高精度共焦自准直中心偏测量装置
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摘要
研制了一种基于共焦轴向层析定焦、自准直横向定焦的共焦自准直中心偏测量装置。利用共焦探测模块对被测球面镜的球心和顶点位置进行定焦,从而测得被测球面镜的曲率半径;利用光路自准直方法探测被测镜旋转过程中反射光在探测面上的路径获得被测镜的偏心量,结合偏心量和曲率半径计算得出中心偏。与传统中心偏测量装置相比,所提测量装置可以同时测得曲率半径和中心偏,避免了重复装卡引入的测量误差,有效地提高了测量精度、简化了测量过程、降低了测量成本。实验结果表明测量装置的中心偏重复测量不确定度可达0.065″。
A confocal self-collimation centering measurement structure based on confocal axial sectioning method and horizontal self-collimation positioning is proposed,which uses the confocal method to measure the center and vertex positions of the tested spherical lens to obtain the curvature radius and uses the self-collimation light path to detect the position of the reflected light by tested lens on the detection surface during the rotation of the tested lens driven by the air shaft to get the center bias.Then combine the radius with center bias to obtain the decentration.Compared with the traditional decentration measurement structure,this structure measures the curvature radius and decentration of the tested lens at the same time,so it avoids the measurement error caused by the multiple clamping,effectively improves the measuring efficiency and accuracy,simplifies the measurement process and decreases the measurement cost.Experiment shows that the measurement uncertainty of the structure can reach 0.065″.
A confocal self-collimation centering measurement structure based on confocal axial sectioning method and horizontal self-collimation positioning is proposed,which uses the confocal method to measure the center and vertex positions of the tested spherical lens to obtain the curvature radius and uses the self-collimation light path to detect the position of the reflected light by tested lens on the detection surface during the rotation of the tested lens driven by the air shaft to get the center bias.Then combine the radius with center bias to obtain the decentration.Compared with the traditional decentration measurement structure,this structure measures the curvature radius and decentration of the tested lens at the same time,so it avoids the measurement error caused by the multiple clamping,effectively improves the measuring efficiency and accuracy,simplifies the measurement process and decreases the measurement cost.Experiment shows that the measurement uncertainty of the structure can reach 0.065″.
引文
[1]Ruben P L.Aberrations arising from decentration and tilts[J].Journal of the Optical Society,1964,54(1):45-52.
[2]郭帮辉.基于镜面间隔和中心偏差测量的光学镜头辅助装调设备的研究[D].长春:中国科学院大学,2014:3-10.Guo Banghui.Research of optical lenses assembling apparatus based on measurement of lens thicknesses,air gap distances,and centering errors[D].Changchun:Chinese Academy of Sciences,2014:3-10.
[3]Beier M,Gebhardt A,Eberhardt R,et al.Lens centering of aspheres for high-quality optics[J].Advanced Optics Technology,2012,1(6):441-446.
[4]薛勤敏.新型反射式激光定心仪探讨[J].光学技术,1987,2(7):26-28.Xue Qinmin.Discussion on a new type of reflective laser centering device[J].Optical Technique,1987,2(7):26-28.
[5]Luo M,Zhang Z,Shen D,et al.Orbital angular momentum of the vortex beams through a tilted lens[J].Optics Communications,2017,396(1):206-209.
[6]郭夏锐,王春雨,等.高精度透射式空间光学系统装调误差分析与动态控制[J].红外与激光工程,2012,41(4):1007-2276.Guo Xiarui,Wang Chunyu,et al.Misalignment and assemblage stress analysis in space transmission optical system[J].Infrared and Laser Engineering,2012,41(4):1007-2276.
[7]张欣婷,亢磊等.高精度透射式光电定心仪的研究[J].激光与红外,2016,46(9):1001-5078.Zhang Xinting,Kang Lei,et al.Research on high precision transmission type photoelectric centering instrument[J].Laser&Infrared,2016,46(9):1001-5078.
[8]Wang Y,Qiu L,Yangand J.Measurement of the refractive index and thickness for lens by confocal technique[J].Optik,2013,124(17):2825-2828.
[9]Tan Y,Zhu K,Zhang S,et al.New method for lens thickness measurement by the frequency-shifted confocal feedback[J].Optics Communications,2016,380(4),91-94.
[10]Yang J,Qiu L,Zhao W,et al.Radius measurement by laser confocal technology[J].Applied Optics,2014,53(13):2860-2865.
[11]邱丽荣,李佳,等.激光共焦透镜曲率半径测量系统[J].光学精密工程,2013,21(2):246-252.Qiu Lirong,Li Jia,et al.Laser confocal measurement system for curvature radii of lenses[J].Optics and Precision Engineering,2013,21(2):246-252.
[12]Hou M,Qiu L,Zhao W,et al.Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles[J].Applied Optics,2014,53(3):487-495.
[13]沙定国.误差分析与测量不确定度评定[M].北京:中国计量出版社,2003:53-58.Sha Dingguo.Error analysis and uncertainty evaluation of measurement[M].Beijing:China Metrology Publishing House,2003:53-58.
[2]郭帮辉.基于镜面间隔和中心偏差测量的光学镜头辅助装调设备的研究[D].长春:中国科学院大学,2014:3-10.Guo Banghui.Research of optical lenses assembling apparatus based on measurement of lens thicknesses,air gap distances,and centering errors[D].Changchun:Chinese Academy of Sciences,2014:3-10.
[3]Beier M,Gebhardt A,Eberhardt R,et al.Lens centering of aspheres for high-quality optics[J].Advanced Optics Technology,2012,1(6):441-446.
[4]薛勤敏.新型反射式激光定心仪探讨[J].光学技术,1987,2(7):26-28.Xue Qinmin.Discussion on a new type of reflective laser centering device[J].Optical Technique,1987,2(7):26-28.
[5]Luo M,Zhang Z,Shen D,et al.Orbital angular momentum of the vortex beams through a tilted lens[J].Optics Communications,2017,396(1):206-209.
[6]郭夏锐,王春雨,等.高精度透射式空间光学系统装调误差分析与动态控制[J].红外与激光工程,2012,41(4):1007-2276.Guo Xiarui,Wang Chunyu,et al.Misalignment and assemblage stress analysis in space transmission optical system[J].Infrared and Laser Engineering,2012,41(4):1007-2276.
[7]张欣婷,亢磊等.高精度透射式光电定心仪的研究[J].激光与红外,2016,46(9):1001-5078.Zhang Xinting,Kang Lei,et al.Research on high precision transmission type photoelectric centering instrument[J].Laser&Infrared,2016,46(9):1001-5078.
[8]Wang Y,Qiu L,Yangand J.Measurement of the refractive index and thickness for lens by confocal technique[J].Optik,2013,124(17):2825-2828.
[9]Tan Y,Zhu K,Zhang S,et al.New method for lens thickness measurement by the frequency-shifted confocal feedback[J].Optics Communications,2016,380(4),91-94.
[10]Yang J,Qiu L,Zhao W,et al.Radius measurement by laser confocal technology[J].Applied Optics,2014,53(13):2860-2865.
[11]邱丽荣,李佳,等.激光共焦透镜曲率半径测量系统[J].光学精密工程,2013,21(2):246-252.Qiu Lirong,Li Jia,et al.Laser confocal measurement system for curvature radii of lenses[J].Optics and Precision Engineering,2013,21(2):246-252.
[12]Hou M,Qiu L,Zhao W,et al.Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles[J].Applied Optics,2014,53(3):487-495.
[13]沙定国.误差分析与测量不确定度评定[M].北京:中国计量出版社,2003:53-58.Sha Dingguo.Error analysis and uncertainty evaluation of measurement[M].Beijing:China Metrology Publishing House,2003:53-58.