Love型声表面波反射系数的理论研究

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• 英文论文题名：A theoretical research on the reflection coefficient in Love mode surface acoustic wave
• 论文作者：齐晓琳 ; 刘建生 ; 何世堂
• 英文论文作者：QI Xiao-lin ; LIU Jian-sheng ; HE Shi-tang ; Institute of Acoustics ; Chinese Academy of Sciences
• 年：2016
• 作者机构：中国科学院声学研究所;
• 论文关键词：Love波 ; 分层介质理论 ; 耦合模模型 ; 变分原理
• 英文论文关键词：Love wave ; theory of layered structure ; coupling-of-modes(COM) model ; variational principle
• 会议召开时间：2016-10-28
• 会议录名称：2016年全国声学学术会议论文集
• 语种：中文
• 分类号：O42
• 学会代码：OGSM
• 会议名称：2016年全国声学学术会议
• 会议地点：中国湖北武汉
• 主办单位：中国声学学会
• 学会名称：中国声学学会
• 页数：4
• 文件大小：419k
• 原文格式：D
• 会议级别：全国

摘要

利用分层介质理论,精确求解了压电基片、金属膜和覆盖层中的声波传播特性,计算出Love型声表面波传播速度和机电耦合系数。结合变分原理和耦合模理论,分析了短路栅阵中声表面波的传播特性,得到了有覆盖层的声表面波器件的反射系数计算公式,计算了在ST-90°X基片上覆盖SU8波导层的铝电极栅阵的耦合模模型参量。为进一步优化设计低损耗、高灵敏度及温度稳定性优良的Love型声表面波器件提供理论基础。
By using the theory of layered structure, it was obtained accurate solutions of acoustic waves in piezoelectric substrate, metal film and covering layer structures. Based on the solutions, the phase velocity and electromechanical coupling constant were calculated. Variational principle and coupling-of-modes(COM) equation were used to analyze the surface acoustic waves in shorten gratings with single finger every period and a reflection coefficient expression of a coated SAW device. COM parameters of a device incorporating an ST-90°X substrate, Al electrodes and an SU8 layer were calculated. The results provide a theoretical basis for the optimal design of low loss, high sensitivity and high temperature stability Love mode devices.

引文

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