微波电真空器件的电子枪预处理工艺与装置
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摘要
微波真空电子器件广泛应用于雷达、卫星通信、电子加速器及未来军事前沿的高功率微波武器等方面,担当电子发射的阴极是微波真空电子器件中最为核心的部分,微波真空电子器件中电子枪的绝缘性能一般与电子枪的结构、阴极蒸发水平、及阴极预处理等工艺有关。当电子枪的结构、阴极蒸发水平一定的条件下,影响电子枪绝缘性能的主要因素是电子枪预处理工艺。本文总结了热阴极的蒸发规律;研究了用于微波真空电子器件的电子枪预处理方法。采用在高真空环境下,将电子枪中阴极灯丝缓慢加热,当阴极温度升高到1100℃--1200℃时,保持1—200小时(温度和时间依不同微波管型而定)。这一工艺的建立,解决了电子枪中热阴极发射与蒸发矛盾,现在已建立数十台几十个工位的电子枪预处理设备。本工艺提高了微波真空电子器件中电子枪的绝缘性能、减小了漏电、减小了栅发射。同时通过电子枪的预处理工艺可以加速检验热子的可靠性从而避免微波器件使用过程中才发现热子短路、热子缺陷、热子焊接点不牢等因素造成热子断路的问题,提高了微波真空电子器件中热子的可靠性。
引文
1廖复疆.大功率微波真空电子学技术进.电子学报,2006,313(3):513-516]
2 Shin Y M,Barnett L R,Gamzina D,Lhmann N C.Terahertz vacuum electronic circuits fabricated by UV lithographic molding and reactive ion etching.Appl.Phys.Lett..,2009,95(18):181 505-1-181505-3
3 Chu K R.The electron cycltron maser.Rev.Mod.Phs.,2004,76:2489-540
4 Sirigiri J R,Shaprio M A and Temkin R.High power 140 GHz quasi-optical gyrotron travelling wave amplifier.Phys.Rev.lett.,2003,90(25):56 302
5刘燕文,王小霞,纳米粒子薄膜热电子发射性能.中国科学信息科,2015,45(1):145-156.
6 Liu Y W,Tian H,Han Y.Study on the emission properties of the impregnated cathode with nanoparticle films.IEEE Trans.Electr.Devices,2012,59:3618-3624
7 Li Ji,Yu Zhiqiang,Shao Wensheng,et al.High current density M-type cathodes for vacuum electron devices[J].Appl Surf Sci,25(2005)151-158
8 WangX X,Liao X H and Luo J R.Study on the Ni-Re-Ir Sponge Oxide Cathode.IEEE.Trans.Electr.Devices,2012,59(2):492-495
9 Liu Y W,Tian H.The temperature variation of a thermionic cathode during electron emission.Sciende in China E,2008,51(9):1497-1501
10 Shao Wensheng,Zhang Ke,Li Ji,et al.Gas poisoning investigations of scandate and M-type dispenser cathodes.Appl Surf Sci,215(2003)54-58
11 Wang J S,Zhang X Z,Liu W,Wang Y M.High current density Sc_2O_3-W matrix dispenser cathode.Science China Information Sciences,2012,55(1)98-105
12刘燕文,田宏,韩勇.支取发射电流对热阴极温度影响的研究.中国科学E,2008,38:1515-1520]
13 Isagawa S,Higuchi T,Kobayashi K,Miyake S.Application of M-type cathodes to high-power cwklystrons.Appl.Surf.Sci.,1999,146(1):89-96.
14 Ives R L,Falce L R,Miram G and Collins G Controlled porosity catlodes for high-current-density application.IEEE Trans.Plasma Science,2010,38(5):1345-1353.
15刘燕文,田宏,韩勇.发射均匀的覆纳米粒子薄膜阴极的研究.物理学报,2009,58:535-542
16 Chiba A and Akiyama Y.Life test evaluation of 411M cathode for highly reliable satellite TWTs.Appl.Surf.Sci.,1999,146(5):120-125.
17刘燕文,王小霞,陆玉新,田宏,朱虹,孟鸣凤,用于电真空器件的金属材料蒸发特性,物理学报,2016,65(63):068502-1-7
18 Mingchen Zhang,Yanwen Liu,Shiji Yu,Life Test Studies on Dispenser Cathode with Dual-layer Porous Tungsten,IEEE Transactions on Electron Devices,2014,61(8):2983-2988
19刘燕文,田宏,韩勇.利用飞行时间质谱研究热阴极蒸发特性.真空科学与技术学报,2007,27(5):437-441
20刘燕文,邓峰等,一种电子枪中热阴极预处理方法,发明专利,专利号:201210072672.4
2 Shin Y M,Barnett L R,Gamzina D,Lhmann N C.Terahertz vacuum electronic circuits fabricated by UV lithographic molding and reactive ion etching.Appl.Phys.Lett..,2009,95(18):181 505-1-181505-3
3 Chu K R.The electron cycltron maser.Rev.Mod.Phs.,2004,76:2489-540
4 Sirigiri J R,Shaprio M A and Temkin R.High power 140 GHz quasi-optical gyrotron travelling wave amplifier.Phys.Rev.lett.,2003,90(25):56 302
5刘燕文,王小霞,纳米粒子薄膜热电子发射性能.中国科学信息科,2015,45(1):145-156.
6 Liu Y W,Tian H,Han Y.Study on the emission properties of the impregnated cathode with nanoparticle films.IEEE Trans.Electr.Devices,2012,59:3618-3624
7 Li Ji,Yu Zhiqiang,Shao Wensheng,et al.High current density M-type cathodes for vacuum electron devices[J].Appl Surf Sci,25(2005)151-158
8 WangX X,Liao X H and Luo J R.Study on the Ni-Re-Ir Sponge Oxide Cathode.IEEE.Trans.Electr.Devices,2012,59(2):492-495
9 Liu Y W,Tian H.The temperature variation of a thermionic cathode during electron emission.Sciende in China E,2008,51(9):1497-1501
10 Shao Wensheng,Zhang Ke,Li Ji,et al.Gas poisoning investigations of scandate and M-type dispenser cathodes.Appl Surf Sci,215(2003)54-58
11 Wang J S,Zhang X Z,Liu W,Wang Y M.High current density Sc_2O_3-W matrix dispenser cathode.Science China Information Sciences,2012,55(1)98-105
12刘燕文,田宏,韩勇.支取发射电流对热阴极温度影响的研究.中国科学E,2008,38:1515-1520]
13 Isagawa S,Higuchi T,Kobayashi K,Miyake S.Application of M-type cathodes to high-power cwklystrons.Appl.Surf.Sci.,1999,146(1):89-96.
14 Ives R L,Falce L R,Miram G and Collins G Controlled porosity catlodes for high-current-density application.IEEE Trans.Plasma Science,2010,38(5):1345-1353.
15刘燕文,田宏,韩勇.发射均匀的覆纳米粒子薄膜阴极的研究.物理学报,2009,58:535-542
16 Chiba A and Akiyama Y.Life test evaluation of 411M cathode for highly reliable satellite TWTs.Appl.Surf.Sci.,1999,146(5):120-125.
17刘燕文,王小霞,陆玉新,田宏,朱虹,孟鸣凤,用于电真空器件的金属材料蒸发特性,物理学报,2016,65(63):068502-1-7
18 Mingchen Zhang,Yanwen Liu,Shiji Yu,Life Test Studies on Dispenser Cathode with Dual-layer Porous Tungsten,IEEE Transactions on Electron Devices,2014,61(8):2983-2988
19刘燕文,田宏,韩勇.利用飞行时间质谱研究热阴极蒸发特性.真空科学与技术学报,2007,27(5):437-441
20刘燕文,邓峰等,一种电子枪中热阴极预处理方法,发明专利,专利号:201210072672.4