Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication
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- 作者：Zhiwei Wua ; b ; c ; Fei Zhoua ; b ; fzhou@nuaa.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Qianzhi Wangd ; Zhifeng Zhoue ; Jiwang Yand ; Lawrence Kwok-Yan Lie
- 关键词：CrSiCN coatings ; Microstructure ; Nano-hardness ; Tribological properties ; Water lubrication
- 刊名：Applied Surface Science
- 出版年：2015
- 出版时间：15 November 2015
- 年：2015
- 卷：355
- 期：Complete
- 页码：516-530
- 全文大小：4366 K
文摘
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CrSiCN coatings with different Si and C contents were deposited.
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CrSiCN coatings consisted of Cr(C,N) nanocrystallites and amorphous phases such as a-Si3N4(SiC, SiCN) and a-C(a-CNx).
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CrSiCN coatings exhibited the highest hardness of 21.3 GPa at the TMS flow of 10 sccm.
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CrSiCN coatings deposited at the TMS flow of 10 sccm possessed the excellent tribological properties in water.
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The wear mechanism changed from tribochemical wear to mechanical wear when the TMS flow increased.