等离子体光谱光源技术的研究进展
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摘要
光谱光源是光谱仪器和光谱技术的核心,等离子体光源是原子发射光谱技术的活跃领域之一,电感耦合等离子体(ICP)已成功地应用于原子发射光谱和无机质谱仪器。由于ICP光源采用氩气作为工作气体,耗量较大,降低氩气用量成为近些年来原子光谱技术研究和改进的重要目标。为此目的,已研究过各种低耗氩ICP光源,非氩气ICP光源,微波等离子体光源,射频电容耦合等离子体光源等。综述了近年这些等离子体发射光源的结构,分析性能及特点,以及它们所用工作气体情况。并归纳总结出,评价各种等离子体发射光谱光源应包括:等离子体温度(激发温度,气体温度),电子密度,工作气体种类及用量,元素检出限,光源的稳健性及经济方面等。
The spectral light source is the center of spectral instrument and spectral technology,the plasma light source is one of the active fields of atomic emission spectroscopy technology,inductively coupled plasma(ICP)light source has been successfully applied to atomic emission spectrometry and inorganic mass spectrometry.Because use argon as working gas at Ar-ICP source and the argon consumption is larger,so reduce the dosage of argon become the important goals of research and improvement of the atomic spectrum technology in recent years.For this purpose,a variety of spectral light sources were studied,included the argon ICP source of various low argon ICP source,the microwave plasma source(MIP,MPT)and radio frequency(rf)capacitively coupled plasma source(CCP)etc.In this paper,the structures,properties and characteristics of these plasma emission light sources were reviewed.It is also to generalize and summarize that the evaluation of various plasma emission spectral light sources should include the plasma temperature(excitation temperature Texc,gas temperature Tg),electron density,the type of working gas and amounts of gas,detection limits of elements,robustness of light sources and economical aspects etc.
The spectral light source is the center of spectral instrument and spectral technology,the plasma light source is one of the active fields of atomic emission spectroscopy technology,inductively coupled plasma(ICP)light source has been successfully applied to atomic emission spectrometry and inorganic mass spectrometry.Because use argon as working gas at Ar-ICP source and the argon consumption is larger,so reduce the dosage of argon become the important goals of research and improvement of the atomic spectrum technology in recent years.For this purpose,a variety of spectral light sources were studied,included the argon ICP source of various low argon ICP source,the microwave plasma source(MIP,MPT)and radio frequency(rf)capacitively coupled plasma source(CCP)etc.In this paper,the structures,properties and characteristics of these plasma emission light sources were reviewed.It is also to generalize and summarize that the evaluation of various plasma emission spectral light sources should include the plasma temperature(excitation temperature Texc,gas temperature Tg),electron density,the type of working gas and amounts of gas,detection limits of elements,robustness of light sources and economical aspects etc.
引文
[1]辛仁轩.等离子体发射光谱分析[M].3版.北京:化学工业出版社,2018.
[2]辛仁轩.电感耦合等离子体光谱仪器技术进展与现状[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2011,1(4):1-8.
[3]JANKOWSKI K,RESZKEB E.Recent developments in instrumentation of microwave plasma sources for optical emission and massspectrometry[J].J. Anal. At.Spectrom.,2013,28(9):1196-1212.
[4]何志壮,曹文革.低气流等离子炬管设计及其分析性能[J].分析化学(Chinese Journal of Anaytical Chemisrty),1982,10(2):113-115.
[5]MASAKI O,SATORU K,ISAO S.Development of a spiral flow ICP torch as a new low-gas-flow torchforaxially viewing ICP optical emission spectrometry[J].Chem.Lett.,2013,42(2):347-349.
[6]EDLUNDM,VISSER H,HEITLANDP.Analysis of biodieselbyargon-oxygenmixed-gasinductively coupledplasma optical emission spectrometry[J].Anal.At.Spectrom.,2002,17(2):232-235.
[7]李义久,刘亚菲,曾新平,等.空气冷却ICP-AES测定硅锗锡铅磷砷锑秘的检出限[J].理化检验-化学分册(Physical Testing and Chemical Analysis Part B:Chemical Analysis),1998,34(10):440-444.
[8]朱世盛,俞璐.小功率空气冷却ICP-AES研究[J].复旦学报(Journal of Fudan University(Natural Science)),1990,29(1):58-63.
[9]PETERA,RIPSON M,LIESBET H,et al.Inductively coupled argon plasma atomic emission spectrometry with an externally cooled torch[J].Analytical Chem.1984,56(13):2329-2335.
[10]HASAN T,PRAPHAIRAKSIT N,HOUKR S.Low flow,externally air cooled torch for inductivelycoupled plasma atomic emission spectrometry withaxial viewing[J].Spectrochimica Acta Part B,2001,56(5):409-418.
[11]ENGELHARD C,GAMEZ G,BUSCHER W,et al.Plasma diagnostic on a low-flow plasma for inductively coupled plasma opticalemission spectrometry[J].Spectrochimica Acta Part B,2008,63(6):619-629.
[12]ENGELHARD C,ANDY SCHEFFER A,MAUET,et al.Application of infrared thermography for online monitoring of wallconventional and low-flow gas consumption[J].Spectrochimica Acta Part B,2007,62(7):1161-1168.
[13]KLOSTERMEIER A,ENGELHARD C,EVERS S,et al.New torch design for inductively coupled plasma optical emission spectrometry with minimised gas consumption[J].J.Anal.At.Spectrom.,2005,20(3):308-314.
[14]ENGELHARD C,SCHEFFER A,NOWAK S,et al.Trace element determination using static high-sensitivity inductively coupled plasma optical emissionspectrometry(SHIP-OES)[J].Analytica Chimica Acta,2007,583(2):319-325.
[15]NOWAK S,GESELL M S N,HOLTKAMP M,et al.Low gas flow inductively coupled plasma optical emission spectrometry for the analysis of food sample safter microwave digestion[J].Talanta,2014,110(3):575-578.
[16]ENGELHARD C,VIELHABER T,SCHEFFER T.Analysis of doped luminescent lanthanide fluoride nanoparticles by lowgas flow inductively coupled plasma optical emission spectrometry[J].J. Anal. At.Spectrom.,2008,23(4):407-411.
[17]辛仁轩.微波等离子体光谱技术的发展(一)[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2012,2(4):1-9.
[18]辛仁轩.微波等离子体光谱技术的发展(二)[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2013,3(1):1-10.
[19]ZHANGZ E,WAGATSUMA K.Comparison of the analytical performance of high-powered,microwaveinduced air plasma and nitrogen plasma atomic emissionspectrometry[J].J.Anal.At.Spectrom.,2002,17(6):699-703.
[20]KENICHI O,HIROFUMI Y,YOSHITAKA S,et al,Excitationtemperatureinhigh-powernitrogen microwave-induced plasma at atmospheric pressure[J],J.Anal.At.Spectrom.,1997,51(10):1496-1499.
[21]MASAKI O,NAOKI F.Spatial characterization of emission intensities and temperatures of a high power nitrogen microwave-induced plasma[J].Journal of Analytical Atomic Spectrometry,1997,12(3):341-347.
[22]HAMMERM R.A magnetically excited microwave plasma source for atomic emission spectroscopy with performance approaching that of the inductively coupled plasma[J].Spectrochimica Acta Part B,2008,63(6):456-464.
[23]郭鹏然,潘佳钏,雷永乾,等.微波等离子体原子发射光谱新技术同时测定环境水样中多种元素[J].分析化学(Chinese Journal of Analytical Chemistry),2015,43(5):748-751.
[24]于趁,姚春毅,马育松,等.微波等离子体-原子发射光谱仪(MP-AES)测定葡萄酒中10种金属元素方法[J].食品科技(Food Science and Technology),2016,41(3):306-309.
[25]韩枫,孟卓然,刘轶群,等.微波等离子体发射光谱法同时测定食品中13种元素[J].卫生研究(Journal of Hygiene Research),2016,45(1):76-79.
[26]ZHAO Yang,LI Zenghe,ASHDOWN Ross,et al,Detemination of heavy metels in leather fur by microwave plasma-atomuc emission spectry[J].Spectrochimica Acta(B),2015,112(8):6-8.
[27]TERRANCEH,PHIL L.微波等离子体光谱法测定地质样品中的常量和微量元素[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2015,5(1):41-44.
[28]CAUDURO John.微波等离子体原子发射光谱法测定米粉中的常量、微量和痕量元素[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2014,4(3):82-84.
[29]宁婉华,李丽华,张金生,等.微波等离子体炬的应用级研究进展[J].应用化工(Applied Chemical Industry),2017,46(1):184-187.
[30]金伟,于丙文,朱旦,等.一种原子光谱分析用新激发光源——千瓦级微波等离子体炬(kW-MPT)[J].高等学校化学学报(Chemical Journal of Chinese Universities),2015,36(11):2157-2159.
[31]胡燕新,王凯,赵倩媛.一种MPT光谱仪智能控制器的设计[J].控制工程(Control Engineering),2016,23(增刊):23-25.
[32]于丙文.微波等离子炬(MPT)技术基础理论研究及千瓦及MPT光谱仪的研制[D].杭州:浙江大学,2016.
[33]朱旦.千瓦级微波等离子体炬(MPT)原子发射光谱分析用激发光源的研制[D].杭州:浙江大学,2017.
[34]FRENTIU T,MIHALTAN A I,DARVAS E.A novel analytical system with a capacitively coupled plasma microtorch and agold filament microcollector for the determination of total Hg in water by coldvapour atomic emission spectrometry[J].J.Anal.At.Spectrom.,2012,27(12):1753-1760.
[35]NOVOSAD L,HRDLICKA A,SLAVICEK P,et al.Plasma pencil as an excitation source for atomic emission spectrometry[J].J.Anal.At.Spectrom.,2012,27(3):305-309.
[36]RAHMAN M M,BLADES M W.Ionization of Mg and Cd in an atmospheric pressure parallel plate capacitively coupled plasma[J].J.Anal.At.Spectrom.,2000,15(10):1313-1319.
[37]SIMON A,FRENTIU T,DAN S A et al.Investigation of a medium power radio frequency capacitively coupled plasma and its application to high-temperature superconductor analysis via atomic emission spectrometry[J].J.Anal.At.Spectro m,2 0 0 5,2 0(9):957–965.
[38]FRENTIU T,PONTA M,SORIN D A,et al.Investigationofmediumpowerradiofrequency capacitively coupled plasmas and their application to atomic emission spectrometry for the determination of aluminiumin water samples[J].Microchim.Acta,2004,147(1):93-103.
[2]辛仁轩.电感耦合等离子体光谱仪器技术进展与现状[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2011,1(4):1-8.
[3]JANKOWSKI K,RESZKEB E.Recent developments in instrumentation of microwave plasma sources for optical emission and massspectrometry[J].J. Anal. At.Spectrom.,2013,28(9):1196-1212.
[4]何志壮,曹文革.低气流等离子炬管设计及其分析性能[J].分析化学(Chinese Journal of Anaytical Chemisrty),1982,10(2):113-115.
[5]MASAKI O,SATORU K,ISAO S.Development of a spiral flow ICP torch as a new low-gas-flow torchforaxially viewing ICP optical emission spectrometry[J].Chem.Lett.,2013,42(2):347-349.
[6]EDLUNDM,VISSER H,HEITLANDP.Analysis of biodieselbyargon-oxygenmixed-gasinductively coupledplasma optical emission spectrometry[J].Anal.At.Spectrom.,2002,17(2):232-235.
[7]李义久,刘亚菲,曾新平,等.空气冷却ICP-AES测定硅锗锡铅磷砷锑秘的检出限[J].理化检验-化学分册(Physical Testing and Chemical Analysis Part B:Chemical Analysis),1998,34(10):440-444.
[8]朱世盛,俞璐.小功率空气冷却ICP-AES研究[J].复旦学报(Journal of Fudan University(Natural Science)),1990,29(1):58-63.
[9]PETERA,RIPSON M,LIESBET H,et al.Inductively coupled argon plasma atomic emission spectrometry with an externally cooled torch[J].Analytical Chem.1984,56(13):2329-2335.
[10]HASAN T,PRAPHAIRAKSIT N,HOUKR S.Low flow,externally air cooled torch for inductivelycoupled plasma atomic emission spectrometry withaxial viewing[J].Spectrochimica Acta Part B,2001,56(5):409-418.
[11]ENGELHARD C,GAMEZ G,BUSCHER W,et al.Plasma diagnostic on a low-flow plasma for inductively coupled plasma opticalemission spectrometry[J].Spectrochimica Acta Part B,2008,63(6):619-629.
[12]ENGELHARD C,ANDY SCHEFFER A,MAUET,et al.Application of infrared thermography for online monitoring of wallconventional and low-flow gas consumption[J].Spectrochimica Acta Part B,2007,62(7):1161-1168.
[13]KLOSTERMEIER A,ENGELHARD C,EVERS S,et al.New torch design for inductively coupled plasma optical emission spectrometry with minimised gas consumption[J].J.Anal.At.Spectrom.,2005,20(3):308-314.
[14]ENGELHARD C,SCHEFFER A,NOWAK S,et al.Trace element determination using static high-sensitivity inductively coupled plasma optical emissionspectrometry(SHIP-OES)[J].Analytica Chimica Acta,2007,583(2):319-325.
[15]NOWAK S,GESELL M S N,HOLTKAMP M,et al.Low gas flow inductively coupled plasma optical emission spectrometry for the analysis of food sample safter microwave digestion[J].Talanta,2014,110(3):575-578.
[16]ENGELHARD C,VIELHABER T,SCHEFFER T.Analysis of doped luminescent lanthanide fluoride nanoparticles by lowgas flow inductively coupled plasma optical emission spectrometry[J].J. Anal. At.Spectrom.,2008,23(4):407-411.
[17]辛仁轩.微波等离子体光谱技术的发展(一)[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2012,2(4):1-9.
[18]辛仁轩.微波等离子体光谱技术的发展(二)[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2013,3(1):1-10.
[19]ZHANGZ E,WAGATSUMA K.Comparison of the analytical performance of high-powered,microwaveinduced air plasma and nitrogen plasma atomic emissionspectrometry[J].J.Anal.At.Spectrom.,2002,17(6):699-703.
[20]KENICHI O,HIROFUMI Y,YOSHITAKA S,et al,Excitationtemperatureinhigh-powernitrogen microwave-induced plasma at atmospheric pressure[J],J.Anal.At.Spectrom.,1997,51(10):1496-1499.
[21]MASAKI O,NAOKI F.Spatial characterization of emission intensities and temperatures of a high power nitrogen microwave-induced plasma[J].Journal of Analytical Atomic Spectrometry,1997,12(3):341-347.
[22]HAMMERM R.A magnetically excited microwave plasma source for atomic emission spectroscopy with performance approaching that of the inductively coupled plasma[J].Spectrochimica Acta Part B,2008,63(6):456-464.
[23]郭鹏然,潘佳钏,雷永乾,等.微波等离子体原子发射光谱新技术同时测定环境水样中多种元素[J].分析化学(Chinese Journal of Analytical Chemistry),2015,43(5):748-751.
[24]于趁,姚春毅,马育松,等.微波等离子体-原子发射光谱仪(MP-AES)测定葡萄酒中10种金属元素方法[J].食品科技(Food Science and Technology),2016,41(3):306-309.
[25]韩枫,孟卓然,刘轶群,等.微波等离子体发射光谱法同时测定食品中13种元素[J].卫生研究(Journal of Hygiene Research),2016,45(1):76-79.
[26]ZHAO Yang,LI Zenghe,ASHDOWN Ross,et al,Detemination of heavy metels in leather fur by microwave plasma-atomuc emission spectry[J].Spectrochimica Acta(B),2015,112(8):6-8.
[27]TERRANCEH,PHIL L.微波等离子体光谱法测定地质样品中的常量和微量元素[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2015,5(1):41-44.
[28]CAUDURO John.微波等离子体原子发射光谱法测定米粉中的常量、微量和痕量元素[J].中国无机分析化学(Chinese Journal of Inorganic Analytical Chemistry),2014,4(3):82-84.
[29]宁婉华,李丽华,张金生,等.微波等离子体炬的应用级研究进展[J].应用化工(Applied Chemical Industry),2017,46(1):184-187.
[30]金伟,于丙文,朱旦,等.一种原子光谱分析用新激发光源——千瓦级微波等离子体炬(kW-MPT)[J].高等学校化学学报(Chemical Journal of Chinese Universities),2015,36(11):2157-2159.
[31]胡燕新,王凯,赵倩媛.一种MPT光谱仪智能控制器的设计[J].控制工程(Control Engineering),2016,23(增刊):23-25.
[32]于丙文.微波等离子炬(MPT)技术基础理论研究及千瓦及MPT光谱仪的研制[D].杭州:浙江大学,2016.
[33]朱旦.千瓦级微波等离子体炬(MPT)原子发射光谱分析用激发光源的研制[D].杭州:浙江大学,2017.
[34]FRENTIU T,MIHALTAN A I,DARVAS E.A novel analytical system with a capacitively coupled plasma microtorch and agold filament microcollector for the determination of total Hg in water by coldvapour atomic emission spectrometry[J].J.Anal.At.Spectrom.,2012,27(12):1753-1760.
[35]NOVOSAD L,HRDLICKA A,SLAVICEK P,et al.Plasma pencil as an excitation source for atomic emission spectrometry[J].J.Anal.At.Spectrom.,2012,27(3):305-309.
[36]RAHMAN M M,BLADES M W.Ionization of Mg and Cd in an atmospheric pressure parallel plate capacitively coupled plasma[J].J.Anal.At.Spectrom.,2000,15(10):1313-1319.
[37]SIMON A,FRENTIU T,DAN S A et al.Investigation of a medium power radio frequency capacitively coupled plasma and its application to high-temperature superconductor analysis via atomic emission spectrometry[J].J.Anal.At.Spectro m,2 0 0 5,2 0(9):957–965.
[38]FRENTIU T,PONTA M,SORIN D A,et al.Investigationofmediumpowerradiofrequency capacitively coupled plasmas and their application to atomic emission spectrometry for the determination of aluminiumin water samples[J].Microchim.Acta,2004,147(1):93-103.