双光子制备的微结构及其装配的研究
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摘要
近年来,随着微机电系统、显微医疗和组织工程等领域技术水平的快速发展,微操作技术引起了科研界和产业界的广泛关注,其对于未来的微纳技术的小型化、功能化和集成设备的制造有着至关重要的作用。利用飞秒激光双光子聚合技术加工的微结构,其尺寸处于微观尺度,质地较脆、黏着力大、尺度效应显著,且微结构所受到的表面力逐渐取代重力起主导作用,以上因素进一步增加了微操作的难度。因此,一种基于毛细作用的玻璃毛细管吞吐微结构的微操作装置被提出,利用毛细力将微结构拾取和移动,再将不同的微结构装配在一起。该方法不仅能将微型原件进行组装,而且能将不同材料、不同特性的微型器件组装在一起,形成复杂的混合微结构。
In recent years, with the rapid development of technology in the fields of microelectromechanical systems, micromedical treatment and tissue engineering, micro-operation technology has attracted extensive attention from scientific research and industry, it plays a vital role in the miniaturization, functionalization and manufacture of integrated devices for future micro-nano technologies. Microstructures are fabricated using femtosecond laser two-photon polymerization, whose size is at the microscopic scale, the texture is brittle, the adhesion is large and the scale effect is significant, the surface force of the microstructure gradually replaces gravity to dominate. These factors further increase the difficulty of micro-operations. Therefore, a microoperating device based on capillary action of glass capillary tube was proposed, which used the capillary force to pick up and move the microstructure, and then assembled the different microstructures together. The method can assemble not only micro-originals, but also micro-devices with different materials and different characteristics to form a complex mixed microstructure.
In recent years, with the rapid development of technology in the fields of microelectromechanical systems, micromedical treatment and tissue engineering, micro-operation technology has attracted extensive attention from scientific research and industry, it plays a vital role in the miniaturization, functionalization and manufacture of integrated devices for future micro-nano technologies. Microstructures are fabricated using femtosecond laser two-photon polymerization, whose size is at the microscopic scale, the texture is brittle, the adhesion is large and the scale effect is significant, the surface force of the microstructure gradually replaces gravity to dominate. These factors further increase the difficulty of micro-operations. Therefore, a microoperating device based on capillary action of glass capillary tube was proposed, which used the capillary force to pick up and move the microstructure, and then assembled the different microstructures together. The method can assemble not only micro-originals, but also micro-devices with different materials and different characteristics to form a complex mixed microstructure.
引文
[1] Zhu Wei, Li Jinxin, Leong Y, et al. 3D-printed artificial microfish[J]. Advanced Materials, 2015, 27(30):4411-4417.
[2] Xiong Wei, Liu Ying, Jiang Lijia, et al. Laser-directed assembly of aligned carbon nanotubes in three dimensions for Multifunctional Device Fabrication[J]. Advanced Materials,2016, 28(10):2002-2008.
[3] Xing Xin, Yuan Wei, Li Zehan, et al. Pre-damage dynamics of dielectric chirped mirror film layer excited by femtosecond laser[J]. Infrared and Laser Engineering, 2017, 46(11):1106005.(in Chinese)邢昕,袁伟,李泽汉,等.飞秒激光作用下啁啾镜膜层内损伤相关动力学[J].红外与激光工程, 2017, 46(11):1106005.
[4] Tomazio N B, Boni L D, Mendonca C R. Low threshold Rhodamine doped whispering gallery mode microlasers fabricated by direct laser writing[J]. Scientific Reports, 2017,7(1):8559.
[5] Jiang Zhongwei, Yuan Dajun, Zhu Anding, et al. 2-photon3-D microfabrication technology and its experimental system[J]. Opt Precision Eng, 2003, 11(3):234-238.(in Chinese)蒋中伟,袁大军,祝安定,等.双光子三维微细加工技术及实验系统的开发[J].光学精密工程, 2003, 11(3):234-238.
[6] Villangca M J, Palima D, Ba觡as A R, et al. Light-driven micro-tool equipped with a syringe function[J]. Light Science&Applications, 2016, 5(9):e16148.
[7] Cheng Ping, Wei Di, Wu Benke, et al. Femtosecond laser precision machining of biodegradable heart stent[J]. Opt Precision Eng, 2014, 22(1):63-68.(in Chinese)程萍,位迪,吴本科,等.可降解心脏支架的飞秒激光精密加工[J].光学精密工程, 2014, 22(1):63-68.
[8] Wei Xiong, Zhou Yunshen, Hou Wenjia, et al. Direct writing of graphene patterns on insulating substrates under ambient conditions[J]. Scientific Reports, 2014, 4(7499):4892.
[9] Zhu Y, Murali S, Cai W, et al. Graphene and graphene oxide:synthesis, properties, and applications[J]. Cheminform,2010, 22(46):5226-5226.
[10] Chung S E, Park W, Shin S, et al. Guided and fluidic selfassembly of microstructures using railed microfluidic channels[J]. Nature Materials, 2008, 7(7):581-587.
[11] Kohler J, Ksouri S I, ESEN C, et al. Optical screw-wrench for microassembly[J]. Microsystems&Nanoengineering,2017, 3:16083.
[12] Xie Shiwei, Xiao Xiao, Tan Jianjun, et al. Recent progress in dye-sensitized solar cells using graphene-based electrodes[J]. Chinese Optics, 2014, 7(1):47-56.(in Chinese)谢世伟,肖啸,谭建军,等.基于石墨烯基电极染料敏化太阳能电池的研究进展[J].中国光学, 2014, 7(1):47-56.
[13] Kaplas T, Matikainen A, Nuutinen T, et al. Scalable fabrication of the graphitic substrates for graphene-enhanced Raman spectroscopy[J]. Scientific Reports, 2017, 7(1):8561.
[14] Chen Xieyu, Tian Zhen. Recent progress in terahertz dynamic modulation based on graphene[J]. Chinese Optics, 2017, 10(1):86-97.(in Chinese)陈勰宇,田震.石墨烯太赫兹波动态调制的研究进展[J].中国光学, 2017, 10(1):86-97.
[15] Chen Kai, Zhu Lianqing, Lou Xiaoping, et al. Allpolarization-maintaining fiber laser mode-locked by graphene[J]. Infrared and Laser Engineering, 2017, 46(10):1005004.(in Chinese)陈恺,祝连庆,娄小平,等.石墨烯锁模的全保偏光纤激光器[J].红外与激光工程, 2017, 46(10):1005004.
[2] Xiong Wei, Liu Ying, Jiang Lijia, et al. Laser-directed assembly of aligned carbon nanotubes in three dimensions for Multifunctional Device Fabrication[J]. Advanced Materials,2016, 28(10):2002-2008.
[3] Xing Xin, Yuan Wei, Li Zehan, et al. Pre-damage dynamics of dielectric chirped mirror film layer excited by femtosecond laser[J]. Infrared and Laser Engineering, 2017, 46(11):1106005.(in Chinese)邢昕,袁伟,李泽汉,等.飞秒激光作用下啁啾镜膜层内损伤相关动力学[J].红外与激光工程, 2017, 46(11):1106005.
[4] Tomazio N B, Boni L D, Mendonca C R. Low threshold Rhodamine doped whispering gallery mode microlasers fabricated by direct laser writing[J]. Scientific Reports, 2017,7(1):8559.
[5] Jiang Zhongwei, Yuan Dajun, Zhu Anding, et al. 2-photon3-D microfabrication technology and its experimental system[J]. Opt Precision Eng, 2003, 11(3):234-238.(in Chinese)蒋中伟,袁大军,祝安定,等.双光子三维微细加工技术及实验系统的开发[J].光学精密工程, 2003, 11(3):234-238.
[6] Villangca M J, Palima D, Ba觡as A R, et al. Light-driven micro-tool equipped with a syringe function[J]. Light Science&Applications, 2016, 5(9):e16148.
[7] Cheng Ping, Wei Di, Wu Benke, et al. Femtosecond laser precision machining of biodegradable heart stent[J]. Opt Precision Eng, 2014, 22(1):63-68.(in Chinese)程萍,位迪,吴本科,等.可降解心脏支架的飞秒激光精密加工[J].光学精密工程, 2014, 22(1):63-68.
[8] Wei Xiong, Zhou Yunshen, Hou Wenjia, et al. Direct writing of graphene patterns on insulating substrates under ambient conditions[J]. Scientific Reports, 2014, 4(7499):4892.
[9] Zhu Y, Murali S, Cai W, et al. Graphene and graphene oxide:synthesis, properties, and applications[J]. Cheminform,2010, 22(46):5226-5226.
[10] Chung S E, Park W, Shin S, et al. Guided and fluidic selfassembly of microstructures using railed microfluidic channels[J]. Nature Materials, 2008, 7(7):581-587.
[11] Kohler J, Ksouri S I, ESEN C, et al. Optical screw-wrench for microassembly[J]. Microsystems&Nanoengineering,2017, 3:16083.
[12] Xie Shiwei, Xiao Xiao, Tan Jianjun, et al. Recent progress in dye-sensitized solar cells using graphene-based electrodes[J]. Chinese Optics, 2014, 7(1):47-56.(in Chinese)谢世伟,肖啸,谭建军,等.基于石墨烯基电极染料敏化太阳能电池的研究进展[J].中国光学, 2014, 7(1):47-56.
[13] Kaplas T, Matikainen A, Nuutinen T, et al. Scalable fabrication of the graphitic substrates for graphene-enhanced Raman spectroscopy[J]. Scientific Reports, 2017, 7(1):8561.
[14] Chen Xieyu, Tian Zhen. Recent progress in terahertz dynamic modulation based on graphene[J]. Chinese Optics, 2017, 10(1):86-97.(in Chinese)陈勰宇,田震.石墨烯太赫兹波动态调制的研究进展[J].中国光学, 2017, 10(1):86-97.
[15] Chen Kai, Zhu Lianqing, Lou Xiaoping, et al. Allpolarization-maintaining fiber laser mode-locked by graphene[J]. Infrared and Laser Engineering, 2017, 46(10):1005004.(in Chinese)陈恺,祝连庆,娄小平,等.石墨烯锁模的全保偏光纤激光器[J].红外与激光工程, 2017, 46(10):1005004.
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