射流抛光高斯型去除函数的快速生成方法

详细信息    查看全文 | 推荐本文 |

英文篇名：Fast Generation Method of Gaussian-Shaped Removal Function of Fluid Jet Polishing 作者：李建 ; 张连新 ; 孙鹏飞 ; 王中昱 ; 柯瑞 英文作者：Li Jian;Zhang Lianxin;Sun Pengfei;Wang Zhongyu;Ke Rui;Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics; 关键词：光学制造 ; 射流抛光 ; 快速生成 ; 实验方法 ; 去除函数 ; 高斯型 英文关键词：optical fabrication;;fluid jet polishing;;fast forming;;experimental method;;removal function;;Gaussian-shape 中文刊名：GXXB 英文刊名：Acta Optica Sinica 机构：中国工程物理研究院机械制造工艺研究所; 出版日期：2018-03-12 09:27 出版单位：光学学报 年：2018 期：v.38;No.436 基金：国家自然科学基金(61605181);; 中国工程物理研究院超精密加工重点实验室基金(ZZ15002) 语种：中文; 页：GXXB201807034 页数：9 CN：07 ISSN：31-1252/O4 分类号：272-280

摘要

提出了一种快速生成高斯型去除函数的实验方法。通过研究倾斜定点入射方式下射流束中心与工件的交点和材料去除形貌之间的关系,得到了对应高斯型去除函数的喷嘴高度范围。在确定的工艺参数条件下,添加主轴旋转运动,得到了对应高斯型去除函数的喷嘴高度。对高斯型抛光斑进行了对称性分析和动态去除实验。结果表明,以高斯斑为基础的动态去除过程具有较高稳定性,能满足超精密光学加工的要求,同时也证明了该方法的高效性和可靠性。
        A kind of experimental method for quickly forming the Gaussian-shaped removal function is proposed.The corresponding nozzle height range of Gaussian-shaped removal function is obtained by the investigation of the relationship between the material removal appearance and the intersection point of the fluid jet center and the workpiece under the tilt fixed-point incidence mode.As for the definite process parameters,the corresponding nozzle height of Gaussian-shaped removal function is obtained by the addition of the rotary motion of the principal axis.The symmetry of the Gaussian-shaped polishing spot is analyzed and the dynamic removal experiment is conducted.The results show that the dynamic removal process based on Gaussian spots possesses a good stability,which can meet the demand of the ultra-precision optical manufacture and also can confirm the efficiency and reliability of this method.

引文

[1]Pang Z H,Fan X W,Ma Z,et al.Free-form optical elements corrected aberrations of optical system[J].Acta Optica Sinica,2016,36(5):0522001.庞志海,樊学武,马臻,等.自由曲面校正光学系统误差的研究[J].光学学报,2016,36(5):0522001.
    [2]Wang C C,Zou G Y,Pang Z H,et al.Analysis on development error of segmented mirror optical system[J].Acta Optica Sinica,2016,36(11):1122005.王臣臣,邹刚毅,庞志海,等.拼接主镜光学系统展开误差的分析[J].光学学报,2016,36(11):1122005.
    [3]Fang H.Fluid jet polishing technology[D].Suzhou:Soochow University,2004:8-12.方慧.液体喷射抛光技术[D].苏州:苏州大学,2004:8-12.
    [4]Fahnle O W,Brug H V.Fluid jet polishing:removal process analysis[J].Proceedings of SPIE,1999,3739:68-77.
    [5]Booij S M.Fluid jet polishing-possibilities and limitations of a new fabrication technique[D].Delft:Delft University of Technology,2003.
    [6]Guo P J,Fang H,Yu J C.Research on material removal mechanism of fluid jet polishing[J].Laser Journal,2008,29(1):25-27.郭培基,方慧,余景池.液体喷射抛光技术研究[J].激光杂志,2008,29(1):25-27.
    [7]Fang H,Guo P J,Yu J C.Optimization of the material removal in fluid jet polishing[J].Optical Engineering,2006,45(5):053401.
    [8]Booij S M,Brug H V,Fahnle O W.Computational model for prediction of shaping with FJP and experimental validation[C].Optical Fabrication and Testing,2002,76:OTuB1.
    [9]Li Z Z.Study on abrasive jet polishing technology[D].Changsha:National University of Defense Technology,2011:43-46.李兆泽.磨料水射流抛光技术研究[D].长沙:国防科技大学,2011:43-46.
    [10]Zhang X C,Dai Y F,Li S Y,et al.Analysis of material removal mechanism in magnetorheological jet polishing by CFD[J].Journal of National University of Defense Technology,2007,29(4):110-115.张学成,戴一帆,李圣怡,等.基于CFD的磁射流抛光去除机理分析[J].国防科技大学学报,2007,29(4):110-115.
    [11]Li Z Z,Li S Y,Dai Y F,et al.Effects of various parameters on material removal rate and the footprint in abrasive jet polishing process[J].China Mechanical Engineering,2008,19(21):2532-2535.李兆泽,李圣怡,戴一帆,等.磨料射流抛光中各工艺参数对材料去除率及抛光区形貌的影响[J].中国机械工程,2008,19(21):2532-2535.
    [12]Shi C Y,Yuan J H,Wu F,et al.Influence analysis of impact angle on material removal profile in fluid jet polishing[J].Acta Optica Sinica,2010,30(2):513-517.施春燕,袁家虎,伍凡,等.冲击角度对射流抛光中材料去除面形的影响分析[J].光学学报,2010,30(2):513-517.
    [13]Dong Z Y.Fluid jet mechanics[M].Beijing:Science Press,2005:34-37.董志勇.射流力学[M].北京:科学出版社,2005:34-37.