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超高温压电晶体生长、表征及应用
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摘要
针对温度高于500oC的加速度传感器和温度传感器等超高温体声波和声表面波应用,本文开展了硅酸镓镧(La_3Ga_5SiO_(14))系列、硼酸氧钙钇(YCa_4O(BO_3)_3)系列、钙铝黄长石(Ca_2Al_2Si O_7)、硅钛钡石(Ba_2TiSi_2O_8)等超高温压电晶体的设计筛选与生长制备,并开展了以上晶体在不同温度下的电阻率、压电系数、介电常数、弹性常数等相关高温压电性能测试表征,最后在加速度传感器和温度传感器以及粘度传感器中开展了应用验证。
Aim to the application in high temperature accelerometers and temperature sensors whatever in BAW or in SAW up to above 500oC, various crystals of langasite family, yttrium calcium oxyborate family, gehlenite and fresnoite were sieved and synthesized. And the related properties of electric resistivity, piezoelectric constant and dielectric loss under different temperatures of as-grown crystals were characterized. Their usage in accelerometers, temperature sensors, and viscosity sensors were conducted.
引文
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