磁流变抛光非球柱面镜的新工艺
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摘要
高精密的柱面镜光学元件,不但要求其具有极低的表面粗糙度、无表面/亚表面损伤和低的残余应力等,而且需要保证其柱面母线的平行度与垂直度。通过分析传统磨研抛技术和计算机控制的光学表面成型技术(CCOS) 2种技术对柱面镜加工后的表面粗糙度、面形精度和母线误差的影响,归纳2种加工方法的优缺点,针对现有加工方法存在的低效率、高粗糙度、表面/亚表面损伤等问题提出一种具有对称结构的非球柱面镜磁流变抛光新工艺,并通过时间参数实验验证了新工艺的可行性。该工艺降低了柱面镜的表面粗糙度,提高了面型精度,在抛光时间为40 min时,表面粗糙度R_a从1.84μm降低至0.36μm,局部面型精度RMS_1从1.91μm降低到0.24μm,母线截面面型精度RMS_2从4.1μm下降到0.68μm。
Cylindrical mirror is a high-precision optical element, which requires not only very low surface roughness, no surface/subsurface damage and low residual stress, but also parallelism and verticality of cylindrical generatrix. By analyzing the influence of traditional grinding and polishing technology and computer controlled optical surfacing(CCOS) on surface roughness, surface profile accuracy and generatrix error of cylindrical mirror after machining, the advantages and disadvantages of two methods are summarized. Aiming at the low efficiency, high roughness and surface/subsurface damages of the existing machining methods,a new magnetorheological finishing process with symmetrical structure for aspheric cylindrical mirror is proposed, and the feasibility of the new process is verified by the experiment of time parameters. The surface roughness and profile accuracy of the cylindrical mirror are effectively reduced. At the polishing time of 40 min, the surface roughness R_a decreases from 1.84 to 0.36 μm, the local profile accuracy RMS_1 decreases from 1.91 to 0.24 μm, and the generatrix section profile accuracy RMS_2 decreases from 4.1 to 0.68 μm.
Cylindrical mirror is a high-precision optical element, which requires not only very low surface roughness, no surface/subsurface damage and low residual stress, but also parallelism and verticality of cylindrical generatrix. By analyzing the influence of traditional grinding and polishing technology and computer controlled optical surfacing(CCOS) on surface roughness, surface profile accuracy and generatrix error of cylindrical mirror after machining, the advantages and disadvantages of two methods are summarized. Aiming at the low efficiency, high roughness and surface/subsurface damages of the existing machining methods,a new magnetorheological finishing process with symmetrical structure for aspheric cylindrical mirror is proposed, and the feasibility of the new process is verified by the experiment of time parameters. The surface roughness and profile accuracy of the cylindrical mirror are effectively reduced. At the polishing time of 40 min, the surface roughness R_a decreases from 1.84 to 0.36 μm, the local profile accuracy RMS_1 decreases from 1.91 to 0.24 μm, and the generatrix section profile accuracy RMS_2 decreases from 4.1 to 0.68 μm.
引文
[1] KAMAL M,NARAYANSWAMY S,PACKIRISAMY M.An off-axis cylindrical mirror focused line scanning system with high imaging quality for broad spectral band [J].Journal of Optics,2011,13:219-224.
[2] SCHELLHORN M,BULLOW H V.Improvement of the beam quality of a gasdynamically cooled CO laser with an unstable resonator by use of a cylindrical mirror [J].Optics Letters,1995,20(12):1380-1382.
[3] DYER P E,JAMES D J.Studies of a TEA CO2 laser with a cylindrical mirror unstable resonator [J].Optics Communications,1975,15(1):20-25.
[4] ARNAUD J A,RUSCIO J T.Guidance of 100-GHz beams by cylindrical mirrors [J].IEEE Transactions on Microwave Theory and Techniques,1975,23(4):377-379.
[5] YASUI T,OHTSUKA T,SUZUKI T.Wide range detector using parabolic cylindrical mirror for THz applications [J].International Journal of Infrared & Millimeter Waves,2006,27(2):199-210.
[6] ARNAUD J A,RUSCIO J T.Focusing and deflection of optical beams by cylindrical mirrors [J].Applied Optics,1970,9(10):2377.
[7] 宋辞,戴一帆,彭小强.磁流变抛光高精度光学表面中的工艺参数 [J].纳米技术与精密工程,2008,6(6):424-429.SONG Ci,DAI Yifan,PENG Xiaoqiang.Polishing parameters of magnetorheological finishing for high-precision optical surfaces [J].Nanotechnology and Precision Engineering,2008,6(6):424-429.
[8] 刘尊愚.小凸柱面镜的加工 [J].光学技术,1978(4):17.LIU Zunyu.Addition of small convex cylindrical mirrors [J].Optical Technique,1978(4):17.
[9] ROBERT A J,WIKTOR J R.Rapid optical fabrication with CCOS [J].Proceedings of SPIE the International Society for Optical Engineering,1990,1333:34-43.
[10] 付秀华,崔金迪,贾宗合.光束整形系统异形元件的研制 [J].中国光学,2014,7(3):469-475.FU Xiuhua,CUI Jindi,JIA Zonghe.Fabrication of odd-form component using in beam shaping system [J].Chinese Optics,2014,7(3):469-475.
[11] 康福增,哈湧刚.激光二极管准直中非球面透镜的应用 [J].红外与激光工程,2008,37:321-323.KANG Fuzeng,HA Yonggang.Aspheric lenses applied in the collimated LD system [J].Infrared and Laser Engineering,2008,37:321-323.
[12] 蒋向前,李柱,谢铁邦.全息光栅干涉法测量曲面形貌的理论研究 [J].华中理工大学学报,1994,22(2):60-64.JIANG Xiangqian,LI Zhu,XIE Tiebang.A theoretical investigation on topography measurement of curved surfaces hologram grating interferometry [J].Journal of Huazhong University of Science & Technology,1994,22(2):60-64.
[13] PENG J Z,YU Y J,XU H F.Compensation of high-order misalignment aberrations in cylindrical interferometry [J].Applied Optics,2014,53(22):4947-4956.
[14] 吴开杰,李刚,虞启琏.基于线扫描方式的激光共焦显微镜的研究 [J].仪器仪表学报,2002,23(3):134-135.WU Kaijie,LI Gang,YU Qilian.Study online-scanning based laser confocal microscopy [J].Chinese Journal of Scientific Instrument,2002,23(3):134-135.
[15] 陶友石.放映镜头的结构与使用注意事项 [J].影视技术,2004,3:28-32.TAO Youshi.The structure of projection lens and matters needing attention in use [J].Motion Picture &Video Technology,2004,3:28-32.
[16] COOKE F.Oddly shaped concave mirrors:how to make a number of them by the electroplating replica method [J].Applied Optics,1981,20(3):22.
[17] COOKE F.Making cylinder mirrors [J].Applied Optics,1970,9(4):993-995.
[18] 王宝林,付春宏,刘录.合成孔径雷达柱面镜的研制 [J].光学精密工程,1988(5):63-66.WANG Baolin,FU Chunhong,LIU Lu.Development of synthetic aperture radar cylindrical mirror [J].Optical And Precision Engineering,1988(5):63-66.
[19] 刘嗣明.光学柱面透镜的加工及检测 [J].光学技术,1986,(4):4-12.LIU Siming.Fabrication and measurement of optical cylindrical lens [J].Optical Technique,1986,(4):4-12.
[20] 魏国华.柱面镜加工中母线偏差的校正 [J].光学技术,1986(1):6-9.WEI Guohua.Correction of generatrix deviation incylindrical mirror machining [J].Optical Technique,1986(1):6-9.
[21] 陈大祥.小半径柱面镜光学加工工艺研究 [J].应用光学,2012,33(3):580-583.CHEN Daxiang.Optical processing technique of small-radius cylindrical lens [J].Journal of Applied Optics,2012,33(3):580-583.
[22] 郝沛明,丁厚月,张建华,等.大半径平凸柱面透镜的加工 [J].大气与环境光学学报,1996(1):18-23.HAO Peiming,DING Houyue,ZHANG Jianghua,et al.Machining of large radius plano-convex cylindrical lens [J].Journal of Atmospheric and Environmental Optics,1996(1):18-23.
[23] JONES R A.Grinding and polishing with small tools under computer control [J].Proceedings of the SPIE,1979,171:102-107.
[24] GEYL R.From VLT to GTC and the ELTs [J].Proceedings of the SPIE,2005,5965:235-240.
[25] MARYIN H M,BURGE J H,CUERDEN B.Progress in manufacturing the first 8.4 m off-axis segment for the giant magellan telescope [J].Bioinformatics,2008,24(19):2157-2164.
[26] 张学军,张云峰,余景池,等.FSGJ–1非球面自动加工及在线检测系统 [J].光学精密工程,1997,5(2):70-76.ZHANG Xuejun,ZHANG Yunfeng,YU Jingchi,et al.FSGJ-1 aspheric automatic processing and online testing system [J].Optical Precision Engineering,1997,5(2):70-76.
[27] 李龙响.大口径非球面磁流变加工的关键技术研究 [D].北京:中国科学院大学,2016.LI Longxiang.Study on the key techniques of magnetorheological finishing for large aspheric optics [D].Beijing:University of Chinese Academy of Sciences,2016.
[28] 宋辞.离轴非球面光学零件磁流变抛光关键技术研究 [D].长沙:国防科学技术大学,2012.SONG Ci.Study on the key techniques of magnetorheological finishing for off-axis aspheric optical elements [D].Changsha:School of National University of Defense Technology,2012.
[29] SEOK J,KIM Y J,JANG K I.A study on the fabrication of curved surfaces using magnetorheological fluid finishing [J].International Journal of Machine Tools & Manufacture,2007,47(14):2077-2090.
[30] WANG Y Q,YIN S H,HUANG H.Magnetorheological polishing using a permanent magnetic yoke with straight air gap for ultra-smooth surface planarization [J].Precision Engineering,2015,40:309-317.
[31] 胡皓,戴一帆,彭小强.倒置式磁流变抛光装置的设计与研究 [J].航空精密制造技术,2006,42(6):5-8.HU Hao,DAI Yifan,PENG Xiaoqiang.Design and research of the inverted device for magnetorheological finishing [J].Aviation Precision Manufacture Technology,2006,42(6):5-8.
[2] SCHELLHORN M,BULLOW H V.Improvement of the beam quality of a gasdynamically cooled CO laser with an unstable resonator by use of a cylindrical mirror [J].Optics Letters,1995,20(12):1380-1382.
[3] DYER P E,JAMES D J.Studies of a TEA CO2 laser with a cylindrical mirror unstable resonator [J].Optics Communications,1975,15(1):20-25.
[4] ARNAUD J A,RUSCIO J T.Guidance of 100-GHz beams by cylindrical mirrors [J].IEEE Transactions on Microwave Theory and Techniques,1975,23(4):377-379.
[5] YASUI T,OHTSUKA T,SUZUKI T.Wide range detector using parabolic cylindrical mirror for THz applications [J].International Journal of Infrared & Millimeter Waves,2006,27(2):199-210.
[6] ARNAUD J A,RUSCIO J T.Focusing and deflection of optical beams by cylindrical mirrors [J].Applied Optics,1970,9(10):2377.
[7] 宋辞,戴一帆,彭小强.磁流变抛光高精度光学表面中的工艺参数 [J].纳米技术与精密工程,2008,6(6):424-429.SONG Ci,DAI Yifan,PENG Xiaoqiang.Polishing parameters of magnetorheological finishing for high-precision optical surfaces [J].Nanotechnology and Precision Engineering,2008,6(6):424-429.
[8] 刘尊愚.小凸柱面镜的加工 [J].光学技术,1978(4):17.LIU Zunyu.Addition of small convex cylindrical mirrors [J].Optical Technique,1978(4):17.
[9] ROBERT A J,WIKTOR J R.Rapid optical fabrication with CCOS [J].Proceedings of SPIE the International Society for Optical Engineering,1990,1333:34-43.
[10] 付秀华,崔金迪,贾宗合.光束整形系统异形元件的研制 [J].中国光学,2014,7(3):469-475.FU Xiuhua,CUI Jindi,JIA Zonghe.Fabrication of odd-form component using in beam shaping system [J].Chinese Optics,2014,7(3):469-475.
[11] 康福增,哈湧刚.激光二极管准直中非球面透镜的应用 [J].红外与激光工程,2008,37:321-323.KANG Fuzeng,HA Yonggang.Aspheric lenses applied in the collimated LD system [J].Infrared and Laser Engineering,2008,37:321-323.
[12] 蒋向前,李柱,谢铁邦.全息光栅干涉法测量曲面形貌的理论研究 [J].华中理工大学学报,1994,22(2):60-64.JIANG Xiangqian,LI Zhu,XIE Tiebang.A theoretical investigation on topography measurement of curved surfaces hologram grating interferometry [J].Journal of Huazhong University of Science & Technology,1994,22(2):60-64.
[13] PENG J Z,YU Y J,XU H F.Compensation of high-order misalignment aberrations in cylindrical interferometry [J].Applied Optics,2014,53(22):4947-4956.
[14] 吴开杰,李刚,虞启琏.基于线扫描方式的激光共焦显微镜的研究 [J].仪器仪表学报,2002,23(3):134-135.WU Kaijie,LI Gang,YU Qilian.Study online-scanning based laser confocal microscopy [J].Chinese Journal of Scientific Instrument,2002,23(3):134-135.
[15] 陶友石.放映镜头的结构与使用注意事项 [J].影视技术,2004,3:28-32.TAO Youshi.The structure of projection lens and matters needing attention in use [J].Motion Picture &Video Technology,2004,3:28-32.
[16] COOKE F.Oddly shaped concave mirrors:how to make a number of them by the electroplating replica method [J].Applied Optics,1981,20(3):22.
[17] COOKE F.Making cylinder mirrors [J].Applied Optics,1970,9(4):993-995.
[18] 王宝林,付春宏,刘录.合成孔径雷达柱面镜的研制 [J].光学精密工程,1988(5):63-66.WANG Baolin,FU Chunhong,LIU Lu.Development of synthetic aperture radar cylindrical mirror [J].Optical And Precision Engineering,1988(5):63-66.
[19] 刘嗣明.光学柱面透镜的加工及检测 [J].光学技术,1986,(4):4-12.LIU Siming.Fabrication and measurement of optical cylindrical lens [J].Optical Technique,1986,(4):4-12.
[20] 魏国华.柱面镜加工中母线偏差的校正 [J].光学技术,1986(1):6-9.WEI Guohua.Correction of generatrix deviation incylindrical mirror machining [J].Optical Technique,1986(1):6-9.
[21] 陈大祥.小半径柱面镜光学加工工艺研究 [J].应用光学,2012,33(3):580-583.CHEN Daxiang.Optical processing technique of small-radius cylindrical lens [J].Journal of Applied Optics,2012,33(3):580-583.
[22] 郝沛明,丁厚月,张建华,等.大半径平凸柱面透镜的加工 [J].大气与环境光学学报,1996(1):18-23.HAO Peiming,DING Houyue,ZHANG Jianghua,et al.Machining of large radius plano-convex cylindrical lens [J].Journal of Atmospheric and Environmental Optics,1996(1):18-23.
[23] JONES R A.Grinding and polishing with small tools under computer control [J].Proceedings of the SPIE,1979,171:102-107.
[24] GEYL R.From VLT to GTC and the ELTs [J].Proceedings of the SPIE,2005,5965:235-240.
[25] MARYIN H M,BURGE J H,CUERDEN B.Progress in manufacturing the first 8.4 m off-axis segment for the giant magellan telescope [J].Bioinformatics,2008,24(19):2157-2164.
[26] 张学军,张云峰,余景池,等.FSGJ–1非球面自动加工及在线检测系统 [J].光学精密工程,1997,5(2):70-76.ZHANG Xuejun,ZHANG Yunfeng,YU Jingchi,et al.FSGJ-1 aspheric automatic processing and online testing system [J].Optical Precision Engineering,1997,5(2):70-76.
[27] 李龙响.大口径非球面磁流变加工的关键技术研究 [D].北京:中国科学院大学,2016.LI Longxiang.Study on the key techniques of magnetorheological finishing for large aspheric optics [D].Beijing:University of Chinese Academy of Sciences,2016.
[28] 宋辞.离轴非球面光学零件磁流变抛光关键技术研究 [D].长沙:国防科学技术大学,2012.SONG Ci.Study on the key techniques of magnetorheological finishing for off-axis aspheric optical elements [D].Changsha:School of National University of Defense Technology,2012.
[29] SEOK J,KIM Y J,JANG K I.A study on the fabrication of curved surfaces using magnetorheological fluid finishing [J].International Journal of Machine Tools & Manufacture,2007,47(14):2077-2090.
[30] WANG Y Q,YIN S H,HUANG H.Magnetorheological polishing using a permanent magnetic yoke with straight air gap for ultra-smooth surface planarization [J].Precision Engineering,2015,40:309-317.
[31] 胡皓,戴一帆,彭小强.倒置式磁流变抛光装置的设计与研究 [J].航空精密制造技术,2006,42(6):5-8.HU Hao,DAI Yifan,PENG Xiaoqiang.Design and research of the inverted device for magnetorheological finishing [J].Aviation Precision Manufacture Technology,2006,42(6):5-8.
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