文摘
The FDTD calculations are conducted to optimize the highest coupling efficiency of HfO2 ZCG filter when the total thickness of HfO2 film is fixed. For the incident light with a wavelength of 650 nm, the proposed polarization splitter exhibits the coupling efficiencies of 10.1% for TE-polarized light and 7.1% for TM-polarized light, respectively. The proposed WDM filter has a calculated splitting ratio of 5.79 dB at 550 nm and 9.67 dB at 650 nm, respectively. The integrated HfO2 ZCG filters are implemented on the 200-nm-thick suspended HfO2 membrane as designed.