双波长数字显微像面全息术测量微结构表面形貌
|
摘要
为了扩大传统双波长数字全息显微技术在实时微结构表面形貌测试中的有效测量视场,提高实时响应速度并降低噪声,将传统双波长数字全息术和数字显微像面全息术相结合,提出了一种双波长数字显微像面全息方法。该方法在记录像面全息图后,无需进行衍射重构,直接在全息面提取相位和强度信息达到测量样本形貌的目的。基于该方法对微米级高度的台阶结构进行三维形貌测试,同时对比了传统双波长数字全息显微系统和机械探针轮廓仪的微台阶测试结果。从三者的对比分析中可知,双波长数字显微像面全息的这种测试技术是有效可行的,且具有单曝光、全视场,响应速度快以及噪声较低的特点,对于阶跃高度达到微米级的微器件形貌测试尤为适用。
To enlarge the effective field of view,speed up the response time and reduce the noise of the real-time surface profile measurement of microstructures by traditional dual-wavelength digital holographic microscopy,a technique named dual-wavelength digital microscopic image-plane holography is developed.It is a combination of digital microscopic image-plane holography and the traditional dual-wavelength digital holographic microscopy.The phase and amplitude can be directly extracted from the hologram plane to yield the surface profile of microstructure without calculation of the diffraction after recording the image-plane hologram.A microstep with several micrometers in height is tested by the dual-wavelength digital image-plane holographic microscope,the traditional digital holographic microscope and the stylus profilometer.As can be seen from the comparison of the testing results,the dualwavelength digital microscopic image-plane holography is feasible with the characteristics of single-exposure,completely full-field,short response time and low noises.It is especially suitable for the real-time surface profile measurement of microstructures with step height in the micrometer range.
To enlarge the effective field of view,speed up the response time and reduce the noise of the real-time surface profile measurement of microstructures by traditional dual-wavelength digital holographic microscopy,a technique named dual-wavelength digital microscopic image-plane holography is developed.It is a combination of digital microscopic image-plane holography and the traditional dual-wavelength digital holographic microscopy.The phase and amplitude can be directly extracted from the hologram plane to yield the surface profile of microstructure without calculation of the diffraction after recording the image-plane hologram.A microstep with several micrometers in height is tested by the dual-wavelength digital image-plane holographic microscope,the traditional digital holographic microscope and the stylus profilometer.As can be seen from the comparison of the testing results,the dualwavelength digital microscopic image-plane holography is feasible with the characteristics of single-exposure,completely full-field,short response time and low noises.It is especially suitable for the real-time surface profile measurement of microstructures with step height in the micrometer range.
引文
1 Zhou Wenjing,Yu Yingjie,Xu Qingsheng.Micro-structure measurement of phase grating based on digital micro-hologaphy[J].Acta Photonica Sinica,2008,37(11):2234-2238.周文静,于瀛洁,徐强胜.基于数字显微全息技术的相位光栅结构测量[J].光子学报,2008,37(11):2234-2238.
2 Wang Yujia,Jiang Zhuqing,Gao Zhirui,et al..Investigation on phase unwrapping in dual-wavelengh digital holography[J].Acta Optica Sinica,2012,32(10):1009001.王羽佳,江竹青,高志瑞,等.双波长数字全息相位解包裹方法研究[J].光学学报,2012,32(10):1009001.
3 Jonas Kühn,Tristan Colomb,Frédéric Montfort,et al..Realtime dual-wavelength digital holographic microscopy with a single hologram acquisition[J].Opt Express,2007,15(12):7231-7242.
4 JMin,B Yao,P Gao,et al..Dual-wavelength slightly off-axis digital holographic microscopy[J].Appl Opt,2012,51(2):191-196.
5 A Khmaladze,R L Matz,C Zhang,et al..Dual wavelength digital holography phase unwrapping by linear regression[C].SPIE,2011,8043:80430X.
6 Ma Lihong,Wang Hui,Jin Hongzhen,et al..Experimental study on quantitative phase imaging by digital holographic microscopy[J].Chinese J Lasers,2012,39(3):0309002.马利红,王辉,金洪震,等.数字全息显微定量相位成像的实验研究[J].中国激光,2012,39(3):0309002.
7 T Colomb,S Krivec,H Hutter,et al..Digital holographic reflectometry[J].Opt Express,2010,18(4):3719-3731.
8 TColomb,J Kühn,C Depeursinge,et al..Several micron-range measurements with sub-nanometric resolution by the use of dualwavelength digital holography and vertical scanning[C].SPIE,2009,7389:73891H.
9 YFu,G Pedrini,B M Hennelly,et al..Dual-wavelength imageplane digital holography for dynamic measurement[J].Opt&Lasers in Eng,2009,47(5):552-557.
10 Jia Jinchao,Mo Weidong,Li Zhaoxiang,et al..Measurement of temperature field based on digital holography technology[J].Laser&Optoelectronics Progress,2012,49(3):91-94.贾晋超,莫卫东,李照祥,等.数字全息技术在温度场测量中的应用[J].激光与光电子学进展,2012,49(3):91-94.
11 ECuche,P Marquet,C Depeursinge.Aperture apodization using cubic spline interpolation:application in digital holographic microscopy[J].Opt Commun,2000,182(1):59-69.
12 Zhang Yancao,Fan Qi.Effects of non-synchronous sampling on reconstructed image of digital hologram[J].Acta Optica Sinica,2012,32(12):1209002.张延曹,范琦.数字全息图的非同步采样对再现像的影响[J].光学学报,2012,32(12):1209002.
13 Schnars Ulf,Werner P O Jüptner.Digital recording and numerical reconstruction of holograms[J].Meas Sci&Technol,2002,13(9):R85-R101.
14 Garcia-Sucerquia Jorge,Jorge Alexis Herrera Ramírez,Daniel Velásquez Prieto.Reduction of speckle noise in digital holography by using digital image processing[J].Optik,2005,116(1):44-48.
15 LüQieni,Ge Baozhen,Zhang Yimo.Digital microscopic image plane holography[J].J Optoelectronics·Laser,2006,17(4):475 -478.吕且妮,葛宝臻,张以谟.数字显微像面全息技术研究[J].光电子·激光,2006,17(4):475-478.
16 TColomb,F Montfort,J Kühn,et al..Numerical parametric lens for shifting,magnification,and complete aberration compensation in digital holographic microscopy[J].J Opt Soc Am A,2006,23(12):3177-3190.
17 F Montfort,F Charrière,T Colomb,et al..Purely numerical compensation for microscope objective phase curvature in digital holographic microscopy:influence of digital phase mask position[J].J Opt Soc Am A,2006,23(11):2944-2953.
2 Wang Yujia,Jiang Zhuqing,Gao Zhirui,et al..Investigation on phase unwrapping in dual-wavelengh digital holography[J].Acta Optica Sinica,2012,32(10):1009001.王羽佳,江竹青,高志瑞,等.双波长数字全息相位解包裹方法研究[J].光学学报,2012,32(10):1009001.
3 Jonas Kühn,Tristan Colomb,Frédéric Montfort,et al..Realtime dual-wavelength digital holographic microscopy with a single hologram acquisition[J].Opt Express,2007,15(12):7231-7242.
4 JMin,B Yao,P Gao,et al..Dual-wavelength slightly off-axis digital holographic microscopy[J].Appl Opt,2012,51(2):191-196.
5 A Khmaladze,R L Matz,C Zhang,et al..Dual wavelength digital holography phase unwrapping by linear regression[C].SPIE,2011,8043:80430X.
6 Ma Lihong,Wang Hui,Jin Hongzhen,et al..Experimental study on quantitative phase imaging by digital holographic microscopy[J].Chinese J Lasers,2012,39(3):0309002.马利红,王辉,金洪震,等.数字全息显微定量相位成像的实验研究[J].中国激光,2012,39(3):0309002.
7 T Colomb,S Krivec,H Hutter,et al..Digital holographic reflectometry[J].Opt Express,2010,18(4):3719-3731.
8 TColomb,J Kühn,C Depeursinge,et al..Several micron-range measurements with sub-nanometric resolution by the use of dualwavelength digital holography and vertical scanning[C].SPIE,2009,7389:73891H.
9 YFu,G Pedrini,B M Hennelly,et al..Dual-wavelength imageplane digital holography for dynamic measurement[J].Opt&Lasers in Eng,2009,47(5):552-557.
10 Jia Jinchao,Mo Weidong,Li Zhaoxiang,et al..Measurement of temperature field based on digital holography technology[J].Laser&Optoelectronics Progress,2012,49(3):91-94.贾晋超,莫卫东,李照祥,等.数字全息技术在温度场测量中的应用[J].激光与光电子学进展,2012,49(3):91-94.
11 ECuche,P Marquet,C Depeursinge.Aperture apodization using cubic spline interpolation:application in digital holographic microscopy[J].Opt Commun,2000,182(1):59-69.
12 Zhang Yancao,Fan Qi.Effects of non-synchronous sampling on reconstructed image of digital hologram[J].Acta Optica Sinica,2012,32(12):1209002.张延曹,范琦.数字全息图的非同步采样对再现像的影响[J].光学学报,2012,32(12):1209002.
13 Schnars Ulf,Werner P O Jüptner.Digital recording and numerical reconstruction of holograms[J].Meas Sci&Technol,2002,13(9):R85-R101.
14 Garcia-Sucerquia Jorge,Jorge Alexis Herrera Ramírez,Daniel Velásquez Prieto.Reduction of speckle noise in digital holography by using digital image processing[J].Optik,2005,116(1):44-48.
15 LüQieni,Ge Baozhen,Zhang Yimo.Digital microscopic image plane holography[J].J Optoelectronics·Laser,2006,17(4):475 -478.吕且妮,葛宝臻,张以谟.数字显微像面全息技术研究[J].光电子·激光,2006,17(4):475-478.
16 TColomb,F Montfort,J Kühn,et al..Numerical parametric lens for shifting,magnification,and complete aberration compensation in digital holographic microscopy[J].J Opt Soc Am A,2006,23(12):3177-3190.
17 F Montfort,F Charrière,T Colomb,et al..Purely numerical compensation for microscope objective phase curvature in digital holographic microscopy:influence of digital phase mask position[J].J Opt Soc Am A,2006,23(11):2944-2953.