强震观测用MEMS型加速度计研究
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摘要
强震观测中记录的加速度时程是城市大型建筑抗震设计的重要依据,为城市抗震设防提供可靠的数据支持。因此,对加速度计在稳定性、线性度、动态范围和直流响应等性能方面有着很高的要求。提出利用静电力反馈控制技术与传感器技术相结合形成闭环力平衡式MEMS加速度计,使之具有良好的低频特性。并采用四阶ΣΔ调制器完成低噪声信号采样,确保其动态范围高于140 d B,完全满足现有强震观测规范对该项指标的要求。
Acceleration time histories recordedin strong motion observation is an important basis data for seismic design of large buildings in cities,and can provide reliable data support for seismic fortification of cities. Therefore,the accelerometer has high requirements in terms of stability,linearity,dynamic range and DC response. In this paper,an MEMS accelerometer with closed-loop force balance was developed by combining electrostatic force feedback control technology and sensor technology,so that ithas good low-frequency characteristics. The fourth-order ΣΔmodulator is used to sample the low-noise signal to ensure that the dynamic range ofthe accelerometeris higher than140 dB,which fully meets the requirements of the existing strong motion observation standard.
Acceleration time histories recordedin strong motion observation is an important basis data for seismic design of large buildings in cities,and can provide reliable data support for seismic fortification of cities. Therefore,the accelerometer has high requirements in terms of stability,linearity,dynamic range and DC response. In this paper,an MEMS accelerometer with closed-loop force balance was developed by combining electrostatic force feedback control technology and sensor technology,so that ithas good low-frequency characteristics. The fourth-order ΣΔmodulator is used to sample the low-noise signal to ensure that the dynamic range ofthe accelerometeris higher than140 dB,which fully meets the requirements of the existing strong motion observation standard.
引文
[1]曲明哲,罗新恒,温瑞智. MEMS加速度传感器噪声分析[J].地震工程与工程振动,2014,34(6):26-32.QU M Z,LUO X H,WEN R Z. Noise analysis for MEMS accelerometers[J]. Earthquake Engineering and Engineering Vibration,2014,34(6):26-32.(in Chinese)
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[7] BELIVEAU A,SPENCER G T,THOMAS K A,et al. Evaluation of MEMS capacitive accelerometer[J]. IEEE Design and Test of Computers,2011,16(4):48-56.
[8] LAJEVARDI P,PETKOV V P,MURMANN B. A interface for MEMS accelerometers using electrostatic spring constant modulation for cancellation of bondwire capacitance drift[J]. IEEE JSolid-State Circuits,2013(48)∶265-269.
[9] BRIGATIS,I F,MALCOVATIP. A fourth-order single-bit switched-capacitorΣ-Δmodulator for distributed sensorapplications[J],Instrumentation&Measurement IEEE Transactions,2004(53):266-272.
[10] CHOIY,ROHJ,ROHH. 99-d B DR fourth-order delta-sigma modulator for 20-kHz bandwidth sensorapplications[J]. Instrumentation&Measurement IEEE Transactions on,2009,58:2264.
[11] BAJDECHIO,HUIJSINGJ H. A 1. 8-VΔΣmodulator interface for an electret microphone with on-chip reference[J]. IEEE J Solid-State Circuits,2002(37):279-285.
[12] LIUS C,TANGK T. A low-voltage low power sigma-delta modulator for bio-potential signals[J]. IEEE LISSA,2011:24-28.
[13] YUCETAS M,PULKKINEN M,KALANTI A. A high-resolutionaccelerometer with electrostatic damping and improved supply sensitivity[J]. IEEE J. Sensors,2012(47):1721-1726.
[14] AALTONEN L,HALONENK. Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 gand bandwidth of 300 Hz[J]. Sensors Actuators A:Phys,2009(154):46-51.
[15] AMINIB V,ABDOLVANDR,AYAZI F. A 4. 5-mW closed-loop micro-gravity CMOS SOI accelerometer[J]. IEEE J. Solid-State Circuits,2006(41):2983-2987.
[16] PASTRE M,KAYAL M,SCHMIDH,et al. A 300Hz 19b DR capacitive accelerometer based on a versatile front end in a 5th-orderΔΣloop[J].IEEE. In Proc. Eur. Solid-State Circuits Conf,ESSCIRC,2009:288-294.
[2] SOEN J,VODA A,CONDEMINE C. Controller design for a closed-loop micromachinedaccelerometer[J]. Control Engineering Practice,2007,15:57-68.
[3] ZHAO C,WANG L,KAZMIERSKI T J. An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixedTechnology control loops[C]//IEEE Behavioral Modeling and Simulation Conference,2007:143-147.
[4] TSAI D H,FANG W. Design and simulation of a dual-axis sensing decoupled vibratory wheel gyroscope[J]. IEEE Sensors and Actuators,2010,126(1):33-40.
[5] WANG Yucai,CHODAVARAPU Vamsy P. Design of a CMOS readout circuit for wide-temperature range capacitive MEMS sensors[A]. 15th Int’l Symposium on Quality Electronic Design[C]. Santa,CA,USA,2014:738-742.
[6] KOUREPENIS A,BORENSTEIN J,CONNELLY J,et al. Performance of MEMS inertial sensors[C]//IEEE Position Location and Navigation Symp,Palm Springs,CA,2006:1-8.
[7] BELIVEAU A,SPENCER G T,THOMAS K A,et al. Evaluation of MEMS capacitive accelerometer[J]. IEEE Design and Test of Computers,2011,16(4):48-56.
[8] LAJEVARDI P,PETKOV V P,MURMANN B. A interface for MEMS accelerometers using electrostatic spring constant modulation for cancellation of bondwire capacitance drift[J]. IEEE JSolid-State Circuits,2013(48)∶265-269.
[9] BRIGATIS,I F,MALCOVATIP. A fourth-order single-bit switched-capacitorΣ-Δmodulator for distributed sensorapplications[J],Instrumentation&Measurement IEEE Transactions,2004(53):266-272.
[10] CHOIY,ROHJ,ROHH. 99-d B DR fourth-order delta-sigma modulator for 20-kHz bandwidth sensorapplications[J]. Instrumentation&Measurement IEEE Transactions on,2009,58:2264.
[11] BAJDECHIO,HUIJSINGJ H. A 1. 8-VΔΣmodulator interface for an electret microphone with on-chip reference[J]. IEEE J Solid-State Circuits,2002(37):279-285.
[12] LIUS C,TANGK T. A low-voltage low power sigma-delta modulator for bio-potential signals[J]. IEEE LISSA,2011:24-28.
[13] YUCETAS M,PULKKINEN M,KALANTI A. A high-resolutionaccelerometer with electrostatic damping and improved supply sensitivity[J]. IEEE J. Sensors,2012(47):1721-1726.
[14] AALTONEN L,HALONENK. Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 gand bandwidth of 300 Hz[J]. Sensors Actuators A:Phys,2009(154):46-51.
[15] AMINIB V,ABDOLVANDR,AYAZI F. A 4. 5-mW closed-loop micro-gravity CMOS SOI accelerometer[J]. IEEE J. Solid-State Circuits,2006(41):2983-2987.
[16] PASTRE M,KAYAL M,SCHMIDH,et al. A 300Hz 19b DR capacitive accelerometer based on a versatile front end in a 5th-orderΔΣloop[J].IEEE. In Proc. Eur. Solid-State Circuits Conf,ESSCIRC,2009:288-294.
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