基于计算全息元件的大口径非球面透镜透射波前检测方法
|
摘要
针对大口径非球面透镜透射波前检测,提出了采用计算全息元件(CGH)作为光路相位补偿元件进行检测的方法。大口径非球面透镜透射波前通常采用球面干涉仪进行检测,为了达到零位检测的目的,在光路中往往需要加入相位补偿元件以补偿高阶像差(HOA)。传统的折射式相位补偿元件的精度溯源比较困难,导致检测数据缺乏可信度。将CGH作为相位补偿元件可达到零位检测的目的。针对大口径非球面透镜的透射波前检测,设计并加工了相应的CGH作为相位补偿元件,并与传统的折射式补偿元件进行了对比测试。测试结果表明:两种相位补偿方法的测试数据具有良好的一致性,峰谷(PV)值的差值为0.034λ(λ为检测光的波长),均方根(RMS)值的差值为0.006λ,因此CGH作为相位补偿元件具有相当高的测试精度。
To measure the transmission wavefront of a large-aperture aspheric lens,we propose a method by using a computer-generated hologram(CGH)as a phase compensation element.The transmission wavefront of a largeaperture aspheric lens is typically tested by a sphere interferometer.To conduct a null test,phase compensation is required to compensate for high-order aberrations(HOAs).However,validating the accuracy of conventional refractive-phase compensation elements is difficult,and they therefore generate unreliable measurement results.An alternative type of phase compensation employs a CGH,which is a diffraction element that can also be used to conduct a null test.To conduct a null test for the transmission wavefront of a large-aperture aspheric lens,we design and manufacture a CGH.A contrast test is implemented with two different phase compensation elements,which results in two measured data those are very similar to one another,between which the peak valley(PV)difference is 0.034λ(λis the wavelength of the detect light),and the root mean square(RMS)difference is 0.006λ.Therefore,the null-test method using a CGH proposed in this study displays a high degree of accuracy.
To measure the transmission wavefront of a large-aperture aspheric lens,we propose a method by using a computer-generated hologram(CGH)as a phase compensation element.The transmission wavefront of a largeaperture aspheric lens is typically tested by a sphere interferometer.To conduct a null test,phase compensation is required to compensate for high-order aberrations(HOAs).However,validating the accuracy of conventional refractive-phase compensation elements is difficult,and they therefore generate unreliable measurement results.An alternative type of phase compensation employs a CGH,which is a diffraction element that can also be used to conduct a null test.To conduct a null test for the transmission wavefront of a large-aperture aspheric lens,we design and manufacture a CGH.A contrast test is implemented with two different phase compensation elements,which results in two measured data those are very similar to one another,between which the peak valley(PV)difference is 0.034λ(λis the wavelength of the detect light),and the root mean square(RMS)difference is 0.006λ.Therefore,the null-test method using a CGH proposed in this study displays a high degree of accuracy.
引文
[1] Spaeth M L,Manes K R,Kalantar D H,et al.Description of the NIF laser[J].Fusion Science andTechnology,2016,69(1):25-145.
[2] Baisden P A,Atherton L J,Hawley R A,et al.Large optics for the national ignition facility[J].Fusion Science and Technology,2016,69(1):295-351.
[3] MacGovern A J,Wyant J C.Computer generatedholograms for testing optical elements[J].AppliedOptics,1971,10(3):619-624.
[4] Gao S T,Sui Y X,Yang H J.High precise testing ofasphere with computer-generated hologram and errorevaluation[J].Acta Optica Sinica,2013,33(6):0612003.高松涛,隋永新,杨怀江.用计算全息图对非球面的高精度检测与误差评估[J].光学学报,2013,33(6):0612003.
[5] Arnold S M.How to test an asphere with a computergenerated hologram[J].Proceedings of SPIE,1989,1052:191-197.
[6] Lindlein N.Analysis of the disturbing diffractionorders of computer-generated holograms used fortesting optical aspherics[J].Applied Optics,2001,40(16):2698-2708.
[7] Zhao C,Zehnder R,Burge J H,et al.Testing anoff-axis parabola with a CGH and a spherical mirroras null lens[J].Proceedings of SPIE,2005,5869:586911.
[8] Kim T,Burge J H,Lee Y,et al.Null test for ahighly paraboloidal mirror[J].Applied Optics,2004,43(18):3614-3618.
[9] Dubin M B,Su P,Burge J H.Fizeau interferometerwith spherical reference and CGH correction formeasuring large convex aspheres[J].Proceedings ofSPIE,2009,7426:74260S.
[10] Burge J H,Zhao C,Dubin M.Measurement ofaspheric mirror segments using Fizeau interferometrywith CGH correction[J].Proceedings of SPIE,2010,7739:773902.
[11] Talha M M,Chang J,Wang Y,et al.Computergenerated hologram null compensator for opticalmetrology of a freeform surface[J]. Optik-International Journal for Light and Electron Optics,2010,121(24):2262-2265.
[12] Martin H M,Angel J R P,Angeli G Z,et al.Manufacture and final tests of the LSST monolithicprimary/tertiary mirror[J].Proceedings of SPIE,2016,9912:99120X.
[13] Chang Y C,Zhou P,Burge J H.Analysis of phasesensitivity for binary computer-generatedholograms[J].Applied Optics,2006,45(18):4223-4234.
[14] Zhou P,Burge J H.Optimal design of computer-generated holograms to minimize sensitivity tofabrication errors[J]. Optics Express, 2007,15(23):15410-15417.
[15] Zhao L B,Zhang Z Y,Zhu D Y,eta l.Fabrication ofhigh precision computer generated hologram foraspheric surface testing by laser-direct writing[J].Laser &Optoelectronics Progress,2014,51(11):110902. 赵龙波,张志宇,朱德燕,等.用于非球面检验的激光直写高精度计算全息图制作[J].激光与光电子学进展,2014,51(11):110902.
[16] Dou J T,Gao Z S,Yang Z M,et al.Deep aspheric surface test based on combination of computer generated holograms with low spatial frequency[J].Acta Optica Sinica,2016,36(11):1112004. 窦健泰,高志山,杨忠明,等.低空间频率组合计算全息元件检测深度非球面[J].光学学报,2016,36(11):1112004.
[17] Zheng L G,Hao T,Guo C L,et al.Phase analysis in computer-generated hologram induced by direct laser writing systems with orthogonality error[J].Acta Optica Sinica,2016,36(10):1012005. 郑立功,郝腾,国成立,等.激光直写机床系统正交性误差影响下计算全息图相位分析[J].光学学报,2016,36(10):1012005.
[2] Baisden P A,Atherton L J,Hawley R A,et al.Large optics for the national ignition facility[J].Fusion Science and Technology,2016,69(1):295-351.
[3] MacGovern A J,Wyant J C.Computer generatedholograms for testing optical elements[J].AppliedOptics,1971,10(3):619-624.
[4] Gao S T,Sui Y X,Yang H J.High precise testing ofasphere with computer-generated hologram and errorevaluation[J].Acta Optica Sinica,2013,33(6):0612003.高松涛,隋永新,杨怀江.用计算全息图对非球面的高精度检测与误差评估[J].光学学报,2013,33(6):0612003.
[5] Arnold S M.How to test an asphere with a computergenerated hologram[J].Proceedings of SPIE,1989,1052:191-197.
[6] Lindlein N.Analysis of the disturbing diffractionorders of computer-generated holograms used fortesting optical aspherics[J].Applied Optics,2001,40(16):2698-2708.
[7] Zhao C,Zehnder R,Burge J H,et al.Testing anoff-axis parabola with a CGH and a spherical mirroras null lens[J].Proceedings of SPIE,2005,5869:586911.
[8] Kim T,Burge J H,Lee Y,et al.Null test for ahighly paraboloidal mirror[J].Applied Optics,2004,43(18):3614-3618.
[9] Dubin M B,Su P,Burge J H.Fizeau interferometerwith spherical reference and CGH correction formeasuring large convex aspheres[J].Proceedings ofSPIE,2009,7426:74260S.
[10] Burge J H,Zhao C,Dubin M.Measurement ofaspheric mirror segments using Fizeau interferometrywith CGH correction[J].Proceedings of SPIE,2010,7739:773902.
[11] Talha M M,Chang J,Wang Y,et al.Computergenerated hologram null compensator for opticalmetrology of a freeform surface[J]. Optik-International Journal for Light and Electron Optics,2010,121(24):2262-2265.
[12] Martin H M,Angel J R P,Angeli G Z,et al.Manufacture and final tests of the LSST monolithicprimary/tertiary mirror[J].Proceedings of SPIE,2016,9912:99120X.
[13] Chang Y C,Zhou P,Burge J H.Analysis of phasesensitivity for binary computer-generatedholograms[J].Applied Optics,2006,45(18):4223-4234.
[14] Zhou P,Burge J H.Optimal design of computer-generated holograms to minimize sensitivity tofabrication errors[J]. Optics Express, 2007,15(23):15410-15417.
[15] Zhao L B,Zhang Z Y,Zhu D Y,eta l.Fabrication ofhigh precision computer generated hologram foraspheric surface testing by laser-direct writing[J].Laser &Optoelectronics Progress,2014,51(11):110902. 赵龙波,张志宇,朱德燕,等.用于非球面检验的激光直写高精度计算全息图制作[J].激光与光电子学进展,2014,51(11):110902.
[16] Dou J T,Gao Z S,Yang Z M,et al.Deep aspheric surface test based on combination of computer generated holograms with low spatial frequency[J].Acta Optica Sinica,2016,36(11):1112004. 窦健泰,高志山,杨忠明,等.低空间频率组合计算全息元件检测深度非球面[J].光学学报,2016,36(11):1112004.
[17] Zheng L G,Hao T,Guo C L,et al.Phase analysis in computer-generated hologram induced by direct laser writing systems with orthogonality error[J].Acta Optica Sinica,2016,36(10):1012005. 郑立功,郝腾,国成立,等.激光直写机床系统正交性误差影响下计算全息图相位分析[J].光学学报,2016,36(10):1012005.
© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号 地址：北京市海淀区学院路29号 邮编：100083 电话：办公室：(+86 10)66554848；文献借阅、咨询服务、科技查新：66554700 |