高亮度大功率半导体激光器光纤耦合模块
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摘要
应用ZEMAX软件设计出高亮度大功率光纤耦合模块。采用16支输出功率12 W的单偏振态单边发射半导体激光器,耦合进芯径100μm、数值孔径0.22的光纤中。模块输出功率达到189.4 W,耦合效率达到98.6%,亮度达到94.66 MW/cm2-str。通过Solid Works软件优化得到新热沉结构,应用ANSYS软件进行热分析,结果表明新热沉结构最高温度为42.4℃,相比优化前温度降低1℃以上,得到良好散热结构模型。
In order to output light beam of higher power and higher brightness,the fiber coupled diode laser module consisting 16 single emitter semiconductor laser diodes with 12 W was designed by ZEMAX. This module can produce 189.4 W from a standard optical fiber with core diameter of 100μm and numerical aperture of 0.22. The coupling efficiency is 98.6% and the brightness is above 94.66 MW/cm2-str. The new heat sink structure was designed by using Solid Works software and the thermal analysis was simulated by ANSYS software. The results show that the hightest temperature of new heat sink structure is 42.4 ℃,1 ℃ lower than before.
In order to output light beam of higher power and higher brightness,the fiber coupled diode laser module consisting 16 single emitter semiconductor laser diodes with 12 W was designed by ZEMAX. This module can produce 189.4 W from a standard optical fiber with core diameter of 100μm and numerical aperture of 0.22. The coupling efficiency is 98.6% and the brightness is above 94.66 MW/cm2-str. The new heat sink structure was designed by using Solid Works software and the thermal analysis was simulated by ANSYS software. The results show that the hightest temperature of new heat sink structure is 42.4 ℃,1 ℃ lower than before.
引文
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[13]夏晓宇,高欣,许留洋,等.基于单发光区芯片的大功率光纤耦合激光器的输出远场特征分析[J].发光学报,2017,38(2):170-176.XIA X Y,GAO X,XU L Y,et al..Output far field characteristics of high power fiber coupling diode laserd based on single emitter devices[J].Chin.J.Lumin.,2017,38(2):170-176.(in Chinese)
[14]王文,高欣,周泽鹏,等.百瓦级多芯片半导体激光器稳态热分析[J].红外与激光工程,2014,43(5):1438-1443.WANG W,GAO X,ZHOU Z P,et al..Steady-state thermal analysis of hundred-watt semiconductor laser with multichippackaging[J].Infrared Laser Eng.,2014,43(5):1438-1443.(in Chinese)
[2]王立军,宁永强,秦莉,等.大功率半导体激光器研究进展[J].发光学报,2015,36(1):1-19.WANG L J,NING Y Q,QIN L,et al..Development of high power diode laser[J].Chin.J.Lumin.,2015,36(1):1-19.(in Chinese)
[3]朱洪波,刘云,郝明明,等.高效率半导体激光器光纤耦合模块[J].发光学报,2011,32(11):1147-1151.ZHU H B,LIU Y,HAO M M,et al..High efficiency module of fiber coupled diode laser[J].Chin.J.Lumin.,2011,32(11):1147-1151.(in Chinese)
[4]董婉佳.光纤激光器的泵浦源[J].电子世界,2014,36(1):204-205.DONG W J.The pumping source of fiber laser[J]..Electron.World,2014,36(1):204-205.(in Chinese)
[5]WANG X,WANG C L,WU X,et al..Researching the 915 nm high-power and high-brightness semiconductor laser single chip coupling module[J].J.Semicond.,2017,38(2):73-76.
[6]余俊宏,郭林辉,高松信,等.高功率半导体激光器光纤耦合实验研究[J].强激光与粒子束,2014,26(5):051005-1-4.YU J H,GUO L H,GAO S X,et al..Research on high-power single emitter fiber-coupled diode laser[J].High Power Laser Part.Beams,2014,26(5):051005-1-4.(in Chinese)
[7]刘友强,曹银花,李景,等.激光加工用5 k W光纤耦合半导体激光器[J].光学精密工程,2015,23(5):1279-1287.LIU Y Q,CAO Y H,LI J,et al..5 k W fiber coupling diode laser for laser processing[J].Opt.Precision Eng.,2015,23(5):1279-1287.(in Chinese)
[8]高欣,薄报学,乔忠良,等.多线阵半导体激光器的单光纤输出[J].光子学报,2010,39(7):1229-1234.GAO X,BO B X,QIAO Z L,et al..Single fiber coupling of multi-linear-diode-lasers[J].Acta Photon.Sinica,2010,39(7):1229-1234.(in Chinese)
[9]牛奔,王宝华,郭渭荣,等.基于光参数积的单边发射半导体激光器光束质量描述与评价[J].中国激光,2015,42(2):202004-1-7.NIU B,WANG B H,GUO W R,et al..Description and evaluation of beam quality of single emitter diode laser based on beam parameter product[J].Chin.J.Laser,2015,42(2):202004-1-7.(in Chinese)
[10]吴华玲,郭林辉,王昭,等.基于双管的高亮度半导体激光器光纤耦合系统设计[J].中国激光,2016,43(10):83-89.WU H L,GUO L H,WANG Z,et al..Design of high brightness fiber-coupled diode laser system based on dual-emitters[J].Chin.J.Laser,2016,43(10):83-89.(in Chinese)
[11]牛岗,樊仲维,王培峰,等.利用阶梯镜进行半导体激光器光束整形及光纤耦合[J].激光与红外,2007,37(6):510-512.NIU G,FAN Z W,WAGN P F,et al..Laser diode array beam shaping with micro step-mirror and fiber-coupling[J].Laser Infrared,2007,37(6):510-512.(in Chinese)
[12]余俊宏,郭林辉,王昭,等.200 W级高亮度半导体激光器光纤耦合模块[J].强激光与粒子束,2014,26(11):111001-1-5.YU J H,GUO L H,WANG Z,et al..High brightness fiber coupled diode laser module with 200 W class output power[J].High Power Laser Part.Beams,2014,26(11):111001-1-5.(in Chinese)
[13]夏晓宇,高欣,许留洋,等.基于单发光区芯片的大功率光纤耦合激光器的输出远场特征分析[J].发光学报,2017,38(2):170-176.XIA X Y,GAO X,XU L Y,et al..Output far field characteristics of high power fiber coupling diode laserd based on single emitter devices[J].Chin.J.Lumin.,2017,38(2):170-176.(in Chinese)
[14]王文,高欣,周泽鹏,等.百瓦级多芯片半导体激光器稳态热分析[J].红外与激光工程,2014,43(5):1438-1443.WANG W,GAO X,ZHOU Z P,et al..Steady-state thermal analysis of hundred-watt semiconductor laser with multichippackaging[J].Infrared Laser Eng.,2014,43(5):1438-1443.(in Chinese)