SiHCl_3还原工艺的关键参数探究
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摘要
多晶硅制备方法主要有气液沉积法、流化床法、硅烷热解法、冶金法、物理提纯法、改良西门子法等。改良西门子法由于安全性好、沉积速率高、纯度较高等优点,成为目前应用最广泛的工艺方法。SiHCl_3还原是其中一项关键技术,也是主要耗能部分。在国家提倡建设节能降耗、绿色环保型企业的背景下,如何提高SiHCl_3一次转化率和Si的沉积速率,从而提高产量和质量,降低能耗,具有重要意义。本文针对该问题探究相关参数和优化方法,结合生产实践,探究合理解决方案。
The main preparation methods of polysilicon include such ones: the gas and fluid co-deposition method,the fluidized bed method,the silane pyrolysis,the metallurgy method,the physical purification method,the modified Siemens Method,etc. The modified Siemens Method is the most widely used method,as its many advantages,such as higher security,higher deposition rate,and higher purity,etc. The SiHCl_3 Deoxidization Process is a key technology,as well as the main energy dissipation department. At present,our enterprise advocates the energy-saving and cost-reducing production,and environmental protection. On the background,that how to raise the conversion rate of one-time SiHCl_3 deoxidization and the rate of Si deposition,it is a significant topic. In this paper,these two questions are to be investigated combined with production practice to research appropriate solutions.
The main preparation methods of polysilicon include such ones: the gas and fluid co-deposition method,the fluidized bed method,the silane pyrolysis,the metallurgy method,the physical purification method,the modified Siemens Method,etc. The modified Siemens Method is the most widely used method,as its many advantages,such as higher security,higher deposition rate,and higher purity,etc. The SiHCl_3 Deoxidization Process is a key technology,as well as the main energy dissipation department. At present,our enterprise advocates the energy-saving and cost-reducing production,and environmental protection. On the background,that how to raise the conversion rate of one-time SiHCl_3 deoxidization and the rate of Si deposition,it is a significant topic. In this paper,these two questions are to be investigated combined with production practice to research appropriate solutions.
引文
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[2]杨涛.改良西门子法生产多晶硅工艺设计探讨[J].贵州化工,2009,34(3):7-11.
[3]郭丹,王恩俊,武锦涛.改良西门子法多晶硅生产工艺关键设备[J].当代化工,2013(7):912-916.
[4]李国栋.基于Gibbs自由能最小法的反应过程优化设计的研究[D].青岛:中国海洋大学,2007.
[5]上饶师范学院.无机及分析化学网络课程-第四章化学平衡[EB/OL].http://www.sru.jx.cn/chemone/6-2.htm.
[6]欧阳旭.气固相反应的Gibbs自由能最小法模拟[D].青岛:中国海洋大学,2009.
[7]中国有色金属工业总公司教育教材编审办公室.多晶硅工艺学[M].北京:中国有色金属工业总公司,1999:50-60.
[8]杨志国.多晶硅还原中三氯氢硅几种汽化方式的比较[J].科研探索与知识创新,2009(7):89-90.