超声电流变复合抛光试验
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摘要
针对模具微结构光整加工,利用电流变效应对磨料的聚集作用和超声振动对磨料的驱动作用,提出了超声电流变复合抛光工艺.开发了超声电流变复合抛光加工系统.正交试验结果表明超声振动的振幅和施加的电场强度对表面粗糙度的影响最大.通过单因素试验研究了超声电流变复合抛光工艺参数对抛光后表面粗糙度的影响规律.试验结果验证了超声电流变复合抛光工艺可行性,为后续工艺优化和实际应用奠定了基础.
An ultrasonic and electrorheological integrated polishing process was proposed for finishing micro structures of mold based on both the aggregation of abrasives caused by electrorheological effect and the driving effect of ultrasonic vibration on abrasives. An ultrasonic and electrorheological integrated polishing system was developed. The orthogonal test results showed that the amplitude of the ultrasonic vibration and the applied electric field strength have the greatest influence on surface roughness. The influence of ultrasonic and electrorheological integrated polishing process parameters on the surface roughness after polishing was studied by the single factor test. The experimental results verify the feasibility of the ultrasonic electrorheological integrated polishing process,which lays a foundation for subsequent process optimization and practical application.
An ultrasonic and electrorheological integrated polishing process was proposed for finishing micro structures of mold based on both the aggregation of abrasives caused by electrorheological effect and the driving effect of ultrasonic vibration on abrasives. An ultrasonic and electrorheological integrated polishing system was developed. The orthogonal test results showed that the amplitude of the ultrasonic vibration and the applied electric field strength have the greatest influence on surface roughness. The influence of ultrasonic and electrorheological integrated polishing process parameters on the surface roughness after polishing was studied by the single factor test. The experimental results verify the feasibility of the ultrasonic electrorheological integrated polishing process,which lays a foundation for subsequent process optimization and practical application.
引文
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[10]Zhang L,Zhao Y W,He X S,et al.An investigation of effective area in electrorheological fluid-assisted polishing of tungsten carbide[J].International Journal of Machine Tools&Manufacture,2008,48(3):295-306.
[2]Mahardika M,Mitsui K.A new method for monitoring microelectric discharge machining processes[J].International Journal of Machine Tools&Manufacture,2008,48(3):446-458.
[3]Trimmer A L,Hudson J L,Kock M,et al.Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses[J].Applied Physics Letters,2003,82(19):3327-3329.
[4]Teixidor D,Ciurana J.Optimization of process parameters for pulsed laser milling of micro-channels on AISI H13 tool steel[J].Robotics and Computer-Integrated Manufacturing,2013,29(1):209-218.
[5]Nellen P M,Br9nnimann R.Milling micro-structures using focused ion beams and its application to photonic components[J].Measurement Science&Technology,2006,17(5):943-948.
[6]Romano-Rodríguez A,Hernández-Ramírez F.Dual-beam focused ion beam(FIB):a prototyping tool for micro and nanofabrication[J].Microelectronic Engineering,2007,84(5/6/7/8):789-792.
[7]Horsch C,Schulze V,L9he D.Deburring and surface conditioning of micro milled structures by micro peening and ultrasonic wet peening[J].Microsystem Technologies,2006,12(7):691-696.
[8]Guo B,Zhao Q L,Hou Y,et al.Ultrasonic vibration assisted grinding of microstructures on binderless tungsten carbide(WC)[J].Key Engineering Materials,2015,625:475-479.
[9]Zhang L,He X S,Yang H R,et al.An integrated tool for fiveaxis electrorheological fluid-assisted polishing[J].International Journal of Machine Tools&Manufacture,2010,50(8):737-740.
[10]Zhang L,Zhao Y W,He X S,et al.An investigation of effective area in electrorheological fluid-assisted polishing of tungsten carbide[J].International Journal of Machine Tools&Manufacture,2008,48(3):295-306.