一种高灵敏度无线压力传感器的研究

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英文篇名：Research on High Sensitivity Wireless Pressure Sensor 作者：杨龙 ; 王凌云 ; 谷丹丹 ; 王丽英 英文作者：YANG Long;WANG Ling-yun;GU Dan-dan;WANG Li-ying;Deparment of Mechanical and Electrical Engineering,Xiamen University;Pen-Tung Sah Intitute of Micro-Nano Science and Technology,Xiamen University; 关键词：无线测试 ; LC谐振 ; MEMS ; 压力传感器 英文关键词：wireless test;;LC resonance;;MEMS;;pressure sensor 中文刊名：YBJS 英文刊名：Instrument Technique and Sensor 机构：厦门大学机电工程系;厦门大学萨本栋微米纳米科学技术研究所; 出版日期：2017-10-15 出版单位：仪表技术与传感器 年：2017 期：No.417 基金：航空科学基金资助项目(20160868004,20160868005) 语种：中文; 页：YBJS201710006 页数：4 CN：10 ISSN：21-1154/TH 分类号：23-25+61

摘要

为解决压力传感器在密闭空间、高旋、生物体内等不适用引线的问题,设计了一种无线压力传感器。对传感器进行原理分析及结构设计,采用MEMS工艺对硅片及BF33进行加工,并搭建了谐振频率-压力测试平台,对传感器性能进行测试。压力测试范围为5~105 k Pa,在常温时的灵敏度为161.5 Hz/Pa,传感器具有较高的灵敏度,有利于提高压力检测精度。
        In order to solve the problem that the pressure sensor is not suitable for the lead in the enclosed space and the living body,a wireless pressure sensor was designed.The principle of the sensor was analyzed and the structure was designed.The silicon and BF33 were processed by MEMS process. The performance of the sensor was tested by the resonant frequency pressure testing platform.The pressure test range is 5 ~ 105 k Pa,the sensitivity is 161.5 Hz/Pa at room temperature,the sensor has high sensitivity,which is helpful to improve the accuracy of pressure measurement.

引文

[1]LEMMERHIRT D F,WISE K D.Chip-scale integration of data-gathering microsystems[J].Proceedings of the IEEE,2006,94(6):1138-1159.
    [2]刘谨,欧文,高璇.MEMS无源无线压力传感器研究[J].仪表技术与传感器,2013(11):4-6.
    [3]李莹.LTCC高温压力传感器的设计制作和测试[J].传感器与微系统,2013,32(4):101-102.
    [4]LI C,TAN Q,XUE C,et al.A high-performance LC wireless passive pressure sensor fabricated using low-temperature cofired ceramic(LTCC)technology[J].Sensors,2014,14(12):23337-23347.
    [5]ZHENG C,LI W,LI A L,et al.Design and manufacturing of a passive pressure sensor based on LC resonance[J].Micromachines,2016,7(5):87.
    [6]DONG L,WANG L F,HUANG Q A.Implementation of multiparameter monitoring by an LC-type passive wireless sensor through specific winding stacked inductors[J].Internet of Things Journal IEEE,2015,2(2):168-174.
    [7]LEE H Y,CHOI B,KIM S,et al.Sensitivity-enhanced LC pressure sensor for wireless bladder pressure monitoring[J].IEEE Sensors Journal,2016,16(12):1-1.
    [8]CHEN P J,SAATI S,VARMA R,et al.Wireless intraocular pressure sensing using microfabricated minimally invasive flexible-coiled LC sensor implant[J].Journal of Microelectro-mechanical Systems,2010,19(4):721-734.
    [9]MOHAN S S,DEL M H M,BOYD S P,et al.Simple accurate expressions for planar spiral inductances[J].1999,34(10):1419-1424.
    [10]CHEN P J,SAATI S,VARMA R,et al.Wireless intraocular pressure sensing using microfabricated minimally invasive flexible-coiled LC sensor implant[J].Journal of Microelectromechanical Systems,2010,19(4):721-734.