溶胶凝胶法制备SiO_2(Eu~(n+)∶SiO_2)多层膜及其性能研究
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摘要
利用溶胶-凝胶法于硅基片表面制备SiO_2及Eu~(n+)∶SiO_2单层及多层薄膜。通过X射线衍射仪(XRD)、傅里叶红外光谱仪(FT-IR)、接触角测量仪、动态力学分析仪(DMA)以及扫描电镜(SEM)等对样品的性能进行系统的测试和分析。研究结果表明,经多层镀膜后基片表面膜层厚度增加,且薄膜与基片之间没有明显的间隙,结合紧密。多层镀膜,尤其是镀膜超过6层后,可以显著提高基片的抗弯强度。Eu~(n+)∶SiO_2薄膜对抗弯强度的提高量大于单层SiO_2薄膜。SiO_2薄膜对硅基片亲水性影响不明显,但稀土掺杂Eu~(n+)∶SiO_2薄膜可以显著提高基片的亲水性。
SiO_2 and Eu~(n+)∶ SiO_2 single layer and multilayer films were prepared on the silicon substrate by sol-gel method. The performance of the samples were systematically tested by X-ray diffraction( XRD),Fourier transform infrared spectroscopy( FT-IR),contact angle measuring instrument,dynamic mechanical analyzer( DMA) and scanning electron microscopy( SEM). The results show that the thickness of the multilayer film on the substrate increases,and the adherence between the film and the substrateis strong. Multi-layer coating,especially more than six layers coating,can significantly increase the flexural strength of the substrate. The Eu~(n+)∶ SiO_2 film has a higher bending strength than that of SiO_2 film. The effect of SiO_2 film on the hydrophilicity of the silicon substrate is not obvious,but the rare earth doped film( Eu~(n+)∶ SiO_2) can significantly improve the hydrophilicity.
SiO_2 and Eu~(n+)∶ SiO_2 single layer and multilayer films were prepared on the silicon substrate by sol-gel method. The performance of the samples were systematically tested by X-ray diffraction( XRD),Fourier transform infrared spectroscopy( FT-IR),contact angle measuring instrument,dynamic mechanical analyzer( DMA) and scanning electron microscopy( SEM). The results show that the thickness of the multilayer film on the substrate increases,and the adherence between the film and the substrateis strong. Multi-layer coating,especially more than six layers coating,can significantly increase the flexural strength of the substrate. The Eu~(n+)∶ SiO_2 film has a higher bending strength than that of SiO_2 film. The effect of SiO_2 film on the hydrophilicity of the silicon substrate is not obvious,but the rare earth doped film( Eu~(n+)∶ SiO_2) can significantly improve the hydrophilicity.
引文
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[2] Laura Vivar Mora,Sanjeev Naik,Shiladitya Paul,et al.Influence of silica nanoparticles on corrosion resistance of sol-gel based coatings on mild steel[J]. Surface&Coatings Technology,2017(327):368-375.
[3] Yanru Man,Zhonghua Li,Ming Shu,et al.Surface treatment of 25-μm Kapton film by ammonia for improvement of Ti O2/SiO2coating’s adhesion[J]. Surface and interface analysis,2017(49):843–849.
[4] Zihan Ji,Lei Bao,Hongning Wang,et al.Preparation of super-hydrophobic antireflective films by rod-like Mg F2and Si O2mixed sol[J]. Materials Letters,2017(207):21–24.
[5]熊华山.溶胶-凝胶法制备Si O2增透膜的研究[D].成都:四川大学,2004.
[6]孙继红,范文浩,徐耀,等. Si O2溶胶的簇团特性及其对增透膜光学性能的影响[J].光学技术,1999(4):27-28.
[7] Z.Q. Guo,Y. Liu,M.Y. Tang,et al.Super-durable closed-surface antireflection thin film by silica nanocomposites[J]. Solar Energy Materials and Solar Cells,2017(170):143-148.
[8] Ohta M,Yasuda M,Takami M. Thermolum in escence properties of SiO2:Al,Eu[J]. Journal of Alloys and Compounds,2000(303-304):320-324.
[9] Nakata R,Hashimoto N,Kawano K,et a1. High-Conversion-Eficiency Solar Cell Using Fluorescence of Rrae Eatrh Ions[J]. Japanese Journal of Applied Physics,1996,35(2):90-93.
[10]张思远.稀土离子的光谱学——光谱性质和光谱理论[M].北京:科学出版社,2008:190.
[11] Jiaxing Hu,Wenxiu Que,Zhili Chen,et al.Titania–silica hybrid films derived by a sol–gel process for organic field effect transistors[J]. J Sol-Gel Sci Technol,2017,83:666–674.
[12]张锐,秦丹丹,王海龙,等.溶胶凝胶法制备Si O2工艺[J].郑州大学学报,2006,27(3):119-122.
[13]李晨松,徐廷献.无机薄膜的制备技术[J].硅酸盐通报,2003(2):21-25.
[14] Rajesh D,Tapati J,Swati R. Degradation studies of transparent conducting oxide:a substrate for microcrystalline silicon thin film solar cell[J].Solar energy materials and solar cells,2005,86(2):207-216.