩阵理论，对激光器腔模式进行了详细的分析。
3．从激光晶体的准三能级特性出发，充分考虑增益与损耗之间的矛盾，选择出最佳晶体长度；对三种倍频晶体进行了比较，选择出LBO作为主要倍频晶体；对膜系进行了必要的分析。
4．LD泵浦Nd：YVO_4，Ⅰ类相位匹配LBO作为倍频晶体，在2W泵浦功率条件下，获得了65mW的连续457nm蓝光输出；采用腔内插入光阑的方法，有效克服了功率抖动，同时改善了光斑模式；实验中发现准三能级激光器存在两个空间模式匹配比例关系，并对这一现象给出了合理的解释。
Laser Diode pumped solid-state laser (DPSSL) is an important branchin laser technological field which is more advantageous on the weight, volume, efficiency of the electric-optic switch than traditional laser.Continuous wave, pulse operation, Q-switching and mode-locking operationhave been achieved for DPSSL which have a lot of uses in the field ofmaterial manufacture, medicine, optical instruments, basic study and so on.
Presently, the development of LD pumped 473nm, solid-state blue laseris almost mature but not 457nm, the theoretical and experimental research isvery necessary. Based on the present researches, some valuable results havebeen obtained:
1. Based on monolithic consideration, the problem of mode-matchingwas analyzed.
2. Introducing ABCD theory, the laser mode was analyzed. With thethermal effect consideration.
3. The optical length of crystal was achieved for the characteristics ofquasi-three-level. After comparing the three types of crystal, we select LBOas the main frequency doubler. Meanwhile, some necessary analysis aboutfilm were made, the other strong spectrum were restrained by suitablecoating.
4. LD-pumped Nd: YVO_4, LBO (type-Ⅰcritical phase matching)intra-cavity frequency doubled, blue laser at 457nm was obtained finally.Under the condition of 2W pump power, high power TEM_(00) mode blue laserat 457nm of 65m W was obtained. By means of inserting diaphragm intocavity, the power fluctuation and beam mode were improved; in theexperiments, the proportion of special mode matching in quasi-three-levellaser was discovered, and the phenomenon were explained reasonably.
引文
1 R. Newman. Excitation of the Nd~(3+) fluorescence in CaWO_4 by recombination radiation in GaAs. J. Appl. Phys.,1963,34(2):437～439.
2 R. J. Keyes and L. M. Quist. Injection luminescent pumping of CaF2:U 3+ with GaAs Lasers.Appl.Phys.Lett. 1974, 4: 50～52.
3 M. Ross. YAG laser operation by semiconductor laser pumping.Proc.IEEE, 1968, 56:196
4 L.C. Conant and C.W. GaAs laser diode pumped Nd:YAG laser. Appl.Opt., 1974, 13: 2457～2458.
5 J.E.Jackson and R.R.Rice, Output fluctuations of high-frequency Pulse-pumped Nd:YAG laser. J.Appl.Phys. 1974,45: 2353～2355.
6 K.Kubodera and J.Noda. Pure single-mode LiNdP_4O_(12) solid-state laser transmitter for 1.3μm fiber-optic communications. Appl.Opt., 1982, 27(19): 3466～3469.
7 B.Zhou, T.J.Kane et al.. Efficient frequency-state laser diode pumped Nd:YAG laser. Opt, Lett., 1985,10(2): 62～64
8 T. Baer. Intracavity doubling of a Nd:YAG laser pumped by a laser diode array. Proc. of Conf Laser Electron-opt. Soc. Amer. Wshington DC., 1985,paper ThZZI
9 W.P. Risk, J.C.Baumert, G. C. Bjorklund. Generation of blue light by intracavity frequency mixing of the laser and pump radiation of a miniature meodymium: yttrium aluminum garnet lasers. Appl.Phys.Lett., 1988,52:85～87.
10 B.Zhou, T.J.Kane et al.. Efficient frequency-state laser diode pumped Nd:YAG laser. Opt, Lett., 1985,10(2): 62～64
11 T. Baer. Intracavity doubling of a Nd:YAG laser pumped by a laser diode array. Proc. of Conf Laser Electron-opt. Soc. Amer. Wshington DC., 1985,paper ThZZI
12 Y. F. Chen, S. W. Tsai.Diode-pumped Q-switched Nd:YVO_4 yellow laser with intraeavity sum-frequency mixing. Opt.Lett,2002,27(6):397～399
13 M. K. Linne. Q-switching of diode pumped solid state laser. In Tech. Eig. Conf. Laser Electron-opt. Soe. Amer. Washington DC., 1987,paper WS3
14 I.P.Alcock. Mode-locking and Q-switching of an optical pumped miniature Nd:YAG laser. Opt. Commun., 1986,58(6):417～419
15 Tetsuo Kojima.,20-W ultraviolet-beam generation by fourth-harmonic generation of all-solid-state laser.[J]opties letters,2000,v25(1):58～60
16 www.coherent.com.cn(相干公司网页)
17 郑权，钱龙生．我国中低功率LD泵浦全国固态激光器的研制与开发．光机电信息，2001，1：20～23
18 Jack M.Gill. Lasers: A 40-Year Perspective. IEEE Journal on Selected Topics in Quantum Electronics, 2000, 6(6): 1111～1115
19 D. Fluck, P.gunter. Efficient generation of CW blue light by sum-frequency mixing of laser diodes in KNbO_3. Optics Communications, 1997, 136:257～260
20 D.Fluck, P.gunter. Second-harmonic generation by lens wave-gilding in KNbO_3 crystals. Optics Communications, 1998, 147:305～308
21 A.Ashkin, G.D.Boyd, J.M.Dziedzic. Resonant optical second harmonic generation and mixing. IEEE Journal of Quantum Electronics, 1966, 2(6): 109～124
22 Xiao Guang Sun, John L. Carlsten. Low-noise blue light source with large frequency-scanning range from frequency doubling of a diode laser. J. Opt. Soc. Am. B, 2001, 18(3): 281～285
23 T.Y.Fan, R.L, Byer. Model and CW operation of a quasi-three-level 946nm Nd:YAG laser, IEEE Journal of Quantum Electronics, 1987, 23, 605～612
24 T.Y.Fan, R.L,Byer. Continuous-wave operation of a room-temperature, diode-laser-pumped, 946-nm Nd:YAG laser, Optics Letters, 1987, 12(10), 809～811
25 W.P.Risk. Modeling of longitudinally pumped solid-state lasers exhibiting reabsorption losses. J.Opt.Xoc.Am.B, 1988, 5(7): 1412～1423
26 刘伟仁，钱龙生，檀慧明等．LD泵浦的946nm Nd：YAG激光器及腔内倍频473nm蓝光输出．激光杂志，2000，21(3)：12～13．
27 M. Pierrou and F. Laurell. Generation of 740mW of blue light by intracavity frequency doubling with a first-order quasi-phase-matched KTiOPO_4 crystal. Optics Letters, 1999; 24(4):205～207
28 C. Czeranowsky, M. Schmidt, E. Heumarm, G. Huber, S. Kutovoi and Y. Zavartsev. Continuous wave diode pumped intracavity doubled Nd:GdVO_4 laser with 840mW output power at 456nm. Optics Communications, 2002; 20 (5):361～365
29 檀慧明．全固态蓝光激光器的产品技术与市场应用．激光产品世界，2003，5(5)：13～20
30 郑权，王军营．LD泵浦473nm全固态蓝光激光器的研究进展．激光产品世界，2003，5(5)：28～33
31 戴特立．半导体二极管泵浦固体激光器，四川大学出版社，1993
32 郑加安，赵圣之，晶体热效应对LD端面泵浦固体激光器优化设计的影响，光子学报，2001，30(6)：724～729
33 郑加安，赵圣之，LD端面泵浦Nd：YAG激光器热效应研究，光子学报，2000，29(12)：1121～1126
34 Raymond J. Beach, CW Theory of quasi-three level end-pumped laser oscillators, Optic communication 1996, 385～393
35 周炳昆，激光原理，国防工业出版社 2000，71～75
36 吕百达著．激光光学．四川大学出版社，第二版，1992：292～295
37 W．克希耐尔著，孙文等译．《固体激光工程》，科学出版社2002年，第一版：273
38 New products. Laser Focus World, 2003, 39(6): 178
39 W．克希耐尔著，孙文等译．《固体激光工程》，科学出版社2002年，第一版：55
40 T. Y. Fan, R. L. Byer. Diode-laser-pumped solid state lasers. IEEE Journal of Quantum Electronics, 1988, 24(6):895～912
41 特立．半导体二极管泵浦固体激光器，四川大学出版社，1993：44～45
42 M. Oka, S. Kubota. Stable intra-cavity doubling of orthogonal linearly polarized mode in diode-pumped Nd:YAG lasers. Opt. Lett., 1988, 13 (10):805～807
43 W．克希耐尔著，孙文等译．《固体激光工程》，科学出版社2002年，第一版：55
44 W．克希耐尔(著)，孙文(译)．固体激光工程[M]．科学出版社，2002：14～18
45 TSO YEE FAN, Modeling and CW Operation of Quasi-Three-Level 946nm Nd:YAG Laser, IEEE JORNAL OF QUANTUM ELECTRONICS, 1987, 23(5):605～612
46 孟红祥，中国科学院长春光学精密机械与物理研究所博士学位论文．1998：
47 蓝信钜．激光技术[M]．第一版．北京：科学出版社，2001：219～236
48 郑权，中国科学院长春光学精密机械与物理研究所博士学位论文．2002
49 W．克希耐尔(著)，孙文(译)．固体激光工程[M]．科学出版社，2002：189～196
50 TSO YEE FAN, Modeling and CW Operation of Quasi-Three-Level 946nm Nd:YAG Laser, IEEE JORNAL OF QUANTUM ELECTRONICS, 1987, 23(5):605～612
51 冯衍，LD抽运Nd：YVO4晶体中的上转换及其影响[J]。物理学报，2001，50(2)：335～340
2 R. J. Keyes and L. M. Quist. Injection luminescent pumping of CaF2:U 3+ with GaAs Lasers.Appl.Phys.Lett. 1974, 4: 50～52.
3 M. Ross. YAG laser operation by semiconductor laser pumping.Proc.IEEE, 1968, 56:196
4 L.C. Conant and C.W. GaAs laser diode pumped Nd:YAG laser. Appl.Opt., 1974, 13: 2457～2458.
5 J.E.Jackson and R.R.Rice, Output fluctuations of high-frequency Pulse-pumped Nd:YAG laser. J.Appl.Phys. 1974,45: 2353～2355.
6 K.Kubodera and J.Noda. Pure single-mode LiNdP_4O_(12) solid-state laser transmitter for 1.3μm fiber-optic communications. Appl.Opt., 1982, 27(19): 3466～3469.
7 B.Zhou, T.J.Kane et al.. Efficient frequency-state laser diode pumped Nd:YAG laser. Opt, Lett., 1985,10(2): 62～64
8 T. Baer. Intracavity doubling of a Nd:YAG laser pumped by a laser diode array. Proc. of Conf Laser Electron-opt. Soc. Amer. Wshington DC., 1985,paper ThZZI
9 W.P. Risk, J.C.Baumert, G. C. Bjorklund. Generation of blue light by intracavity frequency mixing of the laser and pump radiation of a miniature meodymium: yttrium aluminum garnet lasers. Appl.Phys.Lett., 1988,52:85～87.
10 B.Zhou, T.J.Kane et al.. Efficient frequency-state laser diode pumped Nd:YAG laser. Opt, Lett., 1985,10(2): 62～64
11 T. Baer. Intracavity doubling of a Nd:YAG laser pumped by a laser diode array. Proc. of Conf Laser Electron-opt. Soc. Amer. Wshington DC., 1985,paper ThZZI
12 Y. F. Chen, S. W. Tsai.Diode-pumped Q-switched Nd:YVO_4 yellow laser with intraeavity sum-frequency mixing. Opt.Lett,2002,27(6):397～399
13 M. K. Linne. Q-switching of diode pumped solid state laser. In Tech. Eig. Conf. Laser Electron-opt. Soe. Amer. Washington DC., 1987,paper WS3
14 I.P.Alcock. Mode-locking and Q-switching of an optical pumped miniature Nd:YAG laser. Opt. Commun., 1986,58(6):417～419
15 Tetsuo Kojima.,20-W ultraviolet-beam generation by fourth-harmonic generation of all-solid-state laser.[J]opties letters,2000,v25(1):58～60
16 www.coherent.com.cn(相干公司网页)
17 郑权，钱龙生．我国中低功率LD泵浦全国固态激光器的研制与开发．光机电信息，2001，1：20～23
18 Jack M.Gill. Lasers: A 40-Year Perspective. IEEE Journal on Selected Topics in Quantum Electronics, 2000, 6(6): 1111～1115
19 D. Fluck, P.gunter. Efficient generation of CW blue light by sum-frequency mixing of laser diodes in KNbO_3. Optics Communications, 1997, 136:257～260
20 D.Fluck, P.gunter. Second-harmonic generation by lens wave-gilding in KNbO_3 crystals. Optics Communications, 1998, 147:305～308
21 A.Ashkin, G.D.Boyd, J.M.Dziedzic. Resonant optical second harmonic generation and mixing. IEEE Journal of Quantum Electronics, 1966, 2(6): 109～124
22 Xiao Guang Sun, John L. Carlsten. Low-noise blue light source with large frequency-scanning range from frequency doubling of a diode laser. J. Opt. Soc. Am. B, 2001, 18(3): 281～285
23 T.Y.Fan, R.L, Byer. Model and CW operation of a quasi-three-level 946nm Nd:YAG laser, IEEE Journal of Quantum Electronics, 1987, 23, 605～612
24 T.Y.Fan, R.L,Byer. Continuous-wave operation of a room-temperature, diode-laser-pumped, 946-nm Nd:YAG laser, Optics Letters, 1987, 12(10), 809～811
25 W.P.Risk. Modeling of longitudinally pumped solid-state lasers exhibiting reabsorption losses. J.Opt.Xoc.Am.B, 1988, 5(7): 1412～1423
26 刘伟仁，钱龙生，檀慧明等．LD泵浦的946nm Nd：YAG激光器及腔内倍频473nm蓝光输出．激光杂志，2000，21(3)：12～13．
27 M. Pierrou and F. Laurell. Generation of 740mW of blue light by intracavity frequency doubling with a first-order quasi-phase-matched KTiOPO_4 crystal. Optics Letters, 1999; 24(4):205～207
28 C. Czeranowsky, M. Schmidt, E. Heumarm, G. Huber, S. Kutovoi and Y. Zavartsev. Continuous wave diode pumped intracavity doubled Nd:GdVO_4 laser with 840mW output power at 456nm. Optics Communications, 2002; 20 (5):361～365
29 檀慧明．全固态蓝光激光器的产品技术与市场应用．激光产品世界，2003，5(5)：13～20
30 郑权，王军营．LD泵浦473nm全固态蓝光激光器的研究进展．激光产品世界，2003，5(5)：28～33
31 戴特立．半导体二极管泵浦固体激光器，四川大学出版社，1993
32 郑加安，赵圣之，晶体热效应对LD端面泵浦固体激光器优化设计的影响，光子学报，2001，30(6)：724～729
33 郑加安，赵圣之，LD端面泵浦Nd：YAG激光器热效应研究，光子学报，2000，29(12)：1121～1126
34 Raymond J. Beach, CW Theory of quasi-three level end-pumped laser oscillators, Optic communication 1996, 385～393
35 周炳昆，激光原理，国防工业出版社 2000，71～75
36 吕百达著．激光光学．四川大学出版社，第二版，1992：292～295
37 W．克希耐尔著，孙文等译．《固体激光工程》，科学出版社2002年，第一版：273
38 New products. Laser Focus World, 2003, 39(6): 178
39 W．克希耐尔著，孙文等译．《固体激光工程》，科学出版社2002年，第一版：55
40 T. Y. Fan, R. L. Byer. Diode-laser-pumped solid state lasers. IEEE Journal of Quantum Electronics, 1988, 24(6):895～912
41 特立．半导体二极管泵浦固体激光器，四川大学出版社，1993：44～45
42 M. Oka, S. Kubota. Stable intra-cavity doubling of orthogonal linearly polarized mode in diode-pumped Nd:YAG lasers. Opt. Lett., 1988, 13 (10):805～807
43 W．克希耐尔著，孙文等译．《固体激光工程》，科学出版社2002年，第一版：55
44 W．克希耐尔(著)，孙文(译)．固体激光工程[M]．科学出版社，2002：14～18
45 TSO YEE FAN, Modeling and CW Operation of Quasi-Three-Level 946nm Nd:YAG Laser, IEEE JORNAL OF QUANTUM ELECTRONICS, 1987, 23(5):605～612
46 孟红祥，中国科学院长春光学精密机械与物理研究所博士学位论文．1998：
47 蓝信钜．激光技术[M]．第一版．北京：科学出版社，2001：219～236
48 郑权，中国科学院长春光学精密机械与物理研究所博士学位论文．2002
49 W．克希耐尔(著)，孙文(译)．固体激光工程[M]．科学出版社，2002：189～196
50 TSO YEE FAN, Modeling and CW Operation of Quasi-Three-Level 946nm Nd:YAG Laser, IEEE JORNAL OF QUANTUM ELECTRONICS, 1987, 23(5):605～612
51 冯衍，LD抽运Nd：YVO4晶体中的上转换及其影响[J]。物理学报，2001，50(2)：335～340