Integral Sliding Mode Based Optimal Composite Nonlinear Feedback Control for Capacitive Micromachined Ultrasonic Transducers(CMUTs) System
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- 英文论文题名：Integral Sliding Mode Based Optimal Composite Nonlinear Feedback Control for Capacitive Micromachined Ultrasonic Transducers(CMUTs) System
- 论文作者：Yi Qin ; Weijie Sun ; John T.W.Yeow
- 英文论文作者：Yi Qin ; Weijie Sun ; John T.W.Yeow ; College of Automation Science and Engineering ; South China University of Technology ; Systems Design Engineering ; University of Waterloo
- 年：2017
- 作者机构：College of Automation Science and Engineering,South China University of Technology;Systems Design Engineering,University of Waterloo;
- 英文论文关键词：CNF ; ISM ; MEMS ; CMUTs ; Robust ; Feedback Control
- 会议召开时间：2017-07-26
- 会议录名称：第36届中国控制会议论文集（A）
- 英文会议录名称：Proceedings of the 36th Chinese Control Conference（A）
- 语种：英文
- 分类号：TB552;TP273
- 学会代码：KZLL
- 会议名称：第36届中国控制会议
- 会议地点：中国辽宁大连
- 主办单位：中国自动化学会控制理论专业委员会
- 学会名称：中国自动化学会控制理论专业委员会
- 页数：6
- 文件大小：263k
- 原文格式：D
- 会议级别：全国
摘要
This paper originally applied an optimal sliding mode based optimal composite nonlinear feedback(ISM-CNF) control strategy to the capacitive micromachined ultrasonic transducers(CMUTs) system. It is known that CMUTs system is inherently unstable which results in pull-in phenomenon and sensitive to a small perturbations. Therefore the major problem is to stablize the CMUTS system beyond the pull-in limit with the external disturbances and input saturation. We verified the effectiveness by CNF and optimal ISM-CNF control methods through extending the travel range of the CMUTs gap. The simulation results show the optimal ISM-CNF control law which achieves robustness, quick response, negligible overshoot and extends the travel range to 90% of the initial gap is better than CNF control law in CMUTs system.
This paper originally applied an optimal sliding mode based optimal composite nonlinear feedback(ISM-CNF) control strategy to the capacitive micromachined ultrasonic transducers(CMUTs) system. It is known that CMUTs system is inherently unstable which results in pull-in phenomenon and sensitive to a small perturbations. Therefore the major problem is to stablize the CMUTS system beyond the pull-in limit with the external disturbances and input saturation. We verified the effectiveness by CNF and optimal ISM-CNF control methods through extending the travel range of the CMUTs gap. The simulation results show the optimal ISM-CNF control law which achieves robustness, quick response, negligible overshoot and extends the travel range to 90% of the initial gap is better than CNF control law in CMUTs system.
This paper originally applied an optimal sliding mode based optimal composite nonlinear feedback(ISM-CNF) control strategy to the capacitive micromachined ultrasonic transducers(CMUTs) system. It is known that CMUTs system is inherently unstable which results in pull-in phenomenon and sensitive to a small perturbations. Therefore the major problem is to stablize the CMUTS system beyond the pull-in limit with the external disturbances and input saturation. We verified the effectiveness by CNF and optimal ISM-CNF control methods through extending the travel range of the CMUTs gap. The simulation results show the optimal ISM-CNF control law which achieves robustness, quick response, negligible overshoot and extends the travel range to 90% of the initial gap is better than CNF control law in CMUTs system.
引文
[1]S.Na,Capacitive micromachined ultrasonic transducers based on annular cell geometry for air-coupled applications Ultrasonics,71:152–160,2016.
[2]M.I.Haller,A Surface Micromachined Electrostatic Ultrasonic Air Transducer IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control,43(1):1–6,1996.
[3]Y.Huang,Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology Journal of Microelectromechanical Systems,12(2):128–137,2003.
[4]T.A.Emadi,Multiple Moving Membrane CMUT With Enlarged Membrane Displacement and Low Pull-Down Voltage IEEE Electron Device Letters,34(12):1578–1580,2013.
[5]S.Satir,Harmonic reduction in capacitive micromachined ultrasonic transducers by gap feedback linearization.Ultrasonics Ferroelectrics and Frequency Control IEEE Trasactions on,59(1):50–59,2012.
[6]H.Chen,Second-order sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes Journal of Micromechanics and Microengineering,23(1):015006,2013.
[7]M.Xin,Adaptive vibration control for MEMS vibratory gyroscope using backstepping sliding mode control Journal of Vibration and Control,21(4):808–817,2015.
[8]H.Fujita,Microactuators and Micromachines.in Proc.of the IEEE,86(8):1721–1732,1998.
[9]J.Seeger,Charge Control of Parallel plate,Electrostatic Actuators and the Tip in Instability.Journal of MEMS,2(5):656–671,2003.
[10]E.Chan,Electrostatic Micromechanical Actuator with Extended Range of Travel.Journal of MEMS,9(3):321–328,2000.
[11]M.Lu,Position Control of Parallel-plate Microactuators for Probe-based Data Storage.Journal of MEMS,13(5):59–769,2004.
[12]G.Zhu,Flatness-based Control of Electrostatically Actuated MEMS with Application to Adaptive Optics:a Simulation Study.Journal of MEMS,15(5):1165–1174,2006.
[13]W.Zhou,A 1-D lumped theoretical model for CMUT.IEEE ASME International Conference on Advanced intelligent Mechatronics,AIM:318–322,2008.
[14]L.Dong,Closed-loop Voltage Control of a Parallel-plate MEMS Electrostatic Actuator American Control Conference,15(5):3409–3414,2010.
[15]G.Zhu,Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainty,in Proc.of the 2006 American Control Conference,1233–1238,2006.
[16]Y.He,Composite nonlinear control with state and measurement feedback for general multivariable systems with input saturation.Systems and Control Letters,54(5):455–469,2005.
[17]W.Lan,On selection of nonlinear gain in composite nonlinear feedback control for a class of linear systems.Proceedings of the 46th IEEE Conference on Decision and Control,1198–1203,2006.
[18]F.Castanos,Analysis and design of integral sliding manifolds for systems with unmatched perturbations.IEEE Transactions on Automatic Control,51(5):853–858,2006.
[19]P.Bhavsar,Trajectory tracking of linear inverted pendulum using integral sliding mode control.International Journal of Intelligent Systems and Applications,4(6):31,2012.
[20]B.Bandyopadhyay,A robust algorithm against actuator saturation using integral sliding mode and composite nonlinear feedback.Proceedings of the 17th International Fe-dration of Automatic Control World Congress,Seoul:IFAC,2008:14174–14179.
[21]B.M.Chen,Composite nonlinear feedback control for linear systems with input saturation:theory and an application.IEEE Transactions on Automatic Control,48(3):427–439,2003.
[22]Y.X,Optimal composite nonlinear feedback control for a gantry crane system.Chinese Control Conference.IEEE,Hefei:601–606,2012.
[23]D.Graham,The synthesis of optimum transient response:criteria and standard forms.Transactions of the American Institute of Electrical Engineers C Part II:Applications and Industry,72(5):273–288,1953.
[2]M.I.Haller,A Surface Micromachined Electrostatic Ultrasonic Air Transducer IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control,43(1):1–6,1996.
[3]Y.Huang,Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology Journal of Microelectromechanical Systems,12(2):128–137,2003.
[4]T.A.Emadi,Multiple Moving Membrane CMUT With Enlarged Membrane Displacement and Low Pull-Down Voltage IEEE Electron Device Letters,34(12):1578–1580,2013.
[5]S.Satir,Harmonic reduction in capacitive micromachined ultrasonic transducers by gap feedback linearization.Ultrasonics Ferroelectrics and Frequency Control IEEE Trasactions on,59(1):50–59,2012.
[6]H.Chen,Second-order sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes Journal of Micromechanics and Microengineering,23(1):015006,2013.
[7]M.Xin,Adaptive vibration control for MEMS vibratory gyroscope using backstepping sliding mode control Journal of Vibration and Control,21(4):808–817,2015.
[8]H.Fujita,Microactuators and Micromachines.in Proc.of the IEEE,86(8):1721–1732,1998.
[9]J.Seeger,Charge Control of Parallel plate,Electrostatic Actuators and the Tip in Instability.Journal of MEMS,2(5):656–671,2003.
[10]E.Chan,Electrostatic Micromechanical Actuator with Extended Range of Travel.Journal of MEMS,9(3):321–328,2000.
[11]M.Lu,Position Control of Parallel-plate Microactuators for Probe-based Data Storage.Journal of MEMS,13(5):59–769,2004.
[12]G.Zhu,Flatness-based Control of Electrostatically Actuated MEMS with Application to Adaptive Optics:a Simulation Study.Journal of MEMS,15(5):1165–1174,2006.
[13]W.Zhou,A 1-D lumped theoretical model for CMUT.IEEE ASME International Conference on Advanced intelligent Mechatronics,AIM:318–322,2008.
[14]L.Dong,Closed-loop Voltage Control of a Parallel-plate MEMS Electrostatic Actuator American Control Conference,15(5):3409–3414,2010.
[15]G.Zhu,Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainty,in Proc.of the 2006 American Control Conference,1233–1238,2006.
[16]Y.He,Composite nonlinear control with state and measurement feedback for general multivariable systems with input saturation.Systems and Control Letters,54(5):455–469,2005.
[17]W.Lan,On selection of nonlinear gain in composite nonlinear feedback control for a class of linear systems.Proceedings of the 46th IEEE Conference on Decision and Control,1198–1203,2006.
[18]F.Castanos,Analysis and design of integral sliding manifolds for systems with unmatched perturbations.IEEE Transactions on Automatic Control,51(5):853–858,2006.
[19]P.Bhavsar,Trajectory tracking of linear inverted pendulum using integral sliding mode control.International Journal of Intelligent Systems and Applications,4(6):31,2012.
[20]B.Bandyopadhyay,A robust algorithm against actuator saturation using integral sliding mode and composite nonlinear feedback.Proceedings of the 17th International Fe-dration of Automatic Control World Congress,Seoul:IFAC,2008:14174–14179.
[21]B.M.Chen,Composite nonlinear feedback control for linear systems with input saturation:theory and an application.IEEE Transactions on Automatic Control,48(3):427–439,2003.
[22]Y.X,Optimal composite nonlinear feedback control for a gantry crane system.Chinese Control Conference.IEEE,Hefei:601–606,2012.
[23]D.Graham,The synthesis of optimum transient response:criteria and standard forms.Transactions of the American Institute of Electrical Engineers C Part II:Applications and Industry,72(5):273–288,1953.