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Five-DOF innovative linear MagLev slider to account for pitch, tilt and load uncertainty
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文摘

The MagLev slider is capable of accounting for load uncertainty.

The MagLev slider can account for uncertainty of the standing position of load.

The MagLev slider exhibits reduction of energy consumption.

The actual linear position deviations of slider can be regulated within ±8 μm.

The actual angular position deviations can be regulated within ±1 mini-degrees.

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