Quantifying the Interface Energy of Block Copolymer Top Coats

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• 作者：Daniel F. Sunday ; Michael J. Maher ; Summer Tein ; Matthew C. Carlson ; Christopher J. Ellison ; C. Grant Willson ; R. Joseph Kline
• 刊名：ACS Macro Letters
• 出版年：2016
• 出版时间：December 20, 2016
• 年：2016
• 卷：5
• 期：12
• 页码：1306-1311
• 全文大小：402K
• ISSN：2161-1653

文摘

Block copolymers (BCPs) have the potential to play a key role in templating materials for nanoscale synthesis. BCP lithography likely will be one of the first examples of BCP-based nanomanufacturing implemented in a production setting. One of the challenges in implementing BCP lithography is that the lamella need to be oriented perpendicular to the substrate. For many systems, this requires control over interfacial energies for both components at the substrate and interface. Top coats can be designed to provide a neutral interface for both blocks on the BCP surface. The preferentiality of the top coat as a function of composition has been determined qualitatively by examining the orientation of a BCP after annealing with a top coat. Measurements of the interfacial width between the top coat and homopolymers allows the interface energy to be quantitatively determined. Resonant soft X-ray reflectivity measurements on top coat/homopolymer pairs were used to extract the Flory–Huggins parameter (χ) and interface energy (γ) as a function of top coat composition. The difference between χ and γ for each top coat/homopolymer pair was minimized at compositions that resulted in the top coat promoting perpendicular orientation. As the composition moved away from the neutral point the difference between χ and γ for each pair grew larger.