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Nonlinear cross-coupling of a 2-DOF piezoelectric actuator with multi-channel Hammerstein model
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摘要
Commercial piezoelectric actuated stages usually has been decoupling designed from the mechanical structure. This paper develops a piezoelectric actuated stage(P-563.3CD) experiment platform. Observed cross-coupling effect in the piezostage is below 1%. In order to improve the performance of piezo-stage in a further step, a multi-channel Hammerstein model is developed to describe the cross-coupling nonlinearity. Further more, the position voltage is introduced into Hammerstein model to modify the performance of the proposed approach. To the end, verification experiments are exhibited.
Commercial piezoelectric actuated stages usually has been decoupling designed from the mechanical structure. This paper develops a piezoelectric actuated stage(P-563.3CD) experiment platform. Observed cross-coupling effect in the piezostage is below 1%. In order to improve the performance of piezo-stage in a further step, a multi-channel Hammerstein model is developed to describe the cross-coupling nonlinearity. Further more, the position voltage is introduced into Hammerstein model to modify the performance of the proposed approach. To the end, verification experiments are exhibited.
引文
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