不同比例钛掺杂对类金刚石薄膜性能的影响
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摘要
为研究钛掺杂对类金刚石薄膜性能的影响,采用磁控溅射制备不同比例钛掺杂类金刚石膜,并通过扫描电镜(SEM)、X-ray光电子谱仪、拉曼光谱仪(Roman)以及洛氏硬度压痕仪等设备对类金刚石薄膜的微观形貌、厚度、sp~2-C与sp~3-C比例、结合强度以及内应力等性能进行表征。经实验分析发现在类金刚石薄膜中掺杂不同比例的钛元素,薄膜的综合性能有不同程度的提高,膜基结合度提高,薄膜内应力下降。当钛掺杂含量为8.5%时,薄膜与基体的结合情况优异,内部应力由无钛掺杂时的4.5 GPa降至掺杂含量为8.5%时的2.1 GPa。从本文研究中可以得到钛元素掺杂有利的改善了类金刚石薄膜的性能,同时钛掺杂类金刚石薄膜存在一个合适的比例,即掺杂比例为8.5%时,薄膜的各方面性能表现优异。
Diamond-like carbon films with different proportions of titanium dopant were prepared by magnetron sputtering. The effect of titanium doping on their properties was studied. The microstructure, thickness, sp~2-C and sp~3-C ratio, bonding strength and internal stress of the diamond-like carbon films were researched by the experiments. Results show that the properties of the DLC films can be improved by doping titanium dopant. The titanium dopant enhances the film-base bonding degree and decreases the internal stress. When the proportion of the titanium dopant reaches 8.5%, the bonding between the film and the substrate is excellent, and the internal stress, which is 4.5 GPa without titanium dopant, is reduced to 2.1 GPa. It can be obtained from this study that the doping of titanium element can improve the performance of the diamond-like carbon film. When the proportion of titanium dopant is 8.5%, the performance of the DLC film is excellent.
Diamond-like carbon films with different proportions of titanium dopant were prepared by magnetron sputtering. The effect of titanium doping on their properties was studied. The microstructure, thickness, sp~2-C and sp~3-C ratio, bonding strength and internal stress of the diamond-like carbon films were researched by the experiments. Results show that the properties of the DLC films can be improved by doping titanium dopant. The titanium dopant enhances the film-base bonding degree and decreases the internal stress. When the proportion of the titanium dopant reaches 8.5%, the bonding between the film and the substrate is excellent, and the internal stress, which is 4.5 GPa without titanium dopant, is reduced to 2.1 GPa. It can be obtained from this study that the doping of titanium element can improve the performance of the diamond-like carbon film. When the proportion of titanium dopant is 8.5%, the performance of the DLC film is excellent.
引文
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[2]张而耕,黄彪,周琼.TaC涂层的研究现状及应用[J].陶瓷学报,2017,38(1):8-12.ZHANG E G,HUANG B,ZHOU Q.Surface Technology,2017,38(1):8-12.
[3]GARRELIE F,LOIR A S,DONNET C,et al.Femtosecond pulsed laser deposition of diamond-like carbon thin films for tribological applications[J].Surface&Coatings Technology,2003,163(2):306-312.
[4]MESKINIS?,CIEGIS A,VASILIIAUSKAS A,et al.Optical properties of diamond like carbon films containing copper,grown by high power pulsed magnetron sputtering and direct current magnetron sputtering:structure and composition effects[J].Thin Solid Films,2015,581:48-53.
[5]马国佳,孙刚,张华芳,等.类金刚石膜Ti、Zr掺杂对DLC力学性能的影响[C].全国特种加工学术会议,2009.
[6]陈新春,彭志坚,付志强,等.梯度掺杂和纳米多层调制类金刚石薄膜的摩擦学性能[J].中国表面工程,2010,23(2):36-41.CHEN X C,PENG Z J,FU Z Q,et al.China Surface Engineering,2010,23(2):36-41.
[7]姜金龙,黄浩,王琼,等.沉积温度对钛硅共掺杂类金刚石薄膜生长、结构和力学性能的影响[J].物理学报,2014,63(2):350-356.JIANG J L,HUANG H,WANG Q,et al.Acta Physica Sinica,2014,63(2):350-356.
[8]马占吉.钛掺杂梯度多层类金刚石薄膜制备与机械性能研究[D].兰州大学,2013.
[9]孙丽丽,代伟,张栋,等.Cr掺杂及Cr过渡层对类金刚石薄膜附着力的影响[J].中国表面工程,2010,23(4):26-28.SUN L L,DAI W,ZHANG D,et al.China Surface Engineering,2010,23(4):26-28.
[10]强力.低浓度钛掺杂类金刚石薄膜的制备、结构及性能研究[D].兰州理工大学,2012.
[11]逄显娟,石雷,王鹏,等.磁控溅射沉积Ti、Al掺杂的类金刚石碳薄膜的摩擦学性能[C].全国摩擦学大会,2007.
[12]CRISTESCU R,PATZ T,NARAYAN R J,et al.Processing of mussel adhesive protein analog thin films by matrix assisted pulsed laser evaporation[J].Applied Surface Science,2005,248(1):416-421.
[13]CHOI H W,CHOI J H,LEE K R,et al.Structure and mechanical properties of Ag-incorporated DLC films prepared by a hybrid ion beam deposition system[J].Thin Solid Films,2007,516(2):248-251.
[14]YATSUZUKA M,TATEIWA J,UCHIDA H.Evaluation of pinhole defect in DLC film prepared by hybrid process of plasma-based ion implantation and deposition[J].Vacuum,2006,80(11):1351-1355.
[15]RAM P,SINGH J,RAMAMOHAN T R,et al.Surface properties of electrodeposited a-Si:C:H:F thin films by x-ray photoelectron spectroscopy[J].Journal of Materials Science,1997,32(23):6305-6310.
[16]LI D F,HUANG J L,LIN M H.The effects of TiAl interlayer on PVD TiAlN films[J].Surface&Coatings Technology,1998,99(1):197-202.
[17]LACKNER J M,WALDHAUSER W,EBNER W,et al.Room temperature deposition of(Ti,Al)N and(Ti,Al)(C,N)coatings by pulsed laser deposition for tribological applications[J].Surface&Coatings Technology,2004,s177-178:447-452.
[18]NARAYAN R J.Laser processing of diamond-like carbonmetal composites[J].Applied Surface Science,2005,245(1-4):420-430.
[19]DUMKUM C,GRANT D M,MCCOLL I R.A Multilayer approach to high adhesion diamond-like carbon coatings on titanium[J].Diamond&Related Materials,1997,6(6):802-806.
[20]代伟.金属掺杂类金刚石纳米复合涂层的制备、结构与性能[J].新技术新工艺,2015,(7):128-131.DAI W.New Technology&New Process,2015,(07):128-131.
[21]柳翠.类金刚石碳膜制备工艺及掺杂性能研究[D].大连理工大学,2006.
[22]代伟,汪爱英.低铬掺杂类金刚石薄膜的制备、结构与性能[C].青年表面工程学术论坛,2010.
[23]XU T,LU J,YANG S,et al.Effect of ion mixing by C+,implantation on friction and adhesion of amorphous carbon film on SiO2[J].Materials Science&Engineering A,2000,284(1-2):51-55.
[24]YANG J,ZHANG T.Tribological properties changes of H13steel induced by MEVVA Ta ion implantation[J].Applied Surface Science,2004,229(1):249-253.
[25]张书姣,吴艳霞,朱丽楠,等.金属掺杂类金刚石薄膜研究进展[J].航空制造技术,2017,532(13):77-82.ZHANG S J,WU Y X,ZHU L A,et al.Aeronautical Manufacturing Technology,2017,532(13):77-82.
[26]BHUSARI D M,CHEN C K,CHEN K H,et al.Composition of SiCN crystals consisting of a predominantly carbon-nitride network[J].Mrs Proceedings,1996,441(2):322-325.
[27]LI X,KE P,WANG A.Probing the stress reduction mechanism of diamond-like carbon films by incorporating Ti,Cr,or W carbide-forming metals:Ab initio molecular dynamics simulation[J].Journal of Physical Chemistry C,2015,119(11):6086-6093.
[28]MA G,GONG S,LIN G,et al.A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation[J].Applied Surface Science,2012,258(7):3045-3050.
[29]高功申.钛掺杂类金刚石膜的摩擦学行为研究[D].中国地质大学(北京),2010.
[30]王伟.钨含量及摩擦条件对掺钨类金刚石膜摩擦磨损性能影响[D].中国地质大学(北京),2010.
[31]代伟,汪爱英.低铬掺杂类金刚石薄膜的制备、结构与性能[C].青年表面工程学术论坛,2010.
[32]D’ORSOGNA D,LAMARRE P,BELLOTTI E,et al.Anovel stress characterization technique for the development of low-stress Ohmic contacts to HgCdTe[J].Journal of Electronic Materials,2009,38(8):1698-1700.