强光光学零件磁流变抛光误差的频谱特征与演变研究

详细信息    查看全文 | 推荐本文 |

英文篇名：Spectral Feature and Evolvement of Machining Error of High-power Optical Elements in Magnetorheological Finishing 作者：王贵林 ; 李完小 ; 向纪邦 英文作者：WANG Gui-lin;LI Wan-xiao;XIANG Ji-bang;Hunan Aerospace Huanyu Communication Technology Co.,LTD; 关键词：强光光学零件 ; 磁流变抛光 ; 中高频误差 ; 功率谱密度 ; 去除函数 英文关键词：high-power optical element;;magnetorheological finishing;;medium-high frequency error;;power spectral density;;removal function 中文刊名：HJZJ 英文刊名：Aviation Precision Manufacturing Technology 机构：湖南航天环宇通信科技股份有限公司; 出版日期：2019-02-15 出版单位：航空精密制造技术 年：2019 期：v.55;No.315 基金：国家自然科学基金资助项目(51475466) 语种：中文; 页：HJZJ201901002 页数：5 CN：01 ISSN：11-2847/V 分类号：10-13+39

摘要

通过分析磁流变抛光的材料去除特征、误差功率谱密度的定量计算方法、敏感频率误差的演变规律,探索误差频谱与去除函数、走刀方式、走刀步距等加工参数的对应关系,为工艺过程的合理控制提供指导。典型强光光学零件磁流变抛光的实验结果表明,通过优化工艺参数,能够大幅修正低频误差、控制中高频误差,保证0.03～8.3mm-1频段误差全部满足NIF评价指标要求。
        By analysis of the removal characteristics of surface material, the calculating algorithm for power spectral density(PSD) and the evolving rule of sensitive frequency error are studied, the corresponding relation between the error spectrum and the figuring parameters including removal function, feed way and feed spacing, the work helps to control the surface error of high-power optical elements. The effectiveness of evaluation method is experimentally verified in the figuring process of typical high-power optical element by using MRF technology. The low frequency errors are corrected and the medium-high frequency errors are controlled by optimizing the figuring parameters. All errors in 0.03～8.3 mm~(-1) frequency range satisfy the NIF evaluation requirements.

引文

[1]Xie N, Guo Y, Huang W Q, et al. Improvement of near-field beam quality for high-power laser pulses by a two-photon-absorption organic compound[J]. Optik, 2013(124):60-63
    [2]Feigenbaum E, Sacks R A, McCandless K P, et al. Algorithm for Fourier propagation through the near-focal region[J]. Appl. Opt.,2013, 52(20):5030-5035
    [3]Edwards M J, Patel P K, Lindl J D, et al. Progress towards ignition on the National Ignition Facility[J]. Physics of Plasmas, 2013,20(7):070501
    [4]王贵林. KDP光学零件超精密车削加工误差的频谱特性与控制[J].应用光学, 2017, 38(2):159-164
    [5]Chen J C, Sun T. Identifying the microtopographic features generated by different ultra-precision machining techniques by power spectral density[J]. Key Engineering Materials, 2014(625):73-78
    [6]Yu P, Pan JS, Yan Q S. Magnetorheological finishing with tangential magnetic fields formed by the rotation of a magnetic pole[J].Int. J. Abrasive Technology, 2016, 7(4):307-320
    [7]Li L X, Zheng L G, Deng W J, et al. Optimized dwell time algorithm in magnetorheological finishing[J]. The International Journal of Advanced Manufacturing Technology, 2015, 81(5-8):833-841