在半导体-金属相变温度附近氧化钒薄膜光学性质的异常变动
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摘要
在可见光—近红外波段的不同波长下,测量了半导体-金属相变过程中氧化钒薄膜样品的反射率和透射率.在薄膜相变过程中,不同波段的反射率曲线和透射率曲线表现出不同的变化趋势.利用非相干光在薄膜中的多级反射-透射模型,计算了相变过程中不同波长下氧化钒薄膜的折射率n和消光系数k随温度的变化.结果表明,在相变温度附近氧化钒薄膜光学性质的异常变动,其原因既有薄膜的折射率和消光系数随波长的变化趋势不同,也有在吸收性薄膜中存在探测光多次反射和透射的累加效应.
The optical properties of vanadium oxide thin film are measured at semiconductor-metal transition, including reflectance and transmittance results at different wavelengths which show different trends during the phase transition.With a multi-level reflection-transmission model of incoherent light, we calculate the values of refractive index n and extinction coefficient k at different wavelengths, and show that the abnormal optical properties result not only from the dependences of n and k on the wavelength, but also from multiple reflections in the absorbing film.
The optical properties of vanadium oxide thin film are measured at semiconductor-metal transition, including reflectance and transmittance results at different wavelengths which show different trends during the phase transition.With a multi-level reflection-transmission model of incoherent light, we calculate the values of refractive index n and extinction coefficient k at different wavelengths, and show that the abnormal optical properties result not only from the dependences of n and k on the wavelength, but also from multiple reflections in the absorbing film.
引文
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[4]Chen T 2011 Ph.D.Dissertation(Tianjin:Tianjin University)(in Chinese)[陈涛2011博士学位论文(天津:天津大学)]
[5]He Q,Xu X D,Wen Y J,Jiang Y D,Ao T H,Fan T J,Huang L,Ma C Q,Sun Z Q 2013 Acta Phys.Sin.62 056802(in Chinese)[何琼,许向东,温粤江,蒋亚东,敖天宏,樊泰君,黄龙,马春前,孙自强2013物理学报62056802]
[6]Fang Z,Yu H Y,Chroboczek J A,Ghibaudo G,Buckley J,Salvo B D,Li X,Kwong D L 2012 IEEE Electr.Device Lett.59 850
[7]Clima S,Chen Y Y,Degraeve R,Mees M,Sankaran K,Govoreanu B,Jurczak M,Gendt S D,Pourtois G 2012Appl.Phys.Lett.100 133102
[8]Qiu D H,Wen Q Y,Yang Q H,Chen Z,Jing Y L,Zhang H W 2013 Acta Phys.Sin.62 217201(in Chinese)[邱东鸿,文岐业,杨青慧,陈智,荆玉兰,张怀武2013物理学报62 217201]
[9]Sun D D,Chen Z,Wen Q Y,Qiu D H,Lai W E,Dong K,Zhao B H,Zhang H W 2013 Acta Phys.Sin.62 017202(in Chinese)[孙丹丹,陈智,文岐业,邱东鸿,赖伟恩,董凯,赵碧辉,张怀武2013物理学报62 017202]
[10]Wen X Z,Chen X,Wu N J,Ignatiev A 2011 Chin.Phys.B 20 097703
[11]Meng Y,Zhang P J,Liu Z Y,Liao Z L,Pan X Y,Liang X J,Zhao H W,Chen D M 2010 Chin.Phys.B 19037304
[12]Tao Z S,Han T T,Mahanti S D,Duxbury P M,Yuan F,Ruan C Y,Wang K,Wu J Q 2012 Phys.Rev.Lett.109 166406
[13]Liang J R,Hu M,Wang X D,Kan Q,Li G K,Chen H D 2010 J.Infrared Millim.Waves 29 457(in Chinese)[梁继然,胡明,王晓东,阚强,李贵柯,陈宏达2010红外与毫米波学报29 457]
[14]Li W W,Yu Q,Liang J R,Jiang K,Hu Z G,Liu J,Chen H D,Chu J H 2011 Appl.Phys.Lett.99 241903
[15]Lee K W,Kweon J J,Lee C E,Gedanken A,Ganesan R 2010 Appl.Phys.Lett.96 243111
[16]Lopez R,Feldman L C,Haglund R F 2004 Phys.Rev.Lett.93 177403
[17]Wang H F,Li Y,Yu X J,Zhu H Q,Huang Y Z,Zhang H,Zhang W,Zhou S 2010 Acta Opt.Sin.30 152205(in Chinese)[王海方,李毅,俞晓静,朱慧群,黄毅泽,张虎,张伟,周晟2010光学学报30 152205]
[18]Kats M A,Sharma D,Lin J,Genevet P,Blanchard R,Yang Z,Qazilbash M M,Basov D N,Ramanathan S,Capasso F 2012 Appl.Phys.Lett.101 221101
[19]Kats M A,Blanchard R,Genevet P,Capasso F 2012Nat.Mater.12 20
[20]Born M,Wolf E(translated by Yang J S)2005 Principles of Optics(Vol.1)(7th ed)(Beijing:Publishing House of Electronics Industry)pp55,56(in Chinese)[玻恩M,沃耳夫E著(杨葭荪译)2005光学原理(上)(第七版)(北京:电子工业出版社)第55,56页]
[21]Coath J A,Richardson M A 1999 Conference on Advances in Optical Interference Coatings(Washington:SPIE)p555