快速动态真空校准装置的研制
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摘要
快速动态真空校准装置由校准系统、高速数据采集与控制系统、抽气系统、烘烤系统、供气系统5个部分组成。采用快开超高真空插板阀与不同几何尺寸限流元件的组合实现标准压力建立时间在18. 12～658. 13 ms范围的调整,采用容积比为1 573. 9的下游室与上游室实现动态真空1 000倍以上的阶跃。通过ms量级稀薄气体快速膨胀过程数值仿真获得了快开阀与限流元件不同流态下随时间的流导函数,并采用动态响应特性经过优化的电容薄膜真空计(响应时间1. 07 ms)实验验证,快速动态真空校准装置校准范围10~(-1)～10~5Pa,合成标准不确定度为14%。
A novel apparatus is developed to calibrate vacuum gauge for its response characteristic,which consists of calibration system,high-speed data acquisition and control system,pumping system,baking system,and gas supply system. A very fast opening ultra-high vacuum gate valve and flow restriction element of various dimensions are combined to realize controllable standard pressure establishment time ranging from 18. 12 ms to 658. 13 ms. Moreover,to establish transient step over three orders of magnitude of the dynamic vacuum pressure,a volume ratio of 1 573. 9 between downstream chamber and upstream chamber is employed. Through numerical simulation of the rapid expansion process of rarefied gas in the millisecond range,the function between conductance and time under different flow states is obtained. Experiments are conducted on capacitance diaphragm gauges with optimized response time( 1. 07 ms). The result show that the calibration range of the apparatus is between 10~(-1) and 10~5 Pa,with a combined standard uncertainty of 14%.
A novel apparatus is developed to calibrate vacuum gauge for its response characteristic,which consists of calibration system,high-speed data acquisition and control system,pumping system,baking system,and gas supply system. A very fast opening ultra-high vacuum gate valve and flow restriction element of various dimensions are combined to realize controllable standard pressure establishment time ranging from 18. 12 ms to 658. 13 ms. Moreover,to establish transient step over three orders of magnitude of the dynamic vacuum pressure,a volume ratio of 1 573. 9 between downstream chamber and upstream chamber is employed. Through numerical simulation of the rapid expansion process of rarefied gas in the millisecond range,the function between conductance and time under different flow states is obtained. Experiments are conducted on capacitance diaphragm gauges with optimized response time( 1. 07 ms). The result show that the calibration range of the apparatus is between 10~(-1) and 10~5 Pa,with a combined standard uncertainty of 14%.
引文
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[21]谢贵久,陈云锋,谢锋,等.快速响应贵金属薄膜热电偶的研制[J].微处理机,2018,3(6):10-14.XIE G J,CHEN Y F,XIE F,et al. Research on rapid response precious metal thin film thermocouple[J].Microprocessors,2018,3(6):10-14.
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[23] JOUSTEN K,Temperature corrections for the calibration of vacuum gauges[J]. Vacuum,1998,48(2):81-87.
[24] VARGAS M,NARIS S,VALOUGEORGISA D,Hybrid modeling of time-dependent rarefied gas expansion[J].Journal of Vacuum Science&Technology A, 2014,32(2):021602.
[25] VARGAS M,NARIS S,VALOUGEORGISA D. Timedependent rarefied gas flow of single gases and binary gas mixtures into vacuum[J]. Vacuum,2014,109(11):385-396.
[26] JOUSTEN K. Problem of vacuum metrology for industrial applications that call for solution by rarefied gas dynamics[C]. 64th IUVSTA Workshop on Practical Applications and Methods of Gas Dynamics for Vacuum Science and Technology,2011:1.
[27] PITAKARNNOP J,WONGPITHAYADISAI R. Rarefied gas flow in pressure and vacuum measurements[C].ACTA IMEKO,2014,3(2):60-63.
[28] SHARIPOV F. Rarefied Gas Dynamics Fundamentals for Research and Practice[M]. Weinheim:WILEY,2016.
[29]达道安.真空设计手册[M].第3版.北京:国防工业出版社,2004.DA D A. Vacuum Design Handbook[M]. 3rd Edition.Beijing:National Defence Industry Press,2004.
[2] WANG M X,YAN L W,HONG W Y,et al. Neutral pressure measured by fast ionization gauge in HL-2A[J]. Journal of Nuclear Materials,2007,363-365(6):1472-1475.
[3] JOUSTEN K, BERGOGIO M, SETINA J. Vacuum measures up for industry[J]. Physics World,2014,8(1):33-34.
[4] LI Y H,YU H Y,WANG J K. Development of vacuum metrology in National Institute of Metrology[J]. Vacuum,2012,86(7):903-907.
[5] XI ZH H, CHENG Y J, ZHANG H ZH, et al.Uncertainty analysis of the LIP vacuum standard for XHV range[J]. Vacuum,2019,163(5):275-281.
[6] YOSHIDA H,ARAI K. Quantitative measurements of various gases in high and ultrahigh vacuum[J]. Journal of Vacuum Science&Technology A, 2018, 36(3):031604(1-8).
[7] JOUSTEN K,PUTZKE S,BUTHIG J. Partial pressure measurement standard for characterizing partial pressure analyzers and measuring outgassing rates[J]. Journal of Vacuum Science&Technology A, 2015, 33(6):061603.
[8] LI D T,GUO M R,CHENG Y J,et al. Vacuumcalibration apparatus with pressure down to 10-10Pa[J].Journal of Vacuum Science&Technology A, 2010,28(5):1099-1104.
[9] LI D T,CHENG Y J,FENG Y,et al. Very low gas flow measurements for UHV/XHV and leak calibration[J].Metrologia,2013,50(1):15-19.
[10]李得天.真空计量新技术[M].北京:机械工业出版社,2013:4-5.LI D T. New Technology for Vacuum Metrology[M].Beijing:China Machine Press,2013:4-5.
[11] JOUSTEN K, Traceability to SI units for vacuum measurement in industrial applications[J]. Measurement,2012,45(10):2420-2425.
[12] Publishable JRP Summary Report for IND12(Vacuum).Vacuum metrology for production environments[R].Braunschweig:EURAMET,2013.
[13] Industrial standards in the intermediate pressure-tovacuum range[S]. Braunschweig:EURAMET,2014.
[14] JOUSTEN K, PANTAZIS S, BUTHIG J, et al, A standard to test the dynamics of vacuum gauges in the millisecond[J]. Vacuum,2014,100(2):14-17.
[15] PANTAZIS S, JOUSTEN K. Computational and experimental study of unsteady gas flow in a dynamic vacuum standard[J]. Vacuum, 2014, 109(11):373-384.
[16] MARI D,BERGOGLIO M,PISANI M,et al. Dynamic vacuum measurement by an optical interferometric technique[J]. Measurement Science and Technology,2014,25(12):125303.
[17] SONDEREGGER K,DUR M,BUTHIG J,et al,Very fast-opening UHV gate valve[J]. Journal of Vacuum Science&Technology A,2013,31(6):060601.
[18] PANTAZIS S,BUTHIG J,JOUSTEN K. Conjugate heat transfer simulations of a thermocouple sensor in a low temperature nitrogen gas ambient[J]. International Journal of Heat and Mass Transfer,2014(70):536-544.
[19]徐立新,谢建斌,杨智伟,等.细微热电偶的制作与时间常数标定方法[J].电子测量与仪器学报,2016,30(7):1023-1028.XU L X,XIE J B,YANG ZH W,et al. Preparation of micro thermocouple and calibration method of time constant[J]. Journal of electronic measurement and instrumentation 2016,30(7):1023-1028.
[20]崔云先,薛帅毅,周通,等.薄膜瞬态温度传感器的制备及性能研究[J].仪器仪表学报,2017,38(12):3028-3035.CUI Y X,XUE SH Y,ZHOU T,et al. Fabrication and performance analysis of thin film transient temperature sensor[J]. Chinese Journal of Scientific Instrument,2017,38(12):3028-3035.
[21]谢贵久,陈云锋,谢锋,等.快速响应贵金属薄膜热电偶的研制[J].微处理机,2018,3(6):10-14.XIE G J,CHEN Y F,XIE F,et al. Research on rapid response precious metal thin film thermocouple[J].Microprocessors,2018,3(6):10-14.
[22] JOUSTEN K. Hanbook of Vacuum Technology[M]. 2nd Edition. Weinheim:WILEY,2016:66.
[23] JOUSTEN K,Temperature corrections for the calibration of vacuum gauges[J]. Vacuum,1998,48(2):81-87.
[24] VARGAS M,NARIS S,VALOUGEORGISA D,Hybrid modeling of time-dependent rarefied gas expansion[J].Journal of Vacuum Science&Technology A, 2014,32(2):021602.
[25] VARGAS M,NARIS S,VALOUGEORGISA D. Timedependent rarefied gas flow of single gases and binary gas mixtures into vacuum[J]. Vacuum,2014,109(11):385-396.
[26] JOUSTEN K. Problem of vacuum metrology for industrial applications that call for solution by rarefied gas dynamics[C]. 64th IUVSTA Workshop on Practical Applications and Methods of Gas Dynamics for Vacuum Science and Technology,2011:1.
[27] PITAKARNNOP J,WONGPITHAYADISAI R. Rarefied gas flow in pressure and vacuum measurements[C].ACTA IMEKO,2014,3(2):60-63.
[28] SHARIPOV F. Rarefied Gas Dynamics Fundamentals for Research and Practice[M]. Weinheim:WILEY,2016.
[29]达道安.真空设计手册[M].第3版.北京:国防工业出版社,2004.DA D A. Vacuum Design Handbook[M]. 3rd Edition.Beijing:National Defence Industry Press,2004.