传输/反射法中样品位置及相关误差的修正

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英文篇名：Modifications of Sample Position and Corresponding Error in Transmission/Reflection Method 作者：严淋 ; 庞露 ; 赵会敏 ; 谢国治 ; 陈将伟 英文作者：YAN Lin;PANG Lu;ZHAO Hui-min;XIE Guo-zhi;CHEN Jiang-wei;College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications; 关键词：传输/反射法 ; 误差 ; 样品位置 ; 散射系数 英文关键词：transmission/reflection method;;error;;sample location;;scattering coefficient 中文刊名：IKJS 英文刊名：Measurement & Control Technology 机构：南京邮电大学电子与光学工程学院微电子学院; 出版日期：2019-01-18 出版单位：测控技术 年：2019 期：v.38;No.323 基金：国家自然科学基金资助项目(61574079) 语种：中文; 页：IKJS201901021 页数：4 CN：01 ISSN：11-1764/TB 分类号：102-105

摘要

探讨传输/反射法测量时,修正样品定位误差的一种可能方法。考虑到理想情况下,样品两侧散射系数S_(11)与S_(22)、S_(12)与S_(21)分别相等,在根据测量的同轴线夹具两端的散射系数S~0计算样品两侧的散射系数S时,搜寻S_(11)与S22差异最小的位置,作为样品的确切位置,来减小误差。测量实例表明,该方法可有效修正定位误差,同时,S_(11)与S_(22)间偏离程度反映了误差的大小,可用来评估实验结果的合理性。该研究有助于深化对传输/反射法测量误差的认识,进一步探讨修正误差的可行途径。
        A possible way to correct the positioning errors of samples during transmission/reflection measurement is discussed. Considering the ideal situation, the scattering coefficients of S_(11) and S_(22), S_(12) and S_(21) on both sides of the sample are equal to each other, respectively, and it is proposed that the sample position can be reconfirmed by artificially adjusting sample position to find the smallest difference between S,, and S22 when deriving S from the measured scattering coefficient S~0 at both ends of the coaxial fixture, then the corresponding error can be reduced. Measurement examples indicate that this method can effectively correct the positioning error, meanwhile, the degree deviation between S_(11) and S_(22) reflects directly the errors, which can be used to evaluate the reasonableness of the measured results. The research will help to deeply understand the errors arising in the transmission/reflection method, and further explore the feasible ways to correct the errors.

引文

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