一种利用半反半透透镜检验二次非球面的方法
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摘要
将半反半透透镜应用于非球面检验。半反半透面和待检验面作为透镜的两个面,空间上相互靠近。半反半透面实现光线自准,同时也对波前进行补偿。这样,既消除了中心遮挡,又可以减小光学系统的尺寸,同时也增强了检验的能力。根据三级像差理论对这一方法进行了推导,进而给出了从待检面的参数得到检验系统参数的方法。根据这一方法设计了一个口径300 mm,焦距1200 mm凸反射镜的检验光路,通过光学设计软件ZEMAX进行优化,优化后系统的波像差小于1/(100λ),满足光学检验的要求。
The semi-transmitting lens is used in the test of aspheric surface. The semi-transmitting surface and the surface under testing are close to each other in space as two surfaces of the lens. Retro-reflected surface can also compensate the aberrations. This testing can eliminate the obscuration, decrease the size of optical system and increase the ability of compensation. According to the third order aberration theory,a method to obtain the testing parameters of the surface under testing is given. An optical system to test a convex aspheric mirror with diameter of 300 mm and focus of 1200 mm is designed. After the optimization with ZEMAX, the wave front aberration of the testing system is lower than 1/(100λ), which meets the requirement of optical testing.
The semi-transmitting lens is used in the test of aspheric surface. The semi-transmitting surface and the surface under testing are close to each other in space as two surfaces of the lens. Retro-reflected surface can also compensate the aberrations. This testing can eliminate the obscuration, decrease the size of optical system and increase the ability of compensation. According to the third order aberration theory,a method to obtain the testing parameters of the surface under testing is given. An optical system to test a convex aspheric mirror with diameter of 300 mm and focus of 1200 mm is designed. After the optimization with ZEMAX, the wave front aberration of the testing system is lower than 1/(100λ), which meets the requirement of optical testing.
引文
[1] Zhang Yimo. Applied Optics(Third Edition)(应用光学(第三版))[M]. Beijing:Publishing House of Electronics Industry, 2008:470-471(in Chinese).
[2] Kong Xianglei, Hao Peiming, Ding Houyue. The manufacturing of concave aspheric surface with large speed aperture[J]. Chinese Journal of Quantun Electronics(量子电子学报),2001,18(1):50-55(in Chinese).
[3] Hao Peiming, Li Kexin, Yuan Liyin, et al. Study on resolving anaerrational point of conicoid[J]. Chinese Journal of Quantun Electronics(量子电子学报), 2006, 23(4):471-475(in Chinese).
[4] Wang Peng, Zhao Wencai, Hu Mingyong, et al. Hindle testing of the off-axis convex asphere surface[J]. Optics·Precision Engineering(光学精密工程),2002, 10(2):139-142(in Chinese).
[5] Shen Zhengxiang, Hao Peiming, Zhao Wencai, et al. Autocollimating testing of convex conic aspheric surface[J].Infrared and Laser Engineering(红外与激光工程),2005, 34(1):46-50(in Chinese).
[6] Tao Chun, Pan Junhua, Hu Mingyong. A new method of convex aspheric surface compansation tests[J]. Optical Technique(光学技术),2009, 35(1):123-126(in Chinese).
[7] Malacara Daniel.Optical Shop Testing(Third Edition)(光学车间检验)[M]. Transl. by Yang Li,Wu Fan, et al.Beijing:China Machine Press, 2012:329-333(in Chinese).
[8] Ma Jie, Zhu Zheng. Testing convex aspherical surface with optimized modified hindle arrangement[J]. Infrared and Laser Engineering(红外与激光工程),2011,40(2):277-281(in Chinese).
[9] Hao Peiming. Design of Auxiliary Optical System of Aspherical Testing(非球面检验的辅助光学系统设计)[M]. Beijing:Science Press, 2017:30-45(in Chinese).
[10] Lin Dajian.Design of Optical Engineering System(工程光学系统设计)[M]. Beijing:China Machine Press,1987:41-67(in Chinese).
[2] Kong Xianglei, Hao Peiming, Ding Houyue. The manufacturing of concave aspheric surface with large speed aperture[J]. Chinese Journal of Quantun Electronics(量子电子学报),2001,18(1):50-55(in Chinese).
[3] Hao Peiming, Li Kexin, Yuan Liyin, et al. Study on resolving anaerrational point of conicoid[J]. Chinese Journal of Quantun Electronics(量子电子学报), 2006, 23(4):471-475(in Chinese).
[4] Wang Peng, Zhao Wencai, Hu Mingyong, et al. Hindle testing of the off-axis convex asphere surface[J]. Optics·Precision Engineering(光学精密工程),2002, 10(2):139-142(in Chinese).
[5] Shen Zhengxiang, Hao Peiming, Zhao Wencai, et al. Autocollimating testing of convex conic aspheric surface[J].Infrared and Laser Engineering(红外与激光工程),2005, 34(1):46-50(in Chinese).
[6] Tao Chun, Pan Junhua, Hu Mingyong. A new method of convex aspheric surface compansation tests[J]. Optical Technique(光学技术),2009, 35(1):123-126(in Chinese).
[7] Malacara Daniel.Optical Shop Testing(Third Edition)(光学车间检验)[M]. Transl. by Yang Li,Wu Fan, et al.Beijing:China Machine Press, 2012:329-333(in Chinese).
[8] Ma Jie, Zhu Zheng. Testing convex aspherical surface with optimized modified hindle arrangement[J]. Infrared and Laser Engineering(红外与激光工程),2011,40(2):277-281(in Chinese).
[9] Hao Peiming. Design of Auxiliary Optical System of Aspherical Testing(非球面检验的辅助光学系统设计)[M]. Beijing:Science Press, 2017:30-45(in Chinese).
[10] Lin Dajian.Design of Optical Engineering System(工程光学系统设计)[M]. Beijing:China Machine Press,1987:41-67(in Chinese).